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Ion acoustic solitary waves in an adiabatic dusty plasma:Roles of superthermal electrons,ion loss and ionization
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作者 饶强华 陈辉 +1 位作者 刘三秋 陈小昌 《Chinese Physics B》 SCIE EI CAS CSCD 2024年第8期337-342,共6页
We investigate propagation of dust ion acoustic solitary wave(DIASW)in a multicomponent dusty plasma with adiabatic ions,superthermal electrons,and stationary dust.The reductive perturbation method is employed to deri... We investigate propagation of dust ion acoustic solitary wave(DIASW)in a multicomponent dusty plasma with adiabatic ions,superthermal electrons,and stationary dust.The reductive perturbation method is employed to derive the damped Korteweg-de Vries(DKdV)equation which describes DIASW.The result reveals that the adiabaticity of ions significantly modifies the basic features of the DIASW.The ionization effect makes the solitary wave grow,while collisions reduce the growth rate and even lead to the damping.With the increases in ionization cross sectionΔσ/σ_(0),ion-to-electron density ratioδ_(ie)and superthermal electrons parameterκ,the effect of ionization on DIASW enhances. 展开更多
关键词 dust ion acoustic wave solitary wave IONIZATION adiabatic process
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Nonlinear ion acoustic waves in multicomponent plasmas with nonthermal electrons-positron and bipolar ions
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作者 Mai-Mai Lin Chen-Guang Song +1 位作者 Fu-Yan Chen Ming-Yue Wang 《Chinese Physics B》 SCIE EI CAS CSCD 2024年第12期324-332,共9页
This paper studied the propagating characteristics of(2+1)-dimensional nonlinear ion acoustic waves in a multicomponent plasma with nonthermal electrons,positrons,and bipolar ions.The dispersion relations are initiall... This paper studied the propagating characteristics of(2+1)-dimensional nonlinear ion acoustic waves in a multicomponent plasma with nonthermal electrons,positrons,and bipolar ions.The dispersion relations are initially explored by using the small amplitude wave's dispersion relation.Then,the Sagdeev potential method is employed to study large amplitude ion acoustic waves.The analysis involves examining the system's phase diagram,Sagdeev potential function,and solitary wave solutions through numerical solution of an analytical process in order to investigate the propagation properties of nonlinear ion acoustic waves under various parameters.It is found that the propagation of nonlinear ion acoustic waves is subject to the influence of various physical parameters,including the ratio of number densities between the unperturbed positrons,electrons to positive ions,nonthermal parameters,the mass ratio of positive ions to negative ions,and the charge number ratio of negative ions to positive ions,the ratio of the electrons'temperature to positrons'temperature.In addition,the multicomponent plasma system has a compressive solitary waves with amplitude greater than zero or a rarefactive solitary waves with amplitude less than zero,in the meantime,compressive and rarefactive ion acoustic wave characteristics depend on the charge number ratio of negative ions to positive ions. 展开更多
关键词 nonlinear ion acoustic waves nonthermal electrons bipolar ions Sagdeev potential method
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Derivation of Cylindrical Internal-Surface Acoustic Waves and Their Small Gravity Effect
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作者 Philipp G. Kornreich 《Journal of Modern Physics》 2024年第12期2193-2219,共27页
The properties of Cylindrical Internal-Surface Acoustic Waves (CISAW) propagating on the inside surface of a high purity fused quartz tubular fiber are derived from basic principles using a variational method. The CIS... The properties of Cylindrical Internal-Surface Acoustic Waves (CISAW) propagating on the inside surface of a high purity fused quartz tubular fiber are derived from basic principles using a variational method. The CISAW consist of Energy Momentum Packets (EMP) moving in a looping motion. The EMP have mass and are affected by gravity similar to a pendulum bob. The effect of gravity on CISAW is much larger than the effect of gravity in a light wave. Therefore, one can build much smaller CISAW Interferometer Gravity wave Observatories (CIGO) than the present km size Light Interferometer Gravity wave Observatories (LIGO). An array of CIGO can be used to detect gravity wave images. Since the wavelength of gravity waves is much larger than the expected spacing between CIGO array elements this would result in sub-wavelength images. It would be interesting to determine what new discoveries could be made using such an array. 展开更多
关键词 Elastic Constant Tensor Continuum Mechanics LAGRANGIAN wave Equation Surface acoustic waves Newtonian Gravity
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The viscous strip approach to simplify the calculation of the surface acoustic wave generated streaming
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作者 F.JAZINI DORCHEH M.GHASSEMI 《Applied Mathematics and Mechanics(English Edition)》 SCIE EI CSCD 2024年第4期711-724,共14页
