由掩模、步进机、光刻工艺和计量仪器产生的误差影响着光刻套准。为此,推出一种检查掩模自身精度的新方法,它能为圆片加工提供更实用的基准,并可反映出其它误差量。研究表明,掩模厚度是决定掩模上图形位置精度的一个关键因素。衬底越厚...由掩模、步进机、光刻工艺和计量仪器产生的误差影响着光刻套准。为此,推出一种检查掩模自身精度的新方法,它能为圆片加工提供更实用的基准,并可反映出其它误差量。研究表明,掩模厚度是决定掩模上图形位置精度的一个关键因素。衬底越厚,自身的畸变越小,掩模制作中连续加工引起的变形越小。尽管厚衬底掩模的像场几乎比薄衬底大1 倍,但6-35 m m 厚度石英衬底掩模的置位图形比2-29 m m 厚度的更准确。离轴照明(OAI) 是影响套准的另一原因,它可引发镜头像差,通过芯片倍率和旋转控制可以补偿这种误差。接触孔制作的套准控制非常重要,但相当困难,多层构造的接触孔套准控制更难。目前试制了一种分别控制x、y 向套准的方法。展开更多
Hanson and Mond have grven sets of necessary and sufficient conditions for optimality in constrained optimization by introducing classes of generalized functions, called type Ⅰ functions. Recently, Bector definded un...Hanson and Mond have grven sets of necessary and sufficient conditions for optimality in constrained optimization by introducing classes of generalized functions, called type Ⅰ functions. Recently, Bector definded univex functions, a new class of functions that unifies several concepts of generalized convexity. In this paper, additional conditions are attached to the Kuhn Tucker conditions giving a set of conditions which are both necessary and sufficient for optimality in constrained optimization, under appropriate constraint qualifications.展开更多
The /-V-（T） characteristic curves of p-n junctions with the forward voltage as the independent variable, the logarithm of forward current as the dependent variable, and the junction temperature as the parameter, alm...The /-V-（T） characteristic curves of p-n junctions with the forward voltage as the independent variable, the logarithm of forward current as the dependent variable, and the junction temperature as the parameter, almost converge at one point in the first quadrant. The voltage corresponding with the convergence point nearly equals the bandgap of the semiconductor material. This convergence point can be used to obtain the I-V characteristic curve at any temperature.展开更多
A new scheme of direct adaptive fuzzy controller for a class of nonlinear systems with unknown triangular control gain structure is proposed. The design is based on the principle of sliding mode control and the approx...A new scheme of direct adaptive fuzzy controller for a class of nonlinear systems with unknown triangular control gain structure is proposed. The design is based on the principle of sliding mode control and the approximation capability of the first type fuzzy systems. By introducing integral-type Lyapunov function and adopting the adaptive compensation term of optimal approximation error, the closed-loop control system is proved to be globally stable, with tracking error converging to zero. Simulation results demonstrate the effectiveness of the approach.展开更多
文摘由掩模、步进机、光刻工艺和计量仪器产生的误差影响着光刻套准。为此,推出一种检查掩模自身精度的新方法,它能为圆片加工提供更实用的基准,并可反映出其它误差量。研究表明,掩模厚度是决定掩模上图形位置精度的一个关键因素。衬底越厚,自身的畸变越小,掩模制作中连续加工引起的变形越小。尽管厚衬底掩模的像场几乎比薄衬底大1 倍,但6-35 m m 厚度石英衬底掩模的置位图形比2-29 m m 厚度的更准确。离轴照明(OAI) 是影响套准的另一原因,它可引发镜头像差,通过芯片倍率和旋转控制可以补偿这种误差。接触孔制作的套准控制非常重要,但相当困难,多层构造的接触孔套准控制更难。目前试制了一种分别控制x、y 向套准的方法。
文摘Hanson and Mond have grven sets of necessary and sufficient conditions for optimality in constrained optimization by introducing classes of generalized functions, called type Ⅰ functions. Recently, Bector definded univex functions, a new class of functions that unifies several concepts of generalized convexity. In this paper, additional conditions are attached to the Kuhn Tucker conditions giving a set of conditions which are both necessary and sufficient for optimality in constrained optimization, under appropriate constraint qualifications.
文摘The /-V-（T） characteristic curves of p-n junctions with the forward voltage as the independent variable, the logarithm of forward current as the dependent variable, and the junction temperature as the parameter, almost converge at one point in the first quadrant. The voltage corresponding with the convergence point nearly equals the bandgap of the semiconductor material. This convergence point can be used to obtain the I-V characteristic curve at any temperature.
基金The National Natural Science Foundation of PRC (60074013) the Natural Science Foundation of Education Bureau of Jiangsu Province (00KJB510006 & 00KJB470006).
文摘A new scheme of direct adaptive fuzzy controller for a class of nonlinear systems with unknown triangular control gain structure is proposed. The design is based on the principle of sliding mode control and the approximation capability of the first type fuzzy systems. By introducing integral-type Lyapunov function and adopting the adaptive compensation term of optimal approximation error, the closed-loop control system is proved to be globally stable, with tracking error converging to zero. Simulation results demonstrate the effectiveness of the approach.
