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Study on stability of hydrogenated amorphous silicon films 被引量:2
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作者 朱秀红 陈光华 +5 位作者 张文理 丁毅 马占洁 胡跃辉 何斌 荣延栋 《Chinese Physics B》 SCIE EI CAS CSCD 2005年第11期2348-2351,共4页
Hydrogenated amorphous silicon (a-Si:H) films with high and same order of magnitude photosensitivity (-10^5) but different stability were prepared by using microwave electron cyclotron resonance chemical vapour d... Hydrogenated amorphous silicon (a-Si:H) films with high and same order of magnitude photosensitivity (-10^5) but different stability were prepared by using microwave electron cyclotron resonance chemical vapour deposition system under the different deposition conditions. It was proposed that there was no direct correlation between the photosensitivity and the hydrogen content (CH) as well as H-Si bonding configurations, but for the stability, they were the critical factors. The experimental results indicated that higher substrate temperature, hydrogen dilution ratio and lower deposition rate played an important role in improving the microstructure of a-Si:H films. We used hydrogen elimination model to explain our experimental results. 展开更多
关键词 hydrogenated amorphous silicon (a-Si:H) films PHOTOSENSITIVITY STABILITY microstructure hydrogen elimination (HE) model
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Research on the optimum hydrogenated silicon thin films for application in solar cells 被引量:1
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作者 雷青松 吴志猛 +3 位作者 耿新华 赵颖 孙健 奚建平 《Chinese Physics B》 SCIE EI CAS CSCD 2006年第12期3033-3038,共6页
Hydrogenated silicon (Si:H) thin films for application in solar ceils were deposited by using very high frequency plasma enhanced chemical vapour deposition (VHF PECVD) at a substrate temperature of about 170 ℃,... Hydrogenated silicon (Si:H) thin films for application in solar ceils were deposited by using very high frequency plasma enhanced chemical vapour deposition (VHF PECVD) at a substrate temperature of about 170 ℃, The electrical, structural, and optical properties of the films were investigated. The deposited films were then applied as i-layers for p-i-n single junction solar cells. The current-voltage (I - V) characteristics of the cells were measured before and after the light soaking. The results suggest that the films deposited near the transition region have an optimum properties for application in solar cells. The cell with an i-layer prepared near the transition region shows the best stable performance. 展开更多
关键词 hydrogenated silicon thin film transition region Si:H thin film solar cell STABILITY
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Smooth Surface Morphology of Hydrogenated Amorphous Silicon Film Prepared by Plasma Enhanced Chemical Vapor Deposition 被引量:1
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作者 闫许 冯飞 +1 位作者 张进 王跃林 《Plasma Science and Technology》 SCIE EI CAS CSCD 2009年第5期569-575,共7页
