In this paper we focused on the mask technology of inductively coupled plasma（ICP） etching for the mesa fabrication of infrared focal plane arrays（FPA）.By using the SiO_2 mask,the mesa has higher graphics transfer...In this paper we focused on the mask technology of inductively coupled plasma（ICP） etching for the mesa fabrication of infrared focal plane arrays（FPA）.By using the SiO_2 mask,the mesa has higher graphics transfer accuracy and creates less micro-ripples in sidewalls.Comparing the IV characterization of detectors by using two different masks,the detector using the SiO_2 hard mask has the R_0A of 9.7×10~6 Ω·cm^2,while the detector using the photoresist mask has the R_0A of3.2 × 10~2 Ω·cm^2 in 77 K.After that we focused on the method of removing the remaining SiO_2 after mesa etching.The dry ICP etching and chemical buffer oxide etcher（BOE） based on HF and NH4 F are used in this part.Detectors using BOE only have closer R_0A to that using the combining method,but it leads to gaps on mesas because of the corrosion on AlSb layer by BOE.We finally choose the combining method and fabricated the 640×512 FPA.The FPA with cutoff wavelength of 4.8 μm has the average R_0A of 6.13 × 10~9 Ω·cm^2 and the average detectivity of 4.51 × 10~9 cm·Hz^（1/2）.W^（-1）at 77 K.The FPA has good uniformity with the bad dots rate of 1.21%and the noise equivalent temperature difference（NEDT） of 22.9 mK operating at 77 K.展开更多
The hydrocarbon generation of source rocks is significantly influenced by organic matter type, chemical element composition, and structural characteristics of kerogen. We classified the organic matter types in the sha...The hydrocarbon generation of source rocks is significantly influenced by organic matter type, chemical element composition, and structural characteristics of kerogen. We classified the organic matter types in the shale of the Lucaogou Formation, Jimusar Sag, Junggar Basin, using organic petrology and rock pyrolysis as well as kerogen element and Fourier transform infrared (FT-IR) spectroscopy analyses, and compared the hydrocarbon generation mechanisms of source rocks with different types of organic matter. The organic matter of the Lucaogou Formation contains mostly two types of hydrocarbon generating macerals, the lamalginite and the telalginite based on physical and optical properties (texture, fluorescence, and optical reflectance). The lamalginite is a continuous sheet of less than 5 μm thick and greater than 50 μm in length. It has strong yellow fluorescence. The telalginite occurs as discontinuous short strips or pear-shaped objects with length of 10–30 μm and relatively weak fluorescence. The lamalginite-dominated shale has higher atomic H/C and lower atomic O/C ratios, indicating better hydrocarbon generation potential, whereas the telalginite-dominated shale has higher N and S heteroatom contents. The results of FT-IR spectroscopy of the kerogen indicate that the lamalginite-dominated shale is rich in aliphatic groups with long linear methylene sequences. The aromatic groups content is relatively low, but the carboxyl/carbon group (Cdouble bondO) content is high. The aliphatic group content of the telalginite-dominated shale is relatively low, with short-branched chains. The aromatic group content is relatively high. The methyl vibration signal directly connected to the benzene ring is strong, and the sulfoxide (Sdouble bondO) group has a high-intensity peak. Our results provide new insights into distinguishing organic matter types in the Lucaogou Formation and understanding the hydrocarbon generation mechanisms of source rocks in saline lake basins.展开更多
基金Project supported by the National Basic Research Program of China(Grant Nos.2014CB643903,2013CB932904,2012CB932701,and 2011CB922201)the National Special Funds for the Development of Major Research Equipment and Instruments,China(Grant No.2012YQ140005)+2 种基金the National Natural Science Foundation of China(Grant Nos.61274013,U1037602,61306013,and 61290303)the Strategic Priority Research Program(B)of the Chinese Academy of Sciences(Grant No.XDB01010200)China Postdoctoral Science Foundation(Grant No.2014M561029)
文摘In this paper we focused on the mask technology of inductively coupled plasma（ICP） etching for the mesa fabrication of infrared focal plane arrays（FPA）.By using the SiO_2 mask,the mesa has higher graphics transfer accuracy and creates less micro-ripples in sidewalls.Comparing the IV characterization of detectors by using two different masks,the detector using the SiO_2 hard mask has the R_0A of 9.7×10~6 Ω·cm^2,while the detector using the photoresist mask has the R_0A of3.2 × 10~2 Ω·cm^2 in 77 K.After that we focused on the method of removing the remaining SiO_2 after mesa etching.The dry ICP etching and chemical buffer oxide etcher（BOE） based on HF and NH4 F are used in this part.Detectors using BOE only have closer R_0A to that using the combining method,but it leads to gaps on mesas because of the corrosion on AlSb layer by BOE.We finally choose the combining method and fabricated the 640×512 FPA.The FPA with cutoff wavelength of 4.8 μm has the average R_0A of 6.13 × 10~9 Ω·cm^2 and the average detectivity of 4.51 × 10~9 cm·Hz^（1/2）.W^（-1）at 77 K.The FPA has good uniformity with the bad dots rate of 1.21%and the noise equivalent temperature difference（NEDT） of 22.9 mK operating at 77 K.
基金funded by Fundamental Research Funds for the Central Universities of Central South University(Grant No.2022ZZTS0531)China Hunan Provincial Science&Technology Department(Grant No.2022WK2004)the Department of Natural Resources of Hunan Province,China(No.2022-5).
文摘The hydrocarbon generation of source rocks is significantly influenced by organic matter type, chemical element composition, and structural characteristics of kerogen. We classified the organic matter types in the shale of the Lucaogou Formation, Jimusar Sag, Junggar Basin, using organic petrology and rock pyrolysis as well as kerogen element and Fourier transform infrared (FT-IR) spectroscopy analyses, and compared the hydrocarbon generation mechanisms of source rocks with different types of organic matter. The organic matter of the Lucaogou Formation contains mostly two types of hydrocarbon generating macerals, the lamalginite and the telalginite based on physical and optical properties (texture, fluorescence, and optical reflectance). The lamalginite is a continuous sheet of less than 5 μm thick and greater than 50 μm in length. It has strong yellow fluorescence. The telalginite occurs as discontinuous short strips or pear-shaped objects with length of 10–30 μm and relatively weak fluorescence. The lamalginite-dominated shale has higher atomic H/C and lower atomic O/C ratios, indicating better hydrocarbon generation potential, whereas the telalginite-dominated shale has higher N and S heteroatom contents. The results of FT-IR spectroscopy of the kerogen indicate that the lamalginite-dominated shale is rich in aliphatic groups with long linear methylene sequences. The aromatic groups content is relatively low, but the carboxyl/carbon group (Cdouble bondO) content is high. The aliphatic group content of the telalginite-dominated shale is relatively low, with short-branched chains. The aromatic group content is relatively high. The methyl vibration signal directly connected to the benzene ring is strong, and the sulfoxide (Sdouble bondO) group has a high-intensity peak. Our results provide new insights into distinguishing organic matter types in the Lucaogou Formation and understanding the hydrocarbon generation mechanisms of source rocks in saline lake basins.
