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A study of pulsed high voltage driven hollow-cathode electron beam sources through synchronous optical trigger
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作者 霍卫杰 贺伟国 +2 位作者 韩罗峰 朱康武 王锋 《Plasma Science and Technology》 SCIE EI CAS CSCD 2024年第5期82-90,共9页
In this study,a pulsed,high voltage driven hollow-cathode electron beam sources through an optical trigger is designed with characteristics of simple structure,low cost,and easy triggering.To validate the new design,t... In this study,a pulsed,high voltage driven hollow-cathode electron beam sources through an optical trigger is designed with characteristics of simple structure,low cost,and easy triggering.To validate the new design,the characteristics of hollow-cathode discharge and electron beam characterization under pulsed high voltage drive are studied experimentally and discussed by discharge characteristics and analyses of waveform details,respectively.The validation experiments indicate that the pulsed high voltage supply significantly improves the frequency and stability of the discharge,which provides a new solution for the realization of a high-frequency,high-energy electron beam source.The peak current amplitude in the high-energy electron beam increases from 6.2 A to 79.6 A,which indicates the pulsed power mode significantly improves the electron beam performance.Besides,increasing the capacitance significantly affects the highcurrent,lower-energy electron beam more than the high-energy electron beam. 展开更多
关键词 hollow-cathode nanosecond pulsed electron beam sources optical trigger pulsed high voltage supply beam current distribution
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Ultraviolet Source Assisted Enhancement of Attosecond Pulse 被引量:3
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作者 冯立强 刘航 《Chinese Journal of Chemical Physics》 SCIE CAS CSCD 2015年第1期21-26,I0001,共7页
A promising method to improve the attosecond pulse intensity has been theoretically pre- sented by properly adding an ultraviolet pulse into the orthogonal two-color field. The results show that by properly adding a 1... A promising method to improve the attosecond pulse intensity has been theoretically pre- sented by properly adding an ultraviolet pulse into the orthogonal two-color field. The results show that by properly adding a 125 nm ultraviolet pulse to the orthogonal two-color field, not only the harmonic yield is enhanced by 2 orders of magnitude compared with the original orthogonal two-color field case, but also the single short quantum path, which is selected to contribute to the harmonic spectrum, results in an ultrabroad 152 eV bandwidth. Moreover, by optimizing the laser parameters, we find that the harmonic enhancement is not very sen- sitive to the pulse duration and the polarized angle of the assisted ultraviolet pulse, which is much better for experimental realization. As a result, an isolated pulse with duration of 38 as can be obtained, which is 2 orders of magnitude improvement in comparison with the original two-color orthogonal field case. 展开更多
关键词 High-order harmonic generation Isolated pulse Two-color orthogonal field Ultraviolet source
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Dielectric barrier discharge plasma-assisted catalytic ammonia synthesis:synergistic effect of Ni-MOF-74 catalyst and nanosecond pulsed plasma
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作者 徐晓芳 孙萌 +4 位作者 宋勤龙 吴璇 陈冲冲 陈强 张海宝 《Plasma Science and Technology》 SCIE EI CAS CSCD 2024年第6期40-49,共10页
Ammonia is one of the most important chemical raw materials in both manufacture and life of human.Traditionally Haber-Bosch method for ammonia synthesis involves high temperature and high pressure conditions,leading t... Ammonia is one of the most important chemical raw materials in both manufacture and life of human.Traditionally Haber-Bosch method for ammonia synthesis involves high temperature and high pressure conditions,leading to significant energy consumption and environmental pollution.Non-thermal plasma(NTP) is a promising alternative approach to ammonia synthesis at low temperature and atmospheric pressure.In this study,the synergistic effect of nanosecond pulsed dielectric barrier discharge(np-DBD) and Ni-MOF-74 catalyst was investigated in ammonia synthesis by utilizing nitrogen and hydrogen as feedstock.The results demonstrated that the plasma catalytic-synthesis process parameters play a crucial role in the synthesis process of ammonia.The highest ammonia synthesis rate of 5145.16 μmol·g^(-1)·h^(-1)with an energy efficiency of 1.27 g·kWh^(-1)was observed in the presence of the Ni-MOF-74 catalyst,which was3.7 times higher than that without Ni-MOF-74 catalyst.The synergistic effect of Ni-MOF-74catalyst and nanosecond pulsed plasma was explored by in-situ plasma discharge diagnostics. 展开更多
