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Hydrophobic, mechanical, and tribological properties of fluorine incorporated hydrogenated fullerene-like carbon films 被引量:6
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作者 Li QIANG Bin ZHANG +2 位作者 Kaixiong GAO Zhenbin GONG Junyan ZHANG 《Friction》 SCIE EI CAS 2013年第4期350-358,共9页
Fluorine-incorporated hydrogenated fullerene-like nanostructure amorphous carbon films(F-FLC)were synthesized by employing the direct current plasma enhanced chemical vapor deposition(dc-PECVD)technique using a mixtur... Fluorine-incorporated hydrogenated fullerene-like nanostructure amorphous carbon films(F-FLC)were synthesized by employing the direct current plasma enhanced chemical vapor deposition(dc-PECVD)technique using a mixture of methane(CH4),tetra-fluoromethane(CF4),and hydrogen(H2)as the working gases.The effect of the fluorine content on the bonding structure,surface roughness,hydrophobic,mechanical,and tribological properties of the films was systematically investigated using Fourier transform infrared spectroscopy(FTIR),X-ray photoelectron spectroscopy(XPS),Raman analysis,atomic force microscope(AFM),contact angle goniometer,nano-indenter,and reciprocating ball-on-disc tester,respectively.The fluorine content in the films increased from 0 to 2.1 at.%as the CF4 gas flow ratio increased from 0 to 3 sccm,and incorporated fluorine atoms existed in the form of C-FX(X=1,2,3)bonds in the film.The fullerene nanostructure embedded in the hydrogenated amorphous carbon films was confirmed by Raman analysis.The water contact angle was significantly increased because of fluorine doping,which indicates that the hydrophobicity of the carbon films could be adjusted to some extent by the fluorine doping.The hardness and elastic modulus of the films remained relatively high(22 GPa)as the fluorine content increased.Furthermore,the friction coefficient of the carbon films was significantly reduced and the wear resistance was enhanced by fluorine doping. 展开更多
关键词 fullerene-like carbon film fluorine doping HYDROPHOBICITY mechanical properties tribological performance
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Influence of Microwave Power on the Properties of Hydrogenated Diamond-Like Carbon Films Prepared by ECR Plasma Enhanced DC Magnetron Sputtering 被引量:2
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作者 汝丽丽 黄建军 +1 位作者 高亮 齐冰 《Plasma Science and Technology》 SCIE EI CAS CSCD 2010年第5期551-555,共5页
Electron cyclotron resonance (ECR) plasma was applied to enhance the direct current magnetron sputtering to prepare hydrogenated diamond-like carbon (H-DLC) films. For different microwave powers, both argon and hy... Electron cyclotron resonance (ECR) plasma was applied to enhance the direct current magnetron sputtering to prepare hydrogenated diamond-like carbon (H-DLC) films. For different microwave powers, both argon and hydrogen gas are introduced separately as the ECR working gas to investigate the influence of microwave power on the microstructure and electrical property of the H-DLC films deposited on P-type silicon substrates. A series of characterization methods including the Raman spectrum and atomic force microscopy are used. Results show that, within a certain range, the increase in microwave power affects the properties of the thin films, namely the sp3 ratio, the hardness, the nanoparticle size and the resistivity all increase while the roughness decreases with the increase in microwave power. The maximum of resistivity amounts to 1.1×10^9 Ω.cm. At the same time it is found that the influence of microwave power on the properties of H-DLC films is more pronounced when argon gas is applied as the ECR working gas, compared to hydrogen gas. 展开更多
关键词 hydrogenated diamond-like carbon films ECR plasma magnetron sputtering microwave power
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Carbon film encapsulated Fe_2O_3: An efficient catalyst for hydrogenation of nitroarenes 被引量:2
