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COMPETING REACTIONS OF EXISTING Ni SILICIDE AND Ni OR Si INDUCED BY THERMAL ANNEALING AND MeV Si ION BEAM MIXING
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作者 朱德彰 M.C.Ridgway +2 位作者 R.G.Elliman J.S.Williams G.Collins 《Nuclear Science and Techniques》 SCIE CAS CSCD 1993年第3期158-163,共6页
The competing reactions between existing Ni silicides surrounded by Si and Ni were investigated by thermal annealing and MeV Si ion beam mixing. With high energy irradiation, the energy deposition at both interfaces, ... The competing reactions between existing Ni silicides surrounded by Si and Ni were investigated by thermal annealing and MeV Si ion beam mixing. With high energy irradiation, the energy deposition at both interfaces, Ni/Ni silicide and Ni silicide/Si, is equal. Two MeV He^- RBS and TEM were used to obtain the reacted layer composition and epitaxial orientation, respectively. Also glancing angle Co K_a. X-ray diffraction was utilized to identify phase formation. The main results indicate that the existing silicides preferentially react with Ni layer, and that there are pronounced differences of Ni silicide phase transition between thermal annealing and MeV Si ion beam mixing, even though the mixing was performed in radiation enhanced diffusion regime. The results can be explained in term of the heat of silicide formation and surface energy change. 展开更多
关键词 Chemical reaction kinetics NI SILICIDES MEV SI ion beam mixing ANNEALING RBS TEM
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Impedance Spectroscopy of Ion Beam Mixed Cu/BaTiO_3 PTCR Ceramics
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作者 雷家珩 《Journal of Wuhan University of Technology(Materials Science)》 SCIE EI CAS 2001年第3期15-18,共4页
The positive temperature coefficient resistance ( PTCR) barium titanate ceramic samples have been prepared by the standard solid-state reaction method, and the ceramic samples have been treated by depositing copper fi... The positive temperature coefficient resistance ( PTCR) barium titanate ceramic samples have been prepared by the standard solid-state reaction method, and the ceramic samples have been treated by depositing copper films with magnetron sputtering method. The metallic copper films deposited on the ceramic substrates have been mixed at room temperature with argon ions in energy of 400 keV. Ion beam mixing induced modification of PTCR behavior of the ceramics was studied by using the ac complex impedance method and the resistance vs. temperature measurements . The results showed that room temperature resistance dramatically decreased and Curie point shifted toward higher temperature side for the ion beam mixed samples. 展开更多
关键词 semiconducting barium titanate ceramics impedance spectroscopy ion beams mixing
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Studies on Ion-Beam Modified Hydrogen Evolution Electrodes
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作者 Zhang Ji-shuang Li Qin-lian Lu Yao-jiao and Yan Xi-yun (Department of Chemistry and Chemical Engineering, Hunan Univesity, Changsha, 410082) Hou Rang-kun (Deaprtment of Chemistiy , Henan Educational College, Zhengzhou, 450003 ) 《Chemical Research in Chinese Universities》 SCIE CAS CSCD 1994年第2期68-71,共4页
he present paper focuses on the modifying effects of ion beam mixing, ion im-planting and ion sputtering on hydrogen evolution electrodes. It was discovered thatthe four types of electrodes possessed excellent catalyt... he present paper focuses on the modifying effects of ion beam mixing, ion im-planting and ion sputtering on hydrogen evolution electrodes. It was discovered thatthe four types of electrodes possessed excellent catalytic activity in acid or alkalinemedia and potential stability in long term electrolysis of water under high currentdensity. Their stability and applying life-span greatly surpass those of other elec-trodes activated by electrodepositing and other method. The effects of temperatureand roughness on function of electrodes were also examined. XPS and AES wereapplied to analyse the surface composition and bond states of the electrodes, andthe distribution of concentration varying with depth, and to explain the law of theexperiments . 展开更多
