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Multifunctional MXene/Carbon Nanotube Janus Film for Electromagnetic Shielding and Infrared Shielding/Detection in Harsh Environments 被引量:1
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作者 Tufail Hassan Aamir Iqbal +14 位作者 Byungkwon Yoo Jun Young Jo Nilufer Cakmakci Shabbir Madad Naqvi Hyerim Kim Sungmin Jung Noushad Hussain Ujala Zafar Soo Yeong Cho Seunghwan Jeong Jaewoo Kim Jung Min Oh Sangwoon Park Youngjin Jeong Chong Min Koo 《Nano-Micro Letters》 SCIE EI CAS CSCD 2024年第10期543-560,共18页
Multifunctional,flexible,and robust thin films capable of operating in demanding harsh temperature environments are crucial for various cutting-edge applications.This study presents a multifunctional Janus film integr... Multifunctional,flexible,and robust thin films capable of operating in demanding harsh temperature environments are crucial for various cutting-edge applications.This study presents a multifunctional Janus film integrating highly-crystalline Ti_(3)C_(2)T_(x) MXene and mechanically-robust carbon nanotube(CNT)film through strong hydrogen bonding.The hybrid film not only exhibits high electrical conductivity(4250 S cm^(-1)),but also demonstrates robust mechanical strength and durability in both extremely low and high temperature environments,showing exceptional resistance to thermal shock.This hybrid Janus film of 15μm thickness reveals remarkable multifunctionality,including efficient electromagnetic shielding effectiveness of 72 dB in X band frequency range,excellent infrared(IR)shielding capability with an average emissivity of 0.09(a minimal value of 0.02),superior thermal camouflage performance over a wide temperature range(−1 to 300℃)achieving a notable reduction in the radiated temperature by 243℃ against a background temperature of 300℃,and outstanding IR detection capability characterized by a 44%increase in resistance when exposed to 250 W IR radiation.This multifunctional MXene/CNT Janus film offers a feasible solution for electromagnetic shielding and IR shielding/detection under challenging conditions. 展开更多
关键词 MXene/carbon nanotube Janus film Electromagnetic interference shielding infrared shielding Thermal camouflage infrared detection
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Thermal-mechanical response of microscale functional film for infrared window 被引量:4
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作者 刘星 汪新智 +1 位作者 朱嘉琦 韩杰才 《Transactions of Nonferrous Metals Society of China》 SCIE EI CAS CSCD 2014年第6期1791-1799,共9页
Infrared window in hypersonic missile usually suffers complex aerodynamic force/heat during high-speed flight.A finite element method was adopted to simulate the thermal and stress response of microscale functional fi... Infrared window in hypersonic missile usually suffers complex aerodynamic force/heat during high-speed flight.A finite element method was adopted to simulate the thermal and stress response of microscale functional film for infrared window under different aerodynamic heats/forces conditions.Temperature and stress distribution were obtained with different heat fluxes.There is almost constant stress distribution along the film thickness except a sudden decrease near the substrate.The maximum stresses are located at the points which are 0.3 mm away from the edges.Different film materials result in different stress values.The temperature and stress in ZrN are larger than those in Y2O3.Besides the numerical simulation,an oxygen propane flame jet impingement test was performed to investigate thermal shock failure of the infrared window.Some place of the window surface has spots damage and some place has line crack damage after thermal shock. 展开更多
关键词 infrared window thin films finite element method thermal stress aerodynamic heating
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Deposition of hexagonal boron nitride thin films on silver nanoparticle substrates and surface enhanced infrared absorption 被引量:2
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作者 邓金祥 陈亮 +3 位作者 满超 孔乐 崔敏 高学飞 《Chinese Physics B》 SCIE EI CAS CSCD 2014年第4期513-516,共4页