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作者 Yingyu Wang Juanjuan Shi +3 位作者 Zihao Zhang Jie Fu Xiuyang Lü Zhaoyin Hou 《Chinese Journal of Catalysis》 CSCD 北大核心 2017年第11期1909-1917,共9页
Iron catalysis has attracted a wealth of interdependent research for its abundance,low price,and nontoxicity.Herein,a convenient and stable iron oxide(Fe2O3)‐based catalyst,in which active Fe2O3nanoparticles(NPs)were... Iron catalysis has attracted a wealth of interdependent research for its abundance,low price,and nontoxicity.Herein,a convenient and stable iron oxide(Fe2O3)‐based catalyst,in which active Fe2O3nanoparticles(NPs)were embedded into carbon films,was prepared via the pyrolysis of iron‐polyaniline complexes on carbon particles.The obtained catalyst shows a large surface area,uniform pore channel distribution,with the Fe2O3NPs homogeneously dispersed across the hybrid material.Scanning electron microscopy,Raman spectroscopy and X‐ray diffraction analyses of the catalyst prepared at900°C(Fe2O3@G‐C‐900)and an acid‐pretreated commercial activated carbon confirmed that additional carbon materials formed on the pristine carbon particles.Observation of high‐resolution transmission electron microscopy images also revealed that the Fe2O3NPs in the hybrid were encapsulated by a thin carbon film.The Fe2O3@G‐C‐900composite was highly active and stable for the direct selective hydrogenation of nitroarenes to anilines under mild conditions,where previously noble metals were required.The synthetic strategy and the structure of the iron oxide‐based composite may lead to the advancement of cost‐effective and sustainable industrial processes. 展开更多
关键词 carbon film ENCAPSULATION Iron catalysis PYROLYSIS hydrogenATION NITROARENE
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Hydrogen Concentration of Co-Deposited Carbon Films Produced in the Vicinity of Local Island Divertor in LHD
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作者 T. Hino T. Hirata +4 位作者 N. Ashikawa S. Masuzaki Y. Yamauchi Y. Nobuta LHD Experimental Group 《Journal of Energy and Power Engineering》 2011年第5期428-433,共6页
In international thermonuclear experimental reactor (ITER), one of major concerns is an in-vessel tritium inventory from a point of safety. It is believed that the carbon-tritium co-deposited film produced by the er... In international thermonuclear experimental reactor (ITER), one of major concerns is an in-vessel tritium inventory from a point of safety. It is believed that the carbon-tritium co-deposited film produced by the erosion of carbon diverter walls has a high tritium concentration. However, no systematic evaluation for the tritium concentration has been conducted yet. In the present study, the carbon-hydrogen co-deposited films were prepared at the wall of pumping duct in Local Island Divertor experiments of LHD, in order to evaluate the tritium concentration of the co-deposited films produced in ITER. The hydrogen concentration was obtained by measuring the amount of retained hydrogen in the film and the mass density of the film. The hydrogen concentration of the co-deposited carbon film at the wall not facing to the plasma with a low temperature was extremely high, 1.3 in the atomic ratio of H/C. This value is triple times higher than the previous value obtained so far. The crystal structure of the co-deposited carbon film observed by Raman spectroscopy showed very unique structure (polymeric aC:H), which is well consistent with the high hydrogen concentration. The present study suggests that the tritium concentration of the co-deposited film in ITER depends on the wall position and becomes quite high as high as T/C-0.65. The results obtained contribute to evaluate the in-vessel tritium inventory owing to the co-deposited carbon films. 展开更多
关键词 In-vessel tritium inventory ITER LHD co-deposited carbon film hydrogen concentration crystal structure.