关键词 Implantating ion-beam mixing ion Sputtering XPS Hydrogen Evo-lution Reaction
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Non-equilibrium alloy phase formation and transformation driven by ion beam mixing in the Fe-Hf-Nb multilayers 被引量:2
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作者 LI Nan WANG TongLe +3 位作者 DING Ning DAI Ye BAI Xue LIU BaiXin 《Science China(Technological Sciences)》 SCIE EI CAS 2012年第3期640-645,共6页
In the ion beam mixing experiments,eight Fe-Hf-Nb multilayered films,with overall compositions of Fe67Hf22Nb11,Fe67Hf11Nb22,Fe54Hf38Nb8,Fe54Hf30Nb16,Fe54Hf11Nb35,Fe25Hf67Nb8,Fe25Hf50Nb25 and Fe25Hf11Nb64,were irradiat... In the ion beam mixing experiments,eight Fe-Hf-Nb multilayered films,with overall compositions of Fe67Hf22Nb11,Fe67Hf11Nb22,Fe54Hf38Nb8,Fe54Hf30Nb16,Fe54Hf11Nb35,Fe25Hf67Nb8,Fe25Hf50Nb25 and Fe25Hf11Nb64,were irradiated by 200 keV xenon ions to doses ranging from 3×1014 Xe+/cm2 to 7×1015 Xe+/cm2.The results showed that unique amorphous phases were obtained at designed alloy compositions,falling in the favored glass-forming region deduced from three binary metal sub-systems.Interestingly,at some alloy compositions,the crystal-amorphous-crystal transformations were observed back and forth while varying the irradiation doses.In addition,at the alloy composition of Fe25Hf67Nb8,a metastable FCC phase was formed through an HCP-FCC structural phase transformation and it had a large lattice constant identified to be a=4.51 .Besides,the formation mechanism of non-equilibrium alloy phases was also discussed in terms of thermodynamics of solids and atomic collision theory. 展开更多
关键词 phase transformation ion beam mixing amorphous phase Fe-Hf-Nb system shearing mechanism
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Metallic glass formation in the ternary Ni-Nb-Mo system by ion beam mixing 被引量:2
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作者 LI Yang WANG TongLe +2 位作者 DING Ning LIU JianBo LIU BaiXin 《Science China(Technological Sciences)》 SCIE EI CAS 2012年第8期2206-2211,共6页
Glass forming ability of the ternary Ni-Nb-Mo system was studied by ion beam mixing of the Ni-Nb-Mo multilayered films.In the experiment,metallic glasses i.e.amorphous alloys were formed in the Ni51Nb19Mo30,Ni52Nb35Mo... Glass forming ability of the ternary Ni-Nb-Mo system was studied by ion beam mixing of the Ni-Nb-Mo multilayered films.In the experiment,metallic glasses i.e.amorphous alloys were formed in the Ni51Nb19Mo30,Ni52Nb35Mo13,Ni61Nb15Mo24 and Ni72Nb20Mo8 multilayered films,while only solid solutions were obtained in the Ni24Nb29Mo47 and Ni26Nb53Mo21 multilayered films.It turned out that the Ni concentration played a dominating role in affecting the glass-forming ability of the system.Besides,thermodynamic calculations predicted a favored composition region for metallic glass formation,matching well with the observations from ion beam mixing. 展开更多
关键词 metallic glasses ion beam mixing the Ni-Nb-Mo system
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Formation of non-equilibrium phases and associated structural transition in the Pd-Ta system induced by ion beam mixing 被引量:1
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作者 ZHAO Man DAI Ye +1 位作者 LI JiaHao LIU BaiXin 《Science China(Technological Sciences)》 SCIE EI CAS 2011年第3期676-681,共6页
