An AgGeSbTe thin film is proposed as a negative heat-mode resist for dry lithography.It possesses high etching selectivity with the etching rate difference of as high as 62 nm/min in CHF_(3)/O_(2)mixed gases.The etche...An AgGeSbTe thin film is proposed as a negative heat-mode resist for dry lithography.It possesses high etching selectivity with the etching rate difference of as high as 62 nm/min in CHF_(3)/O_(2)mixed gases.The etched sidewall is steep without the obvious lateral corrosion.The lithographic characteristics and underlying physical mechanisms are analyzed.Besides,results of X-ray diffraction,Raman spectroscopy,and X-ray photoelectron spectroscopy further indicate that laser irradiation causes the formation of Ge,Sb,and AgTe crystals,which is the basis of etching selectivity.In addition,the etching selectivity of Si to AgGeS_(b)Te resist is as high as 19 at SF_(6)/Ar mixed gases,possessing good etching resistance.It is believed that the AgGeSbTe thin film is a promising heat-mode resist for dry lithography.展开更多
A Te-free binary phase change material Sb Bi is proposed as a new inorganic photoresist for heat-mode lithography. It shows good film-forming ability(surface roughness <1 nm), low threshold power for crystallizatio...A Te-free binary phase change material Sb Bi is proposed as a new inorganic photoresist for heat-mode lithography. It shows good film-forming ability(surface roughness <1 nm), low threshold power for crystallization(2 m W), and high etching selectivity(15:1). Line-type, dot-type, and complex pattern structures with the smallest feature size of 275 nm are fabricated on Sb Bi thin films using a 405 nm diode laser direct writing system. In addition, the excellent grating structures with a period of 0.8 μm demonstrate that thermal interference does not affect the adjacent microstructures obviously. These results indicate that Sb Bi is a promising laser heat-mode resist material for micro/nanostructure fabrication.展开更多
In connection with the current prospect of decarbonization of coal energy through the use of small nuclear power plants (SNPPs) at existing TPPs as heat sources for heat supply to municipal heating networks, there is ...In connection with the current prospect of decarbonization of coal energy through the use of small nuclear power plants (SNPPs) at existing TPPs as heat sources for heat supply to municipal heating networks, there is a technological need to improve heat supply schemes to increase their environmental friendliness and efficiency. The paper proves the feasibility of using the heat-feeding mode of ASHPs for urban heat supply by heating the network water with steam taken from the turbine. The ratio of electric and thermal power of a “nuclear” combined heat and power plant is given. The advantage of using a heat pump, which provides twice as much electrical power with the same heat output, is established. Taking into account that heat in these modes is supplied with different potential, the energy efficiency was used to compare these options. To increase the heat supply capacity, a scheme with the use of a high-pressure heater in the backpressure mode and with the heating of network water with hot steam was proposed. Heat supply from ASHPs is efficient and environmentally friendly even in the case of significant remoteness of heat consumers.展开更多
基金The work was supported by the National Natural Science Foundation of China(Nos.21773291,61904118,and 22002102)Natural Science Foundation of Jiangsu Province(Nos.BK20190935 and BK20190947)+1 种基金Natural Science Foundation of the Jiangsu Higher Education Institutions of China(No.19KJA210005)Jiangsu Key Laboratory for Environment Functional Materials.
文摘An AgGeSbTe thin film is proposed as a negative heat-mode resist for dry lithography.It possesses high etching selectivity with the etching rate difference of as high as 62 nm/min in CHF_(3)/O_(2)mixed gases.The etched sidewall is steep without the obvious lateral corrosion.The lithographic characteristics and underlying physical mechanisms are analyzed.Besides,results of X-ray diffraction,Raman spectroscopy,and X-ray photoelectron spectroscopy further indicate that laser irradiation causes the formation of Ge,Sb,and AgTe crystals,which is the basis of etching selectivity.In addition,the etching selectivity of Si to AgGeS_(b)Te resist is as high as 19 at SF_(6)/Ar mixed gases,possessing good etching resistance.It is believed that the AgGeSbTe thin film is a promising heat-mode resist for dry lithography.
基金partially supported by the National Natural Science Foundation of China(Nos.51672292and 61627826)the International Science&Technology Cooperation Program of China:Intergovernmental International Cooperation Program in Science and Technology Innovation(No.2016YFE0110600)the International Science&Technology Cooperation Program of Shanghai(No.16520710500)
文摘A Te-free binary phase change material Sb Bi is proposed as a new inorganic photoresist for heat-mode lithography. It shows good film-forming ability(surface roughness <1 nm), low threshold power for crystallization(2 m W), and high etching selectivity(15:1). Line-type, dot-type, and complex pattern structures with the smallest feature size of 275 nm are fabricated on Sb Bi thin films using a 405 nm diode laser direct writing system. In addition, the excellent grating structures with a period of 0.8 μm demonstrate that thermal interference does not affect the adjacent microstructures obviously. These results indicate that Sb Bi is a promising laser heat-mode resist material for micro/nanostructure fabrication.
文摘In connection with the current prospect of decarbonization of coal energy through the use of small nuclear power plants (SNPPs) at existing TPPs as heat sources for heat supply to municipal heating networks, there is a technological need to improve heat supply schemes to increase their environmental friendliness and efficiency. The paper proves the feasibility of using the heat-feeding mode of ASHPs for urban heat supply by heating the network water with steam taken from the turbine. The ratio of electric and thermal power of a “nuclear” combined heat and power plant is given. The advantage of using a heat pump, which provides twice as much electrical power with the same heat output, is established. Taking into account that heat in these modes is supplied with different potential, the energy efficiency was used to compare these options. To increase the heat supply capacity, a scheme with the use of a high-pressure heater in the backpressure mode and with the heating of network water with hot steam was proposed. Heat supply from ASHPs is efficient and environmentally friendly even in the case of significant remoteness of heat consumers.