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Study on hydrogen evolution performance of the carbon supported PtRu alloy film electrodes
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作者 杨滨 李旸 昝林寒 《广东有色金属学报》 2005年第2期375-379,共5页
The carbon supported PtRu alloy film electrodes having Pt about 0.10 mg/cm2 or even less were prepared by ion beam sputtering method (IBSM). It was valued on the hydrogen analyse performance, the temperature influen... The carbon supported PtRu alloy film electrodes having Pt about 0.10 mg/cm2 or even less were prepared by ion beam sputtering method (IBSM). It was valued on the hydrogen analyse performance, the temperature influence factor and the stability by electroanalysis hydrogen analyse method. It was found that the carbon supported PtRu alloy film electrodes had higher hydrogen evolution performance and stability, such as the hydrogen evolution exchange current density (j0) was increase as the temperature (T) rised, and it overrun 150 mA/cm2 as the trough voltage in about 0.68V, and it only had about 2.8% decline in 500 h electrolytic process. The results demonstrated that the carbon supported PtRu alloy film electrodes kept highly catalytic activity and stability, and it were successfully used in pilot plant for producing H2 on electrolysis of H2S. 展开更多
关键词 合金 薄膜 电极 结构参数
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Electrodeposition of Cu_2O/g-C_3N_4 heterojunction film on an FTO substrate for enhancing visible light photoelectrochemical water splitting 被引量:3
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作者 张声森 晏洁 +5 位作者 杨思源 徐悦华 蔡欣 张向超 彭峰 方岳平 《Chinese Journal of Catalysis》 SCIE EI CAS CSCD 北大核心 2017年第2期365-371,共7页
An immobilized Cu2O/g-C3N4 heterojunction film was successfully made on an FTO substrate by electrophoretic deposition of g-C3N4 on a Cu2O thin film.The photoelectrochemical(PEC) performance for water splitting by t... An immobilized Cu2O/g-C3N4 heterojunction film was successfully made on an FTO substrate by electrophoretic deposition of g-C3N4 on a Cu2O thin film.The photoelectrochemical(PEC) performance for water splitting by the Cu2O/g-C3N4 film was better than pure g-C3N4 and pure Cu2O film.Under-0.4 V external bias and visible light irradiation,the photocurrent density and PEC hydrogen evolution efficiency of the optimized Cu2O/g-C3N4 film was-1.38 mA/cm^2 and 0.48 mL h^-1 cm^-2,respectively.The enhanced PEC performance of Cu2O/g-C3N4 was attributed to the synergistic effect of light coupling and a matching energy band structure between g-C3N4 and Cu2O as well as the external bias. 展开更多