For the Pd-Ta system characterized by a negative heat of formation of -78 kJ/mol, 200 keV xenon ion beam mixing with nano-sized Pd-Ta multilayered films was conducted to study the non-equilibrium phase formation. The ... For the Pd-Ta system characterized by a negative heat of formation of -78 kJ/mol, 200 keV xenon ion beam mixing with nano-sized Pd-Ta multilayered films was conducted to study the non-equilibrium phase formation. The results showed that uniform amorphous alloys can be formed within a composition range of 25 at%-78 at% Ta, which falls in the maximum possible amorphization range of 22 at%-80 at% Ta predicted by the empirical model. Moreover, two metastable crystalline phases both of FCC structure, yet with different lattice constants were obtained. Interestingly, a self-assembled fractal pattern was observed in the Pd52Ta48 multilayered films after irradiation to a dose of 1×1015 Xe+/cm2 and its dimension was determined to be 1.75±0.05. The possible mechanisms for the formation of amorphous and metastable crystalline phases as well as for the growth of the fractal pattern were discussed. 展开更多
关键词 amorphous phase Pd-Ta alloy ion beam mixing metastable crystalline phase FRACTAL
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Different atomic structures observed from ternary Ni-Nb-Ta metallic glasses obtained by ion beam mixing 被引量:1
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作者 WANG YuanYu LIU JianBo +1 位作者 DAI Ye LIU BaiXin 《Science China(Technological Sciences)》 SCIE EI CAS 2013年第8期1842-1846,共5页
Four sets of ternary Ni-Nb-Ta multilayered samples with overall compositions of Ni69Nb8Ta23,Ni55Nb13Ta32,Ni42Nb16Ta42 and Ni29Nb18Ta53,respectively were prepared and subjected to 185 keV xenon ion beam mixing.The expe... Four sets of ternary Ni-Nb-Ta multilayered samples with overall compositions of Ni69Nb8Ta23,Ni55Nb13Ta32,Ni42Nb16Ta42 and Ni29Nb18Ta53,respectively were prepared and subjected to 185 keV xenon ion beam mixing.The experimental results showed that in the four Ni-Nb-Ta multilayered samples,metallic glasses could all be obtained at appropriate doses,supporting the prediction directly from a proven realistic Ni-Nb-Ta interatomic potential through molecular dynamics simulations,and that two different atomic structures were observed,as in the corresponding selected area diffraction patterns,the locations of the diffused bands reflected from the metallic glass phases were observed at different angles for the Ni69Nb8Ta23 and Ni29Nb18Ta53 metallic glasses.Interestingly,Voronoi tellessation analysis indicated that the observed difference in atomic structures could be attributed to the distinct coordinate number spectra,i.e.,the spectrum of the Ni69Nb8Ta23 metallic glass has its coordinate number(CN) equal to 13 as dominating atomic configuration(with a weight of about 27%),whereas for the Ni29Nb18Ta53 metallic glass,CN=14 is the dominating atomic configuration(also about 27%).Moreover,the distinct atomic configurations of the obtained Ni-Nb-Ta metallic glasses could be correlated to the structures of the constituent metals of the ternary Ni-Nb-Ta system,as the first neighbor of fcc is 12 and the sum of the first and second neighbors of bcc is 14,implying the structural heredity did play a role in metallic glass formation. 展开更多
关键词 ion beam mixing molecular dynamics coordinate number structural heredity
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Synthesis of metallic glasses and metallic glass based composites in the Cu-Mo-Hf system by ion beam mixing 被引量:1
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作者 BAI Xue WANG TongLe +3 位作者 CUI YuanYuan DING Ning LI JiaHao LIU BaiXin 《Science China(Technological Sciences)》 SCIE EI CAS 2012年第5期1353-1358,共6页