关键词 AMMONIA SYNTHESIS low-temperature plasma nanosecond pulsed power source Ni-MOF-74
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Effect of source parameters on forward-directivity velocity pulse for vertical strike slip fault in half space 被引量:3
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作者 刘启方 袁一凡 金星 《Earthquake Engineering and Engineering Vibration》 SCIE EI CSCD 2006年第1期1-9,共9页
It has been found that the large velocity pulse is one of the most important characteristics of near-fault strong ground motions. Some statistical relationships between pulse period and the moment magnitude for near-f... It has been found that the large velocity pulse is one of the most important characteristics of near-fault strong ground motions. Some statistical relationships between pulse period and the moment magnitude for near-fault strong ground motions have been established by Somerville (1998); Alavi and Krawinkler (2000); and Mavroeidis and Papageorgiou (2003), where no variety of rupture velocity, fault depth, and fault distance, etc. were considered. Since near-fault ground motions are significantly influenced by the rupture process and source parameters, the effects of some source parameters on the amplitude and the period ofa forward-directivity velocity pulse in a half space are analyzed by the finite difference method combined with the kinematic source model in this paper. The study shows that the rupture velocity, fault depth, position of the initial rupture point and distribution of asperities are the most important parameters to the velocity pulse. Generally, the pulse period decreases and the pulse amplitude increases as the rupture velocity increases for shallow crustal earthquakes. In a definite region besides the fault trace, the pulse period increases as the fault depth increases. For a uniform strike slip fault, rupture initiating from one end of a fault and propagating to the other always generates a higher pulse amplitude and longer pulse period than in other cases. 展开更多
关键词 forward-directivity velocity pulse AMPLITUDE pulse period source parameters rupture velocity fault depth ASPERITY
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Factors Influencing the Electron Yield of Needle-Ring Pulsed Corona Discharge Electron Source for Negative Ion Mobility Spectrometer 被引量:4
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作者 刘欣 李胜利 李铭书 《Plasma Science and Technology》 SCIE EI CAS CSCD 2013年第12期1215-1220,共6页
A simple negative ion mobility spectrometer (IMS) is designed and used to investi- gate the factors that influence the number and efficiency of electrons generated by the needle-ring pulsed corona discharge electron... A simple negative ion mobility spectrometer (IMS) is designed and used to investi- gate the factors that influence the number and efficiency of electrons generated by the needle-ring pulsed corona discharge electron source. Simulation with Ansoft Maxwell 12 is carried out to analyze the electric field distribution within the IMS, and to offer the basis and foundation for analyzing the measurement results. The measurement results of the quantities of electrons show that when the drift electric field strength and the ring inner diameter rise, both the number of ef- fective electrons and the effective electron rate are increased. When the discharge voltage becomes stronger, the number of effective electrons goes up while the effective electron rate goes down. In light of the simulation results, mechanisms underlying the effects of drift electric field strength, ring inner diameter, and discharge voltage on the effective electron number and effective electron rate are discussed. These will make great sense for designing negative ion mode IMS using the needle-ring pulsed corona discharge as the electron source. 展开更多
关键词 ion mobility spectrometer electron source pulsed corona discharge effectiveelectrons simulation
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Development of high frequency pulse power source using two powersfor TIG welding 被引量:1
