The squeeze-film air damping exists in a lot of micro-electronic-mechanical system (MEMS) devices unavoidably. The effects of air damping in traditional inertial switch with spring-mass system can be ignored for its l...The squeeze-film air damping exists in a lot of micro-electronic-mechanical system (MEMS) devices unavoidably. The effects of air damping in traditional inertial switch with spring-mass system can be ignored for its large volume and mass. But, many properties of MEMS switch, such as sensitivity, resolution and contact time, are affected by the air damping caused from the squeezed air film between two parallel plates moving relatively. Based on the conservation laws for mass and flux and the nonlinear Reynolds equation, the coefficient of squeeze-film damping was derived. The dynamic responses of the inertial switch with and without squeeze-film damping were simulated by using software ANSYS. The simulated results show that the sensitivity and contact time of the switch descend by about 5% and 15%, respectively, when the effects of squeeze-film damping are considered.展开更多
文摘The squeeze-film air damping exists in a lot of micro-electronic-mechanical system (MEMS) devices unavoidably. The effects of air damping in traditional inertial switch with spring-mass system can be ignored for its large volume and mass. But, many properties of MEMS switch, such as sensitivity, resolution and contact time, are affected by the air damping caused from the squeezed air film between two parallel plates moving relatively. Based on the conservation laws for mass and flux and the nonlinear Reynolds equation, the coefficient of squeeze-film damping was derived. The dynamic responses of the inertial switch with and without squeeze-film damping were simulated by using software ANSYS. The simulated results show that the sensitivity and contact time of the switch descend by about 5% and 15%, respectively, when the effects of squeeze-film damping are considered.
