In this paper, the factors of affecting surface roughness and profiles accuracy of the machined larege depth diamter ratio aspheric surfaces in ultra-precision grinding process are analyzed theoretically. An ultra-pre...In this paper, the factors of affecting surface roughness and profiles accuracy of the machined larege depth diamter ratio aspheric surfaces in ultra-precision grinding process are analyzed theoretically. An ultra-precision aspheric grinding system is then designed and manufactured. Aerostatic form is adopted to build the spindle of the workpiece, transverse guideway, longitudinal guideway and the spindle of the grinder in this system. The following specification is achieved, such as the turning accuracy of the spindle of the workpiece is 0.05 μm, radial rigidity of the spindle is GE 220N/μm, axial rigidity is GE 160 N/μm, radial rigidity of the guideway is GE 200N/μm, the highest rotational speed of the grinder is 80 000 rev/min and its turning accuracy is 0.1 μm, the resolution of linear displacement of the transverse and longitudinal guideway is 4.9 nm. Adjusting range of this adjusting mechanism is 2 mm in the Y direction, the adjusting accuracy of the precise adjusting mechanism is 0.1 μm. Micro displacement measuring system of this ultra-precision aspheric grinding adopts two-backfeed strategy, and angle displacement back-feed is realized by photoelectric encoder, it’s resolution is 655 360 pulse/rev. after 4 frequency multiplication, it’s angle displacement resolution is achieved 2 621 440 pulse/rev. Straight-line displacement is monitored by single frequency laser interferometer (DLSTAX LTM-20B, made in Japan). This CNC system adopts inimitable bi-arc step length flex CN interpolation algorithm, it’s CN system resolution is 5 nm.So this aspheric grinding system ensures profile accuracy of the machined part. The resolution of this interferometer is 5 nm. Finally, lots of ultra-precision grinding experiments are carried out on this grinding system. Some optical aspheric parts, with profiles accuracy of 0.3 μm, surface roughness less than 0.01 μm, are obtained.展开更多
Large aspheric mirrors are needed for the remote sensing and ground based telescope optical systems,these mirrors are made of hard and brittle materials which require ultra-precision grinding process to guarantee the ...Large aspheric mirrors are needed for the remote sensing and ground based telescope optical systems,these mirrors are made of hard and brittle materials which require ultra-precision grinding process to guarantee the high profile accuracy and machining efficiency. The ultra-precision aspheric CNC grinding machine( UAG900) is presented by this paper,as well as its grinding capability. The hydrostatic bearings of high accuracy and stiffness are adopted by the linear and rotary motions to guarantee the mirror accuracy,material removal rate and subsurface damage. Disk type grinding wheel with arc edge is used. The material removal rate can be up to 360 mm3/ min to guarantee the machining efficiency during rough grinding using D180 diamond grinding wheel while the fine grinding is performed using D15 grinding wheel. It indicates that the grinding wheel radius measuring error is proportional to the profile error induced by the grinding path. The grinding step size is better to be 0. 01 mm for the reduction of the grinding movement accelerations and program length. The grinding path is planned and expressed based on the grinding mode according to the mirror shape. One540 mm×450 mm× 100 mm zerodur mirror is ground and re-ground using the measuring data acquired by the Leitz CMM. The final surface accuracy of P-V value is less than 5 μm after compensation grinding.展开更多
As for the ultra-precision grinding of the hemispherical fused silica resonator,due to the hard and brittle nature of fused silica,subsurface damage(SSD)is easily generated,which enormously influences the performance ...As for the ultra-precision grinding of the hemispherical fused silica resonator,due to the hard and brittle nature of fused silica,subsurface damage(SSD)is easily generated,which enormously influences the performance of such components.Hence,ultra-precision grinding experiments are carried out to investigate the surface/subsurface quality of the hemispherical resonator machined by the small ball-end fine diamond grinding wheel.The influence of grinding parameters on the surface roughness(SR)and SSD depth of fused silica samples is then analyzed.The experimental results indicate that the SR and SSD depth decreased with the increase of grinding speed and the decrease of feed rate and grinding depth.In addition,based on the material strain rate and the maximum undeformed chip thickness,the effect of grinding parameters on the subsurface damage mechanism of fused silica samples is analyzed.Furthermore,a multi-step ultra-precision grinding technique of the hemispherical resonator is proposed based on the interaction influence between grinding depth and feed rate.Finally,the hemispherical resonator is processed by the proposed grinding technique,and the SR is improved from 454.328 nm to 110.449 nm while the SSD depth is reduced by 94%from 40μm to 2.379μm.The multi-step grinding technique proposed in this paper can guide the fabrication of the hemispherical resonator.展开更多
