Electron cyclotron resonance （ECR） plasma was applied to enhance the direct current magnetron sputtering to prepare hydrogenated diamond-like carbon （H-DLC） films. For different microwave powers, both argon and hy...Electron cyclotron resonance （ECR） plasma was applied to enhance the direct current magnetron sputtering to prepare hydrogenated diamond-like carbon （H-DLC） films. For different microwave powers, both argon and hydrogen gas are introduced separately as the ECR working gas to investigate the influence of microwave power on the microstructure and electrical property of the H-DLC films deposited on P-type silicon substrates. A series of characterization methods including the Raman spectrum and atomic force microscopy are used. Results show that, within a certain range, the increase in microwave power affects the properties of the thin films, namely the sp3 ratio, the hardness, the nanoparticle size and the resistivity all increase while the roughness decreases with the increase in microwave power. The maximum of resistivity amounts to 1.1×10^9 Ω.cm. At the same time it is found that the influence of microwave power on the properties of H-DLC films is more pronounced when argon gas is applied as the ECR working gas, compared to hydrogen gas.展开更多
A diamond-like carbon（DLC） film was deposited on YT14 substrate using magnetron sputtering（MS）. The surface morphologies, roughness and bonding spectra of obtained film were characterized using scanning electron m...A diamond-like carbon（DLC） film was deposited on YT14 substrate using magnetron sputtering（MS）. The surface morphologies, roughness and bonding spectra of obtained film were characterized using scanning electron microscopy（SEM）, atomic force microscopy（AFM）, and X-ray photoelectron spectroscopy（XPS）, respectively, and its mechanical property and bonding strength were measured using a nanoindentation and scratch tester, respectively. The results show that the C-enriched DLC film exhibits a denser microstructure and smoother surface with lower surface roughness of 21.8 nm. The ratio of C sp2 at 284.4 e V that corresponds to the diamond（111） and the C sp3 at 285.3 e V that corresponds to the diamond（220） plane for the as-received film is 0.36： 0.64, showing that the C sp3 has the high content. The hardness and Young＇s modulus of DLC film by nanoindentation are 8.534 41 and 142.158 1 GPa, respectively, and the corresponding bonding strength is 74.55 N by scratch test.展开更多
Composite SiNx/DLC films were deposited on Si substrate by RF magnetron sputtering of silicon nitride (Si3N4) target simultaneously with filtered cathode arc (FCA) of graphite. The RF power was fixed at 100 W whereas ...Composite SiNx/DLC films were deposited on Si substrate by RF magnetron sputtering of silicon nitride (Si3N4) target simultaneously with filtered cathode arc (FCA) of graphite. The RF power was fixed at 100 W whereas the arc currents of FCA were 20, 40, 60 and 80 A. The effects of arc current on the structure, surface roughness, density and mechanical properties of SiNx/DLC films were investigated. The results show that the arc current in the studied range has effect on the structure, surface roughness, density and mechanical properties of composite SiNx/DLC films. The composite SiNx/DLC films show the sp3 content between 53.5% and 66.7%, density between 2.54 and2.98 g/cm3, stress between 1.7 and 2.2 GPa, and hardness between 35 and 51 GPa. Furthermore, it was found that the density, stress and hardness correlate linearly with the sp3 content for composite SiNx/DLC films.展开更多
It is imperative to develop a novel matching of metallic substrate and self-lubricating coating for aircraft spherical plain bearing in a wide range of service conditions.As a new type of superelastic material,60NiTi ...It is imperative to develop a novel matching of metallic substrate and self-lubricating coating for aircraft spherical plain bearing in a wide range of service conditions.As a new type of superelastic material,60NiTi alloy meets the performance requirements of aerospace bearing materials,but exhibits poor tribological performance,especially under the conditions of dry sliding friction.A Hydrogenated Diamond-Like Carbon(H-DLC)coating was deposited on the 60NiTi alloy to improve its tribological performance.The microstructure and mechanical behavior of the 60NiTi alloy and its H-DLC coating were explored.Results show that improvement of friction and wear performance of the H-DLC coating deposited on the 60NiTi substrate is mainly achieved by graphitization at the friction interface and the transfer film produced on the counterpart ball.The increased friction load leads to intensification of graphitization at the friction interface and formation of continuous and compact transfer film on the surface of the counterpart ball.展开更多
