A non-sputtering discharge is utilized to verify the effect of replacement of gas ions by metallic ions and consequent decrease in the secondary electron emission coefficient in the discharge current curves in high-po...A non-sputtering discharge is utilized to verify the effect of replacement of gas ions by metallic ions and consequent decrease in the secondary electron emission coefficient in the discharge current curves in high-power impulse magnetron sputtering （HiPIMS）. In the non-sputtering discharge involving hydrogen, replacement of ions is avoided while the rarefaction still contributes. The initial peak and ensuing decay disappear and all the discharge current curves show a similar feature as the HiPIMS discharge of materials with low sputtering yields such as carbon. The results demonstrate the key effect of ion replacement during sputtering.展开更多
This note contains three main results.Firstly,a complete solution of the Linear Non-Homogeneous Matrix Differential Equations(LNHMDEs)is presented that takes into account both the non-zero initial conditions of the ps...This note contains three main results.Firstly,a complete solution of the Linear Non-Homogeneous Matrix Differential Equations(LNHMDEs)is presented that takes into account both the non-zero initial conditions of the pseudo state and the nonzero initial conditions of the input.Secondly,in order to characterise the dynamics of the LNHMDEs correctly,some important concepts such as the state,slow state(smooth state)and fast state(impulsive state)are generalized to the LNHMDE case and the solution of the LNHMDEs is separated into the smooth(slow)response and the fast(implusive)response.As a third result,a new characterization of the impulsive free initial conditions of the LNHMDEs is given.展开更多
基金Supported by the National Natural Science Foundation of China under Grant Nos 51301004 and U1330110the Guangdong Innovative and Entrepreneurial Research Team Program under Grant No 2013N080+1 种基金the Shenzhen Science and Technology Research Grant under Grant Nos JCYJ20140903102215536 and JCYJ20150828093127698the City University of Hong Kong Applied Research Grant under Grant No 9667104
文摘A non-sputtering discharge is utilized to verify the effect of replacement of gas ions by metallic ions and consequent decrease in the secondary electron emission coefficient in the discharge current curves in high-power impulse magnetron sputtering （HiPIMS）. In the non-sputtering discharge involving hydrogen, replacement of ions is avoided while the rarefaction still contributes. The initial peak and ensuing decay disappear and all the discharge current curves show a similar feature as the HiPIMS discharge of materials with low sputtering yields such as carbon. The results demonstrate the key effect of ion replacement during sputtering.
文摘This note contains three main results.Firstly,a complete solution of the Linear Non-Homogeneous Matrix Differential Equations(LNHMDEs)is presented that takes into account both the non-zero initial conditions of the pseudo state and the nonzero initial conditions of the input.Secondly,in order to characterise the dynamics of the LNHMDEs correctly,some important concepts such as the state,slow state(smooth state)and fast state(impulsive state)are generalized to the LNHMDE case and the solution of the LNHMDEs is separated into the smooth(slow)response and the fast(implusive)response.As a third result,a new characterization of the impulsive free initial conditions of the LNHMDEs is given.
