1.IntroductionRecently,progress of vapour phasegrowth of diamond fihn under non-equilib-rium reaction condition has shown theprospect of its commercial production in re-spect of effectiveness and economy.Theprocess pr...1.IntroductionRecently,progress of vapour phasegrowth of diamond fihn under non-equilib-rium reaction condition has shown theprospect of its commercial production in re-spect of effectiveness and economy.Theprocess proceeds in the thermodynamical展开更多
Deposition of diamond thin films on tungsten wire substrate with the gas mixture of acetone and hydrogen by using bias-enhanced hot filament chemical vapor deposition（CVD）with the tantalum wires being optimized arra...Deposition of diamond thin films on tungsten wire substrate with the gas mixture of acetone and hydrogen by using bias-enhanced hot filament chemical vapor deposition（CVD）with the tantalum wires being optimized arranged is investigated.The self-supported diamond tubes are obtained by etching away the tungsten substrates.The quality of the diamond film before and after the removal of substrates is observed by scanning electron microscope（SEM）and Raman spectrum.The results show that the cylindrical diamond tubes with good quality and uniform thickness are obtained on tungsten wires by using bias enhanced hot filament CVD.The compressive stress in diamond film formed during the deposition is released after the substrate etches away by mixture of H2O2 and NH4 OH.There is no residual stress in diamond tube after substrate removal.展开更多
A sheet plasma is generated by a mesh anode and a single hot-filament cathode with a DC power supply, and its characteristics are experimentally investigated. The sheet plasma is observed to locate around the anode. B...A sheet plasma is generated by a mesh anode and a single hot-filament cathode with a DC power supply, and its characteristics are experimentally investigated. The sheet plasma is observed to locate around the anode. Both electron density and electron temperature derived from the average energy of the energetic electrons in nitrogen are estimated to be 10s cm^-3 and 20- 40 eV, respectively, using the optical emission spectroscopy （OES） method based on a kinetic model of low-pressure nitrogen discharge. The electron density, electron temperature and their spatial distributions are found to be affected by the supplying voltage on the anode（70 V to 300 V）, filament temperature （600℃ to 780℃） and gas pressure （2 Pa to 20 Pa）. By adjusting these parameters the discharge status can be easily controlled.展开更多
文摘1.IntroductionRecently,progress of vapour phasegrowth of diamond fihn under non-equilib-rium reaction condition has shown theprospect of its commercial production in re-spect of effectiveness and economy.Theprocess proceeds in the thermodynamical
基金Selected from Proceedings of the 7th International Conference on Frontiers of Design and Manufacturing(ICFDM'2006)This project is supported by National Natural Science Foundation of China(No.50475026,No.50275095,No.50575135).
文摘Deposition of diamond thin films on tungsten wire substrate with the gas mixture of acetone and hydrogen by using bias-enhanced hot filament chemical vapor deposition（CVD）with the tantalum wires being optimized arranged is investigated.The self-supported diamond tubes are obtained by etching away the tungsten substrates.The quality of the diamond film before and after the removal of substrates is observed by scanning electron microscope（SEM）and Raman spectrum.The results show that the cylindrical diamond tubes with good quality and uniform thickness are obtained on tungsten wires by using bias enhanced hot filament CVD.The compressive stress in diamond film formed during the deposition is released after the substrate etches away by mixture of H2O2 and NH4 OH.There is no residual stress in diamond tube after substrate removal.
基金supported by National Defence Research Foundation of China (No.A1420060181)
文摘A sheet plasma is generated by a mesh anode and a single hot-filament cathode with a DC power supply, and its characteristics are experimentally investigated. The sheet plasma is observed to locate around the anode. Both electron density and electron temperature derived from the average energy of the energetic electrons in nitrogen are estimated to be 10s cm^-3 and 20- 40 eV, respectively, using the optical emission spectroscopy （OES） method based on a kinetic model of low-pressure nitrogen discharge. The electron density, electron temperature and their spatial distributions are found to be affected by the supplying voltage on the anode（70 V to 300 V）, filament temperature （600℃ to 780℃） and gas pressure （2 Pa to 20 Pa）. By adjusting these parameters the discharge status can be easily controlled.
