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Transparent conducting indium-tin-oxide(ITO) film as full front electrode in Ⅲ–Ⅴ compound solar cell 被引量:1
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作者 代盼 卢建娅 +6 位作者 谭明 王青松 吴渊渊 季莲 边历峰 陆书龙 杨辉 《Chinese Physics B》 SCIE EI CAS CSCD 2017年第3期495-499,共5页
The application of transparent conducting indium-tin-oxide (ITO) film as full front electrode replacing the conven- tional bus-bar metal electrode in III-V compound GalnP solar cell was proposed. A high-quality, non... The application of transparent conducting indium-tin-oxide (ITO) film as full front electrode replacing the conven- tional bus-bar metal electrode in III-V compound GalnP solar cell was proposed. A high-quality, non-rectifying contact between ITO and 10 nm N+-GaAs contact layer was formed, which is benefiting from a high carrier concentration of the terrilium-doped N+-GaAs layer, up to 2×10^19 cm^-3. A good device performance of the GalnP solar cell with the ITO electrode was observed. This result indicates a great potential of transparent conducting films in the future fabrication of larger area flexible III-V solar cell. 展开更多
关键词 full indium-tin-oxide (ito electrode specific contact resistance solar cell
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Isothermal thermo-analytical study and decomposition kinetics of non-activated and mechanically activated indium tin oxide(ITO) scrap powders treated by alkaline solution
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作者 B.JANKOVI 《Transactions of Nonferrous Metals Society of China》 SCIE EI CAS CSCD 2015年第5期1657-1676,共20页
Isothermal decomposition process of chemically transforming indium tin oxide(ITO) powders into indium(III) hydroxide powders was investigated. Two types of powders were analyzed, i.e., non-activated and mechanical... Isothermal decomposition process of chemically transforming indium tin oxide(ITO) powders into indium(III) hydroxide powders was investigated. Two types of powders were analyzed, i.e., non-activated and mechanically activated. It has been found that in the case of activated sample, shorter induction periods appear, which permits growth of smaller crystals, while in the case of non-activated sample, long induction periods appear, characterized by the growth of larger crystals. DAEM approach has shown that decomposition processes of non-activated and mechanically activated samples can be described by contracting volume model with a linear combination of two different density distribution functions of apparent activation energies(Ea), and with first-order model, with a single symmetrical density distribution function of Ea, respectively. It was established that specific characteristics of particles not only affect the mechanism of decomposition processes, but also have the significant impact on thermodynamic properties. 展开更多
关键词 indium tin oxide mechanical activation chemical preparation grain boundaries thermal properties decomposition kinetics
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Preparation and Characterization of Indium Doped Tin Oxide (ITO) via a Solvothermal Method
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作者 Anh Khuong Quoc Nguyen Van Thi Thanh Ho 《Journal of Environmental Science and Engineering(B)》 2016年第8期379-384,共6页
Tin-doped Indium Oxide (ITO) has been successfully prepared via solvothermal method with a mixture of Indium(Ill) acetylacetonate and Tin(IV) bis(acetylacetonate)dichioride in oleyamine solvent under the condi... Tin-doped Indium Oxide (ITO) has been successfully prepared via solvothermal method with a mixture of Indium(Ill) acetylacetonate and Tin(IV) bis(acetylacetonate)dichioride in oleyamine solvent under the condition of the different reaction time from 12 h to 48 h for the first time. The morphology, phase composition and particle size of the ITO powder were characterized by TEM and XRD. Two significant properties required for ITO samples to become noncarbon support for Pt in PEMFCs including specific surface area and electrical conductivity were studied. 展开更多
关键词 ito indium doped tin oxide SOLVOTHERMAL CONDUCTIVITY NANOPARTICLES
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Preparation of indium tin oxide targets with a high density and single phase structure by normal pressure sintering process 被引量:6