In recent decades,the importance of surface acoustic waves,as a biocompatible tool to integrate with microfluidics,has been proven in various medical and biological applications.The numerical modeling of acoustic stre... In recent decades,the importance of surface acoustic waves,as a biocompatible tool to integrate with microfluidics,has been proven in various medical and biological applications.The numerical modeling of acoustic streaming caused by surface acoustic waves in microchannels requires the effect of viscosity to be considered in the equations which complicates the solution.In this paper,it is shown that the major contribution of viscosity and the horizontal component of actuation is concentrated in a narrow region alongside the actuation boundary.Since the inviscid equations are considerably easier to solve,a division into the viscous and inviscid domains would alleviate the computational load significantly.The particles'traces calculated by this approximation are excellently alongside their counterparts from the completely viscous model.It is also shown that the optimum thickness for the viscous strip is about 9-fold the acoustic boundary layer thickness for various flow patterns and amplitudes of actuation. 展开更多
关键词 surface acoustic wave MICROFLUIDICS numerical simulation particle tracing acoustic streaming
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Numerical Simulation and Parallel Computing of Acoustic Wave Equation in Isotropic-Heterogeneous Media
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作者 Arshyn Altybay Niyaz Tokmagambetov 《Computer Modeling in Engineering & Sciences》 SCIE EI 2024年第11期1867-1881,共15页
In this paper,we consider the numerical implementation of the 2D wave equation in isotropic-heterogeneous media.The stability analysis of the scheme using the von Neumann stability method has been studied.We conducted... In this paper,we consider the numerical implementation of the 2D wave equation in isotropic-heterogeneous media.The stability analysis of the scheme using the von Neumann stability method has been studied.We conducted a study on modeling the propagation of acoustic waves in a heterogeneous medium and performed numerical simulations in various heterogeneous media at different time steps.Developed parallel code using Compute Unified Device Architecture(CUDA)technology and tested on domains of various sizes.Performance analysis showed that our parallel approach showed significant speedup compared to sequential code on the Central Processing Unit(CPU).The proposed parallel visualization simulator can be an important tool for numerous wave control systems in engineering practice. 展开更多
关键词 acoustic wave simulation numerical simulation isotropic-heterogeneous media graphics processing unit(GPU) von Neumann stability analysis
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3D near-surface P-wave velocity structure imaging with Distributed Acoustic Sensing and electric hammer source
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作者 Heting Hong Fu Yin +2 位作者 Yuhang Lei Yulan Li Baoshan Wang 《Earthquake Research Advances》 CSCD 2024年第3期27-33,共7页
Distributed Acoustic Sensing(DAS) is an emerging technique for ultra-dense seismic observation, which provides a new method for high-resolution sub-surface seismic imaging. Recently a large number of linear DAS arrays... Distributed Acoustic Sensing(DAS) is an emerging technique for ultra-dense seismic observation, which provides a new method for high-resolution sub-surface seismic imaging. Recently a large number of linear DAS arrays have been used for two-dimensional S-wave near-surface imaging in urban areas. In order to explore the feasibility of three-dimensional(3D) structure imaging using a DAS array, we carried out an active source experiment at the Beijing National Earth Observatory. We deployed a 1 km optical cable in a rectangular shape, and the optical cable was recast into 250 sensors with a channel spacing of 4 m. The DAS array clearly recorded the P, S and surface waves generated by a hammer source. The first-arrival P wave travel times were first picked with a ShortTerm Average/Long-Term Average(STA/LTA) method and further manually checked. The P-wave signals recorded by the DAS are consistent with those recorded by the horizontal components of short-period seismometers. At shorter source-receiver distances, the picked P-wave arrivals from the DAS recording are consistent with vertical component recordings of seismometers, but they clearly lag behind the latter at greater distances.This is likely due to a combination of the signal-to-noise ratio and the polarization of the incoming wave. Then,we used the Tomo DD software to invert the 3D P-wave velocity structure for the uppermost 50 m with a resolution of 10 m. The inverted P-wave velocity structures agree well with the S-wave velocity structure previously obtained through ambient noise tomography. Our study indicates the feasibility of 3D near-surface imaging with the active source and DAS array. However, the inverted absolute velocity values at large depths may be biased due to potential time shifts between the DAS recording and seismometer at large source-receiver distances. 展开更多