关键词 Cuprous oxide Graphitic carbon nitride Heterojunction film ELECTRODEPOSITION Visible light Photoelectrochemical water splitting hydrogen evolution
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Molecular dynamics simulation of the deposition process of hydrogenated diamond-like carbon (DLC) films 被引量:2
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作者 ZHANG Yujun DONG GuangNeng MAO JunHong XIE YouBai 《Chinese Science Bulletin》 SCIE EI CAS 2008年第7期1094-1099,共6页
The deposition process of hydrogenated diamond-like carbon (DLC) film greatly affects its frictional properties. In this study, CH3 radicals are selected as source species to deposit hydrogenated DLC films for molecul... The deposition process of hydrogenated diamond-like carbon (DLC) film greatly affects its frictional properties. In this study, CH3 radicals are selected as source species to deposit hydrogenated DLC films for molecular dynamics simulation. The growth and structural properties of hydrogenated DLC films are investigated and elucidated in detail. By comparison and statistical analysis, the authors find that the ratio of carbon to hydrogen in the films generally shows a monotonously increasing trend with the increase of impact energy. Carbon atoms are more reactive during deposition and more liable to bond with substrate atoms than hydrogen atoms. In addition, there exists a peak value of the number of hydrogen atoms deposited in hydrogenated DLC films. The trends of the variation are opposite on the two sides of this peak point, and it becomes stable when impact energy is greater than 80 eV. The average relative density also indicates a rising trend along with the increment of impact energy, while it does not reach the saturation value until impact energy comes to 50 eV. The hydrogen content in source species is a key factor to determine the hydrogen content in hydrogenated DLC films. When the hydrogen content in source species is high, the hydrogen content in hydrogenated DLC films is accordingly high. 展开更多
