In the high precision image measurement system, the verticality error between the axis of the shooting system and the measured object can bring error of the measurement result. The high demand of the system’s vertica...In the high precision image measurement system, the verticality error between the axis of the shooting system and the measured object can bring error of the measurement result. The high demand of the system’s vertical degree is raised by measure system due to the demands of high precision and disposable full field imaging in the micro-parts imaging measurement. The existing method of optical axis verticality detection cannot meet the demand all. In order to achieve the high-precision adjustment of the system optical axis, the algorithm of detecting verticality based on regional image definition is proposed. First, the objected standard image is divided into fixed area. Then, the object plane is moved from the downside to the upside of the focus plane, meanwhile, recording the definition function values of each standard image region at each step, and fitting out the clearest positions of the regions. Finally, according to the inter-regional relations between the locations and the height difference of the each regional clearest position, the small angle between the optical axis and the measured surface can be calculated. The experiment is based on the given image of lithography template with the scale of 10 μm as move unit, and the results show that this method effective reduced the small angle between the system optical axis and the measured body in high-precision image measuring system, the evaluation accuracy is less than 0.1°, meeting the requirements in high-precision measurement. The proposed method of detecting verticality based on regional image definition can evaluate the verticality error between the axis of the shooting system and the measured object accurately, effectively and conveniently.展开更多
Image definition measurement plays an important role in various image processing applications.And a reliable objective image definition metrics is critical for evaluating the definition of the restored image.In this p...Image definition measurement plays an important role in various image processing applications.And a reliable objective image definition metrics is critical for evaluating the definition of the restored image.In this paper,a novel image distortion metric based on minimal Total Bounded Variation(TBV) is presented.It is clarified that when the restored image approximates to the original clear image,the smaller the TBV is,the better the definition of the restored image is.Furthermore,the difference between the restored image and the original clear image is the smallest when the TBV is minimum.In numerical results,the TBV of the original clear image,blur image and restored image are presented and compared,and the results demonstrate the validity of the distortion metric proposed.展开更多
基金supported by Major Science and Technology Funded Project of National High-grad CNC of China (Grant No. 2009ZX04014-092)Tianjin Municipal Key Natural Science Foundation of China (Grant No. 09JCZDJC26700)
文摘In the high precision image measurement system, the verticality error between the axis of the shooting system and the measured object can bring error of the measurement result. The high demand of the system’s vertical degree is raised by measure system due to the demands of high precision and disposable full field imaging in the micro-parts imaging measurement. The existing method of optical axis verticality detection cannot meet the demand all. In order to achieve the high-precision adjustment of the system optical axis, the algorithm of detecting verticality based on regional image definition is proposed. First, the objected standard image is divided into fixed area. Then, the object plane is moved from the downside to the upside of the focus plane, meanwhile, recording the definition function values of each standard image region at each step, and fitting out the clearest positions of the regions. Finally, according to the inter-regional relations between the locations and the height difference of the each regional clearest position, the small angle between the optical axis and the measured surface can be calculated. The experiment is based on the given image of lithography template with the scale of 10 μm as move unit, and the results show that this method effective reduced the small angle between the system optical axis and the measured body in high-precision image measuring system, the evaluation accuracy is less than 0.1°, meeting the requirements in high-precision measurement. The proposed method of detecting verticality based on regional image definition can evaluate the verticality error between the axis of the shooting system and the measured object accurately, effectively and conveniently.
基金supported by the Fund of National Science & Technology monumental projects under Grants No.2012ZX03005012,No. 2011ZX03005-004-03,No.2009ZX03003-007
文摘Image definition measurement plays an important role in various image processing applications.And a reliable objective image definition metrics is critical for evaluating the definition of the restored image.In this paper,a novel image distortion metric based on minimal Total Bounded Variation(TBV) is presented.It is clarified that when the restored image approximates to the original clear image,the smaller the TBV is,the better the definition of the restored image is.Furthermore,the difference between the restored image and the original clear image is the smallest when the TBV is minimum.In numerical results,the TBV of the original clear image,blur image and restored image are presented and compared,and the results demonstrate the validity of the distortion metric proposed.
