This paper describes a promising route for the exploration and development of 3.0 THz sensing and imaging with FET-based power detectors in a standard 65 nm CMOS process.Based on the plasma-wave theory proposed by Dya...This paper describes a promising route for the exploration and development of 3.0 THz sensing and imaging with FET-based power detectors in a standard 65 nm CMOS process.Based on the plasma-wave theory proposed by Dyakonov and Shur,we designed high-responsivity and low-noise multiple detectors for monitoring a pulse-mode 3.0 THz quantum cascade laser(QCL).Furthermore,we present a fully integrated high-speed 32×32-pixel 3.0 THz CMOS image sensor(CIS).The full CIS measures 2.81×5.39 mm^(2) and achieves a 423 V/W responsivity(Rv)and a 5.3 nW integral noise equivalent power(NEP)at room temperature.In experiments,we demonstrate a testing speed reaching 319 fps under continuous-wave(CW)illumina-tion of a 3.0 THz QCL.The results indicate that our terahertz CIS has excellent potential in cost-effective and commercial THz imaging and material detection.展开更多
基金Project supported by the National Natural Science Foundation of China under Grant Nos.61874107,62075211.
文摘This paper describes a promising route for the exploration and development of 3.0 THz sensing and imaging with FET-based power detectors in a standard 65 nm CMOS process.Based on the plasma-wave theory proposed by Dyakonov and Shur,we designed high-responsivity and low-noise multiple detectors for monitoring a pulse-mode 3.0 THz quantum cascade laser(QCL).Furthermore,we present a fully integrated high-speed 32×32-pixel 3.0 THz CMOS image sensor(CIS).The full CIS measures 2.81×5.39 mm^(2) and achieves a 423 V/W responsivity(Rv)and a 5.3 nW integral noise equivalent power(NEP)at room temperature.In experiments,we demonstrate a testing speed reaching 319 fps under continuous-wave(CW)illumina-tion of a 3.0 THz QCL.The results indicate that our terahertz CIS has excellent potential in cost-effective and commercial THz imaging and material detection.