关键词 分子动力学 沉积程序 氢化作用 DLC 薄膜
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Effect of ZnO Electrodeposited on Carbon Film and Decorated with Metal Nanoparticles for Solar Hydrogen Production
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作者 Young Kwang Kim Hye-Jin Seo +3 位作者 Soonhyun Kim Sung-Ho Hwang Hyunwoong Park Sang Kyoo Lim 《Journal of Materials Science & Technology》 SCIE EI CAS CSCD 2016年第10期1059-1065,共7页
In this study, we prepared horn-like ZnO structures on carbon films(ZnO/CF) by electrodeposition and decorated the ZnO horns with different metals(Ag, Au, and Pt) via photodeposition(M-ZnO/CF). Using M-ZnO/CF as... In this study, we prepared horn-like ZnO structures on carbon films(ZnO/CF) by electrodeposition and decorated the ZnO horns with different metals(Ag, Au, and Pt) via photodeposition(M-ZnO/CF). Using M-ZnO/CF as photocatalysts, we examined ways to enhance solar hydrogen production from various points of view, such as modifying the intrinsic physical properties and thermodynamics of the materials, and varying the chemical environment during M-ZnO/CF fabrication. In particular, we focused on the effects of the carbon film and metals in M-ZnO/CF hybrid photocatalysts on solar hydrogen production. The type of metal nanoparticles is an important factor in solar hydrogen production because the deposition rate and electrical conductivity of each metal affect the proton-water reduction ability. 展开更多
关键词 Solar hydrogen production ZnO horn carbon film Metal nanoparticle Electrodeposition
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掺氮类金刚石薄膜的微观结构和红外光学性能研究 被引量:5
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作者 居建华 夏义本 +6 位作者 张伟丽 王林军 史为民 黄志明 李志锋 郑国珍 汤定元 《应用科学学报》 CAS CSCD 2001年第2期173-177,共5页
采用俄歇电子能谱、原子力显微镜、拉曼散射分析、傅里叶红外光谱和红外椭圆偏振光谱等设备 ,对射频等离子增强化学气相沉积法制备的掺氮类金刚石薄膜的微观结构和红外光学性能进行了研究 .结果表明 ,薄膜中氮含量随工艺中氮气 /甲烷流... 采用俄歇电子能谱、原子力显微镜、拉曼散射分析、傅里叶红外光谱和红外椭圆偏振光谱等设备 ,对射频等离子增强化学气相沉积法制备的掺氮类金刚石薄膜的微观结构和红外光学性能进行了研究 .结果表明 ,薄膜中氮含量随工艺中氮气 /甲烷流量比的增加而增加并趋于饱和 .光谱中 CH键吸收峰 (2 85 9~ 310 0 cm- 1 )逐渐消失 ,而且 CNH键(16 0 0 cm- 1 )、C≡ N键 (2 2 0 0 cm- 1 )和 NH键 (32 5 0 cm- 1 )对应的红外吸收峰强度随氮含量的增加而增加 .拉曼散射中G峰向小波数方向位移和峰值展宽的现象说明薄膜中形成了非晶的氮化碳结构 ,与原子力显微镜显示的薄膜中富氮的非晶纳米颗粒相对应 .偏振光谱分析认为 ,富氮纳米颗粒的存在导致了薄膜在红外波段折射率由 1.8降低到 1. 展开更多
关键词 掺氮类金刚石薄膜 微观结构 红外光学性能 化学沉积 非晶氮化碳 富氮纳米颗粒
