On the basis of existing techniques, a compact micro-displacement sensor of phase grating interference （PGI） is described, which adopts cylindrical hologram diffraction grating as the calibration standard. The optic...On the basis of existing techniques, a compact micro-displacement sensor of phase grating interference （PGI） is described, which adopts cylindrical hologram diffraction grating as the calibration standard. The optical principle of the sensor is explained, and the relation between the grating motion displacement and the phase shift of interference stripes is deduced. The improvement of the integral structure and the method of photoelectric signal processing are described in detail. With the software system based on the virtual instrument development platform Labwindows/CVI and other hardwares such as the precision displacement worktable, the surfaces of typical parts are measured and the characterization results are given. The sensor has wide measuring range and high resolution, its sensitivity and resolution being independent of the wavelength of the incident light. The vertical measuring range is 0-6 mm, and the vertical resolution is 0.005μm. The experimental results show that the sensor can be used to measure and characterize the surface topography parameters of the plane and curved surface.展开更多
Micro-displacement measurement based on self-mixing interference using a fiber laser system was demonstrated. The sinusoidal phase modulation technique was introduced into the fiber laser self-mixing interference meas...Micro-displacement measurement based on self-mixing interference using a fiber laser system was demonstrated. The sinusoidal phase modulation technique was introduced into the fiber laser self-mixing interference measurement system to improve the measurement resolution. The phase could be demodulated by the Fourier analysis method. Error sources were evaluated in detail, and the system was experimentally applied to reconstruct the motion of a high-precision commercial piezoelectric ceramic transducer （PZT）. The displacement measurement resolution was well beyond a half-wavelength. It provides a practical solution for displacement measurement based on all optical-fiber sensing applications with high precision.展开更多
基金This project is supported by National Natural Sciences Foundation of China (No.50175037).
文摘On the basis of existing techniques, a compact micro-displacement sensor of phase grating interference （PGI） is described, which adopts cylindrical hologram diffraction grating as the calibration standard. The optical principle of the sensor is explained, and the relation between the grating motion displacement and the phase shift of interference stripes is deduced. The improvement of the integral structure and the method of photoelectric signal processing are described in detail. With the software system based on the virtual instrument development platform Labwindows/CVI and other hardwares such as the precision displacement worktable, the surfaces of typical parts are measured and the characterization results are given. The sensor has wide measuring range and high resolution, its sensitivity and resolution being independent of the wavelength of the incident light. The vertical measuring range is 0-6 mm, and the vertical resolution is 0.005μm. The experimental results show that the sensor can be used to measure and characterize the surface topography parameters of the plane and curved surface.
基金This work was supported by the National Natural Science Foundation of China （Grant No. 91123015, 51405240）, the Specialized Research Fund for the Doctoral Program of Higher Education （20113207110004）, and the Natural Science Foundation of Jiangsu Province（BK20140925）. Open Access This article is distributed under the terms of the Creative Commons Attribution License which permits any use, distribution, and reproduction in any medium, provided the original author（s） and source are credited.
文摘Micro-displacement measurement based on self-mixing interference using a fiber laser system was demonstrated. The sinusoidal phase modulation technique was introduced into the fiber laser self-mixing interference measurement system to improve the measurement resolution. The phase could be demodulated by the Fourier analysis method. Error sources were evaluated in detail, and the system was experimentally applied to reconstruct the motion of a high-precision commercial piezoelectric ceramic transducer （PZT）. The displacement measurement resolution was well beyond a half-wavelength. It provides a practical solution for displacement measurement based on all optical-fiber sensing applications with high precision.