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作者 张广军 耿正 +1 位作者 吴林 梁群 《China Welding》 EI CAS 1999年第2期38-42,共5页
A high frequency pulse power source for TIG welding is developed. The structure of two powers is adopted. The by pass circuit effectively eliminates the effect of the cable equivalent inductance. The maximum frequenc... A high frequency pulse power source for TIG welding is developed. The structure of two powers is adopted. The by pass circuit effectively eliminates the effect of the cable equivalent inductance. The maximum frequency of the output pulse current reaches to 16 kHz . The base current and the peak current can be regulated separately. 展开更多
关键词 high frequency pulse TIG welding arc welding power source
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Linear Track Estimation Using Double Pulse Sources for Near-Field Underwater Moving Target 被引量:2
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作者 Zhifei ChenI Hong Hou +2 位作者 Jianhua Yang Jincai Sun Qian Wang 《Journal of Marine Science and Application》 2013年第2期240-244,共5页
The double pulse sources (DPS) method is presented for linear track estimation in this work. In the field of noise identification of underwater moving target, the Doppler will distort the frequency and amplitude of ... The double pulse sources (DPS) method is presented for linear track estimation in this work. In the field of noise identification of underwater moving target, the Doppler will distort the frequency and amplitude of the radiated noise. To eliminate this, the track estimation is necessary. In the DPS method, we first estimate bearings of two sinusoidal pulse sources installed in the moving target through baseline positioning method. Meanwhile, the emitted and recorded time of each pulse are also acquired. Then the linear track parameters will be achieved based on the geometry pattern with the help of double sources spacing. The simulated results confirm that the DPS improves the performance of the previous double source spacing method. The simulated experiments were carried out using a moving battery car to further evaluate its performance. When the target is 40-60m away, the experiment results show that biases of track azimuth and abeam distance of DPS are under 0.6° and 3.4m, respectively. And the average deviation of estimated velocity is around 0.25m/s. 展开更多
关键词 linear track estimation double pulse sources (DPS) baseline positioning method time-of-arrival difference
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Characteristics of Resistance Triggering of a Pulsed Vacuum Arc Ion Source 被引量:1
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作者 蓝朝晖 龙继东 +4 位作者 郑乐 董攀 杨振 王韬 李杰 《Chinese Physics Letters》 SCIE CAS CSCD 2015年第9期84-87,共4页
Triggering scheme is a significant factor that may influence the process of vacuum arc initiation. In this work, the characteristics of resistance triggering of a pulsed vacuum arc ion source are investigated and comp... Triggering scheme is a significant factor that may influence the process of vacuum arc initiation. In this work, the characteristics of resistance triggering of a pulsed vacuum arc ion source are investigated and compared with the independent pulse generator triggering. The results show that although the resistance triggering method is capable of triggering a vacuum arc ion source by properly choosing the resistance and electric parameters, it inevitably increases the rise time of the arc current. A high speed multiframe camera is used to reveal the transition process o~ arc initiation during one shot. From the images it is conjectured that the lower voltage between the cathode and the anode may be the reason that leads to the lower transition speed of discharge at the moment of arc initiation. 展开更多
关键词 In Characteristics of Resistance Triggering of a pulsed Vacuum Arc Ion source ARC
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Estimation of Ion Beam Trajectories for a Slot Aperture Accelerator of Long-Pulse Ion Source in Neutral Beam Injector 被引量:1
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作者 Doo-Hee Chang 《Open Journal of Applied Sciences》 2013年第2期163-168,共6页