Silver nanoparticle thin films with different average particle diameters are grown on silicon substrates. Boron nitride thin films are then deposited on the silver nanoparticle interlayers by radio frequency (RF) ma... Silver nanoparticle thin films with different average particle diameters are grown on silicon substrates. Boron nitride thin films are then deposited on the silver nanoparticle interlayers by radio frequency (RF) magnetron sputtering. The boron nitride thin films are characterized by Fourier transform infrared spectra. The average particle diameters of silver nanoparticle thin films are 126.6, 78.4, and 178.8 nm. The results show that the sizes of the silver nanoparticles have effects on the intensities of infrared spectra of boron nitride thin films. An enhanced infrared absorption is detected for boron nitride thin film grown on silver nanoparticle thin film. This result is helpful to study the growth mechanism of boron nitride thin film. 展开更多
关键词 hexagonal boron nitride thin film silver nanoparticles surface enhanced infrared absorption
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Structural properties of a-SiO_x:H films studied by an improved infrared-transmission analysis method 被引量:1
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作者 王烁 张晓丹 +1 位作者 熊绍珍 赵颖 《Chinese Physics B》 SCIE EI CAS CSCD 2014年第9期578-584,共7页
An improved method of fitting point-by-point is proposed to determine the absorption coefficient from infrared (IR) transmittance. With no necessity of empirical correction factors, the absorption coefficient can be... An improved method of fitting point-by-point is proposed to determine the absorption coefficient from infrared (IR) transmittance. With no necessity of empirical correction factors, the absorption coefficient can be accurately determined for the films with thin thicknesses. Based on this method, the structural properties of the hydrogenated amorphous silicon oxide materials (a-SiOx:H) are investigated. The oxygen-concentration-dependent variation of the Si-O-Si and the Si-H related modes in a-SiOx:H materials is discussed in detail. 展开更多
关键词 amorphous silicon oxide film thin thickness infrared transmission structural properties
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Infrared Thermochromic Properties of VO_2 Thin Films Prepared through Aqueous Sol-gel Process 被引量:2
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作者 刘东青 程海峰 《Journal of Wuhan University of Technology(Materials Science)》 SCIE EI CAS 2012年第5期861-865,共5页
The stoichiometric vanadium(IV) oxide thin films were obtained by controlling the temperature, time and pressure of annealing. The thermochromic phase transition and the IR thermochromic property of 400 nm and 900 n... The stoichiometric vanadium(IV) oxide thin films were obtained by controlling the temperature, time and pressure of annealing. The thermochromic phase transition and the IR thermochromic property of 400 nm and 900 nm VO2 thin films in the 7.5 μm-14 μm region were discussed. The derived VO2 thin film samples were characterized by Raman, XRD, XPS, AFM, SEM, and DSC. The resistance and infrared emissivity of VO2 thin films under different temperature were measured, and the thermal images of films were obtained using infrared imager. The results show that the VO2 thin film annealed at 550 ℃ for 10 hours through aqueous sol-gel process is pure and uniform. The 900 nm VO2 thin film exhibits better IR thermochromic property than the 400 nm VO2 thin film. The resistance of 900 nm VO2 film can change by 4 orders of magnitude and the emissivity can change by 0.6 during the phase transition, suggesting the outstanding IR thermochromic property. The derived VO2 thin film can control its infrared radiation intensity and lower its apparent temperature actively when the real temperature increases, which may be applied in the field of energy saving, thermal control and camouflage. 展开更多
关键词 vanadium dioxide thermochromism infrared emissivity sol-gel thin film
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In situ infrared spectroscopic study of cubic boron nitride thin film delamination
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作者 杨杭生 张健英 +1 位作者 聂安民 张孝彬 《Chinese Physics B》 SCIE EI CAS CSCD 2008年第9期3453-3458,共6页
This paper investigates the procedure of cubic boron nitride (cBN) thin film delamination by Fourier-transform infrared (IR) spectroscopy. It finds that the apparent IR absorption peak area near 1380cm^-1 and 1073... This paper investigates the procedure of cubic boron nitride (cBN) thin film delamination by Fourier-transform infrared (IR) spectroscopy. It finds that the apparent IR absorption peak area near 1380cm^-1 and 1073 cm^-1 attributed to the B-N stretching vibration of sp2-bonded BN and the transverse optical phonon of cBN, respectively, increased up to 195% and 175% of the original peak area after film delamination induced compressive stress relaxation. The increase of IR absorption of sp2-bonded BN is found to be non-linear and hysteretic to film delamination, which suggests that the relaxation of the turbostratic BN (tBN) layer from the compressed condition is also hysteretic to film delamination. Moreover, cross-sectional transmission electron microscopic observations revealed that cBN film delamination is possible from near the aBN(amorphous BN)/tBN interface at least for films prepared by plasma-enhanced chemical vapour deposition. 展开更多
