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A comparison of electromigration failure of metal lines with fracture mechanics 被引量:3
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作者 Hiroyuki Abé Mikio Muraoka +1 位作者 Kazuhiko Sasagawa Masumi Saka 《Acta Mechanica Sinica》 SCIE EI CAS CSCD 2012年第3期774-781,共8页
Atoms constructing an interconnecting metal line in a semiconductor device are transported by electron flow in high density. This phenomenon is called electromigration, which may cause the line failure. In order to ch... Atoms constructing an interconnecting metal line in a semiconductor device are transported by electron flow in high density. This phenomenon is called electromigration, which may cause the line failure. In order to characterize the electromigration failure, a comparison study is carded out with some typical phenomena treated by fracture mechanics for thin and large structures. An example of thin structures, which have been treated by fracture mechanics, is silica opti- cal fibers for communication systems. The damage growth in a metal line by electromigration is characterized in compar- ison with the crack growth in a silica optical fiber subjected to static fatigue. Also a brief comparison is made between the electromigration failure and some fracture phenomena in large structures. 展开更多
关键词 Electromigration failure. Interconnecting line Comparison Fracture mechanics
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An interconnect width and spacing optimization model considering scattering effect 被引量:1
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作者 朱樟明 万达经 杨银堂 《Chinese Physics B》 SCIE EI CAS CSCD 2010年第9期599-603,共5页
As the feature size of the CMOS integrated circuit continues to shrink, the more and more serious scattering effect has a serious impact on interconnection performance, such as delay and bandwidth. Based on the impact... As the feature size of the CMOS integrated circuit continues to shrink, the more and more serious scattering effect has a serious impact on interconnection performance, such as delay and bandwidth. Based on the impact of the scattering effect on latency and bandwidth, this paper first presents the quality-factor model which optimises latency and bandwidth effectively with the consideration of the scattering effect. Then we obtain the analytical model of line width and spacing with application of curve-fitting method. The proposed model has been verified and compared based on the nano-scale CMOS technology. This optimisation model algorithm is simple and can be applied to the interconnection system optimal design of nano-scale integrated circuits. 展开更多
关键词 scattering effect curve fitting interconnection line dimensions nanometer integrated circuits
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A statistical RCL interconnect delay model taking account of process variations
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作者 朱樟明 万达经 +1 位作者 杨银堂 恩云飞 《Chinese Physics B》 SCIE EI CAS CSCD 2011年第1期659-666,共8页
As the feature size of the CMOS integrated circuit continues to shrink, process variations have become a key factor affecting the interconnect performance. Based on the equivalent Elmore model and the use of the polyn... As the feature size of the CMOS integrated circuit continues to shrink, process variations have become a key factor affecting the interconnect performance. Based on the equivalent Elmore model and the use of the polynomial chaos theory and the Galerkin method, we propose a linear statistical RCL interconnect delay model, taking into account process variations by successive application of the linear approximation method. Based on a variety of nano-CMOS process parameters, HSPICE simulation results show that the maximum error of the proposed model is less than 3.5%. The proposed model is simple, of high precision, and can be used in the analysis and design of nanometer integrated circuit interconnect systems. 展开更多
关键词 process variation interconnect line statistical delay successive linear approximation
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