A neutral beam injection (NBI) system has been developed and is being tested for an Experimental Advanced Superconducting Tokamak (EAST) device. The NBI system needs to be employed for an auxiliary heating and current... A neutral beam injection (NBI) system has been developed and is being tested for an Experimental Advanced Superconducting Tokamak (EAST) device. The NBI system needs to be employed for an auxiliary heating and current drive of EAST plasmas. The first long pulse ion source (LPIS-1) has been installed in the neutral beam test bed (NBTB) system, and the performance is being tested in the NBTB. The LPIS-1 consists of a magnetic bucket plasma generator with multipole cusp-fields and a set of tetrode accelerators with slit-type apertures (a transparency of 60%). The ion beam trajectories of the accelerator column are estimated for the LPIS-1, including an original structure, with the change of slit aperture distance, plasma grid shape, grid gap distance, and voltage ratio between a plasma grid and a gradient grid using the IGUN code. This kind of calculation for the ion beam trajectory may be useful for the estimation of beam extraction characteristics and the direction of accelerator upgrade or modification, prior to the experiments of ion beam extraction. 展开更多
关键词 Long pulse ION source SLOT APERTURE ACCELERATOR EAST Neutral BEAM Injection ION BEAM Trajectory IGUN Code
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Study on welding power source used in intelligent control system for weld pool shape in pulsed GTAW
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作者 张广军 陈善本 +1 位作者 吴林 耿正 《China Welding》 EI CAS 2001年第2期33-37,共5页
This paper analyses the performance request of arc welding power source used in intelligent control of weld pool shape in pulsed GTAW, and develops a sample power source. The main circuit of the power source takes the... This paper analyses the performance request of arc welding power source used in intelligent control of weld pool shape in pulsed GTAW, and develops a sample power source. The main circuit of the power source takes the structure of single ended inverter with two switches, and takes IGBTs as power switches. The working frequency of the inverter is set at 20 kHz. The control circuit takes PWM circuit as center, and uses single chip computer to complete the manage functions such as the control of working sequence, setting and changing of the welding parameters, sensing of the welding states and communication with outside computer etc. The dynamic reacting time of the whole power is 1 ms, the range of the output current is 5~250 A, the precision of the output current reaches to 1 A. The power strikes arc by contacting workpiece under 5 A, and have convenient interface with system computer. All above shows this power source is one with high performance. 展开更多
关键词 arc welding power source pulsed GTAW weld pool shape intelligent control
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Longitudinal dispersion with constant source concentration along unsteady groundwater flow in finite aquifer: analytical solution with pulse type boundary condition
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作者 Mritunjay Kumar Singh Nav Kumar Mahato Premlata Singh 《Natural Science》 2011年第3期186-192,共7页
Analytical solution is obtained to predict the contaminant concentration with presence and absence of pollution source in finite aquifer subject to constant point source concentration. A longitudinal dispersion along ... Analytical solution is obtained to predict the contaminant concentration with presence and absence of pollution source in finite aquifer subject to constant point source concentration. A longitudinal dispersion along unsteady groundwater flow in homogeneous and finite aquifer is considered which is initially solute free that is, aquifer is supposed to be clean. The constant source concentration in intermediate portion of the aquifer system is considered with pulse type boundary condition and at the other end of the aquifer, concentration gradient is supposed to be zero. The Laplace Transformation Technique (LTT) is used to obtain the analytical solution of the formulated solute transport model with suitable initial and boundary conditions. The time varying velocities are considered. Analytical solutions are perhaps most useful for benchmarking the numerical codes and models. It may be used as the preliminary predictive tools for groundwater management. 展开更多
关键词 AQUIFER UNSTEADY Groundwater Flow Longitudinal Dispersion Uniform source CONCENTRATION pulse TYPE Boundary Condition
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Electromagnetic Compatibility Analysis of High-Power Pulse Drive Source
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作者 Wuxi Leng Junxu He 《Journal of Power and Energy Engineering》 2020年第7期32-44,共13页