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P110钢在不同温度含饱和H_2S/CO_2腐蚀溶液中的腐蚀行为 被引量:11
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作者 刘飞 黄金营 +2 位作者 夏成宇 周仕明 邓天安 《腐蚀与防护》 CAS 北大核心 2016年第6期481-483,489,共4页
利用腐蚀失重试验,电化学试验和扫描电子显微镜等方法研究了不同温度下P110钢在含饱和H_2S/CO_2气体的5%NaCl溶液中的腐蚀行为。研究表明:随着温度的升高,P110钢的腐蚀速率呈现出了先增大后减小的规律;在含饱和H_2S/CO_2气体的5%NaCl溶... 利用腐蚀失重试验,电化学试验和扫描电子显微镜等方法研究了不同温度下P110钢在含饱和H_2S/CO_2气体的5%NaCl溶液中的腐蚀行为。研究表明:随着温度的升高,P110钢的腐蚀速率呈现出了先增大后减小的规律;在含饱和H_2S/CO_2气体的5%NaCl溶液中,由于温度升高促进了点蚀的发生,在较高温度时形成全面腐蚀,但温度的升高导致H_2S、CO_2气体的溶解度降低,抑制了点蚀的发生,形成厚而致密的腐蚀产物膜,使腐蚀速率随温度升高而降低。 展开更多
关键词 硫化氢 二氧化碳 温度 腐蚀速率 腐蚀产物膜
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在Si(111)上磁控溅射碳化硅薄膜的H_2退火效应 被引量:7
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作者 安霞 庄惠照 +2 位作者 杨莺歌 李怀祥 薛成山 《Journal of Semiconductors》 EI CAS CSCD 北大核心 2002年第6期593-598,共6页
用射频磁控溅射法在常温硅衬底上制备了碳化硅薄膜并研究了氢退火对薄膜的影响 .用傅里叶红外透射谱(FTIR)、X射线衍射 (XRD)、X光电子能谱 (XPS)、扫描电镜 (SEM)及原子力显微镜 (AFM)对薄膜样品进行了结构、组分和形貌分析 .结果表明 ... 用射频磁控溅射法在常温硅衬底上制备了碳化硅薄膜并研究了氢退火对薄膜的影响 .用傅里叶红外透射谱(FTIR)、X射线衍射 (XRD)、X光电子能谱 (XPS)、扫描电镜 (SEM)及原子力显微镜 (AFM)对薄膜样品进行了结构、组分和形貌分析 .结果表明 :高温退火后 Si C膜的晶化程度明显提高 。 展开更多
关键词 磁控溅射 碳化硅 薄膜 氢退火 碳纳米线碳化硅
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真空中不同转速和对偶对a-C:H膜摩擦学性能的影响 被引量:4
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作者 吴艳霞 李红轩 +4 位作者 吉利 冶银平 孙晓军 陈建敏 周惠娣 《中国表面工程》 EI CAS CSCD 北大核心 2012年第6期90-95,共6页
非晶碳氢(a-C∶H)薄膜作为空间润滑材料有很大的应用前景,它在真空中的摩擦磨损行为与掺杂元素、摩擦对偶、滑动速度等因素有关。采用中频非平衡磁控溅射法在AISI202不锈钢和p(111)单晶硅基体上沉积了厚度为1.3~1.6μm的a-C∶H膜以及Cr... 非晶碳氢(a-C∶H)薄膜作为空间润滑材料有很大的应用前景,它在真空中的摩擦磨损行为与掺杂元素、摩擦对偶、滑动速度等因素有关。采用中频非平衡磁控溅射法在AISI202不锈钢和p(111)单晶硅基体上沉积了厚度为1.3~1.6μm的a-C∶H膜以及Cr、MoS2掺杂的a-C∶H复合膜。采用球盘摩擦试验机对3种膜的真空摩擦学行为进行了研究,摩擦性能较好的薄膜在真空中进行了GCr15、Si3N4和C不同对偶以及100、500、1000r/min的不同转速摩擦实验。结果表明:在沉积气压为5.3×10-1 Pa,Ar和CH4的气体流量比为1∶1,单纯溅射石墨靶(溅射电流12A)的条件下,制备的a-C∶H薄膜在真空中的摩擦因数最低(0.005),寿命相对最长;对偶对a-C∶H膜的摩擦因数影响不大,但薄膜的耐磨寿命随着对偶硬度的增加而降低;随着转速的增加,a-C∶H膜的摩擦因数和耐磨寿命均降低。 展开更多
关键词 非晶碳氢膜 掺杂膜 对偶 转速
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沉积参数对含氢非晶碳膜结构及性能的影响 被引量:8
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作者 李明 王凤 +2 位作者 张艳 蔺增 巴德纯 《真空科学与技术学报》 EI CAS CSCD 北大核心 2008年第1期64-66,共3页
