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OPTIMUM DESIGN OF PROCESSING CONDITION AND EXPERIMENTAL INVESTIGATION OF GRATING FABRICATION WITH HOT EMBOSSING LITHOGRAPHY
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作者 Jianguo Zhu Huimin Xie +1 位作者 Minjin Tang Xiaojtm Li 《Acta Mechanica Solida Sinica》 SCIE EI 2009年第6期665-671,共7页
The cross-section profiles of polymer deformation in the hot embossing lithography process were studied by finite element method for various temperature, time and pressure. In order to successfully fabricate high-freq... The cross-section profiles of polymer deformation in the hot embossing lithography process were studied by finite element method for various temperature, time and pressure. In order to successfully fabricate high-frequency grating lines, an optimal imprint condition was selected and the related experiments were carried out. The fabricated gratings were illuminated by the SEM image and AFM analysis, which agree well with the simulated results. Therefore, the finite element methods are helpful for a better comprehension of the polymer flow phenomena governing the pattern definition and the design of optimum processing conditions for successful grating fabrication. 展开更多
关键词 grating fabrication hot embossing lithography finite element EXPERIMENT
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Design and Fabrication of a 400 GHz InP-Based Arrayed Waveguide Grating with Flattened Spectral Response
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作者 ZHANG Xi-Lin LIU Song Tao +2 位作者 LU Dan ZHANG Rui-Kang JI Chen 《Chinese Physics Letters》 SCIE CAS CSCD 2015年第5期55-58,共4页
A four-channel 400 GHz channel spacing InP-based arrayed waveguide grating with a flattened wavelength re- sponse by employing a multimode interference coupler at the input waveguide of the filter is prepared. The fab... A four-channel 400 GHz channel spacing InP-based arrayed waveguide grating with a flattened wavelength re- sponse by employing a multimode interference coupler at the input waveguide of the filter is prepared. The fabricated devices show a flattened spectral response with a broadened 3-dB bandwidth up to 3.5 nm, interchan- nel non-uniformity of 〈0. 7dB and excellent match to the simulation results. 展开更多
关键词 AWG InP Design and fabrication of a 400 GHz InP-Based Arrayed Waveguide grating with Flattened Spectral Response
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Theoretical study of micro-optical structure fabrication based on sample rotation and two-laser-beam interference 被引量:1
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作者 陈宜臻 王向贤 +2 位作者 王茹 杨华 祁云平 《Chinese Physics B》 SCIE EI CAS CSCD 2017年第5期148-152,共5页
A method for fabricating a micro-optical structure based on sample rotation and two-laser-beam interference is proposed. The rotation process is analyzed using the coordinate transformation in matrix presentation and ... A method for fabricating a micro-optical structure based on sample rotation and two-laser-beam interference is proposed. The rotation process is analyzed using the coordinate transformation in matrix presentation and the theoretical expressions of the optical field distributions corresponding to different sample rotations. By rotating the samples and changing the laser wavelength, various special micro-optical structures can be obtained, such as equally spaced concentric rings and irregular trapezoidal lattices; these structures are demonstrated by simulating the corresponding optical field distributions. The proposed approach may be developed into a low-cost laser interference lithography technology for the fabrication of various micro-optical structures. 展开更多
关键词 rotation fabrication lithography fabricating rotating coordinate presentation hexagonal coherent grating
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Surface morphology of refractive-index waveguide gratings fabricated in polymer films
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作者 董毅 宋艳芳 +1 位作者 马磊 高芳芳 《Optoelectronics Letters》 EI 2016年第5期329-332,共4页
The characteristic modifications are reported on the surface of polymeric waveguide film in the process of vol- ume-grating fabrication. The light from a mode-locked 76 MHz femtosecond laser with pulse duration of 200... The characteristic modifications are reported on the surface of polymeric waveguide film in the process of vol- ume-grating fabrication. The light from a mode-locked 76 MHz femtosecond laser with pulse duration of 200 fs and wavelength of 800 nm is focused normal to the surface of the sample. The surface morphology modifications are as- cribed to a fact that surface swelling occurs during the process. Periodic micro-structure is inscribed with increasing incident power. The laser-induced swelling threshold on the grating, which is higher than that of two-photon initiated photo-polymerization (TPIP) (8 mW), is verified to be about 20 mW. It is feasible to enhance the surface smoothness of integrated optics devices for further encapsulation. The variation of modulation depth is studied for different values of incident power and scan spacing. Ablation accompanied with surface swelling appears when the power is higher. By ootimizing the laser carvinR oararneters, hizhly efficient grating devices can be fabricated. 展开更多
关键词 polymerization waveguide swelling polymeric initiated grating encapsulation refractive spacing fabrication
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Preface to the Special Topic on 2D Materials and Devices 被引量:1
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作者 Jingbo Li Xinran Wang 《Journal of Semiconductors》 EI CAS CSCD 2017年第3期1-1,共1页
The great research progresses in materials sciences in the past decades have revealed that reduced dimension can have significant influences on the properties of materials.Since the successful fabrication of graphene ... The great research progresses in materials sciences in the past decades have revealed that reduced dimension can have significant influences on the properties of materials.Since the successful fabrication of graphene in 2004 by Novoselov and 展开更多
关键词 fabrication crystalline sincerely covering thick grateful overview doping focusing valley
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An adaptive tensor voting algorithm combined with texture spectrum
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作者 王刚 苏庆堂 +3 位作者 吕高焕 张小峰 刘玉环 贺安之 《Optoelectronics Letters》 EI 2015年第1期73-76,共4页
An adaptive tensor voting algorithm combined with texture spectrum is proposed. The image texture spectrum is used to get the adaptive scale parameter of voting field. Then the texture information modifies both the at... An adaptive tensor voting algorithm combined with texture spectrum is proposed. The image texture spectrum is used to get the adaptive scale parameter of voting field. Then the texture information modifies both the attenuation coefficient and the attenuation field so that we can use this algorithm to create more significant and correct structures in the original image according to the human visual perception. At the same time, the proposed method can improve the edge extraction quality, which includes decreasing the flocculent region efficiently and making image clear. In the experiment for extracting pavement cracks, the original pavement image is processed by the proposed method which is combined with the significant curve feature threshold procedure, and the resulted image displays the faint crack signals submerged in the complicated background efficiently and clearly. 展开更多
关键词 interferometer offset grating cascaded simultaneous fabrication monitored refractive cladding resonant
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