Platinum(Pt)and nitrogen(N)were co-incorporated in diamond-like carbon(DLC)thin films using a magnetron sputtering system to form PtN-DLC thin films for tribological applications.The Pt content in the PtN-DLC films pr...Platinum(Pt)and nitrogen(N)were co-incorporated in diamond-like carbon(DLC)thin films using a magnetron sputtering system to form PtN-DLC thin films for tribological applications.The Pt content in the PtN-DLC films prepared on Si substrates was controlled by varying RF power applied to a Pt target at a fixed N2 flow rate.The tribological properties of the PtN-DLC films were investigated with respect to the Pt content in the films.The uncoated Si substrate surface tested against a steel ball of 6 mm in diameter had significant abrasive and fatigue wear,while no significant wear was found on the N-DLC coated sample surface,indicating that the N-DLC film effectively prevented its underlying Si substrate from wear.However,the incorporation of Pt in the N-DLC films reduced the wear resistance of the films by degrading sp3-bonded cross-linking structures of the films so that significant wear tracks were found on the surfaces of the PtN-DLC films.Therefore,the increased radio frequency(RF)power applied to the Pt target decreased the wear resistance of the PtN-DLC films as a result of the increased Pt content.展开更多
The effect of nitrogen pressure on optical properties of hydrogen-free diamond-like carbon (DLC) films deposited by pulsed laser ablation graphite in different background pressures of nitrogen is reported. By varying ...The effect of nitrogen pressure on optical properties of hydrogen-free diamond-like carbon (DLC) films deposited by pulsed laser ablation graphite in different background pressures of nitrogen is reported. By varying nitrogen pressures from 0.05 to 15.00 Pa, the photoluminescence is gradually increased and optical transmittance is gradually decreased. Atomic force microscopy (AFM) is used to observe the surface morphology of the DLC films. The results indicate that the surface becomes unsmoothed and there are some globose particles on the films surface with the rise of nitrogen pressures. The microstructure of the films is characterized using Raman spectroscopy.展开更多
High-performance diamond films are highly demanded on tool surfaces for wire-drawing and mechanical sealing applications.Herein,this work aims at enhancing the tribological performance of chemical vapor deposition dia...High-performance diamond films are highly demanded on tool surfaces for wire-drawing and mechanical sealing applications.Herein,this work aims at enhancing the tribological performance of chemical vapor deposition diamond films in water-lubricated conditions by utilizing non-hydrogenated and hydrogenated diamond-like carbon(DLC and DLC-H)top layers.The tribological properties of bilayer micro-crystalline diamond(MCD)/DLC,MCD/DLC-H,nano-crystalline diamond(NCD)/DLC and NCD/DLC-H films are evaluated,in terms of maximal and stable coefficients of friction(COFs),C—C bonds transformation,worn surface morphology and specific wear rates.The results show that DLC or DLC-H coated on diamond layer significantly suppresses the initial maximal COF peak and the wear of counterpart ball.Moreover,severe regular arranged sp^(2) C—C bonds transformation is detected on MCD film,in comparison to NCD;while inversely,the NCD/DLC bilayer exhibits severer C—C bonds transformation effect compared with the MCD/DLC.Furthermore,the DLC-H top layer shows a larger decreasing rate of maximal COFs and wear rates of counterpart balls,compared with the DLC coating,which is due to its superior self-lubricity.Among all the tested films,the NCD/DLC-H bilayer shows an optimized tribological performance.展开更多
