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Measurement of wireless pressure sensors fabricated in high temperature co-fired ceramic MEMS technology 被引量:13
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作者 Ji-jun XIONG Shi-jun ZHENG +4 位作者 Ying-ping HONG Jun LI Ying-lin WANG Wei WANG Qiu-lin TAN 《Journal of Zhejiang University-Science C(Computers and Electronics)》 SCIE EI 2013年第4期258-263,共6页
High temperature co-fired ceramics(HTCCs) have wide applications with stable mechanical properties,but they have not yet been used to fabricate sensors.By introducing the wireless telemetric sensor system and ceramic ... High temperature co-fired ceramics(HTCCs) have wide applications with stable mechanical properties,but they have not yet been used to fabricate sensors.By introducing the wireless telemetric sensor system and ceramic structure embedding a pressure-deformable cavity,the designed sensors made from HTCC materials(zirconia and 96% alumina) are fabricated,and their capacities for the pressure measurement are tested using a wireless interrogation method.Using the fabricated sensor,a study is conducted to measure the atmospheric pressure in a sealed vessel.The experimental sensitivity of the device is 2 Hz/Pa of zirconia and 1.08 Hz/Pa of alumina below 0.5 MPa with a readout distance of 2.5 cm.The described sensor technology can be applied for monitoring of atmospheric pressure to evaluate important component parameters in harsh environments. 展开更多
关键词 high temperature co-fired ceramic (HTCC) WIRELESS Micro-electro-mechanical systems (MEMS)
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表贴式MMIC高密度封装外壳微波特性设计 被引量:9
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作者 徐利 曹坤 +1 位作者 李思其 王子良 《固体电子学研究与进展》 CAS CSCD 北大核心 2014年第2期152-156,196,共6页
基于高温共烧陶瓷(HTCC)工艺,研制了一款32根引脚方形扁平无引线封装(CQFN)型微波外壳,外形尺寸仅为5mm×5mm×1.4mm。该外壳采用侧面挂孔的方式实现微波信号从基板底部到外壳内部带状线和键合区微带线的传输,底部增加了密集阵... 基于高温共烧陶瓷(HTCC)工艺,研制了一款32根引脚方形扁平无引线封装(CQFN)型微波外壳,外形尺寸仅为5mm×5mm×1.4mm。该外壳采用侧面挂孔的方式实现微波信号从基板底部到外壳内部带状线和键合区微带线的传输,底部增加了密集阵列接地过孔以消除高密度引脚间的耦合。对制作的外壳进行了微波性能测试,在C波段内的插入损耗小于0.5dB,驻波比小于1.3,隔离度大于30dB。该小型化表贴陶瓷外壳适用于C波段的微波单片集成电路(MMIC)的高品质气密封装,且便于批量化生产。 展开更多
关键词 高温共烧陶瓷 方形扁平无引线封装 微波外壳 高密度封装 微波单片集成电路
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60 GHz SIW Steerable Antenna Array in LTCC
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作者 Bahram Sanadgol Sybille Holzwarth +2 位作者 Peter Uhlig Alberto Milano Rafi Popovich 《ZTE Communications》 2012年第4期29-32,共4页
In this paper, we present a 60 GHz substrate-integrated waveguide fed-steerable low-temperature cofired ceramics array. The antenna is suitable for transmitting and receiving on the 60 GHz wireless personal area netwo... In this paper, we present a 60 GHz substrate-integrated waveguide fed-steerable low-temperature cofired ceramics array. The antenna is suitable for transmitting and receiving on the 60 GHz wireless personal area network frequency band. The wireless system can be used for HDTV, high-data-rate networking up to 4.5 GBit/s, security and surveillance, and similar applications. 展开更多
关键词 substrate integrated waveguide(SIW) phase shifted injected push-push oscillator(PSIPPO) low temperature co-fired ceramic(LTCC) ~monolithic microwave integrated chip(mmic wireless personal area network(WPAN)
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