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作者 LIU Chen LIU Jiaxiang WANG Yue 《Rare Metals》 SCIE EI CAS CSCD 2011年第2期126-130,共5页
The present work mainly describes the technology for preparing indium-tin oxide (ITO) targets by cold isostatic pressing (CIP) and normal pressure sintering process. ITO powders were produced by chemical co-precip... The present work mainly describes the technology for preparing indium-tin oxide (ITO) targets by cold isostatic pressing (CIP) and normal pressure sintering process. ITO powders were produced by chemical co-precipitation and shaped into an ITO green compact with a relative density of 60% by CIP under 300 MPa. Then, an ITO target with a relative density larger than 99.6% was obtained by sintering this green compact at 1550℃ for 8 h. The effects of forming pressure, sintering temperature and sintering time on the density of the target were inves- tigated. Also, a discussion was made on the sintering atmosphere. 展开更多
关键词 thin films indium tin oxide (ito isostatic pressing SINTERING relative density microstructure
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Microstructure and properties of indium tin oxide thin films deposited by RF-magnetron sputtering 被引量:4
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作者 LI Shitao QIAO Xueliang CHEN Jianguo JIA Fang WU Changle 《Rare Metals》 SCIE EI CAS CSCD 2006年第4期359-364,共6页
Tin-doped indium oxide (ITO) thin films were prepared using conventional radio frequency (RF) planar magnetron sputtering equipped with IR irradiation using a ceramic target of In2O3/SnO2 with a mass ratio of 1:1... Tin-doped indium oxide (ITO) thin films were prepared using conventional radio frequency (RF) planar magnetron sputtering equipped with IR irradiation using a ceramic target of In2O3/SnO2 with a mass ratio of 1:1 at various IR irradiation temperatures T1 (from room temperature to 400℃). The refractive index, deposited ratio, and resistivity are functions of the sputtering Ar gas pressure. The microstructure of ITO thin films is related to IR T1, the crystalline seeds appear at T1= 300℃, and the films are amorphous at the temperature ranging from 27℃ to 400℃. AFM investigation shows that the roughness value of peak-valley of ITO thin film (Rp-v) and the surface microstructure of rio thin films have a close relation with T1. The IR irradiation results in a widening value of band-gap energy due to Burstein-Moss effect and the maximum visible transmittance shifts toward a shorter wavelength along with a decrease in the film's refractive index. The plasma wavelength and the refractive index of ITO thin films are relative to the T1. XPS investigation shows that the photoelectrolytic properties can be deteriorated by the sub-oxides. The deterioration can be decreased by increasing the oxygen flow rote (fo2), and the mole ratio of Sn/In in the samples reduces with an increase info2. 展开更多
关键词 indium-tin oxide (ito photoelectrolytic properties RF-magnetron sputtering IR irradiation temperature MICROSTRUCTURE refractive index
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Preparation of High Quality Indium Tin Oxide Film on a Microbial Cellulose Membrane Using Radio Frequency Magnetron Sputtering 被引量:2
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作者 杨加志 赵成刚 +3 位作者 刘晓丽 于俊伟 孙东平 唐卫华 《Chinese Journal of Chemical Engineering》 SCIE EI CAS CSCD 2011年第2期179-184,共6页
Microbial cellulose (MC) membranes produced by Acetobacter xylinum NUST4.1,were used as flexible substrates for the fabrication of transparent indium tin oxide (ITO) electrodes.Transparent and conductive ITO thin ... Microbial cellulose (MC) membranes produced by Acetobacter xylinum NUST4.1,were used as flexible substrates for the fabrication of transparent indium tin oxide (ITO) electrodes.Transparent and conductive ITO thin films were deposited on MC membrane at room temperature using radio frequency (RF) magnetron sputtering.The optimum ITO deposition conditions were achieved by examining crystalline structure,surface morphology and op-toelectrical characteristics with X-ray diffraction (XRD),scanning electron microscopy (SEM),atomic force mi-croscopy (AFM),and UV spectroscopy.The sheet resistance of the samples was measured with a four-point probe and the resistivity of the film was calculated.The results reveal that the preferred orientation of the deposited ITO crystals is strongly dependent upon with oxygen content (O2/Ar,volume ratio) in the sputtering chamber.And the ITO crystalline structure directly determines the conductivity of ITO-deposited films.High conductive [sheet resis-tance ~120 Ω·square-1 (Ω·sq-1)] and transparent (above 76%) ITO thin films (240 nm thick) were obtained with a moderate sputtering power (about 60 W) and with an oxygen flow rate of 0.25 ml·min-1 (sccm) during the deposi-tion.These results show that the ITO-MC electrodes can find their potential application in optoelectrical devices. 展开更多
