A profilometer used for 3 dimension measurement of micro-surface topography is presented. The instrument is based on the vertical scanning microscopic interferometry （VSMI）. A Linnik type interference microscope is ...A profilometer used for 3 dimension measurement of micro-surface topography is presented. The instrument is based on the vertical scanning microscopic interferometry （VSMI）. A Linnik type interference microscope is used and the interferograms which present changes of surface profile are recorded with a CCD camera. A developed nano-positioning work stage with an integrated optical grating displacement measuring system realizes the precise vertical scanning motion during profile measurement. By a white-light phase shifting algorithm of arbitrary step, frames of interferograms are processed by a computer to rebuild and evaluate the measured profile. Because of the specialty of VSMI, the profilometer is suitable for both smooth and rough surface measurement. It can also be used to measure curved surfaces, dimension of micro electro mechanical systems （MEMS）, etc. The vertical resolution of the profilometer is 0.5 nm, and lateral resolution 0.5 μm.展开更多
A novel hybrid instrument of contact and non-contact measurement with large range is developed, and both measurement systems are based on a Linnik interference microscope and on white-light interference measuring tech...A novel hybrid instrument of contact and non-contact measurement with large range is developed, and both measurement systems are based on a Linnik interference microscope and on white-light interference measuring techniques. The ambiguity presented in conventional monochromatic interferometers is not present in the contact and non-contact measurement, and they have a virtually unlimited unambiguous range. For the contact measurement, the vertical measuring range is ±5 mm with a resolution of 1 nm and the horizontal measuring range is ±25 mm in x-range and y-range with a resolution of 1.25 μm; for the non-contact measurement, the vertical measuring range is ~5 mm with a resolution of 1 nm and the horizontal resolution better than 0.5 urn.展开更多
When interference microscope measures the surface rough of the micromechanical device, as soon as the work distance of interference microscope and the depth of field is shortened, the interference images become slur f...When interference microscope measures the surface rough of the micromechanical device, as soon as the work distance of interference microscope and the depth of field is shortened, the interference images become slur for the measured object if there has small interference after clear focus. The auto-focusing system is introduced into the interference microscope, the system can obtain high definition interference image rapidly,and can improve the measuring velocity and measuring precision. The system is characterized by auto-focusing range of ±150 μm, auto-focusing precision of ±0.3 μm, auto-focusing time of 4～8 s.展开更多
基金Project supported by the National Natural Science Foundation of China （Grant No.50175037）
文摘A profilometer used for 3 dimension measurement of micro-surface topography is presented. The instrument is based on the vertical scanning microscopic interferometry （VSMI）. A Linnik type interference microscope is used and the interferograms which present changes of surface profile are recorded with a CCD camera. A developed nano-positioning work stage with an integrated optical grating displacement measuring system realizes the precise vertical scanning motion during profile measurement. By a white-light phase shifting algorithm of arbitrary step, frames of interferograms are processed by a computer to rebuild and evaluate the measured profile. Because of the specialty of VSMI, the profilometer is suitable for both smooth and rough surface measurement. It can also be used to measure curved surfaces, dimension of micro electro mechanical systems （MEMS）, etc. The vertical resolution of the profilometer is 0.5 nm, and lateral resolution 0.5 μm.
基金Supported by the National Natural Science Foundation of China (50605018)
文摘A novel hybrid instrument of contact and non-contact measurement with large range is developed, and both measurement systems are based on a Linnik interference microscope and on white-light interference measuring techniques. The ambiguity presented in conventional monochromatic interferometers is not present in the contact and non-contact measurement, and they have a virtually unlimited unambiguous range. For the contact measurement, the vertical measuring range is ±5 mm with a resolution of 1 nm and the horizontal measuring range is ±25 mm in x-range and y-range with a resolution of 1.25 μm; for the non-contact measurement, the vertical measuring range is ~5 mm with a resolution of 1 nm and the horizontal resolution better than 0.5 urn.
文摘When interference microscope measures the surface rough of the micromechanical device, as soon as the work distance of interference microscope and the depth of field is shortened, the interference images become slur for the measured object if there has small interference after clear focus. The auto-focusing system is introduced into the interference microscope, the system can obtain high definition interference image rapidly,and can improve the measuring velocity and measuring precision. The system is characterized by auto-focusing range of ±150 μm, auto-focusing precision of ±0.3 μm, auto-focusing time of 4～8 s.