关键词 cubic boron nitride films infrared spectroscopy DELAMINATION compressive stress relaxation
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Infrared laser-induced fast photovoltaic effect observed in orthorhombic tin oxide film
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作者 赵嵩卿 张际蕊 +5 位作者 施宏杰 闫坤坤 黄春 杨立敏 杨睿 赵昆 《Chinese Physics B》 SCIE EI CAS CSCD 2016年第2期406-409,共4页
The SnO_2/SnO with an orthorhombic structure is a material known to be stable at high pressures and temperatures and expected to have new optical and electrical properties. The authors report a new finding of the infr... The SnO_2/SnO with an orthorhombic structure is a material known to be stable at high pressures and temperatures and expected to have new optical and electrical properties. The authors report a new finding of the infrared laser induced a fast photovoltaic effect arising from orthorhombic tin oxide film with an indirect band gap(~2.4 e V) which is deposited by pulsed laser deposition. The rising time of the photovoltaic signal is about 3 ns with a peak value of 4.48 mV under the pulsed laser beam with energy density 0.015 m J/mm^2. The relation between the photovoltages and laser positions along the line between two electrodes of the film is also exhibited. A possible mechanism is put forward to explain this phenomenon.All data and analyses demonstrate that the orthorhombic tin oxide with an indirect band gap could be used as a candidate for an infrared photodetector which can be operated at high pressures and temperatures. 展开更多
关键词 polycrystalline tin oxide film ORTHORHOMBIC infrared laser induced lateral photovoltaic effect (LPV) indirect band gap
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Facile sensitizing of PbSe film for near-infrared photodetector by microwave plasma processing
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作者 Kangyi Zhao Shuanglong Feng +2 位作者 Chan Yang Jun Shen Yongqi Fu 《Chinese Physics B》 SCIE EI CAS CSCD 2022年第3期613-618,共6页
High quality PbSe film was first fabricated by a thermal evaporation method, and then the effect of plasma sensitization on the PbSe film was systemically investigated. Typical detectivity and significant photosensiti... High quality PbSe film was first fabricated by a thermal evaporation method, and then the effect of plasma sensitization on the PbSe film was systemically investigated. Typical detectivity and significant photosensitivity are achieved in the PbSe-based photodetector, reaching maximum values of 7.6 × 10^(9)cm·Hz^(1/2)/W and 1.723 A/W, respectively. Compared with thermal annealing, plasma sensitization makes the sensitization easier and significantly improves the performance. 展开更多
关键词 PbSe film infrared photodetector plasma processing
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Infrared Spectral Studies of Copper-Containing Film on the Steel Sample
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作者 Sergey D. Pichugin Vladimir N. Malyshev 《International Journal of Organic Chemistry》 2015年第1期11-14,共4页
Infrared spectral studies of copper-containing film from steel sample (worn in pair with brass in glycerol) friction zone are performed in the study. The protective film formed by the interaction of the friction triad... Infrared spectral studies of copper-containing film from steel sample (worn in pair with brass in glycerol) friction zone are performed in the study. The protective film formed by the interaction of the friction triad having functional groups typical for macromolecular compounds is shown. 展开更多
关键词 Copper-Containing film Functional GROUPS infrared Range FRICTION
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Near Infrared Electroluminescence of Er-doped ZnS Thin Film Devices
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作者 WANG Yujiang, LIU Zhaohong, CHEN Mouzhi, LIU Ruitang, ZENG Yongzhi (Dept. of Physics,Xiamen University, xiamen 361005, CHN) 《Semiconductor Photonics and Technology》 CAS 1998年第4期231-234,共4页
