Deposition of Diamond-Like Carbon on Inner Surface by Hollow Cathode Discharge

A cylindrical hollow cathode discharge （HCD） in CH4/Ar gas mixture at pressure of 20-30 Pa was used to deposit diamond-like carbon （DLC） films on the inner surface of a stainless steel tube. The characteristics of the HCD including the voltage-current curves, the plasma im- ages and the optical emission spectrum （OES） were measured in Ar and CHn/Ar mixtures. The properties of DLC films prepared under different conditions were analyzed by means of Raman spectroscopy and scanning electron microscopy （SEM）. The results show that the electron exci- tation temperature of HCD plasma is about 2400 K. DLC films can be deposited on the inner surface of tubes. The ratio of sp3/sp2 bonds decreases with the applied voltage and the deposition time. The optimizing CH4 content was found to be around CH4/Ar =1/5 for good quality of DLC films in the present system.

The Effect of Gas Flow Rate on Radio-Frequency Hollow Cathode Discharge Characteristics

It is known that gas flow rate is a key factor in controlling industrial plasma processing. In this paper, a 2D PIC/MCC model is developed for an rf hollow cathode discharge with an axial nitrogen gas flow. The effects of the gas flow rate on the plasma parameters are calculated and the results show that： with an increasing flow rate, the total ion（N＋2, N＋） density decreases, the mean sheath thickness becomes wider, the radial electric field in the sheath and the axial electric field show an increase, and the energies of both kinds of nitrogen ions increase;and, as the axial ion current density that is moving toward the ground electrode increases, the ion current density near the ground electrode increases. The simulation results will provide a useful reference for plasma jet technology involving rf hollow cathode discharges in N2.

Impact of exterior electron emission on the self-sustaining margin of hollow cathode discharge

Hollow cathode researches used to focus on the inner cavity or downstream plume,however,rarely on the gap between the throttling orifice plate and the keeper plate(T-K gap),which was found to impact the self-sustaining margin of hollow cathode discharge in this paper.Near the lower margin,the main power deposition and electron emission and ionization regions would migrate from inner cavity and downstream plume to the T-K gap,in which case,the source and destination of each m A current therein matter for the self-sustaining capability.Changing the metal surfaces in the T-K gap with emissive materials proved effective in lowering the lower margin by supplementing auxiliary thermionic emission,compensating electron loss on cold absorbing walls and suppressing discharge oscillations.By doing so,the lower margin of a 4 A hollow cathode was lowered from 1 to 0.1-0.2 A,enabling it to couple with low power Hall thruster without extra keeper current.

Determinations of plasma density and decay time in the hollow cathode discharge by microwave transmission

The microwave （MW） transmission method is employed to measure both the plasma density and the plasma decay time in the hollow cathode discharge （HCD） in argon at low pressure. The plasma density in DC-driven or pulsed HCD is on the order of 1012 cm-3, which can block the X-band MW effectively. In the case of pulsed HCD, the MW transmittance shows the same waveform as the pulsed current during the rising edge if the driving frequency is low, but with a longer delay during the falling edge. The MW transmittance reaches a constant low level when the driving frequency is high enough. The plasma decay time in the HCD system is measured to be about 100 μs around a pressure of 120 Pa. The ambipolar diffusion is considered to be the major mechanism in the decay process.

PIC/MCC Simulation of Radio Frequency Hollow Cathode Discharge in Nitrogen

A two-dimensional PIC/MCC model is developed to simulate the nitrogen radio frequency hollow cathode discharge（rf-HCD）.It is found that both the sheath oscillation heating and the secondary electron heating together play a role to maintain the rf-HCD under the simulated conditions.The mean energy of ions（N＋_2,N＋）in the negative glow region is greater than the thermal kinetic energy of the molecular gas（N2）,which is an important characteristic of rf-HCD.During the negative portion of the hollow electrode voltage cycle,electrons mainly follow pendulum movement and produce a large number of ionization collisions in the plasma region.During the positive voltage of the rf cycle,the axial electric field becomes stronger and its direction is pointing to the anode（substrate）,therefore the ions move toward the anode（substrate）via the axial electric field acceleration.Compared with dc-HCD,rf-HCD is more suitable for serving as a plasma jet nozzle at low pressure.

