For the purpose of decomposing the processing gases CF4 from semiconductor manufacturers, ceramic honeycomb regenerative burner system is suggested by using the principle of HTAC. A simulated high temperature air comb...For the purpose of decomposing the processing gases CF4 from semiconductor manufacturers, ceramic honeycomb regenerative burner system is suggested by using the principle of HTAC. A simulated high temperature air combustion furnace has been used to determine the features of HTAC flames and the results of the decomposition of CF4. The preheat air temperature of it is above 900℃. The exhaust gas released into the atmosphere is lower than 150℃. Moreover, the efficiency of recovery of waste heat is higher than 80%, the NOx level in exhaust gas is less than 198 mg/m3 and the distribution of temperature in the furnace is nearly uniform. The factors influencing on heat transfer, temperature profile in chamber and NOX emission were discussed. Also some CF4 can be decomposed in this system.展开更多
将高温低氧燃烧技术(high temperature air combustion,HTAC)应用于火筒式油田加热炉,解决其炉膛换热面受热不均的问题,并对HTAC技术在火筒式油田加热炉上应用相关的热工特性进行了实验研究。结果表明:采用烟气再循环方式可有效实现高...将高温低氧燃烧技术(high temperature air combustion,HTAC)应用于火筒式油田加热炉,解决其炉膛换热面受热不均的问题,并对HTAC技术在火筒式油田加热炉上应用相关的热工特性进行了实验研究。结果表明:采用烟气再循环方式可有效实现高温低氧燃烧;且将氧浓度控制在10%~13%范围内较为适宜;采用HTAC技术后,加热炉炉膛内不存在明显的局部高温区,炉膛周向和轴向换热的均匀性均大幅改善;当加热炉负荷降低至额定负荷的60%以下时,炉内轴向换热的均匀性明显恶化;但周向换热的均匀性基本不受影响。展开更多
文摘For the purpose of decomposing the processing gases CF4 from semiconductor manufacturers, ceramic honeycomb regenerative burner system is suggested by using the principle of HTAC. A simulated high temperature air combustion furnace has been used to determine the features of HTAC flames and the results of the decomposition of CF4. The preheat air temperature of it is above 900℃. The exhaust gas released into the atmosphere is lower than 150℃. Moreover, the efficiency of recovery of waste heat is higher than 80%, the NOx level in exhaust gas is less than 198 mg/m3 and the distribution of temperature in the furnace is nearly uniform. The factors influencing on heat transfer, temperature profile in chamber and NOX emission were discussed. Also some CF4 can be decomposed in this system.
文摘将高温低氧燃烧技术(high temperature air combustion,HTAC)应用于火筒式油田加热炉,解决其炉膛换热面受热不均的问题,并对HTAC技术在火筒式油田加热炉上应用相关的热工特性进行了实验研究。结果表明:采用烟气再循环方式可有效实现高温低氧燃烧;且将氧浓度控制在10%~13%范围内较为适宜;采用HTAC技术后,加热炉炉膛内不存在明显的局部高温区,炉膛周向和轴向换热的均匀性均大幅改善;当加热炉负荷降低至额定负荷的60%以下时,炉内轴向换热的均匀性明显恶化;但周向换热的均匀性基本不受影响。