An ultra-low specific on-resistance trench gate vertical double-diffused metal-oxide semiconductor with a high-k dielectric-filled extended trench(HK TG VDMOS) is proposed in this paper.The HK TG VDMOS features a hi...An ultra-low specific on-resistance trench gate vertical double-diffused metal-oxide semiconductor with a high-k dielectric-filled extended trench(HK TG VDMOS) is proposed in this paper.The HK TG VDMOS features a high-k(HK) trench below the trench gate.Firstly,the extended HK trench not only causes an assistant depletion of the n-drift region,but also optimizes the electric field,which therefore reduces Ron,sp and increases the breakdown voltage(BV).Secondly,the extended HK trench weakens the sensitivity of BV to the n-drift doping concentration.Thirdly,compared with the superjunction(SJ) vertical double-diffused metal-oxide semiconductor(VDMOS),the new device is simplified in fabrication by etching and filling the extended trench.The HK TG VDMOS with BV = 172 V and Ron,sp = 0.85 mΩ·cm2 is obtained by simulation;its Ron,sp is reduced by 67% and 40% and its BV is increased by about 15% and 5%,in comparison with those of the conventional trench gate VDMOS(TG VDMOS) and conventional superjunction trench gate VDMOS(SJ TG CDMOS).展开更多
An ultra-low specific on-resistance (Ron,sp) oxide trench-type silicon-on-insulator (SOI) lateral double-diffusion metal-oxide semiconductor (LDMOS) with an enhanced breakdown voltage (BV) is proposed and inve...An ultra-low specific on-resistance (Ron,sp) oxide trench-type silicon-on-insulator (SOI) lateral double-diffusion metal-oxide semiconductor (LDMOS) with an enhanced breakdown voltage (BV) is proposed and investigated by simulation. There are two key features in the proposed device: one is a U-shaped gate around the oxide trench, which extends from source to drain (UG LDMOS); the other is an N pillar and P pillar located in the trench sidewall. In the on-state, electrons accumulate along the U-shaped gate, providing a continuous low resistance current path from source to drain. The Ron,sp is thus greatly reduced and almost independent of the drift region doping concentration. In the off-state, the N and P pillars not only enhance the electric field (E-field) strength of the trench oxide, but also improve the E-field distribution in the drift region, leading to a significant improvement in the BV. The BV of 662 V and Ron,sp of 12.4 mΩ.cm2 are achieved for the proposed UG LDMOS. The BV is increased by 88.6% and the Ron,sp is reduced by 96.4%, compared with those of the conventional trench LDMOS (CT LDMOS), realizing the state-of-the-art trade-off between BV and Ron,sp.展开更多
A new high voltage trench lateral double-diffused metal–oxide semiconductor (LDMOS) with ultra-low specific onresistance (R on,sp ) is proposed. The structure features a dual gate (DG LDMOS): a planar gate and...A new high voltage trench lateral double-diffused metal–oxide semiconductor (LDMOS) with ultra-low specific onresistance (R on,sp ) is proposed. The structure features a dual gate (DG LDMOS): a planar gate and a trench gate inset in the oxide trench. Firstly, the dual gate can provide a dual conduction channel and reduce R on,sp dramatically. Secondly, the oxide trench in the drift region modulates the electric field distribution and reduces the cell pitch but still can maintain comparable breakdown voltage (BV). Simulation results show that the cell pitch of the DG LDMOS can be reduced by 50% in comparison with that of conventional LDMOS at the equivalent BV; furthermore, R on,sp of the DG LDMOS can be reduced by 67% due to the smaller cell pitch and the dual gate.展开更多