关键词 Distributed acoustic Sensing(DAS) Near-surface structure First-arrival travel time tomography Body wave Active source
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Excitation and Detection of Shear Horizontal Waves with Electromagnetic Acoustic Transducers for Nondestructive Testing of Plates 被引量:13
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作者 MA Qingzeng JIAO Jingpin +3 位作者 HU Ping ZHONG Xi WU Bin HE Cunfu 《Chinese Journal of Mechanical Engineering》 SCIE EI CAS CSCD 2014年第2期428-436,共9页
The fundamental shear horizontal(SH0) wave has several unique features that are attractive for long-range nondestructive testing(NDT). By a careful design of the geometric configuration, electromagnetic acoustic t... The fundamental shear horizontal(SH0) wave has several unique features that are attractive for long-range nondestructive testing(NDT). By a careful design of the geometric configuration, electromagnetic acoustic transducers(EMATs) have the capability to generate a wide range of guided wave modes, such as Lamb waves and shear-horizontal(SH) waves in plates. However, the performance of EMATs is influenced by their parameters. To evaluate the performance of periodic permanent magnet(PPM) EMATs, a distributed-line-source model is developed to calculate the angular acoustic field cross-section in the far-field. Numerical analysis is conducted to investigate the performance of such EMATs with different geometric parameters, such as period and number of magnet arrays, and inner and outer coil widths. Such parameters have a great influence on the directivity of the generated SH0 waves that arises mainly in the amplitude and width of both main and side lobes. According to the numerical analysis, these parameters are optimized to obtain better directivity. Optimized PPM EMATs are designed and used for NDT of strip plates. Experimental results show that the lateral boundary of the strip plate has no perceivable influence on SHO-wave propagation, thus validating their used in NDT. The proposed model predicts the radiation pattern ofPPM EMATs, and can be used for their parameter optimization. 展开更多
关键词 electromagnetic acoustic transducers shear-horizontal waves strip plate nondestructive testing
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PROPAGATION OF SURFACE ACOUSTIC WAVES IN PRESTRESSED ANISOTROPIC LAYERED PIEZOELECTRIC STRUCTURES 被引量:5
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作者 Liu Hua Kuang Zhenbang +2 位作者 Cai Zhengming Wang Tiejun Wang Zikun 《Acta Mechanica Solida Sinica》 SCIE EI 2003年第1期16-23,共8页
The propagation of surface acoustic waves in layered piezoelectric structureswith initial stresses is investigated. The phase velocity equations are obtained for electricallyfree and shorted cases, respectively. Effec... The propagation of surface acoustic waves in layered piezoelectric structureswith initial stresses is investigated. The phase velocity equations are obtained for electricallyfree and shorted cases, respectively. Effects of the initial stresses on the phase velocity and theelectromechanical coupling coefficient for the fundamental mode of the layered piezoelectricstructures are discussed. Numerical results for the c-axis oriented film of LiNbO_3 on a sapphiresubstrate are given. It is found that the fractional change in phase velocity is a linear functionwith the initial stresses, and the electromechanical coupling factor increases with an increase ofthe absolute values of the compressive initial stresses. The results are useful for the design ofsurface acoustic wave devices. 展开更多
关键词 surface acoustic waves layered piezoelectric structure phase velocity electromechanical coupling coefficient
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Temperature Characteristics of Surface Acoustic Waves Propagating on La_3Ga_5SiO_4 Substrates 被引量:2
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作者 Guowei ZHANG, Wenkang SHI, Xiaojun JI, Tao HAN, Feng DU and Lianger LISchool of Electronics & Information, Shanghai Jiao Tong University, Shanghai 200030, China 《Journal of Materials Science & Technology》 SCIE EI CAS CSCD 2004年第1期63-66,共4页
Langasite (LGS) is a novel piezoelectric crystal. The authors numerically analyses the temperature stability of surface acoustic waves (SAW) and the relation of SAW propagation with temperature on certain optimal cuts... Langasite (LGS) is a novel piezoelectric crystal. The authors numerically analyses the temperature stability of surface acoustic waves (SAW) and the relation of SAW propagation with temperature on certain optimal cuts on LGS in this paper. The results show that LGS has better temperature stability than traditional piezo crystals. The results also demonstrate that the velocity of SAW decrease with temperature, the electro-mechanical coupling constant (k2) and temperature coefficient of frequency increases parabolically and the power flow angle increases linearly on certain optimal cuts of LGS. The calculation result compared with the experimental and show good agreement. 展开更多
关键词 La3Ga5SiO4 (LGS) Surface acoustic wave (SAW) Temperature characteristic
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Theoretical and Experimental Study on the Acoustic Wave Energy After the Nonlinear Interaction of Acoustic Waves in Aqueous Media 被引量:1