Influence of the parameters of plasma enhanced chemical vapor deposition (PECVD) on the surface morphology of hydrogenated amorphous silicon (α-Si:H) film was investigated. The root-mean-square (RMS) roughness... Influence of the parameters of plasma enhanced chemical vapor deposition (PECVD) on the surface morphology of hydrogenated amorphous silicon (α-Si:H) film was investigated. The root-mean-square (RMS) roughness of the film was measured by atomic force microscope (AFM) and the relevant results were analyzed using the surface smoothing mechanism of film deposition. It is shown that an α-Si:H film with smooth surface morphology can be obtained by increasing the PH3/N2 gas flow rate for 10% in a high frequency (HF) mode. For high power, however, the surface morphology of the film will deteriorate when the Sill4 gas flow rate increases. Furthermore, optimized parameters of PECVD for growing the film with smooth surface were obtained to be Sill4:25 sccm (standard cubic centimeters per minute), At: 275 sccm, 10%PH3/N2:2 sccm, HF power: 15 W, pressure: 0.9 Torr and temperature: 350℃. In addition, for in thick fihn deposition on silicon substrate, a N20 and NH3 preprocessing method is proposed to suppress the formation of gas bubbles. 展开更多
关键词 hydrogenated amorphous silicon film surface roughness plasma enhancedchemical vapor deposition
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Characterization of doped hydrogenated nanocrystalline silicon films prepared by plasma enhanced chemical vapour deposition
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作者 王金良 毋二省 《Chinese Physics B》 SCIE EI CAS CSCD 2007年第3期848-853,共6页
The B- and P-doped hydrogenated nanocrystalline silicon films (nc-Si:H) are prepared by plasma-enhanced chemical vapour deposition (PECVD). The microstructures of doped nc-Si'H films are carefully and systematic... The B- and P-doped hydrogenated nanocrystalline silicon films (nc-Si:H) are prepared by plasma-enhanced chemical vapour deposition (PECVD). The microstructures of doped nc-Si'H films are carefully and systematically characterized by using high resolution electron microscopy (HREM), Raman scattering, x-ray diffraction (XRD), Auger electron spectroscopy (AES), and resonant nucleus reaction (RNR). The results show that as the doping concentration of PH3 increases, the average grain size (d) tends to decrease and the crystalline volume percentage (Xc) increases simultaneously. For the B-doped samples, as the doping concentration of B2H6 increases, no obvious change in the value of d is observed, but the value of Xc is found to decrease. This is especially apparent in the case of heavy B2H6 doped samples, where the films change from nanocrystalline to amorphous. 展开更多
关键词 PECVD doped hydrogenated nanocrystalline silicon film MICROSTRUCTURE
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Room Temperature Growth of Hydrogenated Amorphous Silicon Films by Dielectric Barrier Discharge Enhanced CVD
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作者 郭玉 张溪文 韩高荣 《Plasma Science and Technology》 SCIE EI CAS CSCD 2007年第2期177-180,共4页