A low on-resistance (Ron,sp) integrable silicon-on-insulator (SOI) n-channel lateral double-diffused metal-oxide-semiconductor (LDMOS) is proposed and its mechanism is investigated by simulation. The LDMOS has t...A low on-resistance (Ron,sp) integrable silicon-on-insulator (SOI) n-channel lateral double-diffused metal-oxide-semiconductor (LDMOS) is proposed and its mechanism is investigated by simulation. The LDMOS has two features: the integration of a planar gate and an extended trench gate (double gates (DGs)); and a buried P-layer in the N-drift region, which forms a triple reduced surface field (RESURF) (TR) structure. The triple RESURF not only modulates the electric field distribution, but also increases N-drift doping, resulting in a reduced specific on-resistance (Ron,sp) and an improved breakdown voltage (BV) in the off-state. The DGs form dual conduction channels and, moreover, the extended trench gate widens the vertical conduction area, both of which further reduce the Ron,sp. The BV and Ron,sp are 328 V and 8.8 mΩ·cm^2, respectively, for a DG TR metal-oxide semiconductor field-effect transistor (MOSFET) by simulation. Compared with a conventional SOI LDMOS, a DG TR MOSFET with the same dimensional device parameters as those of the DG TR MOSFET reduces Ron,sp by 59% and increases BV by 6%. The extended trench gate synchronously acts as an isolation trench between the high-voltage device and low-voltage circuitry in a high-voltage integrated circuit, thereby saving the chip area and simplifying the fabrication processes.展开更多
An ultra-low specific on-resistance(R_(on,sp)) silicon-on-insulator(SOI) double-gate trench-type MOSFET (DG trench MOSFET) is proposed.The MOSFET features double gates and an oxide trench:the oxide trench is ...An ultra-low specific on-resistance(R_(on,sp)) silicon-on-insulator(SOI) double-gate trench-type MOSFET (DG trench MOSFET) is proposed.The MOSFET features double gates and an oxide trench:the oxide trench is in the drift region,one trench gate is inset in the oxide trench and one trench gate is extended into the buried oxide.Firstly,the double gates reduce R_(on,sp) by forming dual conduction channels.Secondly,the oxide trench not only folds the drift region,but also modulates the electric field,thereby reducing device pitch and increasing the breakdown voltage(BV).A BV of 93 V and a R_(on,sp) of 51.8 mΩ·mm^2 is obtained for a DG trench MOSFET with a 3μm half-cell pitch.Compared with a single-gate SOI MOSFET(SG MOSFET) and a single-gate SOI MOSFET with an oxide trench(SG trench MOSFET),the R_(on,sp) of the DG trench MOSFET decreases by 63.3%and 33.8% at the same BV,respectively.展开更多
A 4H-SiC trench gate metal-oxide-semiconductor field-effect transistor(UMOSFET)with semi-super-junction shiel-ded structure(SS-UMOS)is proposed and compared with conventional trench MOSFET(CT-UMOS)in this work.The adv...A 4H-SiC trench gate metal-oxide-semiconductor field-effect transistor(UMOSFET)with semi-super-junction shiel-ded structure(SS-UMOS)is proposed and compared with conventional trench MOSFET(CT-UMOS)in this work.The advantage of the proposed structure is given by comprehensive study of the mechanism of the local semi-super-junction structure at the bottom of the trench MOSFET.In particular,the influence of the bias condition of the p-pillar at the bottom of the trench on the static and dynamic performances of the device is compared and revealed.The on-resistance of SS-UMOS with grounded(G)and ungrounded(NG)p-pillar is reduced by 52%(G)and 71%(NG)compared to CT-UMOS,respectively.Additionally,gate ox-ide in the GSS-UMOS is fully protected by the p-shield layer as well as semi-super-junction structure under the trench and p-base regions.Thus,a reduced electric-field of 2 MV/cm can be achieved at the corner of the p-shield layer.However,the quasi-intrinsic protective layer cannot be formed in NGSS-UMOS due to the charge storage effect in the floating p-pillar,resulting in a large electric field of 2.7 MV/cm at the gate oxide layer.Moreover,the total switching loss of GSS-UMOS is 1.95 mJ/cm2 and is reduced by 18%compared with CT-UMOS.On the contrary,the NGSS-UMOS has the slowest overall switching speed due to the weakened shielding effect of the p-pillar and the largest gate-to-drain capacitance among the three.The proposed GSS-UMOS plays an important role in high-voltage and high-frequency applications,and will provide a valuable idea for device design and circuit applications.展开更多