Near infrared electroluminescence characteristics of the Er-doped ZnS thin film devices,fabricated by thermal evaporation with two boats, are reported. The study of the film microstructure has been carried out using X... Near infrared electroluminescence characteristics of the Er-doped ZnS thin film devices,fabricated by thermal evaporation with two boats, are reported. The study of the film microstructure has been carried out using X-ray diffraction. The effects of the Er-doped film microstructure on luminescence are pointed out. 展开更多
关键词 Microstructure Near infrared Electroluminescence ZnS Thin film
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Infrared Nano-Imaging of Electronic Phase across the Metal–Insulator Transition of NdNiO_(3) Films
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作者 Fanwei Liu Sisi Huang +4 位作者 Sidan Chen Xinzhong Chen Mengkun Liu Kuijuan Jin Xi Chen 《Chinese Physics Letters》 SCIE EI CAS CSCD 2022年第7期58-62,共5页
NdNiO_(3) is a typical correlated material with temperature-driven metal–insulator transition. Resolving the local electronic phase is crucial in understanding the driving mechanism behind the phase transition. Here ... NdNiO_(3) is a typical correlated material with temperature-driven metal–insulator transition. Resolving the local electronic phase is crucial in understanding the driving mechanism behind the phase transition. Here we present a nano-infrared study of the metal–insulator transition in NdNiO_(3) films by a cryogenic scanning near-field optical microscope. The NdNiO_(3) films undergo a continuous transition without phase coexistence. The nano-infrared signal shows significant temperature dependence and a hysteresis loop. Stripe-like modulation of the optical conductivity is formed in the films and can be attributed to the epitaxial strain. These results provide valuable evidence to understand the coupled electronic and structural transformations in NdNiO_(3) films at the nano-scale. 展开更多
关键词 red Insulator Transition of NdNiO_(3)films infrared Nano-Imaging of Electronic Phase across the Metal
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Variable angle spectroscopic ellipsometry and its applications in determining optical constants of chalcogenide glasses in infrared
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作者 Ning-Ning Wei Zhen Yang +6 位作者 Hong-Bo Pan Fan Zhang Yong-Xing Liu Rong-Ping Wang Xiang Shen Shi-Xun Dai Qiu-Hua Nie 《Chinese Physics B》 SCIE EI CAS CSCD 2018年第6期454-460,共7页
The principle of variable angle spectroscopic ellipsometry(VASE) and the data analysis models, as well as the applications of VASE in the characterization of chalcogenide bulk glasses and thin films are reviewed. By... The principle of variable angle spectroscopic ellipsometry(VASE) and the data analysis models, as well as the applications of VASE in the characterization of chalcogenide bulk glasses and thin films are reviewed. By going through the literature and summarizing the application scopes of various analysis models, it is found that a combination of various models, rather than any single data analysis model, is ideal to characterize the optical constants of the chalcogenide bulk glasses and thin films over a wider wavelength range. While the reliable optical data in the mid-and far-infrared region are limited, the VASE is flexible and reliable to solve the issues, making it promising to characterize the optical properties of chalcogenide glasses. 展开更多
关键词 chalcogenide glasses/thin films VASE optical constants infrared
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Infrared Spectroscopy of Titania Sol-Gel Coatings on 316L Stainless Steel
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作者 Daniela Cordeiro Leite Vasconcelos Vilma Conceicao Costa +3 位作者 Eduardo Henrique Martins Nunes Antonio Claret Soares Sabioni Massimo Gasparon Wander Luiz Vasconcelos 《Materials Sciences and Applications》 2011年第10期1375-1382,共8页
