The mechanical properties of regenerated W-alloys relating to the chemical purity and size of reclamation powders of 93W-Ni-Fe-Co(Mn)alloy chips,the structure of main constituents of the powders,as well as microstruet...The mechanical properties of regenerated W-alloys relating to the chemical purity and size of reclamation powders of 93W-Ni-Fe-Co(Mn)alloy chips,the structure of main constituents of the powders,as well as microstrueture and fractograph of regenerated W-alloys made by the reclamation powders,composition of W particle and binder phase,content,structure and distribution of main impurity elements have been studied by means of optical microscope, SEM,XRES.XRD,TEM,AES and chemical analysis.The feasibility of oxidation-reduc- tion process for reclamation and the possibility of praetical application of regenerated W-al- loys have been discussed.展开更多
An inductively coupled plasma (ICP) discharge and its etching behaviors for aluminum alloys were investigated in this report. A radio frequency power supply was used for plasma generation. The unique hardware configur...An inductively coupled plasma (ICP) discharge and its etching behaviors for aluminum alloys were investigated in this report. A radio frequency power supply was used for plasma generation. The unique hardware configuration enabled one to control ion energy separately from plasma density. Plasma properties were measured with a Langmuir probe. Electron temperature, plasma potential and plasma density were found to be comparable with those reported from Electron Cyclotron Resonance (ECR) and other types of reactors[1].A mixture of HBr and chlorine gases were used for this aluminum etch study. Experimental matrices were designed with Response Surface Methodology (RSM) to analyze the process trends versus etch parameters, such as source power, bias power and gas composition. An etch rate of 8500A to 9000A per minute was obtained at 5 to 15 mTorr pressure ranges. Anisotropic profiles with high photoresist selectivity (5 to 1) and silicon dioxide selectivity greater than 10 were achieved with HBr addition into chlorine plasma.Bromine-containing chemistry for an aluminum etch in a low pressure ICP discharge showed great potential for use in ULSI fabrication. In addition, the hardware used was very simple and the chamber size was much smaller than other high density plasma sources.展开更多
The radiation generated by nuclear reaction is harmful to human body and equipment,thus the radiation shielding materials that employ the shielding ability from neutron and gamma rays are the best candidates according...The radiation generated by nuclear reaction is harmful to human body and equipment,thus the radiation shielding materials that employ the shielding ability from neutron and gamma rays are the best candidates according to application situations and radiation sources.In this paper,the researches of metal-based neutron and gamma rays or multiple purpose shielding materials are systematically summarized,and the respective and principal problems of these materials with respect to shielding effectiveness and other performances,such as corrosion,mechanical properties,manufacture,etc.,are discussed.Finally,the prospect of shielding materials is outlined,which suggests that the development of highly efficient and multiply functional radiation shielding materials with good environmental compatibility is one of the future development trends.展开更多
文摘The mechanical properties of regenerated W-alloys relating to the chemical purity and size of reclamation powders of 93W-Ni-Fe-Co(Mn)alloy chips,the structure of main constituents of the powders,as well as microstrueture and fractograph of regenerated W-alloys made by the reclamation powders,composition of W particle and binder phase,content,structure and distribution of main impurity elements have been studied by means of optical microscope, SEM,XRES.XRD,TEM,AES and chemical analysis.The feasibility of oxidation-reduc- tion process for reclamation and the possibility of praetical application of regenerated W-al- loys have been discussed.
文摘An inductively coupled plasma (ICP) discharge and its etching behaviors for aluminum alloys were investigated in this report. A radio frequency power supply was used for plasma generation. The unique hardware configuration enabled one to control ion energy separately from plasma density. Plasma properties were measured with a Langmuir probe. Electron temperature, plasma potential and plasma density were found to be comparable with those reported from Electron Cyclotron Resonance (ECR) and other types of reactors[1].A mixture of HBr and chlorine gases were used for this aluminum etch study. Experimental matrices were designed with Response Surface Methodology (RSM) to analyze the process trends versus etch parameters, such as source power, bias power and gas composition. An etch rate of 8500A to 9000A per minute was obtained at 5 to 15 mTorr pressure ranges. Anisotropic profiles with high photoresist selectivity (5 to 1) and silicon dioxide selectivity greater than 10 were achieved with HBr addition into chlorine plasma.Bromine-containing chemistry for an aluminum etch in a low pressure ICP discharge showed great potential for use in ULSI fabrication. In addition, the hardware used was very simple and the chamber size was much smaller than other high density plasma sources.
文摘The radiation generated by nuclear reaction is harmful to human body and equipment,thus the radiation shielding materials that employ the shielding ability from neutron and gamma rays are the best candidates according to application situations and radiation sources.In this paper,the researches of metal-based neutron and gamma rays or multiple purpose shielding materials are systematically summarized,and the respective and principal problems of these materials with respect to shielding effectiveness and other performances,such as corrosion,mechanical properties,manufacture,etc.,are discussed.Finally,the prospect of shielding materials is outlined,which suggests that the development of highly efficient and multiply functional radiation shielding materials with good environmental compatibility is one of the future development trends.