Due to the widespread application in recent years, high-power pulse sources have received special attention from large companies and R & D institutions around the world. Compared with foreign mid-range and high-en... Due to the widespread application in recent years, high-power pulse sources have received special attention from large companies and R & D institutions around the world. Compared with foreign mid-range and high-end products, China’s development in this field is relatively lagging behind and lacks mature mid-range and high-end products. The reason is not only because of lack of theoretical support, but more importantly, in the pursuit of indicators and design, the electromagnetic compatibility of the equipment has not been studied thoroughly, resulting in a large degree of distortion in the output waveform, resulting in a reduction in actual value. This paper introduces the sources of high-power pulsed electromagnetic interference of the main driving source, conducts a reasonable high-power electromagnetic compatibility driving source dynamic analysis, and proposes measures to improve electromagnetic compatibility. 展开更多
关键词 pulse Drive source Electromagnetic Compatibility High Frequency pulse
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Source Range Estimation Based on Pulse Waveform Matching in a Slope Environment
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作者 吴祖勇 张仁和 +2 位作者 秦继兴 彭朝晖 孟洲 《Chinese Physics Letters》 SCIE CAS CSCD 2017年第7期122-125,共4页
An approach of source range estimation in an ocean environment with sloping bottom is presented. The approach is based on pulse waveform correlation matching between the received and simulated signals. An acoustic pro... An approach of source range estimation in an ocean environment with sloping bottom is presented. The approach is based on pulse waveform correlation matching between the received and simulated signals. An acoustic prop- agation experiment is carried out in a slope environment. The pulse signal is received by the vertical line array, and the depth structure can be obtained. For the experimental data, the depth structures of pulse waveforms are different, which depends on the source range. For a source with unknown range, the depth structure of pulse waveform can be first obtained from the experimental data. Next, the depth structures of pulse waveforms in dif- ferent ranges are numerically calculated. After the process of correlating the experimental and simulated signals, the range corresponding to the maximum value of the correlation coefficient is the estimated source range. For the explosive sources in the experiment with two depths, the mean relative errors of range estimation are both less than 7%. 展开更多
关键词 source Range Estimation Based on pulse Waveform Matching in a Slope Environment
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Compact and robust dual-color linearly polarized illumination source for three-photon fluorescence imaging
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作者 Jiazheng Song Yanyan Zhang Yuanshan Liu 《Journal of Innovative Optical Health Sciences》 SCIE EI CSCD 2023年第5期69-76,共8页
The miniaturized femtosecond laser in near infrared-Ⅱregion is the core equipment of threephoton microscopy.In this paper,we design a compact and robust illumination source that emits dual-color linearly polarized li... The miniaturized femtosecond laser in near infrared-Ⅱregion is the core equipment of threephoton microscopy.In this paper,we design a compact and robust illumination source that emits dual-color linearly polarized light for three-photon microscopy.Based on an all-polarizationmaintaining passive mode-locked fiber laser,we shift the center wavelength of the pulses to the 1.7m band utilizing cascade Raman effect,thereby generate dual-wavelength pulses.To enhance clarity,the two wavelengths are separated through the graded-index multimode fiber.Then we obtain the dual-pulse sequences with 1639.4 nm and 1683.7 nm wavelengths,920 fs pulse duration,and 23.75 MHz pulse repetition rate.The average power of the signal is 53.64mW,corresponding to a single pulse energy of 2.25 nJ.This illumination source can be further amplified and compressed for three-photon fluorescence imaging,especially dual-color three-photon fluorescence imaging,making it an ideal option for biomedical applications. 展开更多
关键词 Three-photon fluorescence imaging illumination source dual-wavelength femtosecond pulse cascaded Raman effect graded-index multimodefiber.