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作者 兰朝凤 李凤臣 +3 位作者 陈欢 卢迪 杨德森 张梦 《China Ocean Engineering》 SCIE EI CSCD 2015年第4期611-621,共11页
Based on the Burgers equation and Manley-Rowe equation, the derivation about nonlinear interaction of the acoustic waves has been done in this paper. After nonlinear interaction among the low-frequency weak waves and ... Based on the Burgers equation and Manley-Rowe equation, the derivation about nonlinear interaction of the acoustic waves has been done in this paper. After nonlinear interaction among the low-frequency weak waves and the pump wave, the analytical solutions of acoustic waves' amplitude in the field are deduced. The relationship between normalized energy of high-frequency and the change of acoustic energy before and after the nonlinear interaction of the acoustic waves is analyzed. The experimental results about the changes of the acoustic energy are presented. The study shows that new frequencies are generated and the energies of the low-frequency are modulated in a long term by the pump waves, which leads the energies of the low-frequency acoustic waves to change in the pulse trend in the process of the nonlinear interaction of the acoustic waves. The increase and decrease of the energies of the low-frequency are observed under certain typical conditions, which lays a foundation for practical engineering applications. 展开更多
关键词 nonlinear interaction amplitude solution of the acoustic waves energy amplification of low-frequencyacoustic waves energy reduction of low-frequency acoustic waves
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Controlling flexural waves in thin plates by using transformation acoustic metamaterials 被引量:2
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作者 Xing Chen Li Cai Ji-Hong Wen 《Chinese Physics B》 SCIE EI CAS CSCD 2018年第5期513-517,共5页
In this study,we design periodic grille structures on a single homogenous thin plate to achieve anisotropic acoustic metamaterials that can control flexural waves.The metamaterials can achieve the bending control of f... In this study,we design periodic grille structures on a single homogenous thin plate to achieve anisotropic acoustic metamaterials that can control flexural waves.The metamaterials can achieve the bending control of flexural waves in a thin plate at will by designing only one dimension in the thickness direction,which makes it easier to use this metamaterial to design transformation acoustic devices.The numerical simulation results show that the metamaterials can accurately control the bending waves over a wide frequency range.The experimental results verify the validity of the theoretical analysis.This research provides a more practical theoretical method of controlling flexural waves in thin-plate structures. 展开更多
关键词 acoustic metamaterials coordinate transformation flexural wave grille structure
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Nondestructive determination of film thickness with laser-induced surface acoustic waves 被引量:1
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作者 Xia Xiao Tao Kong +1 位作者 Hai Yang Qi and Hui Quan Qing 《Chinese Physics B》 SCIE EI CAS CSCD 2018年第9期457-461,共5页
The application of surface acoustic waves(SAWs) for thickness measurement is presented. By studying the impact of film thickness h on the dispersion phenomenon of surface acoustic waves, a method for thickness deter... The application of surface acoustic waves(SAWs) for thickness measurement is presented. By studying the impact of film thickness h on the dispersion phenomenon of surface acoustic waves, a method for thickness determination based on theoretical dispersion curve v( fh) and experimental dispersion curve v( f) is developed. The method provides a series of thickness values at different frequencies f, and the mean value is considered as the final result of the measurement. The thicknesses of six interconnect films are determined by SAWs, and the results are compared with the manufacturer's data.The relative differences are in the range from 0.4% to 2.18%, which indicates that the surface acoustic wave technique is reliable and accurate in the nondestructive thickness determination for films. This method can be generally used for fast and direct determination of film thickness. 展开更多
关键词 thickness measurement dispersion curve surface acoustic waves layered structure
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Selective generation of ultrasonic Lamb waves by electromagnetic acoustic transducers 被引量:1
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作者 李明亮 邓明晰 高广健 《Chinese Physics B》 SCIE EI CAS CSCD 2016年第12期1-8,共8页