Sol-gel titania films were deposited on 316L stainless steel using titanium isopropoxide as a chemical precursor. Dip-coating was performed at withdrawal speeds of 6 mm/min, 30 mm/min, and 60 mm/min. Deposited gel fil... Sol-gel titania films were deposited on 316L stainless steel using titanium isopropoxide as a chemical precursor. Dip-coating was performed at withdrawal speeds of 6 mm/min, 30 mm/min, and 60 mm/min. Deposited gel films were heat treated in air at 80℃, 100℃, 300℃, and 400℃. The structural evolution of the coatings was evaluated by infrared reflection-absorption spectroscopy. The influence of the withdrawal speed and the heat treatment temperature on the structure of the films was studied by varying the reflectance incidence angle during the infrared experiments and by Glow Discharge Spectrometry. Free functional groups were detected. The results indicate the formation of bidendate bridging coordination of carboxylic acid to titanium. Titanium atoms can also be pentacoordinated according to the processing conditions of the films. We observed a tendency of increasing amounts of OH groups with decreasing reflectance incidence angle. The film hardness was measured via Knoop microindenation hardness test. 展开更多
关键词 filmS SOL-GEL infrared Spectroscopy Glow Discharge Spectrometry Knoop Hardness
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Performance of the Multilayer Film for Infrared Stealth based on VO_(2) Thermochromism
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作者 LI Yaru WANG Fuqiang +5 位作者 ZHANG Aoyu FU Zhichang SU Ronghua GAO Tengfei WANG Zhen GUO Jicheng 《Journal of Thermal Science》 SCIE EI CAS CSCD 2024年第4期1312-1324,共13页
With the development of detection and identification technology,infrared stealth is of great value to realize anti-reconnaissance detection of military targets.At present,infrared stealth materials generally have defi... With the development of detection and identification technology,infrared stealth is of great value to realize anti-reconnaissance detection of military targets.At present,infrared stealth materials generally have deficiency,such as complex structure,inconvenient radiation regulation and cumbersome preparation steps,which greatly limit the practical application of infrared stealth materials.In view of the above deficiency of infrared stealth materials,we proposed a kind of multilayer film for infrared stealth using VO2thermochromism based on the temperature response mechanism of tuna to adjust its color,and through the intelligent reversible radiation regulation mechanism to meet the infrared stealth requirements of tanks in different actual scenes.The results show that when the temperature increases from 300 K to 373 K,the peak emissivity of the film decreases from 94%to 20%in the 8-14μm band after structural optimization,which can realize the infrared stealth of the high temperature target in the 8-14μm band.The average emissivity of the multilayer film for infrared stealth at3-5μm and 8-14μm band can be reduced to 34%and 27%at 373 K,and the peak emissivity at 5-8μm band can reach 65%,realizing dual-band infrared stealth in the 3-5μm and 8-14μm bands and heat dissipation in the 5-8μm band.The multilayer film for infrared stealth based on VO2thermochromism designed by the authors can meet the characteristics of simple film structure,convenient radiation regulation and simple preparation. 展开更多
关键词 vanadium dioxide multilayer film infrared stealth thermal management
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Tailoring of a robust asymmetric aramid nanofibers/MXene aerogel film for enhanced infrared thermal camouflage and Joule heating performances
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作者 Wanbin Dang Wei Guo +1 位作者 Wenting Chen Qiuyu Zhang 《Nano Research》 SCIE EI CSCD 2024年第3期1990-1998,共9页
The development of infrared(IR)surveillance technology has led to a growing interest in thermal camouflage.However,the trade-off relationship between low IR-emissivity and thermal insulation hinders the advance of the... The development of infrared(IR)surveillance technology has led to a growing interest in thermal camouflage.However,the trade-off relationship between low IR-emissivity and thermal insulation hinders the advance of thermal camouflage materials.Herein,guided by multi-physics simulation,we show a design of asymmetric aramid nanofibers/MXene(ANF/MXene)aerogel film that realizes high-efficient thermal camouflage applications.The rationale is that the asymmetric structure contains a thermal-insulation three-dimensional(3D)network part to prevent effective heat transfer and a low IR-emissivity(~0.3)dense surface layer to suppress radiative heat emission.It is remarkable that the synergy mechanism in the topology structure contributes to over 40%reduction of target radiation temperature.Impressively,the tailored asymmetric ANF/MXene aerogel film also enables sound mechanical properties such as a Young’s modulus of 44.4 MPa and a tensile strength of 1.3 MPa,superior to most aerogel materials.It also exhibits great Joule heating performances including low driving voltage(4 V),fast thermal response(<10 s),and long-term stability,further enabling its versatile thermal camouflage applications.This work offers an innovative design concept to configure multifunctional structures for next-generation thermal management applications. 展开更多