Single-phase and dual-phase metallic glasses as well as metallic glass based composites were synthesized in the Cu-Mo-Hf ternary metal system by 200 keV xenon ion beam mixing of far-from-equilibrium. It was found that... Single-phase and dual-phase metallic glasses as well as metallic glass based composites were synthesized in the Cu-Mo-Hf ternary metal system by 200 keV xenon ion beam mixing of far-from-equilibrium. It was found that Mo-Hf-based and Cu-Mo-based single-phase metallic glasses could be obtained at compositions around CulTMo20Hf63 and Cu34Mo57Hf9, respectively. Interestingly, at the nearly equal-atomic stoichiometry of Cu38Mo31Hf3i, a dual-phase Cu-Mo-Hf metallic glass, consisting both of the Mo-Hf-based and Cu-Mo-based phases, was first obtained at relatively low irradiation doses ranging from (1-5)×10^15 Xe+/cm2, and a single-phase metallic glass was eventually obtained at a dose of 7×10^15 Xe+/cm2. In addition, two glass-based composites were obtained at the compositions of Cu14Mo62Hf24 and Cu77Mo14Hf9, and they consisted of the Mo-Hf based and Cu-Mo based metallic glasses, dissolved with some uniformly distributed BCC Mo-based and FCC Cu-based crystalline solid solutions, respectively. The formation mechanism of the above described non-equilibrium alloy phases was also discussed in terms of the atomic collision theory. 展开更多
关键词 Cu-Mo-Hf system ion beam mixing metallic glass dual-phase metallic glass glass-based composite
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Effect of Cu content on the glass forming ability of Cu-Zr-Ti system studied by ion beam mixing 被引量:1
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作者 WANG Yuan Yu WANG Qi LIU Bai Xin 《Science China(Technological Sciences)》 SCIE EI CAS CSCD 2015年第4期750-752,共3页
Based on the Cu-Zr-Ti ternary phase diagram,four sets of Cu-Zr-Ti multilayered films with various compositions of Cu20Zr36Ti44,Cu36Zr31Ti33,Cu49Zr24Ti27,and Cu67Zr16Ti17 were prepared and then the ion beam mixing was ... Based on the Cu-Zr-Ti ternary phase diagram,four sets of Cu-Zr-Ti multilayered films with various compositions of Cu20Zr36Ti44,Cu36Zr31Ti33,Cu49Zr24Ti27,and Cu67Zr16Ti17 were prepared and then the ion beam mixing was carried out.It turned out that the increase of Cu content doesn't always have a positive effect on the glass forming ability.The glass forming ability of Cu49Zr24Ti27 was degraded due to the appearance of a Cs Cl-type B2 structure Cu Zr phase in the eutectic region.The experimental observations justify the existence of the Cu Zr phase under the non-equilibrium condition.Possible formation mechanisms for the crystalline phase were also discussed in terms of the atomic collision theory. 展开更多
关键词 glass forming ability ion beam mixing FILMS
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Studies on Surface Modification of Metals by Ion Beam Mixing Implanting With Plasma Source Ion Implantation
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作者 陈英方 吴知非 +1 位作者 施芸城 蒋向荣 《Chinese Science Bulletin》 SCIE EI CAS 1994年第14期1161-1165,共5页
Ion implantation, as currently practiced, has been shown to be quite effective in production of semiconductor and integrated circuit as well as surface modification of metal. But it is a line-of-sight process and if t... Ion implantation, as currently practiced, has been shown to be quite effective in production of semiconductor and integrated circuit as well as surface modification of metal. But it is a line-of-sight process and if the target is non-planar, target manipulation, such as translation or rotation, is required to implant all sides of the target. Even with sophisticated target manipulation system, the performance of beam-line implantor is still limited by the retained dose problem,, i.e. the maximum dose retained by the target is governed by the angle of incidence of the beam. In order to achieve reasonable dose uniformity on targets with curved surfaces, target masking may be employed to restrict the ion beam angle of incidence. Even though the target has sufficient symmetry to accommodate masking, the masking degrades the system performance, and furthermore, sputtering of the masking contaminates the target. 展开更多
关键词 plasma source ion IMPLANTATion ion beam mixing surface modification AUGER electron SPECTROSCOPY X-ray PHOTOELECTRON spectroscopy.