关键词 thin films magnetron sputtering microbial cellulose membrane optical properties indium tin oxide
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Preparation of Indium Tin Oxide Films on Polycarbonate substrates by Radio-frequency Magnetron Sputtering 被引量:1
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作者 刘静 《Journal of Wuhan University of Technology(Materials Science)》 SCIE EI CAS 2005年第4期22-25,共4页
Indium tin oxide(ITO)thin films(100±10nm)were deposited on PC(polycarbonate)and glass substrates by rf(radio-frequency)mannetron spuutering.The oxygen content of the ITO films was changed by variation of ... Indium tin oxide(ITO)thin films(100±10nm)were deposited on PC(polycarbonate)and glass substrates by rf(radio-frequency)mannetron spuutering.The oxygen content of the ITO films was changed by variation of the sputtering gas composition.All the other deposition parameters were kept constant.The sheet resistance.optical transmittance and microstructure of ITO films were investigated using a four-point probe.spectrophotometer,X-ray diffractometer(XRD)and atomic force microscope(AFM).Sheet resistances for the ITO films with optical transmittance more than 75% on PC substrates varied from 40Ω/cm^2 to more than 104 Ω/cm^2 with increasing oxygen partial pressure from O to about 2%.The same tendeney of sheet resistances increasing with increasing oxygen partial pressure was observed on glass substrates.The X-ray diffraction data indicated polycrystalline filns with grain orientations predominantly along(440)and (422)directions.The intensities of (440)and (422)peaks increased slightly with the increase of oxygen partial pressure both on PC and glass substrates.The AFM images show that the ITO films on PC substrates were dense and uniform.The average grain size of the films was about 40nm. 展开更多
关键词 indium tin oxide POLYCARBONATE RESISTANCE optical transmittance radio-frequency magnetron sputtering
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Electrical and optical properties of indium tin oxide/epoxy composite film 被引量:1
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作者 郭霞 郭春威 +1 位作者 陈宇 苏治平 《Chinese Physics B》 SCIE EI CAS CSCD 2014年第7期601-604,共4页
The electrical and optical properties of the indium tin oxide (ITO)/epoxy composite exhibit dramatic variations as functions of the ITO composition and ITO particle size. Sharp increases in the conductivity in the v... The electrical and optical properties of the indium tin oxide (ITO)/epoxy composite exhibit dramatic variations as functions of the ITO composition and ITO particle size. Sharp increases in the conductivity in the vicinity of a critical volume fraction have been found within the framework of percolation theory. A conductive and insulating transition model is extracted by the ITO particle network in the SEM image, and verified by the resistivity dependence on the temperature. The dependence of the optical transmittance on the particle size was studied. Further decreasing the ITO particle size could further improve the percolation threshold and light transparency of the composite film. 展开更多
关键词 percolation effect indium tin oxide/epoxy composite film electrical state transition optical transmittance
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Effects of SiO_2 and TiO_2 on resistance stabilities of flexible indium-tin-oxide films prepared by ion assisted deposition 被引量:2
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作者 LI Yuqiong YU Zhinong +3 位作者 WANG Wuyu FAN Yuejiang DING Zhao XUE Wei 《Rare Metals》 SCIE EI CAS CSCD 2009年第6期559-563,共5页