In this paper, we describe a modal expansion approach for the analysis of the selective generation of ultrasonic Lamb waves by electromagnetic acoustic transducers (EMATs). With the modal expansion approach for wave... In this paper, we describe a modal expansion approach for the analysis of the selective generation of ultrasonic Lamb waves by electromagnetic acoustic transducers (EMATs). With the modal expansion approach for waveguide excitation, an analytical expression of the Lamb wave's mode expansion coefficient is deduced, which is related to the driving frequency and the geometrical parameters of the EMAT's meander coil, and lays a theoretical foundation for exactly analyzing the selective generation of Larnb waves with EMATs. The influences of the driving frequency on the mode expansion coefficient of ultrasonic Lamb waves are analyzed when the EMAT's geometrical parameters are given. The numerical simulations and experimental examinations show that the ultrasonic Lamb wave modes can be effectively regulated (strengthened or restrained) by choosing an appropriate driving frequency of EMAT, with the geometrical parameters given. This result provides a theoretical and experimental basis for selectively generating a single and pure Lamb wave mode with EMATs. 展开更多
关键词 ultrasonic Lamb waves selective generation electromagnetic acoustic transducer (EMAT) Lorentz surface stress
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Analytical Solution for Acoustic Waves Propagation in Fluids 被引量:1
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作者 Mohamed I. A. Othman Mohamed Galal Sayed Ali Roushdi Mohamed Farouk 《World Journal of Mechanics》 2011年第5期243-246,共4页
This paper presents a mathematical model of linear acoustic wave propagation in fluids. The benefits of a mathematical model over a normal mode analysis are first discussed, then the mathematical model for acoustic pr... This paper presents a mathematical model of linear acoustic wave propagation in fluids. The benefits of a mathematical model over a normal mode analysis are first discussed, then the mathematical model for acoustic propagation in the test medium is developed using computer simulations. The approach is based on a analytical solution to the homogeneous wave equation for fluid medium. A good agreement between the computational presented results with published data. 展开更多
关键词 acoustic waves NORMAL Mode Analysis Fluid MEDIUM
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On the Time Fractional Modulation for Electron Acoustic Shock Waves 被引量:1
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作者 H.G.Abdelwahed E.K.El-Shewy A.A.Mahmoud 《Chinese Physics Letters》 SCIE CAS CSCD 2017年第3期86-89,共4页
Nonlinear features of electron-acoustic shock waves are studied. The Burgers equation is derived and converted to the time fractional Burgers equation by Agrawal's method. Using the Adomian decomposition method, the ... Nonlinear features of electron-acoustic shock waves are studied. The Burgers equation is derived and converted to the time fractional Burgers equation by Agrawal's method. Using the Adomian decomposition method, the shock wave solutions of the time fractional Burgers equation are constructed. The effect of time fractional parameter on the shock wave properties in auroral plasma & investigated. 展开更多
关键词 On the Time Fractional Modulation for Electron acoustic Shock waves
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Effects of bi-kappa distributed electrons on dust-ion-acoustic shock waves in dusty superthermal plasmas 被引量:1
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作者 M.S.Alam M.M.Masud A.A.Mamun 《Chinese Physics B》 SCIE EI CAS CSCD 2013年第11期390-395,共6页
The basic properties of dust-ion-acoustic (DIA) shock waves in an unmagnetized dusty plasma (containing inertial ions, kappa distributed electrons with two distinct temperatures, and negatively charged immobile dus... The basic properties of dust-ion-acoustic (DIA) shock waves in an unmagnetized dusty plasma (containing inertial ions, kappa distributed electrons with two distinct temperatures, and negatively charged immobile dust grains) are investi- gated both numerically and analytically. The hydrodynamic equation for inertial ions has been used to derive the Burgers equation. The effects of superthermal bi-kappa electrons and ion kinematic viscosity, which are found to modify the basic features of DIA shock waves significantly, are briefly discussed. 展开更多
关键词 bi-kappa electrons shock waves dust-ion-acoustic waves dusty plasma
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Confined aquifer as wave-guide and its responses to geo-acoustic waves
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作者 简文彬 陈葆仁 卢华复 《Acta Seismologica Sinica(English Edition)》 CSCD 1997年第3期97-105,共9页
On the basis of the hydro geological model of a confined aquifer, the propagation mechanism of geo acoustic waves along the confined aquifer outlined as a plate wave guide is proposed. The harmonic frequency equati... On the basis of the hydro geological model of a confined aquifer, the propagation mechanism of geo acoustic waves along the confined aquifer outlined as a plate wave guide is proposed. The harmonic frequency equation for geo acoustic propagation along confined aquifer as waveguide is derived from Biot theory. The basic frequency of the confined aquifer with a deep well for geo acoustic observation, located at Juxian county, Shandong province, China, is 35.0 Hz. By Wigner distribution of geo acoustic signals observed at Juxian geo acoustic well, the frequencies of geo acoustics are basically the integral multiple of the basic frequency. The results show that the responses of the confined aquifer to geo acoustic waves are characterized by frequency selection and frequency dependence. Only the waves whose frequency f is the integral multiple of basic frequency can propagate as guide waves in the aquifer, that is , the aquifer responds to the waves. 展开更多