Diamond-like carbon(DLC)films are deposited on rubber surfaces to protect the rubber components,and surface pretreatment of the rubber substrates prior to the film deposition can improve the adhesion between the DLC f...Diamond-like carbon(DLC)films are deposited on rubber surfaces to protect the rubber components,and surface pretreatment of the rubber substrates prior to the film deposition can improve the adhesion between the DLC films and the rubber.Thus,the principal purpose of this work concentrates on determining the effects of argon(Ar),oxygen(O_(2)),nitrogen(N_(2)),and hydrogen(H_(2))plasma pretreatments on the adhesion and friction performance of the DLC films deposited on rubber(DLC/rubber).The results indicated that the Ar plasma pretreatment promoted the formation of a compact layer on the rubber surface.By contrast,massive fillers were exposed on the rubber surface after oxygen or nitrogen plasma pretreatments.Moreover,the typical micrometer-scale patches divided by random cracks were observed on the surface of DLC/rubber,except for the sample pretreated with oxygen plasma.The adhesion of DLC/rubber was found to strengthen with the removal of weak boundary layers and the generation of free radicals on the rubber surface after plasma pretreatment.The tribo-tests revealed that DLC/rubber with O_(2),N_(2),and H_(2) plasma pretreatments cannot achieve optimal friction performance.Significantly,DLC/rubber with Ar plasma pretreatment exhibited a low and stable friction coefficient of 0.19 and superior wear resistance,which was correlated to the high adhesion,good load-bearing of the rubber surface,and the approximate sine function of the surface profile of the DLC film.展开更多
To meet the surging needs in energy efficiency and eco-friendly lubricants,a novel superlubricious technology using a vegetable oil and ceramic materials is proposed.By coupling different hydrogen-free amorphous carbo...To meet the surging needs in energy efficiency and eco-friendly lubricants,a novel superlubricious technology using a vegetable oil and ceramic materials is proposed.By coupling different hydrogen-free amorphous carbon coatings with varying fraction of sp^(2) and sp^(3) hybridized carbon in presence of a commercially available silicon nitride bulk ceramic,castor oil provides superlubricity although the liquid vegetable oil film in the contact is only a few nanometres thick at most.Besides a partial liquid film possibly separating surfaces in contact,local tribochemical reactions between asperities are essential to maintain superlubricity at low speeds.High local pressure activates chemical degradation of castor oil generating graphitic/graphenic-like species on top of asperities,thus helping both the chemical polishing of surface and its chemical passivation by H and OH species.Particularly,the formation of the formation of–(CH_(2)–CH_(2))n–noligomers have been evidenced to have a major role in the friction reduction.Computer simulation unveils that formation of chemical degradation products of castor oil on friction surfaces are favoured by the quantity of sp^(2)-hybridized carbon atoms in the amorphous carbon structure.Hence,tuning sp^(2)-carbon content in hydrogen-free amorphous carbon,in particular,on the top layers of the coating,provides an alternative way to control superlubricity achieved with castor oil and other selected green lubricants.展开更多
Diamond-like carbon(DLC)film has been developed as an extremely effective lubricant to reduce energy dissipation;however,most films should undergo running-in to achieve a super-low friction state.In this study,the run...Diamond-like carbon(DLC)film has been developed as an extremely effective lubricant to reduce energy dissipation;however,most films should undergo running-in to achieve a super-low friction state.In this study,the running-in behaviors of an H–DLC/Al_(2)O_(3) pair were investigated through a controllable single-asperity contact study using an atomic force microscope.This study presents direct evidence that illustrates the role of transfer layer formation and oxide layer removal in the friction reduction during running-in.After 200 sliding cycles,a thin transfer layer was formed on