关键词 asymmetric aerogel film low infrared(IR)-emissivity thermal insulation IR thermal camouflage Joule heating performance
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Modulation of the cutoff wavelength in the spectra for solar selective absorbing coating based on high-entropy films 被引量:2
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作者 Ping Song Cong Wang +5 位作者 Jie Ren Ying Sun Yong Zhang Angélique Bousquet Thierry Sauvage Eric Tomasella 《International Journal of Minerals,Metallurgy and Materials》 SCIE EI CAS CSCD 2020年第10期1371-1378,共8页
This paper demonstrates an intrinsic modulation of the cutoff wavelength in the spectra for solar selective absorbing coating based on high-entropy films.The(NiCuCrFeSi)N((NCCFS)N)films were deposited by a magnetron s... This paper demonstrates an intrinsic modulation of the cutoff wavelength in the spectra for solar selective absorbing coating based on high-entropy films.The(NiCuCrFeSi)N((NCCFS)N)films were deposited by a magnetron sputtering system.Rutherford backscattering spectroscopy analysis confirms the uniform composition and good homogeneity of these high-entropy films.The real and imaginary parts of the permittivity for the(NCCFS)N material are calculated on the basis of the reflectance spectral fitting results.A redshift cutoff wavelength of the reflectance spectrum with increasing nitrogen gas flow rate exists because of the different levels of dispersion when changing nitrogen content.To realize significant solar absorption,the film surface was reconstituted to match its impedance with air by designing a pyramid nanostructure metasurface.Compared with the absorptance of the as-deposited films,the designed metasurface obtains a significant improvement in solar absorption with the absorptance increasing from 0.74 to 0.99.The metasurfaces also show low mid-infrared emissions with thermal emittance that can be as low as 0.06.These results demonstrate a new idea in the design of solar selective absorbing surface with controllable absorptance and low infrared emission for high-efficiency photo-thermal conversion. 展开更多
关键词 cutoff wavelength solar selective absorption infrared emission NANOSTRUCTURE high-entropy film
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Effects of the ion-beam voltage on the properties of the diamond-like carbon thin film prepared by ion-beam sputtering deposition 被引量:1
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作者 孙鹏 胡明 +4 位作者 张锋 季一勤 刘华松 刘丹丹 冷健 《Chinese Physics B》 SCIE EI CAS CSCD 2015年第6期581-585,共5页
Diamond-like carbon (DLC) thin film is one of the most widely used optical thin films. The fraction of chemical bondings has a great influence on the properties of the DLC film. In this work, DLC thin films are prep... Diamond-like carbon (DLC) thin film is one of the most widely used optical thin films. The fraction of chemical bondings has a great influence on the properties of the DLC film. In this work, DLC thin films are prepared by ion-beam sputtering deposition in Ar and CH4 mixtures with graphite as the target. The influences of the ion-beam voltage on the surface morphology, chemical structure, mechanical and infrared optical properties of the DLC films are investigated by atomic force microscopy (AFM), Raman spectroscopy, nanoindentation, and Fourier transform infrared (FTIR) spec- troscopy, respectively. The results show that the surface of the film is uniform and smooth. The film contains sp2 and sp3 hybridized carbon bondings. The film prepared by lower ion beam voltage has a higher sp3 bonding content. It is found that the hardness of DLC films increases with reducing ion-beam voltage, which can be attributed to an increase in the fraction of sp3 carbon bondings in the DLC film. The optical constants can be obtained by the whole infrared optical spectrum fitting with the transmittance spectrum. The refractive index increases with the decrease of the ion-beam voltage, while the extinction coefficient decreases. 展开更多
关键词 DLC thin film ion-beam sputtering deposition chemical bondings infrared optical and mechani-cal properties