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实现水蒸汽滴状冷凝的表面材料研究 被引量:9
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作者 马学虎 徐敦颀 林纪方 《大连理工大学学报》 CAS CSCD 北大核心 1994年第6期662-666,共5页
分别采用离子注入、等离子体聚合和动态离子束混合注入技术在黄铜管外表面制备了具有低表面能的非晶态离子注氮合金、聚六氟丙烯和聚四氟乙烯表面,实现了水蒸汽在常压下的滴状冷凝。实验结果表明,各种表面均能提高冷凝传热系数约20... 分别采用离子注入、等离子体聚合和动态离子束混合注入技术在黄铜管外表面制备了具有低表面能的非晶态离子注氮合金、聚六氟丙烯和聚四氟乙烯表面,实现了水蒸汽在常压下的滴状冷凝。实验结果表明,各种表面均能提高冷凝传热系数约20倍,由于不同技术制备的表面形成滴状冷凝的机制不同,各具有不同的特性。分析讨论了各种技术制备低表面能表面的特点及其应用前景。 展开更多
关键词 滴状冷凝 离子注入 等离子体聚合 水蒸汽
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注入氮离子的SiC涂层阻氢性能研究 被引量:2
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作者 王小英 邹觉生 黄宁康 《材料保护》 CAS CSCD 北大核心 2002年第2期23-25,共3页
利用离子束混合 离子注入 (Ar+ )和磁控溅射相结合的实验技术在HR 1不锈钢基体上制备了注入N+ 的SiC涂层 ,并用表面分析手段对所制备涂层的表面形貌、剖面形貌、相结构、表面成分、表面元素的化学态进行了分析。结果表明 :制备的涂层... 利用离子束混合 离子注入 (Ar+ )和磁控溅射相结合的实验技术在HR 1不锈钢基体上制备了注入N+ 的SiC涂层 ,并用表面分析手段对所制备涂层的表面形貌、剖面形貌、相结构、表面成分、表面元素的化学态进行了分析。结果表明 :制备的涂层结构致密、表面平整、膜层成分均匀 ;涂层与基体之间形成了一明显的过渡层 ,增强了涂层和基体之间的结合力。用二次离子质谱 (SIMS)对充氘涂层的阻氢性能进行了定性分析。结果表明 :涂层元素与氢形成稳定的化学键 ,抑制了氢的扩散和迁移 。 展开更多
关键词 离子束混合 注入N^+ SIC涂层 阻氢涂层 性能 氮离子 碳化硅
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H^+辐照对不锈钢基体上涂覆W膜的微观研究 被引量:2
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作者 杨斌 雷家荣 +1 位作者 汪德志 黄宁康 《核技术》 CAS CSCD 北大核心 2002年第4期267-271,共5页
对奥氏体不锈钢基体上采用离子束混合技术进行不同厚度的钨膜沉积 ,沉积后的试样进行了H+注入前后的XRD和SEM微观分析 ,研究了H+辐照对W膜的晶体结构和形貌的影响。结果表明 ,沉积的W膜基本上是非晶的 ,还出现了由于污染造成的钨的氧化... 对奥氏体不锈钢基体上采用离子束混合技术进行不同厚度的钨膜沉积 ,沉积后的试样进行了H+注入前后的XRD和SEM微观分析 ,研究了H+辐照对W膜的晶体结构和形貌的影响。结果表明 ,沉积的W膜基本上是非晶的 ,还出现了由于污染造成的钨的氧化物。氢离子的辐照模拟结果表明 ,少量晶化的W向非晶化转变 ,污染的氧化物被择优溅射掉。H+轰击对W膜表面形貌的影响不大 ,它仍然致密、均匀、完整且无明显损伤。 展开更多
关键词 不锈钢基体 离子束混合 W薄膜 H^+辐照 氢离子 辐照模拟 聚变堆 第一壁 钨薄膜 微结构 保护
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离子束混合及离子注入陶瓷材料表面改性研究概述 被引量:15
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作者 王齐祖 陈玉峰 《核技术》 CAS CSCD 北大核心 1994年第9期569-576,共8页
对离子注入陶瓷材料引起的辐照损伤和材料力学性能、摩擦学性能的改善及陶瓷基体上金属薄膜的离子束混合增强粘着研究的进展进行了综述。
关键词 离子注入 陶瓷 表面改性 力学性质
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超薄聚合物表面上滴状冷凝的传热研究 被引量:6
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作者 马学虎 李洪安 +1 位作者 徐敦颀 龙振湖 《高校化学工程学报》 EI CAS CSCD 1993年第4期309-316,共8页