the Al2O3 tip.Compared with a clean tip,this modified tip showed a significantly lower adhesion force and friction force on the original H–DLC film,which confirmed the contribution of the transfer layer formation in the friction reduction during running-in.It was also found that the friction coefficient of the H–DLC/Al_(2)O_(3) pair decreased linearly as the oxygen concentration of the H–DLC substrate surface decreased.This phenomenon can be explained by a change in the contact surface from an oxygen termination with strong hydrogen bond interactions to a hydrogen termination with weak van der Waals interactions.These results provide new insights that quantitatively reveal the running-in mechanism at the nanoscale,which may help with the design optimization of DLC films for different environmental applications.展开更多
基金supported by Shenzhen Key Laboratory of Sensors Technology Open Fund of China (Nos.SST200908, SST200911)
文摘Electron cyclotron resonance （ECR） plasma was applied to enhance the direct current magnetron sputtering to prepare hydrogenated diamond-like carbon （H-DLC） films. For different microwave powers, both argon and hydrogen gas are introduced separately as the ECR working gas to investigate the influence of microwave power on the microstructure and electrical property of the H-DLC films deposited on P-type silicon substrates. A series of characterization methods including the Raman spectrum and atomic force microscopy are used. Results show that, within a certain range, the increase in microwave power affects the properties of the thin films, namely the sp3 ratio, the hardness, the nanoparticle size and the resistivity all increase while the roughness decreases with the increase in microwave power. The maximum of resistivity amounts to 1.1×10^9 Ω.cm. At the same time it is found that the influence of microwave power on the properties of H-DLC films is more pronounced when argon gas is applied as the ECR working gas, compared to hydrogen gas.
基金Funded by the Jiangsu Province Science and Technology Support Program(Industry)(No.BE2014818)
文摘A diamond-like carbon（DLC） film was deposited on YT14 substrate using magnetron sputtering（MS）. The surface morphologies, roughness and bonding spectra of obtained film were characterized using scanning electron microscopy（SEM）, atomic force microscopy（AFM）, and X-ray photoelectron spectroscopy（XPS）, respectively, and its mechanical property and bonding strength were measured using a nanoindentation and scratch tester, respectively. The results show that the C-enriched DLC film exhibits a denser microstructure and smoother surface with lower surface roughness of 21.8 nm. The ratio of C sp2 at 284.4 e V that corresponds to the diamond（111） and the C sp3 at 285.3 e V that corresponds to the diamond（220） plane for the as-received film is 0.36： 0.64, showing that the C sp3 has the high content. The hardness and Young＇s modulus of DLC film by nanoindentation are 8.534 41 and 142.158 1 GPa, respectively, and the corresponding bonding strength is 74.55 N by scratch test.
文摘Composite SiNx/DLC films were deposited on Si substrate by RF magnetron sputtering of silicon nitride (Si3N4) target simultaneously with filtered cathode arc (FCA) of graphite. The RF power was fixed at 100 W whereas the arc currents of FCA were 20, 40, 60 and 80 A. The effects of arc current on the structure, surface roughness, density and mechanical properties of SiNx/DLC films were investigated. The results show that the arc current in the studied range has effect on the structure, surface roughness, density and mechanical properties of composite SiNx/DLC films. The composite SiNx/DLC films show the sp3 content between 53.5% and 66.7%, density between 2.54 and2.98 g/cm3, stress between 1.7 and 2.2 GPa, and hardness between 35 and 51 GPa. Furthermore, it was found that the density, stress and hardness correlate linearly with the sp3 content for composite SiNx/DLC films.
基金co-supported by the National Natural Science Foundation of China(No.51905466)the Aeronautical Science Foundation of China(No.201945099002)+1 种基金the Natural Science Foundation of Hebei Province,China(Nos.E2021203191 and E2020203184)the Youth Top Talent Project of Hebei Province Higher Education,China(No.BJ2019058).