Inorganic buffer layers such as SiO2 or TiO2 and transparent conductive indium-tin-oxide (ITO) films were prepared on polyethylene terephthalate (PET) substrates by ion assisted deposition (IAD) at room temperat... Inorganic buffer layers such as SiO2 or TiO2 and transparent conductive indium-tin-oxide (ITO) films were prepared on polyethylene terephthalate (PET) substrates by ion assisted deposition (IAD) at room temperature, and the effects of SiO2 and TiOzon the bending resistance performance of flexible ITO films were investigated. The results show that ITO films with SiO2 or TiO2 buffer layer have better resistance stabilities compared to ones without the buffer layer when the ITO films are inwards bent at a bending radius more than 1.2 cm and when the ITO films are outwards bent at a bending radius from 0.8 cm to 1.2 cm. 1TO films with SiO2 buffer layer have better resistance sta- bilities compared to ones with TiO2 buffer layer after the ITO fdms are bent several hundreds of cycles at the same bending radius, for the adhesion of SiO2 is stronger than that of TiO2. The compressive stress resulted from inward bending leads to the formation of more defects in the ITO films compared with the tensile stress arising from outward bending. SiO2 and TiO2 buffer layers can effectively improve the crystallinity of ITO films in (400), (440) directions. 展开更多
关键词 indium-tin-oxide (ito inorganic buffer layers bending resistance performance stress ion assisted deposition (IAD)
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Dependence of Performance of Organic Light-emitting Devices on Sheet Resistance of Indium-tin-oxide Anodes 被引量:2
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作者 ZHOU Liang ZHANG Hong-jie YU Jiang-bo MENG Qing-guo PENG Chun-yun LIU Feng-yi DENG Rui-ping PENG Ze-ping LI Zhe-feng 《Chemical Research in Chinese Universities》 SCIE CAS CSCD 2006年第4期427-431,共5页
The dependence of the performance of organic light-emitting devices(OLEDs) on the sheet resistance of indiumtin-oxide(ITO) anodes was investigated by measuring the steady state current density brightness voltage c... The dependence of the performance of organic light-emitting devices(OLEDs) on the sheet resistance of indiumtin-oxide(ITO) anodes was investigated by measuring the steady state current density brightness voltage characteristics and the electroluminescent spectra. The device with a higher sheet resistance anode shows a lower current density, a lower brightness level, and a higher operation voltage. The electroluminescence(EL) efficiencies of the devices with the same structure but different ITO anodes show more complicated differences. Furthermore, the shift of the light-emitting zone toward the anode was found when an anode with a higher sheet resistance was used. These performance differences are discussed and attributed to the reduction of hole injection and the increase in voltage drop over ITO anode with the increase in sheet resistance. 展开更多
关键词 Organic light-emitting device(OLED) indium-tin-oxide(ito Sheet resistance Balance of holes and electrons
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Low Temperature DC Sputtering Deposition on Indium-Tin Oxide Film and Its Application to Inverted Top-emitting Organic Light-emitting Diodes 被引量:1
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作者 Hui LIN Junsheng YU Shuangling LOU Jun WANG Yadong JIANG 《Journal of Materials Science & Technology》 SCIE EI CAS CSCD 2008年第2期179-182,共4页
Indium tin oxide (ITO) ultrathin films were prepared on glass substrate by DC (direct current) magnetron sputtering technique with the assistance of H2O vapor to avoid potential surface damage. The film properties... Indium tin oxide (ITO) ultrathin films were prepared on glass substrate by DC (direct current) magnetron sputtering technique with the assistance of H2O vapor to avoid potential surface damage. The film properties were characterized by X-ray diffraction (XRD) technique, four-point probe method and spectrophotometer. The results show that the deposited ITO film with introduced H2O during sputtering process was almost amorphous. The average visible light transmission of 100 nm ITO film was around 85% and square resistivity was below 80 Ω/square. The film was used as the transparent anode to fabricate an inverted top-emitting organic light-emitting diodes (IT-OLEDs) with the structure of glass substrate/Alq3 (40 nm)/NPB (15 nm)/CuPc (x nm)/ITO anode (100 nm), where the film thickness of CuPc was optimized. It was found that the luminance of this IT-OLEDs was improved from 25 cd/m^2 to more than 527 cd/m^2 by increasing the thickness of CuPc, and luminance efficiency of 0.24 lm/W at 100 cd/m^2 was obtained, which indicated that the optimized thickness of CuPc layer was around 15 nm. 展开更多