本文利用射频等离子体增强化学气相沉积(RF-PECVD)技术,以CH4、H2为气源,Ar为稀释气体,通过增加过渡层和改变输入功率和气体成分比例(CH4/H2),在不锈钢基底上制备了含氢非晶碳膜(a-C:H)。利用拉曼光谱(Raman)、X射线光电子能谱(XPS)、... 本文利用射频等离子体增强化学气相沉积(RF-PECVD)技术,以CH4、H2为气源,Ar为稀释气体,通过增加过渡层和改变输入功率和气体成分比例(CH4/H2),在不锈钢基底上制备了含氢非晶碳膜(a-C:H)。利用拉曼光谱(Raman)、X射线光电子能谱(XPS)、纳米显微硬度计和摩擦磨损试验机等研究手段对含氢非晶碳膜的形貌、结构、显微硬度和耐磨性进行了表征。Ramas光谱和XPS分析表明,薄膜是由sp2和sp3杂化组成的非晶碳膜。显微硬度和摩擦学测试表明,在较低射频功率和富氢等离子体中沉积的a-C:H膜表面光滑、结构致密,薄膜的硬度、摩擦系数、耐磨性和结合力等性能较好。 展开更多
关键词 含氢非晶碳膜 射频等离子体增强化学气相沉积 过渡层 硬度 摩擦磨损
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非晶碳氢薄膜结构及光学间隙 被引量:6
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作者 刘东平 李芳 +1 位作者 俞世吉 马腾才 《材料科学与工艺》 EI CAS CSCD 2000年第2期58-61,共4页
利用完全抑制网络结构 (FCN)对氢化非晶碳 (α -C :H)膜组成进行模拟计算 ,得出形成质密α -C :H膜条件是H、SP2 C和SP3 C在其三元相图中应在一个三角形区域内 .大量实验数据表明 ,模拟结果与实验结果相当吻合 .在α -C :H中主要存在氢... 利用完全抑制网络结构 (FCN)对氢化非晶碳 (α -C :H)膜组成进行模拟计算 ,得出形成质密α -C :H膜条件是H、SP2 C和SP3 C在其三元相图中应在一个三角形区域内 .大量实验数据表明 ,模拟结果与实验结果相当吻合 .在α -C :H中主要存在氢、四面体碳、乙烯、苯环和双苯等结构 ,它们相对含量在三角形区域内变化 .该理论模拟对薄膜光学间隙的实验分析给予了很好的解释 . 展开更多
关键词 氢化非晶碳膜 光学间隙 FCN 结构 DLC
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射频等离子体沉积非晶碳氢薄膜及其阻隔性能 被引量:5
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作者 张跃飞 张广秋 +2 位作者 葛袁静 陈光良 王瑜 《包装工程》 CAS CSCD 北大核心 2004年第4期177-180,共4页
 采用射频辉光放电等离子体化学气相沉积系统,,以甲烷和氩气作为工作气体在PET(聚对苯二甲酸乙二醇酯)片和玻璃片基上沉积了非晶碳氢薄膜,利用傅立叶变换红外光谱(FTIR)对碳氢薄膜的结构进行研究,并且通过透水蒸汽相对比较实验检测了PE...  采用射频辉光放电等离子体化学气相沉积系统,,以甲烷和氩气作为工作气体在PET(聚对苯二甲酸乙二醇酯)片和玻璃片基上沉积了非晶碳氢薄膜,利用傅立叶变换红外光谱(FTIR)对碳氢薄膜的结构进行研究,并且通过透水蒸汽相对比较实验检测了PET上沉积碳氢膜的阻隔性能,详细讨论了沉积工艺参数对碳氢薄膜结构和阻隔性能的影响。实验结果证明,沉积的薄膜越厚,碳氢膜的含量越高,阻隔性能越好,沉积碳氢膜的PET阻隔性比原始PET都有明显提高,当膜厚达900nm时,阻水蒸汽透过率可提高7倍。 展开更多
关键词 等离子体化学气相沉积 碳氢膜 阻隔性能
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含氢类金刚石碳膜的拉曼光谱洛伦兹分解 被引量:6
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作者 蔺增 巴德纯 王凤 《东北大学学报(自然科学版)》 EI CAS CSCD 北大核心 2007年第4期573-575,共3页
利用射频等离子体增强化学气相沉积(rf PECVD)工艺在不锈钢基底上制备a-C:H膜,利用激光Raman光谱表征所沉积碳膜的微观结构,特别是通过对拉曼谱图进行洛伦兹分解来评价所沉积碳膜的sp3含量,分析了沉积电压和过渡层对a-C:H膜生长过程及膜... 利用射频等离子体增强化学气相沉积(rf PECVD)工艺在不锈钢基底上制备a-C:H膜,利用激光Raman光谱表征所沉积碳膜的微观结构,特别是通过对拉曼谱图进行洛伦兹分解来评价所沉积碳膜的sp3含量,分析了沉积电压和过渡层对a-C:H膜生长过程及膜中sp3含量的影响.结果表明,利用拉曼光谱的洛伦兹分解能够有效分析a-C:H的结构特性,碳膜沉积过程中沉积电压和过渡层对a-C:H膜的生长均具有重要影响.在本实验条件下,以Ti/TiN/TiC为过渡层沉积电压为2500 V时所制备的a-C:H膜中的sp3含量最高. 展开更多
关键词 氢化类金刚石碳膜 等离子体增强化学气相沉积 拉曼光谱 洛伦兹分解
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氢气流量对类金刚石薄膜结构与性能的影响 被引量:3
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作者 刘磊 王涛 +3 位作者 何智兵 张玲 易勇 杜凯 《原子能科学技术》 EI CAS CSCD 北大核心 2016年第9期1664-1672,共9页
