The discharge characteristics of capacitively coupled argon plasmas driven by very high frequency discharge are studied.The mean electron temperature and electron density are calculated by using the Ar spectral lines ...The discharge characteristics of capacitively coupled argon plasmas driven by very high frequency discharge are studied.The mean electron temperature and electron density are calculated by using the Ar spectral lines at different values of power(20 W-70 W)and four different frequencies(13.56 MHz,40.68 MHz,94.92 MHz,and 100 MHz).The mean electron temperature decreases with the increase of power at a fixed frequency.The mean electron temperature varies non-linearly with frequency increasing at constant power.At 40.68 MHz,the mean electron temperature is the largest.The electron density increases with the increase of power at a fixed frequency.In the cases of driving frequencies of 94.92 MHz and 100 MHz,the obtained electron temperatures are almost the same,so are the electron densities.Particle-in-cell/Monte-Carlo collision(PIC/MCC)method developed within the Vsim 8.0 simulation package is used to simulate the electron density,the potential distribution,and the electron energy probability function(EEPF)under the experimental condition.The sheath width increases with the power increasing.The EEPF of 13.56 MHz and 40.68 MHz are both bi-Maxwellian with a large population of low-energy electrons.The EEPF of 94.92 MHz and 100 MHz are almost the same and both are nearly Maxwellian.展开更多
The plasma generated in the low-altitude atmosphere is of high collision frequencies. In this paper, the transmission coefficients of millimeter(MM) waves normally incident upon the plasma with high collision frequenc...The plasma generated in the low-altitude atmosphere is of high collision frequencies. In this paper, the transmission coefficients of millimeter(MM) waves normally incident upon the plasma with high collision frequencies are calculated and analyzed. The experimental results of reflection and attenuation are presented for the eight-millimeter waves propagating through the plasma. Both the calculated experimental results indicate that the MM-waves concerned are attenuated significantly and reflected weakly, when propagating through the plasma of high collision frequencies.展开更多
基金Project supported by the National Natural Science Foundation of China(Grant No.11665021)the Natural Science Foundation of Gansu Province,China(Grant No.20JR10RA078).
文摘The discharge characteristics of capacitively coupled argon plasmas driven by very high frequency discharge are studied.The mean electron temperature and electron density are calculated by using the Ar spectral lines at different values of power(20 W-70 W)and four different frequencies(13.56 MHz,40.68 MHz,94.92 MHz,and 100 MHz).The mean electron temperature decreases with the increase of power at a fixed frequency.The mean electron temperature varies non-linearly with frequency increasing at constant power.At 40.68 MHz,the mean electron temperature is the largest.The electron density increases with the increase of power at a fixed frequency.In the cases of driving frequencies of 94.92 MHz and 100 MHz,the obtained electron temperatures are almost the same,so are the electron densities.Particle-in-cell/Monte-Carlo collision(PIC/MCC)method developed within the Vsim 8.0 simulation package is used to simulate the electron density,the potential distribution,and the electron energy probability function(EEPF)under the experimental condition.The sheath width increases with the power increasing.The EEPF of 13.56 MHz and 40.68 MHz are both bi-Maxwellian with a large population of low-energy electrons.The EEPF of 94.92 MHz and 100 MHz are almost the same and both are nearly Maxwellian.
文摘The plasma generated in the low-altitude atmosphere is of high collision frequencies. In this paper, the transmission coefficients of millimeter(MM) waves normally incident upon the plasma with high collision frequencies are calculated and analyzed. The experimental results of reflection and attenuation are presented for the eight-millimeter waves propagating through the plasma. Both the calculated experimental results indicate that the MM-waves concerned are attenuated significantly and reflected weakly, when propagating through the plasma of high collision frequencies.