The infrared conformal window is one of the most critical components in aircraft.Conformal windows with high performance bring low aberrations,high aerodynamic performance,reliability in extreme working environments,a...The infrared conformal window is one of the most critical components in aircraft.Conformal windows with high performance bring low aberrations,high aerodynamic performance,reliability in extreme working environments,and added value for aircraft.Through the past decades,remarkable advances have been achieved in manufacturing technologies for conformal windows,where the machining accuracy approaches the nanometer level,and the surface form becomes more complex.These advances are critical to aircraft development,and these manufacturing technologies also have significant reference values for other directions of the ultra-precision machining field.In this review,the infrared materials suitable for manufacturing conformal windows are introduced and compared with insights into their performances.The remarkable advances and concrete work accomplished by researchers are reviewed.The challenges in manufacturing conformal windows that should be faced in the future are discussed.展开更多
As for ultra-precision grinding of difficult-to-process thin-walled complex components with ball-end grinding wheels,interference is easy to occur.According to screw theory and grinding kinematics,a mathematical model...As for ultra-precision grinding of difficult-to-process thin-walled complex components with ball-end grinding wheels,interference is easy to occur.According to screw theory and grinding kinematics,a mathematical model is established to investigate the interference and grinding characteristics of the ball-end wheel.The relationship between grinding wheel inclination angle,C axis rotation angle,grinding position angle and grinding wheel wear are analyzed.As the grinding wheel inclination angle increases,the C axis rotatable range decreases and the grinding position angle increases.The grinding position angle and wheel radius wear show a negative correlation with the C axis rotation angle.Therefore,a trajectory planning criteria for increasing grinding speed as much as possible under the premise of avoiding interference is proposed to design the grinding trajectory.Then grinding point distribution on the ball-end wheel is calculated,and the grinding characteristics,grinding speed and maximum undeformed chip thickness,are investigated.Finally,a complex structural component can be ground without interference,and surface roughness and profile accuracy are improved to 40.2 nm and 0.399 lm,compared with 556 nm and 3.427 lm before ultra-precision grinding.The mathematical model can provide theoretical guidance for the analysis of interference and grinding characteristics in complex components grinding to improve its grinding quality.展开更多
This paper proposes an experimental approach for monitoring and inspection of the formation accuracy in ultra-precision grinding （UPG） with respect to the chatter vibration. Two factors related to the grinding progr...This paper proposes an experimental approach for monitoring and inspection of the formation accuracy in ultra-precision grinding （UPG） with respect to the chatter vibration. Two factors related to the grinding progress, the grinding speed of grinding wheel and spindle, and the oil pressure of the hydrostatic bearing are taken into account to determining the accuracy. In the meantime, a mathematical model of the radius deviation caused by the micro vibration is also established and applied in the experiments. The results show that the accuracy is sensitive to the vibration and the forming accuracy is much improved with proper processing parameters. It is found that the accuracy of aspheric surface can be less than 4 μm when the grinding speed is 1400r/min and the wheel speed is 100 r/min with the oil pressure being 1.1 MPa.展开更多