关键词 Inverted top-emitting organic light-emitting diodes indium-tin-oxide Ultrathin film DC sputtering
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Effect of Sn^(4+) content on properties of indium tin oxide nanopowders
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作者 徐宝强 冯瑞康 +1 位作者 杨斌 邓勇 《Transactions of Nonferrous Metals Society of China》 SCIE EI CAS CSCD 2010年第4期643-648,共6页
Indium tin oxide(ITO)nanopowders were prepared by a modified chemical co-precipitation process.The influence of different SnO2 contents on the decomposition behavior of ITO precursors,and on the phase and morphology o... Indium tin oxide(ITO)nanopowders were prepared by a modified chemical co-precipitation process.The influence of different SnO2 contents on the decomposition behavior of ITO precursors,and on the phase and morphology of ITO precursors and ITO nanopowders were studied by X-ray diffractometry,transmission electron microscopy and differential thermal and thermogravimetry analysis methods.The TG-DSC curves show that the decomposition process of precursor precipitation is completed when the temperature is close to 600 ℃and the end temperature of decompositionis somewhat lower when the doping amount of SnO2 is increased.The XRD patterns indicate that the solubility limit of Sn4+ relates directly to the calcining temperature. When being calcined at 700℃,a single phase ITO powder with 15%SnO2(mass fraction)can be obtained.But,when the calcining temperature is higher than 800℃,the phase of SnO2 will appear in ITO nanopowders which contain more than 10%SnO2.The particle size of the ITO nanopowders is 15-25 nm.The ITO nanoparticles without Sn have a spherical shape,but their morphology moves towards an irregular shape when being doped with Sn4+. 展开更多
关键词 indium tin oxide(ito) chemical precipitation NANO-PARTICLE SNO2
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Synthesis and sintering of indium tin oxide nanoparticles by citrate-nitrate combustion method
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作者 WANG Haiwen XU Xiujuan +2 位作者 LI Xiuhua ZHANG Jianrong LI Chunzhong 《Rare Metals》 SCIE EI CAS CSCD 2010年第4期355-360,共6页
Spherical indium tin oxide (ITO) nanoparticles were synthesized by combustion method using citric acid as fuel and nitrates as oxidizer. The obtained ITO nanoparticles were characterized by TG-DSC, FT-IR, XRD, BET, ... Spherical indium tin oxide (ITO) nanoparticles were synthesized by combustion method using citric acid as fuel and nitrates as oxidizer. The obtained ITO nanoparticles were characterized by TG-DSC, FT-IR, XRD, BET, TEM, and SEM. The ITO nanoparticles grew steadily with the increase of heat treatment temperature, and the 700~C calcined particles had a crystallite size of 25.3 nm and a specific surface area of 26.1 m2.g i The avoidance of chlorine ions in the synthesis process decreases particle agglomeration and promotes powder densification. The 900~C sintered pellet had a density of 67.6% of theoretical density (TD) and increased steadily to 97.3% for the 1400℃ sintered ceramics, respectively. 展开更多
关键词 oxide materials CERAMICS SINTERING indium tin oxide
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Improvement of the light output and contact resistance of InGaN-based light-emitting diodes based on tantalum-doped indium tin oxide as p-type electrodes
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作者 黄俊毅 范广涵 +5 位作者 郑树文 牛巧利 李述体 曹健兴 苏军 章勇 《Chinese Physics B》 SCIE EI CAS CSCD 2010年第4期365-368,共4页
This paper reports that highly transparent and low resistance tantalum-doped indium tin oxide (Ta-doped ITO) films contacted to p-type GaN have been prepared by the electron-beam evaporation technique. The Ta-doped ... This paper reports that highly transparent and low resistance tantalum-doped indium tin oxide (Ta-doped ITO) films contacted to p-type GaN have been prepared by the electron-beam evaporation technique. The Ta-doped ITO contacts become Ohmic with a specific contact resistance of $/sim 5.65/times 10^{ - 5}$$/Omega /cdot$cm$^{2}$ and show the transmittance of $/sim $98% at a wavelength of 440nm when annealed at 500/du. Blue light emitting diodes (LEDs) fabricated with Ta-doped ITO p-type Ohmic contact layers give a forward-bias voltage of 3.21V at an injection current of 20mA. It further shows that the output power of LEDs with Ta-doped ITO contacts is enhanced 62% at 20mA in comparison with that of LEDs with conventional Ni/Au contacts 展开更多
