This paper presents a micro packaged MEMS pressure sensor for intracranial pressure measurement which belongs to BioMEMS. It can be used in lumbar puncture surgery to measure intracranial pressure. Minia- turization i...This paper presents a micro packaged MEMS pressure sensor for intracranial pressure measurement which belongs to BioMEMS. It can be used in lumbar puncture surgery to measure intracranial pressure. Minia- turization is key for lumbar puncture surgery because the sensor must be small enough to allow it be placed in the reagent chamber of the lumbar puncture needle. The size of the sensor is decided by the size of the sensor chip and package. Our sensor chip is based on silicon piezoresistive effect and the size is 400 × 400 μm2. It is much smaller than the reported polymer intracranial pressure sensors such as liquid crystal polymer sensors. In terms of package, the traditional dual in-line package obviously could not match the size need, the minimal size of recently reported MEMS-based intracranial pressure sensors after packaging is 10 × 10 mm2. In this work, we are the first to introduce a quad flat no-lead package as the package form of piezoresistive intracranial pressure sensors, the whole size of the sensor is minimized to only 3 × 3 mm2. Considering the liquid measurement environment, the sensor is gummed and waterproof performance is tested; the sensitivity of the sensor is 0.9 × 10-2 mV/kPa.展开更多
The monitoring of increased intracranial pressure（ICP） is necessary in the diagnosis and treatment of patients with neurological disease because it can provide an insight into the mechanism of the head injury. In th...The monitoring of increased intracranial pressure（ICP） is necessary in the diagnosis and treatment of patients with neurological disease because it can provide an insight into the mechanism of the head injury. In this letter, we develop a novel miniature Fabry–Perot（F-P） sensor for ICP measurement. The proposed sensor is fabricated by using a commercially available fusion splicer and a fiber cleaver, by which many difficult art problems involved in fabrication are solved and the online monitoring of the F-P cavity is actualized. The sensor exhibits a linear response to the applied pressure over the range of 0–25 k Pa（ample for ICP measurement）, with a sensitivity of 10.18 nm/k Pa, a resolution of 0.1 k Pa, and a reduced thermal sensitivity of 0.068 nm/°C, which shows it can meet the requirements of ICP measurement.展开更多
基金Project supported by the National Natural Science Foundation of China(Nos.61025021,61434001)the ‘Thousands Talents’ Program for Pioneer Researchers and Its Innovation Team,China
文摘This paper presents a micro packaged MEMS pressure sensor for intracranial pressure measurement which belongs to BioMEMS. It can be used in lumbar puncture surgery to measure intracranial pressure. Minia- turization is key for lumbar puncture surgery because the sensor must be small enough to allow it be placed in the reagent chamber of the lumbar puncture needle. The size of the sensor is decided by the size of the sensor chip and package. Our sensor chip is based on silicon piezoresistive effect and the size is 400 × 400 μm2. It is much smaller than the reported polymer intracranial pressure sensors such as liquid crystal polymer sensors. In terms of package, the traditional dual in-line package obviously could not match the size need, the minimal size of recently reported MEMS-based intracranial pressure sensors after packaging is 10 × 10 mm2. In this work, we are the first to introduce a quad flat no-lead package as the package form of piezoresistive intracranial pressure sensors, the whole size of the sensor is minimized to only 3 × 3 mm2. Considering the liquid measurement environment, the sensor is gummed and waterproof performance is tested; the sensitivity of the sensor is 0.9 × 10-2 mV/kPa.
基金supported by Beijing Nova Program under Grant No.Z121101002512111
文摘The monitoring of increased intracranial pressure（ICP） is necessary in the diagnosis and treatment of patients with neurological disease because it can provide an insight into the mechanism of the head injury. In this letter, we develop a novel miniature Fabry–Perot（F-P） sensor for ICP measurement. The proposed sensor is fabricated by using a commercially available fusion splicer and a fiber cleaver, by which many difficult art problems involved in fabrication are solved and the online monitoring of the F-P cavity is actualized. The sensor exhibits a linear response to the applied pressure over the range of 0–25 k Pa（ample for ICP measurement）, with a sensitivity of 10.18 nm/k Pa, a resolution of 0.1 k Pa, and a reduced thermal sensitivity of 0.068 nm/°C, which shows it can meet the requirements of ICP measurement.