关键词 confined aquifer wave guide porous media GEO acousticS response
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Effects of electron trapping on nonlinear electron-acoustic waves excited by an electron beam via particle-in-cell simulations
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作者 Quanming LU Huayue CHEN +1 位作者 Yangguang KE Shui WANG 《Plasma Science and Technology》 SCIE EI CAS CSCD 2019年第5期93-101,共9页
By performing one-dimensional particle-in-cell simulations, the nonlinear effects of electronacoustic(EA) waves are investigated in a multispecies plasma, whose constituents are hot electrons, cold electrons, and beam... By performing one-dimensional particle-in-cell simulations, the nonlinear effects of electronacoustic(EA) waves are investigated in a multispecies plasma, whose constituents are hot electrons, cold electrons, and beam electrons with immobile neutralized positive ions. Numerical analyses have identified that EA waves with a sufficiently large amplitude tend to trap cold electrons. Because EA waves are dispersive, where the wave modes with different wavenumbers have different phase velocities, the trapping may lead to the mixing of cold electrons. The cold electrons finally get thermalized or heated. The investigation also shows that the excited EA waves give rise to a broad range of wave frequencies, which may be helpful for understanding the broadband-electrostatic-noise spectrum in the Earth’s auroral region. 展开更多
关键词 electron acoustic waves cold ELECTRONS TRAPPING particle-in-cell(PIC)simulation
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Propagation and interaction of ion-acoustic solitary waves in a quantum electron-positron-ion plasma
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作者 韩久宁 罗均华 +2 位作者 孙桂华 刘振来 李守义 《Chinese Physics B》 SCIE EI CAS CSCD 2011年第2期340-346,共7页
This paper discusses the existence of ion-acoustic solitary waves and their interaction in a dense quantum electron positron-ion plasma by using the quantum hydrodynamic equations. The extended Poincar^-Lighthill-Kuo ... This paper discusses the existence of ion-acoustic solitary waves and their interaction in a dense quantum electron positron-ion plasma by using the quantum hydrodynamic equations. The extended Poincar^-Lighthill-Kuo perturbation method is used to derive the Korteweg-de Vries equations for quantum ion-acoustic solitary waves in this plasma. The effects of the ratio of positrons to ions unperturbation number density p and the quantum diffraction parameter He (Hp) on the newly formed wave during interaction, and the phase shift of the colliding solitary waves are studied. It is found that the interaction between two solitary waves fits linear superposition principle and these plasma parameters have significantly influence on the newly formed wave and phase shift of the colliding solitary waves. The investigations should be useful for understanding the propagation and interaction of ion-acoustic solitary waves in dense astrophysical plasmas (such as white dwarfs) as well as in intense laser-solid matter interaction experiments. 展开更多
关键词 quantum plasma ion acoustic solitary wave Korteweg-de Vries equation INTERACTION
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Influence of roughness on the detection of mechanical characteristics of low-k film by the surface acoustic waves
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作者 肖夏 陶冶 孙远 《Chinese Physics B》 SCIE EI CAS CSCD 2014年第10期424-428,共5页
The surface acoustic wave (SAW) technique is a precise and nondestructive method to detect the mechanical charac- teristics of the thin low dielectric constant (low-k) film by matching the theoretical dispersion c... The surface acoustic wave (SAW) technique is a precise and nondestructive method to detect the mechanical charac- teristics of the thin low dielectric constant (low-k) film by matching the theoretical dispersion curve with the experimental dispersion curve. In this paper, the influence of sample roughness on the precision of SAW mechanical detection is inves- tigated in detail. Random roughness values at the surface of low-k film and at the interface between this low-k film and the substrate are obtained by the Monte Carlo method. The dispersive characteristic of SAW on the layered structure with rough surface and rough interface is modeled by numerical simulation of finite element method. The Young's moduli of the Black DiamondTM samples with different roughness values are determined by SAWs in the experiment. The results show that the influence of sample roughness is very small when the root-mean-square (RMS) of roughness is smaller than 50 nm and correlation length is smaller than 20 μm. This study indicates that the SAW technique is reliable and precise in the nondestructive mechanical detection for low-k films. 展开更多
关键词 low-k film mechanical character detection rough surface rough interface surface acoustic wave
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