关键词 P-GAN tantalum-doped indium tin oxide (Ta-doped ito) Ohmic contact specific con-tact resistance
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Enhanced performance in organic photovoltaic devices with a KMnO_4 solution treated indium tin oxide anode modification
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作者 杨倩倩 赵谡玲 +6 位作者 徐征 张福俊 闫光 孔超 樊星 张妍斐 徐叙瑢 《Chinese Physics B》 SCIE EI CAS CSCD 2012年第12期526-530,共5页
The properties of poly(3-hexylthiophene):(6,6)-phenyl C61 butyric acid methyl ester (P3HT:PCBM) organic pho- tovoltaic devices (OPVs) with an indium tin oxide (ITO) anode treated by a KMnO4 solution are in... The properties of poly(3-hexylthiophene):(6,6)-phenyl C61 butyric acid methyl ester (P3HT:PCBM) organic pho- tovoltaic devices (OPVs) with an indium tin oxide (ITO) anode treated by a KMnO4 solution are investigated. The optimized KMnO4 solution has a concentration of 50 rag/L, and ITO is treated for 15 min. The modification of ITO anode results in an enhancement of the power conversion efficiency (PCE) of the device, which is responsible for the increase of the photocurrent. The performance enhancement is attributed to the work function modification of the ITO substrate through the strong oxygenation of KMnO4, and then the charge collection efficiency is improved. 展开更多
关键词 organic photovoltaic devices indium tin oxide anode modification KMNO4
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Microstructure Study on Nano-phase Powder of Indium Tin Oxide
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作者 高愈尊 李永洪 张泰宋 《Rare Metals》 SCIE EI CAS CSCD 1998年第1期51-55,共5页
hemical co-precipitation method was used to prepare indium tin hydroxide. Indium tin hydroxide has the structure of cubic crystal. The cubic crystal structure transformed to amorphous after heat treatment at 250℃ for... hemical co-precipitation method was used to prepare indium tin hydroxide. Indium tin hydroxide has the structure of cubic crystal. The cubic crystal structure transformed to amorphous after heat treatment at 250℃ for 1 h. When the heat treatment temperature was higher than 280℃, the amorphous transformed to cubic crystal structure. After heat treatment at 600℃ for 1 h, the particle size of indium tin oxide is 8~20 nm. The weight ratio of In∶Sn is near 9∶1. Its granule has spherical shape. The dispersity is good. 展开更多
关键词 MICROSTRUCTURE Nanophase powder indium tin oxide
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Work Function Enhancement of Indium Tin Oxide via Oxygen Plasma Immersion Ion Implantation
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作者 高欢忠 何龙 +7 位作者 何志江 李泽斌 吴忠航 成卫海 艾畦 范晓轩 区琼荣 梁荣庆 《Plasma Science and Technology》 SCIE EI CAS CSCD 2013年第8期791-793,共3页
Indium tin oxide (ITO) transparent conducting film was treated with oxygen plasma immersion ion implantation (PIII). X-ray photoelectron spectroscopy (XPS) was employed to characterize the effect. The results su... Indium tin oxide (ITO) transparent conducting film was treated with oxygen plasma immersion ion implantation (PIII). X-ray photoelectron spectroscopy (XPS) was employed to characterize the effect. The results suggested that the oxygen content in the surface was increased and maintained for more than 50 h compared with traditional plasma-treated samples. Meanwhile, the work function of ITO estimated by comparing the peak shift in the XPS diagram suggested a corresponding increase by more than 1 eV. 展开更多
关键词 plasma immersion ion implantation surface treatment work function indium tin oxide
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Fabrication and Properties of DC Magnetron Sputtered Indium Tin Oxide on Flexible Plastic Substrate
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作者 Hui Lin Junsheng Yu Nana Wang Shuangling Lou Yadong Jiang 《Journal of Materials Science & Technology》 SCIE EI CAS CSCD 2009年第1期119-122,共4页
