Based on geometric moire method, moire interferometry and microscopic moire interferometry, a high spatial resolution and high sensitivity geometric microscopic moire method is presented. Geometric micron-moire patter...Based on geometric moire method, moire interferometry and microscopic moire interferometry, a high spatial resolution and high sensitivity geometric microscopic moire method is presented. Geometric micron-moire patterns are produced by the superposition of two high frequency gratings through a microscope system. Compared with other grating-based photo-mechanics methods, microscopic moire method could provide whole-field moire patterns of both high spatial resolution and high sensitivity. The frequency of specimen and reference gratings used in this method can be from 1 line/mm to 10000 lines/mm. Additionally, a 4F optical filter system is used to enhance the contrast of microscopic moire patterns effectively.展开更多
基金The project supported by the National Natural Science Foundation of China
文摘Based on geometric moire method, moire interferometry and microscopic moire interferometry, a high spatial resolution and high sensitivity geometric microscopic moire method is presented. Geometric micron-moire patterns are produced by the superposition of two high frequency gratings through a microscope system. Compared with other grating-based photo-mechanics methods, microscopic moire method could provide whole-field moire patterns of both high spatial resolution and high sensitivity. The frequency of specimen and reference gratings used in this method can be from 1 line/mm to 10000 lines/mm. Additionally, a 4F optical filter system is used to enhance the contrast of microscopic moire patterns effectively.