Hydrogenated amorphous silicon (a-Si: H) films were deposited on Si (100) and glass substrates by dielectric barrier discharge enhanced chemical vapour deposition (DBD-CVD) in (SiH4+H2) atmosphere at room te... Hydrogenated amorphous silicon (a-Si: H) films were deposited on Si (100) and glass substrates by dielectric barrier discharge enhanced chemical vapour deposition (DBD-CVD) in (SiH4+H2) atmosphere at room temperature. Results of the thickness measurement, SEM (scanning electron microscope), Raman, and FTIR (Fourier transform infrared spectroscopy) show that with the increase in the applied peak voltage, the deposition rate and network order of the films increase, and the hydrogen bonding configurations mainly in di-hydrogen (Si-H2) and poly hydrogen (SiH2)n are introduced into the films. The UV-visible transmission spectra show that with the decrease in SiH4/ (SiHn+H2) the thin films' band gap shifts from 1.92 eV to 2.17 eV. These experimental results are in agreement with the theoretic analysis of the DBD discharge. The deposition of a-Si: H films by the DBD-CVD method as reported here for the first time is attractive because it allows fast deposition of a-Si: H films on large-area low-melting-point substrates and requires only a low cost of production without additional heating or pumping equipment. 展开更多
关键词 DBD-CVD room temperature hydrogenated amorphous silicon films
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SUBSTRATE EFFECT ON HYDROGENATED MICROCRYSTALLINE SILICON FILMS DEPOSITED WITH VHF-PECVD TECHNIQUE
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作者 H.D. Yang 《Acta Metallurgica Sinica(English Letters)》 SCIE EI CAS CSCD 2006年第4期295-300,共6页
Raman spectra and scanning electron microscope (SEM) techniques were used to determine the structural properties of microcrb'stalline silicon (μc-Si:H) films deposited on different substrates with the very high... Raman spectra and scanning electron microscope (SEM) techniques were used to determine the structural properties of microcrb'stalline silicon (μc-Si:H) films deposited on different substrates with the very high frequency plasma-enhanced chemical vapor deposition (VHF-PECVD) technique. Using the Raman spectra, the values of crystalline volume fraction Xc and average grain size d are 86%, 12.3nm; 65%, 5.45nm; and 38%, 4.05nm, for single crystalline silicon wafer, coming 7059 glass, and general optical glass substrates, respectively. The SEM images further demonstrate the substrate effect on the film surface roughness. For the single crystalline silicon wafer and Coming 7059 glass, the surfaces of the μc-Si:H films are fairly smooth because of the homogenous growth or h'ttle lattice mismatch. But for general optical glass, the surface of the μ-Si: H film is very rough, thus the growing surface roughness affects the crystallization process and determines the average grain size of the deposited material. Moreover, with the measurements of thickness, photo and dark conductivity, photosensitivity and activation energy, the substrate effect on the deposition rate, optical and electrical properties of the μc-Si:H thin films have also been investigated. On the basis of the above results, it can be concluded that the substrates affect the initial growing layers acting as a seed for the formation of a crystalline-like material and then the deposition rates, optical and electrical properties are also strongly influenced, hence, deposition parameter optimization is the key method that can be used to obtain a good initial growing layer, to realize the deposition of μc-Si:H films with device-grade quality on cheap substrates such as general glass. 展开更多