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STUDY OF RAY IRRADIATION ON DIAMOND-LIKE CARBON FILMS
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作者 G.A. Liu T.M. Wang E.Q 《Acta Metallurgica Sinica(English Letters)》 SCIE EI CAS CSCD 2002年第1期26-32,共7页
Diamond-like carbon (DLC) films have been deposited on glass substrates usingradio-frequency (rf) plasma deposition method. Gamma -ray, ultraviolet (UV) ray were used toirradiate the DLC films. Raman spectroscopy and ... Diamond-like carbon (DLC) films have been deposited on glass substrates usingradio-frequency (rf) plasma deposition method. Gamma -ray, ultraviolet (UV) ray were used toirradiate the DLC films. Raman spectroscopy and infrared (IR) spectroscopy were use to characterizethe changing characteristics of SP^3 C-H bond and hydrogen content in the films due to theirradiations. The results show that, the damage degrees induced by the UV ray on the SP^3 C-H bondsare much stronger than that by the gamma -ray. When the irradiation dose of gamma -ray reaches 1 OX10^4 Gy, the SP^3 C-H bond reduces about 50 percent in number. The square electrical resistance ofthe films is reduced due to the irradiation of UV ray and this is caused by severe oxidation of thefilms. By using the results on optical gap of the films and the fully constrained network theory,the hydrogen content in the as-deposited films is estimated to be l0-25at. percent. 展开更多
关键词 diamond-like carbon film gamma -ray irradiation ultraviolet rayirradiation SP^3 C-H bond infrared transmittance
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Influence of oxygen on the growth of cubic boron nitride thin films by plasma-enhanced chemical vapour deposition
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作者 杨杭生 聂安民 邱发敏 《Chinese Physics B》 SCIE EI CAS CSCD 2010年第1期451-455,共5页
Cubic boron nitride thin films were deposited on silicon substrates by low-pressure inductively coupled plasmaenhanced chemical vapour deposition. It was found that the introduction of 02 into the deposition system su... Cubic boron nitride thin films were deposited on silicon substrates by low-pressure inductively coupled plasmaenhanced chemical vapour deposition. It was found that the introduction of 02 into the deposition system suppresses both nucleation and growth of cubic boron nitride. At a B2H6 concentration of 2.5% during film deposition, the critical O2 concentration allowed for the nucleation of cubic boron nitride was found to be less than 1.4%, while that for the growth of cubic boron nitride was higher than 2.1%. Moreover, the infrared absorption peak observed at around 1230- 1280 cm^-1, frequently detected for cubic boron nitride films prepared using non-ultrahigh vacuum systems, appears to be due to the absorption of boron oxide, a contaminant formed as a result of the oxygen impurity. Therefore, the existence of trace oxygen contamination in boron nitride films can be evaluated qualitatively by this infrared absorption peak. 展开更多
关键词 cubic boron nitride films infrared spectroscopy plasma-enhanced chemical vapour deposition
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Studies on the Structure of Gel during Preparing ZnO Thin Films by Sol-gel Method
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作者 QIN Xiu-Juan SUN Xue-Liang BU Li-Min ZUO Hua-Tong HANSI Hui-Zhi 《Chinese Journal of Structural Chemistry》 SCIE CAS CSCD 2010年第7期1061-1066,共6页
Transparent thin films of ZnO have been prepared on ordinary glass substrates by the inorganic sol-gel method using citric acid as chelating agent and zinc nitrate as the starting material. A novel structure on zinc c... Transparent thin films of ZnO have been prepared on ordinary glass substrates by the inorganic sol-gel method using citric acid as chelating agent and zinc nitrate as the starting material. A novel structure on zinc citrate complex was put forward by using DTA-TG and FT-IR absorbanee spectrum of citrate gels. Phase formation, morphology and optical properties of ZnO films are investigated by XRD, AFM and UV-vis transmittance spectra. The experimental results show that ZnO thin films derived from zinc citrate sol-gel method showed a (002) oriented hexagonal wurtzite structure, good crystalline property, a uniform range of grain size (40 nm), smooth surface of films, band gap of 3.28 eV and optical transmittances ratio over 90% in the visible range. 展开更多
关键词 ZnO thin film inorganic complex sol-gel infrared spectra zinc citrate complex
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