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Azimuthal distributions of final-state particles and fragments and transverse structure of emission source in high-energy nucleus-nucleus collisions 被引量:2
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作者 刘福虎 马引群 段麦英 《Chinese Physics B》 SCIE EI CAS CSCD 2005年第12期2458-2466,共9页
The azimuthal distributions of final-state particles and fragments produced in high-energy nucleus-nucleus collisions are described by a modified multisource ideal gas model which contains the expansions and movements... The azimuthal distributions of final-state particles and fragments produced in high-energy nucleus-nucleus collisions are described by a modified multisource ideal gas model which contains the expansions and movements of the emission sources. The transverse structures of the sources are given in the transverse plane by momentum components Px and Py, and described by parameters in the model. The results of the azimuthal distributions, calculated by the Monte Carlo method, are in good agreement with the experimental data in nucleus-nucleus collisions at high energies. 展开更多
关键词 high-energy nucleus-nucleus collisions final-state particles and fragments azimuthal distributions transverse structure of emission source
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Artificial neural network algorithm for pulse shape discrimination in 2πα and 2πβ particle surface emission rate measurements
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作者 Yuan-Qiao Li Bao-Ji Zhu +4 位作者 Yang Lv Heng Zhu Min Lin Ke-Sheng Chen Li-Jun Xu 《Nuclear Science and Techniques》 SCIE EI CAS CSCD 2023年第10期91-102,共12页
To enhance the accuracy of 2πα and 2πβ particle surface emission rate measurements and address the identification issues of nuclides in conventional methods, this study introduces two artificial neural network(ANN... To enhance the accuracy of 2πα and 2πβ particle surface emission rate measurements and address the identification issues of nuclides in conventional methods, this study introduces two artificial neural network(ANN) algorithms: back-propagation(BP) and genetic algorithm-based back-propagation(GA-BP). These algorithms classify pulse signals from distinct α and β particles. Their discrimination efficacy is assessed by simulating standard pulse signals and those produced by contaminated sources, mixing α and β particles within the detector. This study initially showcases energy spectrum measurement outcomes, subsequently tests the ANNs on the measurement and validation datasets, and contrasts the pulse shape discrimination efficacy of both algorithms. Experimental findings reveal that the proportional counter's energy resolution is not ideal, thus rendering energy analysis insufficient for distinguishing between 2πα and 2πβ particles. The BP neural network realizes approximately 99% accuracy for 2πα particles and approximately 95% for 2πβ particles, thus surpassing the GA-BP's performance. Additionally, the results suggest enhancing β particle discrimination accuracy by increasing the digital acquisition card's threshold lower limit. This study offers an advanced solution for the 2πα and 2πβ surface emission rate measurement method, presenting superior adaptability and scalability over conventional techniques. 展开更多
关键词 pulse shape discrimination Artificial neural networks Alpha and beta sources Multi-wire proportional counter Surface emission rate
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High-Stability High-Energy Picosecond Optical Parametric Chirped Pulse Amplifier as a Preamplifier in Nd:Glass Petawatt System for Contrast Enhancement 被引量:1
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作者 黄庭瑞 潘雪 +3 位作者 张鹏 王江峰 欧阳小平 李学春 《Chinese Physics Letters》 SCIE CAS CSCD 2017年第6期53-57,共5页
We demonstrate a novel picosecond optical parametric preamplification to generate high-stability, high-energy and high-contrast seed pulses. The 5ps seed pulse is amplified from 60pJ to 300μJ with an 8.6ps/ 3mJ pump ... We demonstrate a novel picosecond optical parametric preamplification to generate high-stability, high-energy and high-contrast seed pulses. The 5ps seed pulse is amplified from 60pJ to 300μJ with an 8.6ps/ 3mJ pump laser in a signal stage of short pulse non-collinear optical parametric chirped pulse amplification. The total gain is more than 106 and the rms energy stability is under 1.35%. The contrast ratio is higher than 10s within a scale of 20ps before the main pulse. Consequently, the improvement factor of the signal contrast is approximately equal to the gain 106 outside the pump window. 展开更多