关键词 hydrogenated microcrystalline silicon film VHF-PECVD (very high frequency plasma-enhanced chemical vapor deposition) substrate effect
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Effects of ratio of hydrogen flow on microstructure of hydrogenated microcrystalline silicon films deposited by magnetron sputtering at 100 ℃
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作者 WANG Lin-qing ZHOU Yong-tao +1 位作者 WANG Jun-jun LIU Xue-qin 《Journal of Central South University》 SCIE EI CAS CSCD 2019年第10期2661-2667,共7页
Hydrogenated microcrystalline silicon(μc-Si:H)films were prepared on glass and silicon substrates by radio frequency magnetron sputtering at 100°C using a mixture of argon(Ar)and hydrogen(H2)gasses as precursor ... Hydrogenated microcrystalline silicon(μc-Si:H)films were prepared on glass and silicon substrates by radio frequency magnetron sputtering at 100°C using a mixture of argon(Ar)and hydrogen(H2)gasses as precursor gas.The effects of the ratio of hydrogen flow(H2/(Ar+H2)%)on the microstructure were evaluated.Results show that the microstructure,bonding structure,and surface morphology of theμc-Si:H films can be tailored based on the ratio of hydrogen flow.An amorphous to crystalline phase transition occurred when the ratio of hydrogen flow increased up to 50%.The crystallinity increased and tended to stabilize with the increase in ratio of hydrogen flow from 40%to 70%.The surface roughness of thin films increased,and total hydrogen content decreased as the ratio of hydrogen flow increased.Allμc-Si:H films have a preferred(111)orientation,independent of the ratio of hydrogen flow.And theμc-Si:H films had a dense structure,which shows their excellent resistance to post-oxidation. 展开更多
关键词 hydrogenated microcrystalline silicon films radio frequency magnetron sputtering ratio of hydrogen flow low temperature MICROSTRUCTURE
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New Numerical Method to Calculate the True Optical Absorption of Hydrogenated Nanocrystalline Silicon Thin Films
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作者 Fatiha Besahraoui Larbi Chahed +1 位作者 Yahia Bouizem Jamal Dine Sib 《World Journal of Nano Science and Engineering》 2012年第1期1-5,共5页
The enhanced optical absorption measured by Constant Photocurrent Method (CPM) of hydrogenated nanocrystalline silicon thin films is due mainly to bulk and/or surface light scattering effects. A new numerical method i... The enhanced optical absorption measured by Constant Photocurrent Method (CPM) of hydrogenated nanocrystalline silicon thin films is due mainly to bulk and/or surface light scattering effects. A new numerical method is presented to calculate both true optical absorption and scattering coefficient from CPM absorption spectra of nanotextured nano-crystalline silicon films. Bulk and surface light scattering contributions can be unified through the correlation obtained between the scattering coefficient and surface roughness obtained using our method. 展开更多
关键词 Solution hydrogenated NANOCRYSTALLINE silicon Constant PHOTOCURRENT Method Optical Absorption Bulk Light Scattering Surface ROUGHNESS film Thickness
