A high-g beam-mass structure accelerometer was designed.In this structure,by means of KOH back etching on the mass,V-groove structure was fabricated on the backside of the mass,so the weight of the mass and also the r...A high-g beam-mass structure accelerometer was designed.In this structure,by means of KOH back etching on the mass,V-groove structure was fabricated on the backside of the mass,so the weight of the mass and also the relative distance between the mass center and the neutral plane were all decreased.With the thin mass structure,we can take advantage of both beam-mass structure and flat film structure;the fabrication process is also simple.By means of Hopkinson shock test system,we did the accelerometer calibration.According to the test result,the sensitivity of the MEMS accelerometer is 0.71 μV/g,which keeps in accordance with the theoretical calculation.After a 200 000 g shocking test,the micro structure worked as usual,so this design can satisfy the requirements of high shock,seriously vibration test environment.展开更多
针对高g值加速度计动态校准要求激励信号的频率大于加速度计谐振频率的需要,采用小型Hopkinson杆和激光干涉仪构成动态校准系统,对某型高g值加速度传感器进行了校准实验。结果表明:该系统能产生脉宽10滋s以下的窄脉冲加速度激励信号,对...针对高g值加速度计动态校准要求激励信号的频率大于加速度计谐振频率的需要,采用小型Hopkinson杆和激光干涉仪构成动态校准系统,对某型高g值加速度传感器进行了校准实验。结果表明:该系统能产生脉宽10滋s以下的窄脉冲加速度激励信号,对一阶谐振频率大于100 k Hz的高g值加速度计可以实现动态校准。展开更多
设计实现了一种扭摆式高g值微机械加速度计。微结构采用十字形扭梁减小横向效应,摆片两侧使用梳齿结构作为止档和阻尼器,6个敏感单元并联的方式提高基础电容量。有限元仿真得到表头谐振频率约为56 k Hz,前两阶模态分离比大于4,高过载能...设计实现了一种扭摆式高g值微机械加速度计。微结构采用十字形扭梁减小横向效应,摆片两侧使用梳齿结构作为止档和阻尼器,6个敏感单元并联的方式提高基础电容量。有限元仿真得到表头谐振频率约为56 k Hz,前两阶模态分离比大于4,高过载能力10万g,微结构灵敏度为8.94E-6p F/g,基于玻璃-硅(Silicon On Glass,SOG)工艺流片后单侧基础电容约为3.6 p F。分析了环形二极管电容检测电路的检测带宽问题,并设计了高g值加速度计的检测电路。搭建了霍普金森杆实验系统进行高g值的冲击校准,2万g范围内非线性度2%,5 V供电下标度因数约为24.5μV/g。展开更多
基金Shanxi province young leaders on science and by program for New Century Excellent Talents in University(NCET)
文摘A high-g beam-mass structure accelerometer was designed.In this structure,by means of KOH back etching on the mass,V-groove structure was fabricated on the backside of the mass,so the weight of the mass and also the relative distance between the mass center and the neutral plane were all decreased.With the thin mass structure,we can take advantage of both beam-mass structure and flat film structure;the fabrication process is also simple.By means of Hopkinson shock test system,we did the accelerometer calibration.According to the test result,the sensitivity of the MEMS accelerometer is 0.71 μV/g,which keeps in accordance with the theoretical calculation.After a 200 000 g shocking test,the micro structure worked as usual,so this design can satisfy the requirements of high shock,seriously vibration test environment.
文摘针对高g值加速度计动态校准要求激励信号的频率大于加速度计谐振频率的需要,采用小型Hopkinson杆和激光干涉仪构成动态校准系统,对某型高g值加速度传感器进行了校准实验。结果表明:该系统能产生脉宽10滋s以下的窄脉冲加速度激励信号,对一阶谐振频率大于100 k Hz的高g值加速度计可以实现动态校准。
文摘设计实现了一种扭摆式高g值微机械加速度计。微结构采用十字形扭梁减小横向效应,摆片两侧使用梳齿结构作为止档和阻尼器,6个敏感单元并联的方式提高基础电容量。有限元仿真得到表头谐振频率约为56 k Hz,前两阶模态分离比大于4,高过载能力10万g,微结构灵敏度为8.94E-6p F/g,基于玻璃-硅(Silicon On Glass,SOG)工艺流片后单侧基础电容约为3.6 p F。分析了环形二极管电容检测电路的检测带宽问题,并设计了高g值加速度计的检测电路。搭建了霍普金森杆实验系统进行高g值的冲击校准,2万g范围内非线性度2%,5 V供电下标度因数约为24.5μV/g。
