Broadband and high efficiency metal multi-layer dielectric grating based on non-quarter-wave coatings as a reflective mirror

This article deals with designing a broadband and high efficiency metal multi-layer dielectric grating （MMDG） used to compress and stretch an ultrashort laser pulse. The diffraction characteristics of the IVIMDG are analysed by using the rigorous coupled-wave method. The multi-layer dielectric used as the reflective mirror is made up of non- quarter-wave coatings. Taking the diffraction efficiency of the -1 order as the value of merit function, the parameters such as groove depth, residual thickness, duty cycle, and reflective mirror are optimized to obtain broadband and high diffraction efficiency. The optimized MMDG shows an ultra-broadband working spectrum with the average efficiency exceeding 97% over 160 nm wavelength centred at 1053 nm and TE polarization. The optimized MMDG should be useful for chirped pulse amplification.

极紫外多层膜光栅技术研究进展

极紫外多层膜光栅是一种人造二维周期性结构,它将横向结构上的光栅衍射与深度结构上的多层膜布拉格衍射相结合,使得在极紫外波段采用非掠入射、高衍射效率、高光谱分辨率的分光元件成为可能,在天文学、物理学、材料科学等领域具有广阔的应用前景。介绍了极紫外多层膜光栅的应用;从光栅衬底制备与多层膜沉积两方面对多层膜光栅制备技术的研究进展进行了分析;并从实际应用角度出发,对未来多层膜光栅技术研究的发展趋势作了展望。