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Effect of Hydrogen Dilution on Growth of Silicon Nanocrystals Embedded in Silicon Nitride Thin Film by Plasma-Enhanced CVD
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作者 丁文革 甄兰芳 +3 位作者 张江勇 李亚超 于威 傅广生 《Plasma Science and Technology》 SCIE EI CAS CSCD 2007年第5期599-602,共4页
An investigation was conducted into the effect of hydrogen dilution on the microstructure and optical properties of silicon nanograins embedded in silicon nitride (Si/SiNx) thin film deposited by the helicon wave pl... An investigation was conducted into the effect of hydrogen dilution on the microstructure and optical properties of silicon nanograins embedded in silicon nitride (Si/SiNx) thin film deposited by the helicon wave plasma-enhanced chemical vapour deposition technique. With Ar-diluted SiH4 and N2 as the reactant gas sources in the fabrication of thin film, the film was formed at a high deposition rate. There was a high density of defect at the amorphous silicon (a-Si)/SiNx interface and a relative low optical gap in the film. An addition of hydrogen into the reactant gas reduced the film deposition rate sharply. The silicon nanograins in the SiNx matrix were in a crystalline state, and the density of defects at the silicon nanocrystals (nc-Si)/SiNx interface decreased significantly and the optical gap of the films widened. These results suggested that hydrogen activated by the plasma could not only eliminate in the defects between the interface of silicon nanograins and SiNx matrix, but also helped the nanograins transform from the amorphous into crystalline state. By changing the hydrogen dilution ratio in the reactant gas sources, a tunable band gap from 1.87 eV to 3.32 eV was obtained in the Si/SiNx film. 展开更多
关键词 hydrogen dilution silicon nanocrystals silicon nitride film
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Effect of hydrogen content on dielectric strength of the silicon nitride film deposited by ICP-CVD
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作者 Yudong Zhang Jiale Tang +8 位作者 Yongjie Hu Jie Yuan Lulu Guan Xingyu Li Hushan Cui Guanghui Ding Xinying Shi Kaidong Xu Shiwei Zhuang 《Chinese Physics B》 SCIE EI CAS CSCD 2021年第4期550-554,共5页
The inductively coupled plasma chemical vapor deposition(ICP-CVD) deposited silicon nitride(SiN_(x)) thin film was evaluated for its application as the electrical insulating film for a capacitor device.In order to ach... The inductively coupled plasma chemical vapor deposition(ICP-CVD) deposited silicon nitride(SiN_(x)) thin film was evaluated for its application as the electrical insulating film for a capacitor device.In order to achieve highest possible dielectric strength of SiN_(x),the process parameters of ICP-CVD were carefully tuned to control hydrogen in SiN_(x) films by means of tuning N_(2)/SiH_(4) ratio and radio frequency(RF) power.Besides electrical measurements,the hydrogen content in the films was measured by dynamic secondary ion mass spectrometry(D-SIMS).Fourier transform infrared spectroscopy(FTIR) and micro Raman spectroscopy were used to characterize the SiN_(x) films by measuring Si-H and N-H bonds’ intensities.It was found that the more Si-H bonds lead to the higher dielectric strength. 展开更多