Ultra-precision machining technologies are the essential methods, to obtain the highest form accuracy and surface quality. As more research findings are published, such technologies now involve complicated systems eng...Ultra-precision machining technologies are the essential methods, to obtain the highest form accuracy and surface quality. As more research findings are published, such technologies now involve complicated systems engineering and been widely used in the production of components in various aerospace, national defense, optics, mechanics, electronics, and other high-tech applications. The conception, applications and history of ultra-precision machining are introduced in this article, and the develop- ments of ultra-precision machining technologies, espe- cially ultra-precision grinding, ultra-precision cutting and polishing are also reviewed. The current state and problems of this field in China are analyzed. Finally, the development trends of this field and the coping strategies employed in China to keep up with the trends are discussed.展开更多
文摘In this paper, the factors of affecting surface roughness and profiles accuracy of the machined larege depth diamter ratio aspheric surfaces in ultra-precision grinding process are analyzed theoretically. An ultra-precision aspheric grinding system is then designed and manufactured. Aerostatic form is adopted to build the spindle of the workpiece, transverse guideway, longitudinal guideway and the spindle of the grinder in this system. The following specification is achieved, such as the turning accuracy of the spindle of the workpiece is 0.05 μm, radial rigidity of the spindle is GE 220N/μm, axial rigidity is GE 160 N/μm, radial rigidity of the guideway is GE 200N/μm, the highest rotational speed of the grinder is 80 000 rev/min and its turning accuracy is 0.1 μm, the resolution of linear displacement of the transverse and longitudinal guideway is 4.9 nm. Adjusting range of this adjusting mechanism is 2 mm in the Y direction, the adjusting accuracy of the precise adjusting mechanism is 0.1 μm. Micro displacement measuring system of this ultra-precision aspheric grinding adopts two-backfeed strategy, and angle displacement back-feed is realized by photoelectric encoder, it’s resolution is 655 360 pulse/rev. after 4 frequency multiplication, it’s angle displacement resolution is achieved 2 621 440 pulse/rev. Straight-line displacement is monitored by single frequency laser interferometer (DLSTAX LTM-20B, made in Japan). This CNC system adopts inimitable bi-arc step length flex CN interpolation algorithm, it’s CN system resolution is 5 nm.So this aspheric grinding system ensures profile accuracy of the machined part. The resolution of this interferometer is 5 nm. Finally, lots of ultra-precision grinding experiments are carried out on this grinding system. Some optical aspheric parts, with profiles accuracy of 0.3 μm, surface roughness less than 0.01 μm, are obtained.
基金Sponsored by the National High Technology Research and Development Program(Grant No.2008AA042503)the National Science and Technology Major Project(Grant No.2013ZX04006011-201)
文摘Large aspheric mirrors are needed for the remote sensing and ground based telescope optical systems,these mirrors are made of hard and brittle materials which require ultra-precision grinding process to guarantee the high profile accuracy and machining efficiency. The ultra-precision aspheric CNC grinding machine( UAG900) is presented by this paper,as well as its grinding capability. The hydrostatic bearings of high accuracy and stiffness are adopted by the linear and rotary motions to guarantee the mirror accuracy,material removal rate and subsurface damage. Disk type grinding wheel with arc edge is used. The material removal rate can be up to 360 mm3/ min to guarantee the machining efficiency during rough grinding using D180 diamond grinding wheel while the fine grinding is performed using D15 grinding wheel. It indicates that the grinding wheel radius measuring error is proportional to the profile error induced by the grinding path. The grinding step size is better to be 0. 01 mm for the reduction of the grinding movement accelerations and program length. The grinding path is planned and expressed based on the grinding mode according to the mirror shape. One540 mm×450 mm× 100 mm zerodur mirror is ground and re-ground using the measuring data acquired by the Leitz CMM. The final surface accuracy of P-V value is less than 5 μm after compensation grinding.
基金This work was supported by the National Key Research and Development Program of China(No.2022YFB3403600)the National Natural Science Foundation of China(No.52293403)Self-Planned Task of State Key Laboratory of Robotics and System(HIT)(No.SKLRS202204C).