This article investigates an improved 4H-SiC trench gate metal–oxide–semiconductor field-effect transistor(MOSFET)(UMOSFET)fitted with a super-junction(SJ)shielded region.The modified structure is composed of two n-...This article investigates an improved 4H-SiC trench gate metal–oxide–semiconductor field-effect transistor(MOSFET)(UMOSFET)fitted with a super-junction(SJ)shielded region.The modified structure is composed of two n-type conductive pillars,three p-type conductive pillars,an oxide trench under the gate,and a light n-type current spreading layer(NCSL)under the p-body.The n-type conductive pillars and the light n-type current spreading layer provide two paths to and promote the diffusion of a transverse current in the epitaxial layer,thus improving the specific on-resistance(R_(on,sp)).There are three p-type pillars in the modified structure,with the p-type pillars on both sides playing the same role.The p-type conductive pillars relieve the electric field(E-field)in the corner of the trench bottom.Two-dimensional simulation(silvaco TCAD)indicates that Ron,sp of the modified structure,and breakdown voltage(V_(BR))are improved by 22.2%and 21.1%respectively,while the maximum figure of merit(FOM=V_(BR)^(2)/R_(on,sp)) is improved by 79.0%.Furthermore,the improved structure achieves a light smaller low gate-to-drain charge(Q_(gd))and when compared with the conventional UMOSFET(conventional-UMOS),it displays great advantages for reducing the switching energy loss.These advantages are due to the fact that the p-type conductive pillars and n-type conductive pillars configured under the gate provide a substantial charge balance,which also enables the charge carriers to be extracted quickly.In the end,under the condition of the same total charge quantity,the simulation comparison of gate charge and OFF-state characteristics between Gaussdoped structure and uniform-doped structure shows that Gauss-doped structure increases the V_(BR)of the device without degradation of dynamic performance.展开更多
基金Project supported by the National Natural Science Foundation of China (Grant Nos. 60806025 and 61176069 )the Program for New Century Excellent Talents in University of Ministry of Education of China (Grant No. NCET-11-0062)
文摘An ultra-low specific on-resistance trench gate vertical double-diffused metal-oxide semiconductor with a high-k dielectric-filled extended trench(HK TG VDMOS) is proposed in this paper.The HK TG VDMOS features a high-k(HK) trench below the trench gate.Firstly,the extended HK trench not only causes an assistant depletion of the n-drift region,but also optimizes the electric field,which therefore reduces Ron,sp and increases the breakdown voltage(BV).Secondly,the extended HK trench weakens the sensitivity of BV to the n-drift doping concentration.Thirdly,compared with the superjunction(SJ) vertical double-diffused metal-oxide semiconductor(VDMOS),the new device is simplified in fabrication by etching and filling the extended trench.The HK TG VDMOS with BV = 172 V and Ron,sp = 0.85 mΩ·cm2 is obtained by simulation;its Ron,sp is reduced by 67% and 40% and its BV is increased by about 15% and 5%,in comparison with those of the conventional trench gate VDMOS(TG VDMOS) and conventional superjunction trench gate VDMOS(SJ TG CDMOS).
基金Project supported by the National Natural Science Foundation of China(Grant Nos.61176069 and 61376079)the Program for New Century Excellent Talents at the University of Ministry of Education of China(Grant No.NCET-11-0062)
文摘An ultra-low specific on-resistance (Ron,sp) oxide trench-type silicon-on-insulator (SOI) lateral double-diffusion metal-oxide semiconductor (LDMOS) with an enhanced breakdown voltage (BV) is proposed and investigated by simulation. There are two key features in the proposed device: one is a U-shaped gate around the oxide trench, which extends from source to drain (UG LDMOS); the other is an N pillar and P pillar located in the trench sidewall. In the on-state, electrons accumulate along the U-shaped gate, providing a continuous low resistance current path from source to drain. The Ron,sp is thus greatly reduced and almost independent of the drift region doping concentration. In the off-state, the N and P pillars not only enhance the electric field (E-field) strength of the trench oxide, but also improve the E-field distribution in the drift region, leading to a significant improvement in the BV. The BV of 662 V and Ron,sp of 12.4 mΩ.cm2 are achieved for the proposed UG LDMOS. The BV is increased by 88.6% and the Ron,sp is reduced by 96.4%, compared with those of the conventional trench LDMOS (CT LDMOS), realizing the state-of-the-art trade-off between BV and Ron,sp.