关键词 dielectric strength silicon nitride film inductively coupled plasma chemical vapor deposition(ICP-CVD) hydrogen content
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n-nc-Si:H低温制备工艺及其在柔性钙钛矿太阳电池中的应用
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作者 靳果 王记昌 闫奇 《河南科技》 2024年第9期83-87,共5页
【目的】为在低温工艺下制备出适用于柔性钙钛矿太阳电池的高性能电子传输层,需要对电子传输层材料及制备条件进行研究。【方法】将n型氢化纳米晶硅薄膜作为柔性钙钛矿太阳电池电子传输层,研究衬底温度对薄膜性能的影响,并优化电子传输... 【目的】为在低温工艺下制备出适用于柔性钙钛矿太阳电池的高性能电子传输层,需要对电子传输层材料及制备条件进行研究。【方法】将n型氢化纳米晶硅薄膜作为柔性钙钛矿太阳电池电子传输层,研究衬底温度对薄膜性能的影响,并优化电子传输层与钙钛矿层界面处理工艺和结构。【结果】得到暗电导率、光透过率、表面形貌适用于柔性钙钛矿太阳电池电子传输层的n型氢化纳米晶硅薄膜低温制备条件,经过界面优化处理的柔性钙钛矿太阳电池转换效率达到14.66%。【结论】在低温工艺下制备出了高性能的电子传输层及柔性钙钛矿太阳电池,对进一步开展叠层钙钛矿太阳电池的研究具有指导意义。 展开更多
关键词 柔性钙钛矿太阳电池 n-nc-Si:H 衬底温度 薄膜性能 界面优化
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Fractal characteristics of surface morphology for hydrogenated silicon films
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作者 何宇亮 万明芳 +2 位作者 袁凯华 戎霭伦 魏希文 《Chinese Science Bulletin》 SCIE EI CAS 1996年第19期1659-1665,共7页
Hydrogenated nanocrystalline silicon films (nc-Si:H) are a developing novel man-made functional semiconductor material in recent years. Their strange microstructure and physical properties of nc-Si:H films are attract... Hydrogenated nanocrystalline silicon films (nc-Si:H) are a developing novel man-made functional semiconductor material in recent years. Their strange microstructure and physical properties of nc-Si:H films are attracting our attention. We have used the conventional structure analysis procedures, such as X-ray diffraction pattern, Raman scattering spectrum, high resolution transmission electron microscopy (HREM), and the scanning tunnelling microscope (STM), to analyze their microstructure. Since Mandelbrot proposed the fractal theory in 1982, it has become a quantitatively characterizing means to distinguish the microstructure morphology of materials. Recently, the fractal 展开更多
关键词 micro-crystalline silicon filmS nano-crystalline silicon filmS FRACTAL morphology.
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Emitter layer optimization in heterojunction bifacial silicon solar cells
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作者 Adnan Shariah Feda Mahasneh 《Journal of Semiconductors》 EI CAS CSCD 2022年第12期65-71,共7页
Silicon solar cells continue to dominate the market,due to the abundance of silicon and their acceptable efficiency.The heterojunction with intrinsic thin layer(HIT)structure is now the dominant technology.Increasing ... Silicon solar cells continue to dominate the market,due to the abundance of silicon and their acceptable efficiency.The heterojunction with intrinsic thin layer(HIT)structure is now the dominant technology.Increasing the efficiency of these cells could expand the development choices for HIT solar cells.We presented a detailed investigation of the emitter a-Si:H(n)lay-er of a p-type bifacial HIT solar cell in terms of characteristic parameters which include layer doping concentration,thickness,band gap width,electron affinity,hole mobility,and so on.Solar cell composition:(ZnO/nc-Si:H(n)/a-Si:H(i)/c-Si(p)/a-Si:H(i)/nc-Si:H(p)/ZnO).The results reveal optimal values for the investigated parameters,for which the highest computed efficiency is 26.45%when lighted from the top only and 21.21%when illuminated from the back only. 展开更多