文摘It is imperative to develop a novel matching of metallic substrate and self-lubricating coating for aircraft spherical plain bearing in a wide range of service conditions.As a new type of superelastic material,60NiTi alloy meets the performance requirements of aerospace bearing materials,but exhibits poor tribological performance,especially under the conditions of dry sliding friction.A Hydrogenated Diamond-Like Carbon(H-DLC)coating was deposited on the 60NiTi alloy to improve its tribological performance.The microstructure and mechanical behavior of the 60NiTi alloy and its H-DLC coating were explored.Results show that improvement of friction and wear performance of the H-DLC coating deposited on the 60NiTi substrate is mainly achieved by graphitization at the friction interface and the transfer film produced on the counterpart ball.The increased friction load leads to intensification of graphitization at the friction interface and formation of continuous and compact transfer film on the surface of the counterpart ball.
文摘Platinum(Pt)and nitrogen(N)were co-incorporated in diamond-like carbon(DLC)thin films using a magnetron sputtering system to form PtN-DLC thin films for tribological applications.The Pt content in the PtN-DLC films prepared on Si substrates was controlled by varying RF power applied to a Pt target at a fixed N2 flow rate.The tribological properties of the PtN-DLC films were investigated with respect to the Pt content in the films.The uncoated Si substrate surface tested against a steel ball of 6 mm in diameter had significant abrasive and fatigue wear,while no significant wear was found on the N-DLC coated sample surface,indicating that the N-DLC film effectively prevented its underlying Si substrate from wear.However,the incorporation of Pt in the N-DLC films reduced the wear resistance of the films by degrading sp3-bonded cross-linking structures of the films so that significant wear tracks were found on the surfaces of the PtN-DLC films.Therefore,the increased radio frequency(RF)power applied to the Pt target decreased the wear resistance of the PtN-DLC films as a result of the increased Pt content.
基金supported by the Natural Science Foundationof Shandong Province (Grant No. Y2002A09).
文摘The effect of nitrogen pressure on optical properties of hydrogen-free diamond-like carbon (DLC) films deposited by pulsed laser ablation graphite in different background pressures of nitrogen is reported. By varying nitrogen pressures from 0.05 to 15.00 Pa, the photoluminescence is gradually increased and optical transmittance is gradually decreased. Atomic force microscopy (AFM) is used to observe the surface morphology of the DLC films. The results indicate that the surface becomes unsmoothed and there are some globose particles on the films surface with the rise of nitrogen pressures. The microstructure of the films is characterized using Raman spectroscopy.
基金the National Natural Science Foundation of China(No.51705155)the Tribology Science Fund of State Key Laboratory of Tribology(No.SKLTKF17B09)。
文摘High-performance diamond films are highly demanded on tool surfaces for wire-drawing and mechanical sealing applications.Herein,this work aims at enhancing the tribological performance of chemical vapor deposition diamond films in water-lubricated conditions by utilizing non-hydrogenated and hydrogenated diamond-like carbon(DLC and DLC-H)top layers.The tribological properties of bilayer micro-crystalline diamond(MCD)/DLC,MCD/DLC-H,nano-crystalline diamond(NCD)/DLC and NCD/DLC-H films are evaluated,in terms of maximal and stable coefficients of friction(COFs),C—C bonds transformation,worn surface morphology and specific wear rates.The results show that DLC or DLC-H coated on diamond layer significantly suppresses the initial maximal COF peak and the wear of counterpart ball.Moreover,severe regular arranged sp^(2) C—C bonds transformation is detected on MCD film,in comparison to NCD;while inversely,the NCD/DLC bilayer exhibits severer C—C bonds transformation effect compared with the MCD/DLC.Furthermore,the DLC-H top layer shows a larger decreasing rate of maximal COFs and wear rates of counterpart balls,compared with the DLC coating,which is due to its superior self-lubricity.Among all the tested films,the NCD/DLC-H bilayer shows an optimized tribological performance.
基金carried out in Youth Innovation Promotion Association CAS(No.2017459)the National Natural Science Foundation of China(Nos.U1737213 and 51911530114).