基金Project supported by the National Natural Science Foundation of China (Grant No. 61176069)the National Key Laboratory of Analog Integrated Circuit,China (Grant No. 9140C090304110C0905)the Innovation Foundation of the State Key Laboratory of Electronic Thin Films and Integrated Devices,China (Grant No. CXJJ201004)
文摘A new high voltage trench lateral double-diffused metal–oxide semiconductor (LDMOS) with ultra-low specific onresistance (R on,sp ) is proposed. The structure features a dual gate (DG LDMOS): a planar gate and a trench gate inset in the oxide trench. Firstly, the dual gate can provide a dual conduction channel and reduce R on,sp dramatically. Secondly, the oxide trench in the drift region modulates the electric field distribution and reduces the cell pitch but still can maintain comparable breakdown voltage (BV). Simulation results show that the cell pitch of the DG LDMOS can be reduced by 50% in comparison with that of conventional LDMOS at the equivalent BV; furthermore, R on,sp of the DG LDMOS can be reduced by 67% due to the smaller cell pitch and the dual gate.
基金Project supported by the National Natural Science Foundation of China (Grant Nos. 61176069 and 609 76060)the National Key Laboratory of Analogue Integrated Circuit (Grant No. 9140C090304110C0905)
文摘A low on-resistance (Ron,sp) integrable silicon-on-insulator (SOI) n-channel lateral double-diffused metal-oxide-semiconductor (LDMOS) is proposed and its mechanism is investigated by simulation. The LDMOS has two features: the integration of a planar gate and an extended trench gate (double gates (DGs)); and a buried P-layer in the N-drift region, which forms a triple reduced surface field (RESURF) (TR) structure. The triple RESURF not only modulates the electric field distribution, but also increases N-drift doping, resulting in a reduced specific on-resistance (Ron,sp) and an improved breakdown voltage (BV) in the off-state. The DGs form dual conduction channels and, moreover, the extended trench gate widens the vertical conduction area, both of which further reduce the Ron,sp. The BV and Ron,sp are 328 V and 8.8 mΩ·cm^2, respectively, for a DG TR metal-oxide semiconductor field-effect transistor (MOSFET) by simulation. Compared with a conventional SOI LDMOS, a DG TR MOSFET with the same dimensional device parameters as those of the DG TR MOSFET reduces Ron,sp by 59% and increases BV by 6%. The extended trench gate synchronously acts as an isolation trench between the high-voltage device and low-voltage circuitry in a high-voltage integrated circuit, thereby saving the chip area and simplifying the fabrication processes.
基金Project supported by the National Natural Science Foundation of China(Nos.60806025,60976060)the National Key Laboratory of Analogy Integrated Circuit(No.9140C090304110C0905)the State Key Laboratory of Electronic Thin Films and Integrated Devices, China(No.CXJJ201 004)
文摘An ultra-low specific on-resistance(R_(on,sp)) silicon-on-insulator(SOI) double-gate trench-type MOSFET (DG trench MOSFET) is proposed.The MOSFET features double gates and an oxide trench:the oxide trench is in the drift region,one trench gate is inset in the oxide trench and one trench gate is extended into the buried oxide.Firstly,the double gates reduce R_(on,sp) by forming dual conduction channels.Secondly,the oxide trench not only folds the drift region,but also modulates the electric field,thereby reducing device pitch and increasing the breakdown voltage(BV).A BV of 93 V and a R_(on,sp) of 51.8 mΩ·mm^2 is obtained for a DG trench MOSFET with a 3μm half-cell pitch.Compared with a single-gate SOI MOSFET(SG MOSFET) and a single-gate SOI MOSFET with an oxide trench(SG trench MOSFET),the R_(on,sp) of the DG trench MOSFET decreases by 63.3%and 33.8% at the same BV,respectively.