Experimental investigations of enhanced glow based on a pulsed hollow-cathode discharge

In this work, the pulsed hollow cathode discharges at low pressure argon with an axial magnetic field were studied. The results indicate that the pulsed discharge is operated in an enhanced glow(EG) mode. Under the same conditions, the discharge current of the pulsed discharge is two or three orders higher than that of the direct current discharge. The spatial and temporal evolution of the light emission shows that, the current fluctuation at the rising edge of the pulse plays an important role for the EG discharge of pulsed hollow cathode, which forms a high-density, highcurrent and long-distance plasma column outside the cavity.

High Pressure Micro-Slot Hollow Cathode Discharge

A direct current glow discharge source structure operating at high pressure based on the micro-slot hollow cathode is presented in this article. A 100 μm width slot cathode was fabricated of copper, and a stable DC glow discharge with an area of 0.5 mm^2 was produced in noble gases （He, Ne） and air over a wide pressure range （kPa - 10 kPa）. The current-voltage characteristics and the near UV radiation emission of the discharge were studied.

A N_2 Plasma Light Source Generated in Hollow Cathode Discharge and Its Application in Lithographic Plate Making

Computer to conventional plate （CTCP） technology is getting more and more attention in printing industries. In this paper we report a nitrogen plasma light source generated in hollow cathode discharge （HCD）, Which is used for pre-sensitivity （PS） plate exposure. The N2 molecule emits abundant spectrum ranging from 350 nm to 460 nm. With the voltage of 580 V, current of 1.8 A and pressure of 70 Pa in the discharge an optical power density of 0.46 mW/cm2 is obtained. The optical power density could be further increased with optimizing the lens system. The phototonus efficiency of this source is discussed in detail based upon the chemical principle and the FTIR analysis on the coating material.

Transition characteristics from radio-frequency discharge to arc in hollow cathode configuration

The technique of glow discharges in radio frequency configuration was applied to ignite hollow cathode vacuum arc discharge. The effect of discharge parameters on the building up of hollow cathode arc discharge was investigated. The emission spectrum during the vacuum arc ignition process was measured to disclose the discharge dynamics. There exists a threshold radio frequency power （300 W）, beyond which hollow cathode is in T mode discharge status while radio frequency discharge changes into the arc discharge. With the increase of the radio frequency power, the plasma temperature and electronic density increase, and the discharge mode transits more rapidly. The ignition time of hollow cathode vacuum arc discharge is less than 4 s with a radio frequency power of 700 W.

Effects of discharge parameters on the micro-hollow cathode sustained glow discharge

The effects of parameters such as pressure,first anode radius,and the cavity diameter on the micro-hollow cathode sustained glow discharge are investigated by using a two-dimensional self-consistent fluid model in pure argon.The results indicate that the three parameters influence the discharge in the regions inside and outside of the cavity.Under a fixed voltage on each electrode,a larger volume of high density plasma can be produced in the region between the first and the second anodes by selecting the appropriate pressure,the higher first anode,and the appropriate cavity diameter.As the pressure increases,the electron density inside the hollow cathode,the high density plasma volume between the first anode and second anodes,and the radial electric field in the cathode cavity initially increase and subsequently decrease.As the cavity diameter increases,the high-density plasma volume between the first and second anodes initially increases and subsequently decreases;whereas the electron density inside the hollow cathode decreases.As the first anode radius increases,the electron density increases both inside and outside of the cavity.Moreover,the increase of the electron density is more obvious in the microcathode sustained region than in the micro cavity region.The results reveal that the discharge inside the cavity interacts with that outside the cavity.The strong hollow cathode effect and the high-density plasma inside the cavity favor the formation of a sustained discharge between the first anode and the second anodes.Results also show that the radial boundary conditions exert a considerably weaker influence on the discharge except for a little change in the region close to the radial boundary.