关键词 HIT solar cells bifacial solar cells nano-crystalline silicon films gradient doping parameter optimization
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Characterization and Tribological Behavior of Octadecene,Dodecene and Undecenoic Acid Films on Si Substrate
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作者 Jinfang ZHOU+ and Shengrong YANGState Key Laboratory of Solid Lubrication, Lanzhou Institute of Chemical Physics, Chinese Academy of Sciences, Lanzhou730000, China 《Journal of Materials Science & Technology》 SCIE EI CAS CSCD 2005年第5期671-674,共4页
The films of octadecene, dodecene, and undecenoic acid were prepared on H-terminated Si surface in the presence of ultraviolet irradiation. The resulted films were characterized with water-contact angle measurement an... The films of octadecene, dodecene, and undecenoic acid were prepared on H-terminated Si surface in the presence of ultraviolet irradiation. The resulted films were characterized with water-contact angle measurement and infrared spectroscopy. The friction-reducing behavior of the prepared films was examined on a static-dynamic friction coefficient measurement apparatus and on an atomic force microscope. It was found that all the reacted films on the Si substrate showed good friction-reducing ability; especially, the film of the octadecene exhibited the best friction-reducing ability. This was attributed to the transfer of the reacted films onto the counter face with formation of a transfer film on the counterpart surface, which led to the transformation of the sliding between the reacted films and the hard ceramic to fiat between the reacted films and its transfer film on the counterpart surface. The macroscopic and microscopic friction behaviors of the prepared films were dependent on their molecular chain lengths. Thus the octadecene reacted film with the highest degree of ordering arrangement showed the best friction-reducing and antiwear abilities in sliding against Si3N4. 展开更多
关键词 Alkese Reaction film hydrogen-terminated silicon Tribological behavior
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晶硅异质结太阳电池nc-Si:H/nc-SiOx:H叠层窗口层研究
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作者 杨煜豪 刘文柱 +3 位作者 张丽平 孟凡英 高彦峰 刘正新 《太阳能学报》 EI CAS CSCD 北大核心 2023年第8期203-207,共5页
该研究制备高电导、高透明的磷掺杂氢化纳米晶硅氧(nc-Si Ox:H)薄膜,应用于晶硅异质结(SHJ)太阳电池的窗口层以替代传统的氢化非晶硅(a-Si:H)薄膜。与以a-Si:H薄膜为窗口层的电池相比,短路电流密度提高0.5 m A/cm^(2),达到38.5 m A/cm^(... 该研究制备高电导、高透明的磷掺杂氢化纳米晶硅氧(nc-Si Ox:H)薄膜,应用于晶硅异质结(SHJ)太阳电池的窗口层以替代传统的氢化非晶硅(a-Si:H)薄膜。与以a-Si:H薄膜为窗口层的电池相比,短路电流密度提高0.5 m A/cm^(2),达到38.5 m A/cm^(2),填充因子为82.7%,光电转换效率为23.5%。实验发现,在nc-Si Ox:H薄膜沉积前对本征非晶硅层表面进行处理,沉积1 nm纳米晶硅(nc-Si:H)种子层,可改善nc-Si Ox:H薄膜的晶化率,降低薄膜中的非晶相含量。与单层nc-Si Ox:H窗口层的电池相比,nc-Si:H/nc-Si Ox:H叠层结构提高电池填充因子,达到83.4%,光电转换效率增加了0.3%,达到23.8%。 展开更多
关键词 纳米晶材料 太阳电池 薄膜生长 晶硅异质结太阳电池 纳米晶硅氧(nc-SiOx:H) 界面处理
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本征氢化非晶硅薄膜厚度对其钝化性能和HIT太阳电池电性能的影响
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作者 杜敬良 张会学 +3 位作者 姜利凯 勾宪芳 刘海涛 王丽婷 《太阳能》 2023年第11期25-32,共8页