基金supported by the National Natural Science Foundation of China(Grant No.62104222)the Natural Science Foundation of Fujian Province of China for Distinguished Young Scholars(Grant No.2020J06002)+3 种基金the Science and Technology Project of Fujian Province of China(Grant No.2020I0001)the Science and Technology Key Projects of Xiamen(Grant No.3502ZCQ20191001)Shenzhen Science and Technology Program(Grant No.JSGG20201102-155800003)Jiangxi Provincial Natural Science Foundation(Grant No.20212ACB212005).
文摘A 4H-SiC trench gate metal-oxide-semiconductor field-effect transistor(UMOSFET)with semi-super-junction shiel-ded structure(SS-UMOS)is proposed and compared with conventional trench MOSFET(CT-UMOS)in this work.The advantage of the proposed structure is given by comprehensive study of the mechanism of the local semi-super-junction structure at the bottom of the trench MOSFET.In particular,the influence of the bias condition of the p-pillar at the bottom of the trench on the static and dynamic performances of the device is compared and revealed.The on-resistance of SS-UMOS with grounded(G)and ungrounded(NG)p-pillar is reduced by 52%(G)and 71%(NG)compared to CT-UMOS,respectively.Additionally,gate ox-ide in the GSS-UMOS is fully protected by the p-shield layer as well as semi-super-junction structure under the trench and p-base regions.Thus,a reduced electric-field of 2 MV/cm can be achieved at the corner of the p-shield layer.However,the quasi-intrinsic protective layer cannot be formed in NGSS-UMOS due to the charge storage effect in the floating p-pillar,resulting in a large electric field of 2.7 MV/cm at the gate oxide layer.Moreover,the total switching loss of GSS-UMOS is 1.95 mJ/cm2 and is reduced by 18%compared with CT-UMOS.On the contrary,the NGSS-UMOS has the slowest overall switching speed due to the weakened shielding effect of the p-pillar and the largest gate-to-drain capacitance among the three.The proposed GSS-UMOS plays an important role in high-voltage and high-frequency applications,and will provide a valuable idea for device design and circuit applications.
基金the National Natural Science Foundation of China(Grant Nos.61774052 and 61904045)the Youth Foundation of the Education Department of Jiangxi Province,China(Grant No.GJJ191154)the Youth Foundation of Ping Xiang University,China(Grant No.2018D0230).
文摘This article investigates an improved 4H-SiC trench gate metal–oxide–semiconductor field-effect transistor(MOSFET)(UMOSFET)fitted with a super-junction(SJ)shielded region.The modified structure is composed of two n-type conductive pillars,three p-type conductive pillars,an oxide trench under the gate,and a light n-type current spreading layer(NCSL)under the p-body.The n-type conductive pillars and the light n-type current spreading layer provide two paths to and promote the diffusion of a transverse current in the epitaxial layer,thus improving the specific on-resistance(R_(on,sp)).There are three p-type pillars in the modified structure,with the p-type pillars on both sides playing the same role.The p-type conductive pillars relieve the electric field(E-field)in the corner of the trench bottom.Two-dimensional simulation(silvaco TCAD)indicates that Ron,sp of the modified structure,and breakdown voltage(V_(BR))are improved by 22.2%and 21.1%respectively,while the maximum figure of merit(FOM=V_(BR)^(2)/R_(on,sp)) is improved by 79.0%.Furthermore,the improved structure achieves a light smaller low gate-to-drain charge(Q_(gd))and when compared with the conventional UMOSFET(conventional-UMOS),it displays great advantages for reducing the switching energy loss.These advantages are due to the fact that the p-type conductive pillars and n-type conductive pillars configured under the gate provide a substantial charge balance,which also enables the charge carriers to be extracted quickly.In the end,under the condition of the same total charge quantity,the simulation comparison of gate charge and OFF-state characteristics between Gaussdoped structure and uniform-doped structure shows that Gauss-doped structure increases the V_(BR)of the device without degradation of dynamic performance.