文摘Diamond-like carbon(DLC)films are deposited on rubber surfaces to protect the rubber components,and surface pretreatment of the rubber substrates prior to the film deposition can improve the adhesion between the DLC films and the rubber.Thus,the principal purpose of this work concentrates on determining the effects of argon(Ar),oxygen(O_(2)),nitrogen(N_(2)),and hydrogen(H_(2))plasma pretreatments on the adhesion and friction performance of the DLC films deposited on rubber(DLC/rubber).The results indicated that the Ar plasma pretreatment promoted the formation of a compact layer on the rubber surface.By contrast,massive fillers were exposed on the rubber surface after oxygen or nitrogen plasma pretreatments.Moreover,the typical micrometer-scale patches divided by random cracks were observed on the surface of DLC/rubber,except for the sample pretreated with oxygen plasma.The adhesion of DLC/rubber was found to strengthen with the removal of weak boundary layers and the generation of free radicals on the rubber surface after plasma pretreatment.The tribo-tests revealed that DLC/rubber with O_(2),N_(2),and H_(2) plasma pretreatments cannot achieve optimal friction performance.Significantly,DLC/rubber with Ar plasma pretreatment exhibited a low and stable friction coefficient of 0.19 and superior wear resistance,which was correlated to the high adhesion,good load-bearing of the rubber surface,and the approximate sine function of the surface profile of the DLC film.
基金This research is supported by TOTAL,Solaize Research Center and Federal Ministry of Economic Affairs and Energy Germany(BMWi)within project CHEOPS3(Funding number 03ET1286B).
文摘To meet the surging needs in energy efficiency and eco-friendly lubricants,a novel superlubricious technology using a vegetable oil and ceramic materials is proposed.By coupling different hydrogen-free amorphous carbon coatings with varying fraction of sp^(2) and sp^(3) hybridized carbon in presence of a commercially available silicon nitride bulk ceramic,castor oil provides superlubricity although the liquid vegetable oil film in the contact is only a few nanometres thick at most.Besides a partial liquid film possibly separating surfaces in contact,local tribochemical reactions between asperities are essential to maintain superlubricity at low speeds.High local pressure activates chemical degradation of castor oil generating graphitic/graphenic-like species on top of asperities,thus helping both the chemical polishing of surface and its chemical passivation by H and OH species.Particularly,the formation of the formation of–(CH_(2)–CH_(2))n–noligomers have been evidenced to have a major role in the friction reduction.Computer simulation unveils that formation of chemical degradation products of castor oil on friction surfaces are favoured by the quantity of sp^(2)-hybridized carbon atoms in the amorphous carbon structure.Hence,tuning sp^(2)-carbon content in hydrogen-free amorphous carbon,in particular,on the top layers of the coating,provides an alternative way to control superlubricity achieved with castor oil and other selected green lubricants.
基金The authors are grateful for the financial support from the National Natural Science Foundation of China(51875486 and 51991373)Sichuan Science and Technology Program(2019YFH0098).
文摘Diamond-like carbon(DLC)film has been developed as an extremely effective lubricant to reduce energy dissipation;however,most films should undergo running-in to achieve a super-low friction state.In this study,the running-in behaviors of an H–DLC/Al_(2)O_(3) pair were investigated through a controllable single-asperity contact study using an atomic force microscope.This study presents direct evidence that illustrates the role of transfer layer formation and oxide layer removal in the friction reduction during running-in.After 200 sliding cycles,a thin transfer layer was formed on the Al2O3 tip.Compared with a clean tip,this modified tip showed a significantly lower adhesion force and friction force on the original H–DLC film,which confirmed the contribution of the transfer layer formation in the friction reduction during running-in.It was also found that the friction coefficient of the H–DLC/Al_(2)O_(3) pair decreased linearly as the oxygen concentration of the H–DLC substrate surface decreased.This phenomenon can be explained by a change in the contact surface from an oxygen termination with strong hydrogen bond interactions to a hydrogen termination with weak van der Waals interactions.These results provide new insights that quantitatively reveal the running-in mechanism at the nanoscale,which may help with the design optimization of DLC films for different environmental applications.
