High Frequency Discharge Plasma Induced Grafting of Polystyrene onto Titanium Dioxide Powder

Grafting of polystyrene （PS） onto titanium dioxide powder was investigated. The graft polymerization reaction was induced by high frequency discharge produced N2 plasma treatment of the surfaces of titanium dioxide. IR, XPS and TGA results show that PS was grafted on the titanium dioxide powder. And the crystal structure of the titanium dioxide powder observed by XRD was unchanged after plasma treatment.

Discharge characteristic of very high frequency capacitively coupled argon plasma

The discharge characteristics of capacitively coupled argon plasmas driven by very high frequency discharge are studied.The mean electron temperature and electron density are calculated by using the Ar spectral lines at different values of power(20 W-70 W)and four different frequencies(13.56 MHz,40.68 MHz,94.92 MHz,and 100 MHz).The mean electron temperature decreases with the increase of power at a fixed frequency.The mean electron temperature varies non-linearly with frequency increasing at constant power.At 40.68 MHz,the mean electron temperature is the largest.The electron density increases with the increase of power at a fixed frequency.In the cases of driving frequencies of 94.92 MHz and 100 MHz,the obtained electron temperatures are almost the same,so are the electron densities.Particle-in-cell/Monte-Carlo collision(PIC/MCC)method developed within the Vsim 8.0 simulation package is used to simulate the electron density,the potential distribution,and the electron energy probability function(EEPF)under the experimental condition.The sheath width increases with the power increasing.The EEPF of 13.56 MHz and 40.68 MHz are both bi-Maxwellian with a large population of low-energy electrons.The EEPF of 94.92 MHz and 100 MHz are almost the same and both are nearly Maxwellian.

Recording Spatially Resolved Plasma Parameters in Microwave-Driven Plasmas

In an almost cubical reactor 90 1 in volume which is intended to deposit organic polymers by plasma-enhanced chemical vapor deposition （PECVD）, microwave power is coupled into the volume via a quartz window which extends to approximately 1/10 of the sidewall area. Since the plasma is excited locally, plasma parameters like electron temperature and plasma density are expected to exhibit a spatial variation. The compilation of these plasma quantities has been accomplished with a bendable single Langmuir probe. To isolate the tungsten wire against its grounded housing tube, it was coated with polyparylene. After having compared this construction with our Langmuir probe, which has been now in use for more than a decade, we have taken data of more than half the volume of the reactor with argon and have found a definitive radial inhomogenity for all plasma parameters. To investigate whether this conduct can be determined applying optical emission spectroscopy, we improved our spectrometer which had been used for endpoint detection purposes and plasma diagnostics in chlorine-containing ambients where we could detect also a spatial dependence. This behavior is discussed in terms of Lieberman＇s global model.