文摘As for the ultra-precision grinding of the hemispherical fused silica resonator,due to the hard and brittle nature of fused silica,subsurface damage(SSD)is easily generated,which enormously influences the performance of such components.Hence,ultra-precision grinding experiments are carried out to investigate the surface/subsurface quality of the hemispherical resonator machined by the small ball-end fine diamond grinding wheel.The influence of grinding parameters on the surface roughness(SR)and SSD depth of fused silica samples is then analyzed.The experimental results indicate that the SR and SSD depth decreased with the increase of grinding speed and the decrease of feed rate and grinding depth.In addition,based on the material strain rate and the maximum undeformed chip thickness,the effect of grinding parameters on the subsurface damage mechanism of fused silica samples is analyzed.Furthermore,a multi-step ultra-precision grinding technique of the hemispherical resonator is proposed based on the interaction influence between grinding depth and feed rate.Finally,the hemispherical resonator is processed by the proposed grinding technique,and the SR is improved from 454.328 nm to 110.449 nm while the SSD depth is reduced by 94%from 40μm to 2.379μm.The multi-step grinding technique proposed in this paper can guide the fabrication of the hemispherical resonator.
基金the support from the National Key Research and Development Program of China[2018YFA0703400].
文摘The infrared conformal window is one of the most critical components in aircraft.Conformal windows with high performance bring low aberrations,high aerodynamic performance,reliability in extreme working environments,and added value for aircraft.Through the past decades,remarkable advances have been achieved in manufacturing technologies for conformal windows,where the machining accuracy approaches the nanometer level,and the surface form becomes more complex.These advances are critical to aircraft development,and these manufacturing technologies also have significant reference values for other directions of the ultra-precision machining field.In this review,the infrared materials suitable for manufacturing conformal windows are introduced and compared with insights into their performances.The remarkable advances and concrete work accomplished by researchers are reviewed.The challenges in manufacturing conformal windows that should be faced in the future are discussed.
基金the National Key Research and Development Program of China(No.2018YFB 1107600)。
文摘As for ultra-precision grinding of difficult-to-process thin-walled complex components with ball-end grinding wheels,interference is easy to occur.According to screw theory and grinding kinematics,a mathematical model is established to investigate the interference and grinding characteristics of the ball-end wheel.The relationship between grinding wheel inclination angle,C axis rotation angle,grinding position angle and grinding wheel wear are analyzed.As the grinding wheel inclination angle increases,the C axis rotatable range decreases and the grinding position angle increases.The grinding position angle and wheel radius wear show a negative correlation with the C axis rotation angle.Therefore,a trajectory planning criteria for increasing grinding speed as much as possible under the premise of avoiding interference is proposed to design the grinding trajectory.Then grinding point distribution on the ball-end wheel is calculated,and the grinding characteristics,grinding speed and maximum undeformed chip thickness,are investigated.Finally,a complex structural component can be ground without interference,and surface roughness and profile accuracy are improved to 40.2 nm and 0.399 lm,compared with 556 nm and 3.427 lm before ultra-precision grinding.The mathematical model can provide theoretical guidance for the analysis of interference and grinding characteristics in complex components grinding to improve its grinding quality.
文摘This paper proposes an experimental approach for monitoring and inspection of the formation accuracy in ultra-precision grinding （UPG） with respect to the chatter vibration. Two factors related to the grinding progress, the grinding speed of grinding wheel and spindle, and the oil pressure of the hydrostatic bearing are taken into account to determining the accuracy. In the meantime, a mathematical model of the radius deviation caused by the micro vibration is also established and applied in the experiments. The results show that the accuracy is sensitive to the vibration and the forming accuracy is much improved with proper processing parameters. It is found that the accuracy of aspheric surface can be less than 4 μm when the grinding speed is 1400r/min and the wheel speed is 100 r/min with the oil pressure being 1.1 MPa.
文摘Ultra-precision machining technologies are the essential methods, to obtain the highest form accuracy and surface quality. As more research findings are published, such technologies now involve complicated systems engineering and been widely used in the production of components in various aerospace, national defense, optics, mechanics, electronics, and other high-tech applications. The conception, applications and history of ultra-precision machining are introduced in this article, and the develop- ments of ultra-precision machining technologies, espe- cially ultra-precision grinding, ultra-precision cutting and polishing are also reviewed. The current state and problems of this field in China are analyzed. Finally, the development trends of this field and the coping strategies employed in China to keep up with the trends are discussed.