采用直流/射频耦合反应磁控溅射法在Si(100)衬底上成功制备出类金刚石(DLC)薄膜。利用表面轮廓仪、Raman光谱仪、X射线光电子能谱仪表征所制备薄膜在不同氢气流量下的沉积速率和化学结构,讨论了氢气流量对薄膜沉积速率和化学结构的影响... 采用直流/射频耦合反应磁控溅射法在Si(100)衬底上成功制备出类金刚石(DLC)薄膜。利用表面轮廓仪、Raman光谱仪、X射线光电子能谱仪表征所制备薄膜在不同氢气流量下的沉积速率和化学结构,讨论了氢气流量对薄膜沉积速率和化学结构的影响;利用纳米压痕技术及曲率弯曲法表征薄膜的力学性能;利用扫描电镜和原子力显微镜表征薄膜的表面形貌与粗糙度。研究表明:随着氢气流量的增加,所制备薄膜的沉积速率逐渐减小,而薄膜中sp3键的含量逐渐增大。当氢气流量为25mL/min时,薄膜中sp3键的含量为36.3%,薄膜的硬度和体弹性模量分别达到最大值17.5GPa和137GPa。同时,所制备薄膜的内应力均低于0.5GPa,有望成功制备出低内应力的高质量DLC厚膜。随着氢气流量的增加,DLC薄膜的表面变得更致密光滑,且表面均方根粗糙度由5.40nm降为1.46nm。 展开更多
关键词 反应磁控溅射 类金刚石薄膜 氢气流量 X射线光电子能谱 厚膜
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碳素材料表面吸附蛋白的红外光谱分析 被引量:2
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作者 李伯刚 那娟娟 +1 位作者 殷杰 尹光福 《生物医学工程学杂志》 EI CAS CSCD 北大核心 2006年第5期1052-1055,共4页
为探讨类金刚石薄膜(DLC)、金刚石薄膜(DF)和石墨不同血浆蛋白吸附特性的内在原因,对人血白蛋白(HSA)和纤维蛋白原(HFG)在三种碳素材料表面吸附前后进行了红外光谱分析。结果显示:通过氨基,在HSA与DLC、HFG与DF、HFG与石墨之间形成了氢... 为探讨类金刚石薄膜(DLC)、金刚石薄膜(DF)和石墨不同血浆蛋白吸附特性的内在原因,对人血白蛋白(HSA)和纤维蛋白原(HFG)在三种碳素材料表面吸附前后进行了红外光谱分析。结果显示:通过氨基,在HSA与DLC、HFG与DF、HFG与石墨之间形成了氢键,从而有力地支持并合理地解释了DLC具有较高的HSA吸附活性、DF和石墨则优先吸附HFG的前期研究结论。 展开更多
关键词 类金刚石薄膜(DLC) 金刚石薄膜(DF) 石墨 蛋白吸附 氢键
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过渡层对含氢非晶碳膜生长的影响 被引量:7
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作者 蔺增 巴德纯 《真空科学与技术学报》 EI CAS CSCD 北大核心 2006年第6期491-493,共3页
本文利用射频等离子体增强化学气相沉积(RF PECVD)工艺在不锈钢基底上制备了含氢非晶碳膜(a-C∶H膜)。在沉积碳膜之前,首先在基底表面预先沉积了Ti/TiC、Ti/TiN和Ti/TiN/TiC等过渡层以提高膜基结合力。利用激光Raman光谱分析了过渡层对... 本文利用射频等离子体增强化学气相沉积(RF PECVD)工艺在不锈钢基底上制备了含氢非晶碳膜(a-C∶H膜)。在沉积碳膜之前,首先在基底表面预先沉积了Ti/TiC、Ti/TiN和Ti/TiN/TiC等过渡层以提高膜基结合力。利用激光Raman光谱分析了过渡层对a-C∶H膜生长过程及膜中sp3含量的影响。实验结果表明,采用Ti/TiN/TiC过渡层时所制备的a-C∶H膜中sp3含量最多,同时膜基结合力最大。 展开更多
关键词 含氢非晶碳膜 过渡层 膜基结合力
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PMMA基底含氢非晶碳膜的结构和摩擦学性能 被引量:5
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作者 蔺增 李明 +3 位作者 吕少波 林铁源 巴德纯 In-Seop Lee 《材料研究学报》 EI CAS CSCD 北大核心 2008年第4期429-432,共4页
分别用磁控溅射和等离子体增强化学气相沉积方法在PMMA基底上沉积硅膜和含氢非晶碳(a-C:H)膜.用氩离子溅射硅靶制备硅膜,以甲烷和氢气为反应气体在不同自偏压下制备非晶碳膜.分别用原子力显微镜、X射线光电子能谱和紫外拉曼光谱表征薄... 分别用磁控溅射和等离子体增强化学气相沉积方法在PMMA基底上沉积硅膜和含氢非晶碳(a-C:H)膜.用氩离子溅射硅靶制备硅膜,以甲烷和氢气为反应气体在不同自偏压下制备非晶碳膜.分别用原子力显微镜、X射线光电子能谱和紫外拉曼光谱表征薄膜的形貌和结构,并分别用纳米压痕仪和栓盘摩擦磨损试验机测试其机械和摩擦学性能.结果表明,沉积碳膜的PMMA基底呈现出高硬度、低摩擦系数和低磨损率的特性.碳膜的显微结构、机械和摩擦学特性均显著依赖薄膜沉积过程中使用的自偏压,其摩擦系数和磨损率与其硬度和sp^3含量密切相关. 展开更多
关键词 无机非金属材料 含氢非晶碳膜 等离子体增强化学气相沉积 PMMA 自偏压 硬度 摩擦学性能
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