The main factors affecting the dynamic errors of coordinate measuring machines are analyzed. It is pointed out that there are two main contributors to the dynamic errors: One is the rotation of the elements around the...The main factors affecting the dynamic errors of coordinate measuring machines are analyzed. It is pointed out that there are two main contributors to the dynamic errors: One is the rotation of the elements around the joints connected with air bearings and the other is the bending of the elements caused by the dynamic inertial forces. A method for obtaining the displacement errors at the probe position from dynamic rotational errors is presented. The dynamic rotational errors are measured with inductive position sensors and a laser interferometer. The theoretical and experimental results both show that during the process of fast probing, due to the dynamic inertial forces, there are not only large rotation of the elements around the joints connected with air bearings but also large bending of the weak elements themselves.展开更多
In this work, a two-dimensional fluid model has been employed to study the characteristics of Ar/O2 radio frequency（RF） inductively coupled plasma discharges. The emphasis of this work has been put on the influence ...In this work, a two-dimensional fluid model has been employed to study the characteristics of Ar/O2 radio frequency（RF） inductively coupled plasma discharges. The emphasis of this work has been put on the influence of the external parameters（i.e., the RF power, the pressure, and the Ar/O2 gas ratio） on the plasma properties. The numerical results show that the RF power has a significant influence on the amplitude of the plasma density rather than on the spatial distribution.However, the pressure and the Ar/O2 gas ratio affect not only the amplitude of the plasma density, but also the spatial uniformity. Finally, the comparison between the simulation results and the experimental data has been made at different gas pressures and oxygen contents, and a good agreement has been achieved.展开更多
文摘The main factors affecting the dynamic errors of coordinate measuring machines are analyzed. It is pointed out that there are two main contributors to the dynamic errors: One is the rotation of the elements around the joints connected with air bearings and the other is the bending of the elements caused by the dynamic inertial forces. A method for obtaining the displacement errors at the probe position from dynamic rotational errors is presented. The dynamic rotational errors are measured with inductive position sensors and a laser interferometer. The theoretical and experimental results both show that during the process of fast probing, due to the dynamic inertial forces, there are not only large rotation of the elements around the joints connected with air bearings but also large bending of the weak elements themselves.
基金Project supported by the National Science and Technology Major Project of the Ministry of Science and Technology of China(Grant No.2011ZX02403-001)the National Natural Science Foundation of China(Grant No.11205025)
文摘In this work, a two-dimensional fluid model has been employed to study the characteristics of Ar/O2 radio frequency（RF） inductively coupled plasma discharges. The emphasis of this work has been put on the influence of the external parameters（i.e., the RF power, the pressure, and the Ar/O2 gas ratio） on the plasma properties. The numerical results show that the RF power has a significant influence on the amplitude of the plasma density rather than on the spatial distribution.However, the pressure and the Ar/O2 gas ratio affect not only the amplitude of the plasma density, but also the spatial uniformity. Finally, the comparison between the simulation results and the experimental data has been made at different gas pressures and oxygen contents, and a good agreement has been achieved.