关键词 High-Stability high-energy Picosecond Optical Parametric Chirped pulse Amplifier as a Preamplifier in Nd:Glass Petawatt System for Contrast Enhancement length Nd
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DEGRADATION DUE TO ENERGY PULSE IN HIGH-ENERGY ZnO VARISTORS
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作者 Zhang Shugao Huang Baiyun Fang Xunhua (Powder Metallurgy Research Institute, Central South University of Technology, Changsha 410083, China)Ji Youzhang (Institute of Plasma Physics, Chinese Academy of Sciences, Hefei 230031, China) 《Journal of Central South University》 SCIE EI CAS 1997年第2期113-116,共4页
The degradation phenomena due to the energy pulse in the high-energy ZnO varistors used for deexitation and overvoltage protection of hydroelectric generator are investigated. The energy pulse, obtained by releasing t... The degradation phenomena due to the energy pulse in the high-energy ZnO varistors used for deexitation and overvoltage protection of hydroelectric generator are investigated. The energy pulse, obtained by releasing the energy stored in an inductor, can be equivalent to the combination of the DC field components and the energy component. The variations of the characterized voltages, nonlinear coefficients and pre-breakdown V-A characteristics, increase with the number of the applied energy pulse. The asymmetrical variations of the electric properties of the high-energy ZnO varistors after the energy pulse arise from the deformation of the double Schottky barriers due to the ion migration occuring in the depletion layer and in the grain boundary. 展开更多
关键词 high-energy ZnO VARISTORS ENERGY pulse DEGRADATION V-A characteristics GRAIN boundary barrier ion migration
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Generation of high-energy dual-wavelength domain wall pulse with low repetition rate in an HNLF-based fiber ring laser
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作者 罗智超 林振彬 +5 位作者 李金玉 朱鹏飞 宁秋奕 邢晓波 罗爱平 徐文成 《Chinese Physics B》 SCIE EI CAS CSCD 2014年第6期217-220,共4页
The generation of high-energy dual-wavelength domain wall pulse with a low repetition rate is demonstrated in a highly nonlinear fiber (HNLF)-based fiber ring laser. By introducing the intracavity birefringence-indu... The generation of high-energy dual-wavelength domain wall pulse with a low repetition rate is demonstrated in a highly nonlinear fiber (HNLF)-based fiber ring laser. By introducing the intracavity birefringence-induced spectral filtering effect, the dual-wavelength lasing operation can be achieved. In order to enhance the cross coupling effect between the two lasing beams for domain wall pulse formation, a 215-m HNLF is incorporated into the laser cavity. Experimentally, it is found that the dual-wavelength domain wall pulse with a repetition rate of 77.67 kHz could be efficiently obtained through simply rotating the polarization controller (PC). At a maximum pump power of 322 mW, the 655-nJ single pulse energy in cavity is obtained. The proposed configuration provides a simpler and more efficient way to generate high energy pulse with a low repetition rate. 展开更多
关键词 fiber lasers high-energy pulse domain wall low repetition rate
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Preparation of silicon carbide nitride films on Si substrate by pulsed high-energy density plasma
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作者 Xueming Li Size Yang Xingfang Wu 《Journal of University of Science and Technology Beijing》 CSCD 2006年第3期272-276,共5页
Thin films of silicon carbide nitride (SiCN) were prepared on (111) oriented silicon substrates by pulsed high-energy density plasma (PHEDP). The evolution of the chemical bonding states between silicon, nitroge... Thin films of silicon carbide nitride (SiCN) were prepared on (111) oriented silicon substrates by pulsed high-energy density plasma (PHEDP). The evolution of the chemical bonding states between silicon, nitrogen and carbon was investigated as a function of discharge voltage using X-ray photoelectron spectroscopy. With an increase in discharge voltage both the C 1s and N 1s spectra shift to lower binding energy due to the formation of C--Si and N--Si bonds. The Si--C--N bonds were observed in the deconvolved C ls and N ls spectra. The X-ray diffractometer (XRD) results show that there were no crystals in the films. The thickness of the films was approximately 1-2 μm with scanning electron microscopy (SEM). 展开更多
关键词 silicon carbide nitride pulsed high-energy density plasma chemical bonding state
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