Simulation of the spatio-temporal evolution of the electron energy distribution function in a pulsed hollow-cathode discharge

This article presents the 2D simulation results of a nanosecond pulsed hollow cathode discharge obtained through a combination of fluid and kinetic models.The spatio-temporal evolution of the electron energy distribution function(EEDF)of the plasma column and electrical characteristics of the nanosecond pulsed hollow cathode discharge at a gas pressure of 5 Torr are studied.The results show that the discharge development starts with the formation of an ionization front at the anode surface.The ionization front splits into two parts in the cathode cavity while propagating along its lateral surfaces.The ionization front formation leads to an increase in the fast isotropic EEDF component at its front,as well as in the anisotropic EEDF component.The accelerated electrons enter the cathode cavity,which significantly contributes to the formation of the highenergy EEDF component and EEDF anisotropy.

Influence of heating on the discharge characteristics of a hollow cathode

Hollow cathodes are widely used as electron sources and neutralizers in ion and Hall electric propulsion.Special applications such as commercial aerospace and gravitational wave detection require hollow cathodes with a very wide discharge current range.In this paper,a heater is used to compensate for the temperature drop of the emitter at low current.The self-sustained current can be extended from 0.6 to 0.1 A with a small discharge oscillation and ion energy when the flow rate is constant.This is also beneficial for long-life operation.However,when the discharge current is high(>1 A),heating can cause discharge oscillation,discharge voltage and ion energy to increase,f urther,combined with a rapid decline of pressure inside the cathode and an increase in the temperature in the cathode orifice plate,electron emission in die orifice and outside the orifice increases and the plasma density in the orifice decreases.This leads to a change in the cathode discharge mode.

Experimental Study on RF Hollow Cathode Discharge

By using a longitudinal static magnetic field, we have shown that it is possible to excite an intensive plasma in a simple stainless steel tube which is connected with a RF power supply. Under certain conditions, the very bright Ar II lines were excited. The emission intensities of Ar II lines were increased with the increase in RF power, magnetic field, and the decrease in argon pressure. As the plasma-sheath boundary oscillating under the RF voltage, the plasma column is periodically compressed by the oscillating boundary.

Cylindrical Micro-hollow Cathode Discharge at Atmospheric Pressure

The mechanism of micro-hollow cathode discharge at atmospheric pressure is investigated through simulations using two-dimensional fluid model combined with a transport model for metastable atoms.In the simulations,electric potential,electric field,particle density,and mean electron energy of the discharge are calculated.The results show that the two characteristic regions of the discharge,i.e.cathode drop and negative glow can be distinguished in the simulation.The cathode drop is characterized by strong electric field and high mean electron energy,while quasi-neutral plasma of high density and exists in the negative glow.The peak value of electron density can reach the order of 1017cm-3.The electron temperature varies from several eV to tens of eV.The influence of cathode dimension on the discharge characteristics is also investigated.

Uniqueness Theorem for the Non-Local Ionization Source in Glow Discharge and Hollow Cathode

The paper is devoted to the proof of the uniqueness theorem for solution of the equation for the non-local ionization source in a glow discharge and a hollow cathode in general 3D geometry. The theorem is applied to wide class of electric field configurations, and to the walls of discharge volume, which have a property of incomplete absorption of the electrons. Cathode is regarded as interior singular source, which is placed arbitrarily close to the wall. The existence of solution is considered also. During the proof of the theorem many of useful structure formulae are obtained. Elements of the proof structure, which have arisen, are found to have physical sense. It makes clear physical construction of non-local electron avalanche, which builds a source of ionization in glow discharge at low pressures. Last has decisive significance to understand the hollow cathode discharge configuration and the hollow cathode effect.

Influence of the Iron Anisothermal Sintering on the Characteristic of the Hollow Cathode Discharge

This work studies the influence of anisothermal iron sintering process on hollow cathode discharge characteristics. Two independent cathodes form an annular discharge. The pressed cylindrical iron powder sample, acting as central cathode, was placed concentrically in the interior of an external cathode. The external cathode, machined from an AISI 310 steel bar, besides acting to confine the geometry of the plasma, can also acts as a source of alloying elements. The sample heating is a function of the ion bombardment energy and, so, of the discharge electrical parameters: current (or current density) and the effective potential applied to the cathode. Successive anisothermal sintering is performed in a same sample until the reproducibility of the electrical parameters being obtained. The heating experiments up to 1250 °C, in a gas mixture of 80% Ar + 20% H2, at pressure of 133 Pa, at flow of 2xlO"6 mV, with an inter-cathode radial space of 5.8 mm, were carried out. It was verified the metallurgical evolution of the iron sample sintering process influences the current-?0n (time switched-on of the pulse) characteristics of the discharge.