以异质结(HIT)太阳电池的本征氢化非晶硅薄膜为研究对象,该HIT太阳电池采用n型硅片作为晶硅衬底,其n型电子传输层(下文简称为“n面”)为入光侧,p型空穴传输层(下文简称为“p面”)为背光侧。首先研究了n面和p面本征氢化非晶硅薄膜的厚度... 以异质结(HIT)太阳电池的本征氢化非晶硅薄膜为研究对象,该HIT太阳电池采用n型硅片作为晶硅衬底,其n型电子传输层(下文简称为“n面”)为入光侧,p型空穴传输层(下文简称为“p面”)为背光侧。首先研究了n面和p面本征氢化非晶硅薄膜的厚度对膜层钝化性能和光透过率的影响,然后进一步研究了n面和p面本征氢化非晶硅薄膜不同厚度匹配设计对HIT太阳电池电性能的影响,并选出了最优厚度匹配方案。研究结果表明:1)n面本征氢化非晶硅薄膜的厚度越薄,n面非晶硅膜层的光透过率越高,但钝化效果会变差;当厚度达到5 nm时,硅片的少子寿命趋于稳定。2)在n面本征氢化非晶硅薄膜厚度一定的情况下,随着p面本征氢化非晶硅薄膜的厚度变厚,硅片的少子寿命先快速增加,当厚度达到9 nm时,硅片的少子寿命趋于稳定;当厚度大于9 nm时,制备的HIT太阳电池的短路电流和填充因子均下降,表明其串联电阻增大,导致光电转换效率降低。3)当n面和p面本征氢化非晶硅薄膜的厚度分别为5、9 nm时,n面的钝化效果和光透过率匹配较好,p面的钝化效果和电阻率匹配最优,即为最优厚度匹配方案;此方案制备得到的HIT太阳电池的光电转换效率达到最高,为24.59%。 展开更多
关键词 异质结太阳电池 板式PECVD设备 本征氢化非晶硅薄膜 钝化 少子寿命 光透过率 电性能
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基于反射和透射光谱的氢化非晶硅薄膜厚度及光学常量计算 被引量:10
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作者 丁文革 苑静 +3 位作者 李文博 李彬 于威 傅广生 《光子学报》 EI CAS CSCD 北大核心 2011年第7期1096-1100,共5页
采用紫外-可见透射光谱仪测量了对靶磁控溅射沉积法制备的氢化非晶硅(a-Si:H)薄膜的透射光谱和反射光谱.利用T/(1-R)方法来确定薄膜的吸收系数,进而得到薄膜的消光系数;通过拟合薄膜透射光谱干涉极大值和极小值的包络线来确定薄膜折射... 采用紫外-可见透射光谱仪测量了对靶磁控溅射沉积法制备的氢化非晶硅(a-Si:H)薄膜的透射光谱和反射光谱.利用T/(1-R)方法来确定薄膜的吸收系数,进而得到薄膜的消光系数;通过拟合薄膜透射光谱干涉极大值和极小值的包络线来确定薄膜折射率和厚度的初始值,并利用干涉极值公式进一步优化薄膜的厚度值和折射率;利用柯西公式对得到的薄膜折射率进行拟合,给出了a-Si:H薄膜的色散关系曲线.为了验证该方法确定的薄膜厚度和光学常量的可靠性,将理论计算得到的透射光谱与实验数据进行了比较,结果显示两条曲线基本重合,可见这是确定a-Si:H薄膜厚度及光学常量的一种有效方法. 展开更多
关键词 氢化非晶硅 透射谱 薄膜厚度 光学常量
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氢原子在Cat-CVD法制备多晶硅薄膜中的作用 被引量:4
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作者 邝俊峰 付国柱 +4 位作者 高博 高文涛 黄金英 廖燕平 荆海 《液晶与显示》 CAS CSCD 2004年第6期450-454,共5页
采用钨丝催化化学气相沉积(Cat CVD)方法制备多晶硅(p Si)薄膜,研究氢气稀释率(FR(H2)/(FR(H2)+FR(SiH4))对制备多晶硅薄膜的影响。XRD和喇曼光谱分析分别显示(111)面取向的多晶硅峰及喇曼频移为520cm-1多晶硅峰的强度随氢气稀释率的增... 采用钨丝催化化学气相沉积(Cat CVD)方法制备多晶硅(p Si)薄膜,研究氢气稀释率(FR(H2)/(FR(H2)+FR(SiH4))对制备多晶硅薄膜的影响。XRD和喇曼光谱分析分别显示(111)面取向的多晶硅峰及喇曼频移为520cm-1多晶硅峰的强度随氢气稀释率的增加而增强,由喇曼光谱计算的结晶度也有同样的趋势。通过分析测试结果得出,氢原子以表面脱氢、刻蚀弱的Si—Si键,及进入晶格内部进行深度脱氢等方式改善薄膜材料的结晶度。 展开更多
关键词 多晶硅薄膜 氢原子 催化化学气相沉积
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氢稀释对纳米晶硅薄膜晶化特性的影响及薄膜生长机理 被引量:3
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作者 于威 詹小舟 +3 位作者 李彬 徐艳梅 李晓苇 傅广生 《光子学报》 EI CAS CSCD 北大核心 2012年第8期927-931,共5页
以SiH4与H2作为前驱气体,采用射频等离子增强化学气相沉积技术制备了纳米晶硅薄膜.利用Raman散射和红外吸收光谱等技术,对不同氢稀释比条件下薄膜的微观结构和键合特性进行了研究.结果表明,随着氢稀释比增加,薄膜的晶化率明显提高,而氢... 以SiH4与H2作为前驱气体,采用射频等离子增强化学气相沉积技术制备了纳米晶硅薄膜.利用Raman散射和红外吸收光谱等技术,对不同氢稀释比条件下薄膜的微观结构和键合特性进行了研究.结果表明,随着氢稀释比增加,薄膜的晶化率明显提高,而氢稀释比过高时,薄膜晶化率呈现减少趋势.红外吸收光谱分析表明,纳米晶硅薄膜中氢的键合模式与薄膜的晶化特性密切相关.随着氢稀释比增加,薄膜中整体氢含量和SiH2键合密度明显减少,而在高氢稀释比条件下,氢稀释比增加导致薄膜中SiH2键合密度和整体氢含量增加. 展开更多
关键词 纳米晶硅薄膜 晶化率 氢稀释 生长机理
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微晶硅锗薄膜作为近红外光吸收层在硅基薄膜太阳电池中的应用 被引量:5
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作者 曹宇 薛磊 +3 位作者 周静 王义军 倪牮 张建军 《物理学报》 SCIE EI CAS CSCD 北大核心 2016年第14期209-216,共8页
采用射频等离子体增强化学气相沉积技术,制备了具有一定晶化率不同Ge含量的氢化微晶硅锗(μcSi1-xGex:H)薄膜.通过Ⅹ射线荧光谱、拉曼光谱、X射线衍射谱、傅里叶红外谱、吸收系数谱和电导率的测试,表征了μc-Si_(1-x)Ge_x:H的材料微结构... 采用射频等离子体增强化学气相沉积技术,制备了具有一定晶化率不同Ge含量的氢化微晶硅锗(μcSi1-xGex:H)薄膜.通过Ⅹ射线荧光谱、拉曼光谱、X射线衍射谱、傅里叶红外谱、吸收系数谱和电导率的测试,表征了μc-Si_(1-x)Ge_x:H的材料微结构随Ge含量的演变.研究表明:提高Ge含量可以增强μc-Si_(1-x)Ge_x:H薄膜的吸收系数.将其应用到硅基薄膜太阳电池的本征层中可以有效提高电池的短路电流密度(J_(sc)).特别是在电池厚度较薄或陷光不充分的情况下,长波响应的提高会更为显著.应用ZnO衬底后,在Ge含量分别为9%和27%时,μc-Si_(1-x)Ge_x:H太阳电池的转换效率均超过了7%.最后,将μc-Si_(1-x)Ge_x:H太阳电池应用在双结叠层太阳电池的底电池中,发现μc-Si_(0.73)Ge_(0.27):H底电池在厚度为800 nm时即可得到比1700 nm厚微晶硅(μc-Si:H)底电池更高的长波响应.以上结果体现μc-Si_(1-x)Ge_x:H太阳电池作为高效近红外光吸收层,在硅基薄膜太阳电池中应用的前景. 展开更多
关键词 氢化微晶硅锗 近红外响应 硅基薄膜太阳电池 等离子体增强化学气相沉积
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