Indium tin oxide (ITO) thin films deposited on flexible polyethylene terephthalate (PET) substrates at low temperature by DC magnetron sputtering from an In-Sn (90-10 wt pct) alloy target were studied. The corre... Indium tin oxide (ITO) thin films deposited on flexible polyethylene terephthalate (PET) substrates at low temperature by DC magnetron sputtering from an In-Sn (90-10 wt pct) alloy target were studied. The correla- tion between deposition conditions and ITO property was systematically investigated and characterized. These as-deposited ITO films were used as the anode contact for flexible organic light-emitting diodes (FOLEDs). The fabricated FOLEDs with a structure of PET/ITO/NPB (50 nm)/Alq (20 nm)/Mg:Ag (100 nm) showed a maximum luminance of 2125 cd/m^2 at 13 V. 展开更多
关键词 Flexible Organic light-emitting diodes indium tin oxide DC sputtering
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Work Function Optimization Technology of Indium Tin Oxide Films
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作者 Bo Zhang Zhibo Zhang +4 位作者 Xintao Guo Ya’nan Yang Ying Liu Lei Yang Jiaqi Zhu 《Journal of Harbin Institute of Technology(New Series)》 CAS 2021年第4期33-39,共7页
Indium tin oxide(In_(2)O_(3)∶Sn)film is one of the most potential materials in the field of semiconductor industry.However,untreated In2O3∶Sn film has a low work function which can result in a high energy barrier th... Indium tin oxide(In_(2)O_(3)∶Sn)film is one of the most potential materials in the field of semiconductor industry.However,untreated In2O3∶Sn film has a low work function which can result in a high energy barrier that hinders the passage of carriers through the interface,thus leading to poor overall performance of directly prepared devices.In this study,crystalline transparent conductive In_(2)O_(3)∶Sn films were prepared by plasma exposure assisted magnetron sputtering under room temperature.Based on multiple testing methods,it can be found that the low temperature crystallization characteristics of In_(2)O_(3)∶Sn film were enhanced and the work function was effectively improved after Ar^(+)plasma exposure.The increase of the work function of In_(2)O_(3)∶Sn film was due to the increment of Sn⁃O bond on the surface brought by the transition from low oxidation state Sn^(2+)to high oxidation state Sn^(4+)under the action of high exposure. 展开更多
关键词 work function indium tin oxide low temperature crystallization plasma exposure
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Microstructure and properties of indium tin oxide thin films deposited by RF-magnetron sputtering
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作者 LI Shitao QIAO Xueliang CHEN Jianguo JIA Fang WU Changle 《北京科技大学学报》 EI CAS CSCD 北大核心 2006年第8期743-743,共1页
Tin-doped indium oxide (ITO) thin films were prepared using conventional radio frequency (RF) planar magnetron sputtering equipped with IR irradiation using a ceramic target of In2O3/SnO2 with a mass ratio of 1∶1... Tin-doped indium oxide (ITO) thin films were prepared using conventional radio frequency (RF) planar magnetron sputtering equipped with IR irradiation using a ceramic target of In2O3/SnO2 with a mass ratio of 1∶1 at various IR irradiation temperatures T1 (from room temperature to 400?℃). The refractive index,deposited ratio,and resistivity are functions of the sputtering Ar gas pressure. The microstructure of ITO thin films is related to IR T1,the crystalline seeds appear at T1=300?℃,and the films are amorphous at the temperature ranging from 27?℃ to 400?℃. AFM investigation shows that the roughness value of peak-valley of ITO thin film (R p-v ) and the surface microstructure of ITO thin films have a close relation with T1. The IR irradiation results in a widening value of band-gap energy due to Burstein-Moss effect and the maximum visible transmittance shifts toward a shorter wavelength along with a decrease in the film’s refractive index. The plasma wavelength and the refractive index of ITO thin films are relative to the T1. XPS investigation shows that the photoelectrolytic properties can be deteriorated by the sub-oxides. The deterioration can be decreased by increasing the oxygen flow rate (fo2),and the mole ratio of Sn/In in the samples reduces with an increase in fo2. 展开更多
关键词 铟锡氧化物薄膜 微观结构 射频磁控管溅射法 光电解性能 折射率
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