Microstructure and Deuterium Retention of Tungsten Deposited by Hollow Cathode Discharge in Deuterium Plasma

Tungsten has been chosen as one of the most promising candidates as the plasma-facing material in future fusion reactors. Although tungsten has numerous advantages compared with other materials, issues including dust are rather difficult to deal with. Dust is produced in fusion devices by energetic plasma-surface interaction. The re-deposition of dust particles could cause the retention of fuel atoms. In this work, tungsten is deposited with deuterium plasma by hollow cathode discharge to simulate the dust production in a tokamak. The morphology of the deposited tungsten can be described as a film with spherical particles on it. Thermal desorption spectra of the deposited tungsten show extremely high desorption of the peak positions. It is also found that there is a maximum retention of deuterium in the deposited tungsten samples due to the dynamic equilibrium of the deposition and sputtering process on the substrates.

Best Magnetic Condition to Generate Hollow Cathode Glow Plasma in High Vacuum

Based on magnetron hollow cathode discharge, the magnetic condition of glow plasma generation in high vacuum, including both direction and magnitude of the applied mag- netic field, is theoretically derived and experimentally evaluated in this paper. Single particle orbital theory is introduced to discuss the possibilities to generate glow plasma at gas pressure under 10-2 Pa when the magnetic field direction is parallel or perpendicular or oblique to the electric field direction. A quantitative estimation criterion of magnetic induction intensity is also proposed in theory. The comparison with experiments suggests that glow plasma in high vacuum will form more easily in oblique magnetic field condition and that the criterion is accurate enough to estimate magnetic induction intensity at a certain gas pressure.

Measurements of plasma parameters in a hollow electrode AC glow discharge in helium

Measurements of the plasma parameters of coaxial gridded hollow electrode alternating current(AC)discharge helium plasma were carried out using an improved probe diagnostic technology.The measurements were performed under well-defined discharge conditions(chamber geometry,input power,AC power frequency,and external electrical characteristics).The problems encountered in describing the characteristics of AC discharge in many probe diagnostic methods were addressed by using an improved probe diagnostics design.This design can also be applied to the measurement of plasma parameters in many kinds of plasma sources in which the probe potential fluctuates with the discharge current.Several parameters of the hollow electrode AC helium discharge plasma were measured,including the plasma density,electron temperature,plasma density profiles,and changes in plasma density at different input power values and helium pressures.The characteristics of the coaxial gridded hollow electrode plasma determined by the experiments are suitable for comparison with plasma simulations,and for use in many applications of hollow cathode plasma.

A global model for evaluating discharge characteristics and performance of hollow cathodes

Hollow cathode,with the highest plasma density,current density,and temperature,becomes one of the most important components in the electro-thruster system.As the electric-propulsion thruster performance is directly related to the ionization rate,reliability,and lifetime of the hollow cathode,this paper develops a global model to study the effects of discharge current,gas flow rate,and gas species on the discharge characteristics in the insert and orifice regions of the hollow cathode.The emitter wall temperatures of hollow cathodes predicted by the global model are compared with experimental results from NSTAR thruster neutralization cathodes,confirming the model's validity.The influence of hollow cathode emitter material and structure sizes on the plasma parameters in the internal regions was also evaluated.The simulation results show that there is an optimal matching relationship between the discharge current and gas flow rate to guarantee the maximum ionization rate.The optimal working region for the hollow cathode has been deter-mined under different energetic,regime and structural parameters.The global model established in this paper can quickly determine the key structure and operating parameters of hollow cathode at the design stage,and provide the theoretical basis for hollow cathode design and development.