本文采用等离子体聚合和离子束动态混合注入技术在不同的基材(黄铜、紫铜、不锈钢和碳钢)上制备了聚六氟丙烯和聚四氟乙烯的超薄膜,并进行了垂直管外的水蒸汽的滴状冷凝实验。实验发现,对于不同的基材,表面制备的工艺参数对冷凝传热性... 本文采用等离子体聚合和离子束动态混合注入技术在不同的基材(黄铜、紫铜、不锈钢和碳钢)上制备了聚六氟丙烯和聚四氟乙烯的超薄膜,并进行了垂直管外的水蒸汽的滴状冷凝实验。实验发现,对于不同的基材,表面制备的工艺参数对冷凝传热性能及维持滴状冷凝的寿命具有显著的影响。表面性能的测试和估算为预测给定蒸汽在某表面是否成滴提供了依据。 展开更多
关键词 超薄聚合物 表面 滴状冷凝 传热
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H^+辐照前后Mo涂层表面的XPS分析 被引量:2
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作者 刘春海 杜晓松 +2 位作者 汪德志 黄宁康 杨斌 《功能材料》 EI CAS CSCD 北大核心 2007年第2期176-178,182,共4页
对离子束混合技术在不锈钢基体上沉积的钼膜进行了H+辐照前后的XPS分析,研究了H+辐照对钼膜的结合能的影响。分析结果表明,沉积的钼膜中除了单质钼外,还有部分钼的氧化物;H+辐照结果表明,H+的辐照使钼的结合能向低能方向偏移;钼的氧化... 对离子束混合技术在不锈钢基体上沉积的钼膜进行了H+辐照前后的XPS分析,研究了H+辐照对钼膜的结合能的影响。分析结果表明,沉积的钼膜中除了单质钼外,还有部分钼的氧化物;H+辐照结果表明,H+的辐照使钼的结合能向低能方向偏移;钼的氧化物有所减少,说明污染的氧化物在一定程度上被择优溅射掉。 展开更多
关键词 离子束混合 MO薄膜 H^+辐照 XPS分析
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H^+辐照前后W涂层表面的XPS分析 被引量:2
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作者 杨斌 雷家荣 +1 位作者 汪德志 黄宁康 《原子与分子物理学报》 CAS CSCD 北大核心 2002年第1期41-44,共4页
对离子束混合技术在不锈钢基体上沉积的W膜进行了H+ 辐照前后的XPS分析 ,研究了H+ 辐照对W的结合能的影响。分析结果表明 ,沉积的W膜中除了单质钨外 ,还有部分钨的氧化物 ,H+ 辐照结果表明 ,H+的辐照使钨的结合能向低能方向偏移 ;钨的... 对离子束混合技术在不锈钢基体上沉积的W膜进行了H+ 辐照前后的XPS分析 ,研究了H+ 辐照对W的结合能的影响。分析结果表明 ,沉积的W膜中除了单质钨外 ,还有部分钨的氧化物 ,H+ 辐照结果表明 ,H+的辐照使钨的结合能向低能方向偏移 ;钨的氧化物有所减少 。 展开更多
关键词 离子束混合 W薄膜 H^+辐照 XPS分析 钨薄膜 等离子体室 内壁保护
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离子束表面改性及其在摩擦学中的应用 被引量:5
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作者 张绪寿 冶银平 《摩擦学学报》 EI CAS CSCD 北大核心 1992年第1期8-17,共10页
本文对离子束表面改性的各种方法和技术水平及其在摩擦学中的应用进行了综述,讨论了为使这种技术更加广泛地应用于实际摩擦学体系还必须研究的一些问题。大量文献资料表明,离子注入是改善材料摩擦学性能的一种有效方法。离子束辅助涂层... 本文对离子束表面改性的各种方法和技术水平及其在摩擦学中的应用进行了综述,讨论了为使这种技术更加广泛地应用于实际摩擦学体系还必须研究的一些问题。大量文献资料表明,离子注入是改善材料摩擦学性能的一种有效方法。离子束辅助涂层是新近发展起来的一种离子束表面改性技术,包括离子束增强沉积或离子束辅助沉积、离子束混合和离子束反冲注入。利用它可以制得0.05到几个微米厚的涂层。由于界面的相互扩散混合,离子束辅助涂层能更强地与底材结合,并且常比物理或化学气相沉积的涂层更密实。作者认为,离子束技术今后将在两个相关领域中发展,即直接的离子注入和离子辅助涂层,并且指出离子补助涂层技术将拓宽离子束技术在摩擦学中的应用范围。 展开更多
关键词 离子束 表面改性 涂层 摩探磨损
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超薄PTFE表面上滴状冷凝的传热研究 被引量:8
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作者 杜长海 马学虎 徐敦颀 《化学工业与工程》 CAS 2000年第4期192-197,共6页
采用离子束动态混合注入技术 ( Dynamic Ion- beam Mixed Implantation)制备了铜基、不锈钢基聚四氟乙烯 ( PTFE)的超薄聚合物薄膜 ,实现了水蒸汽的滴状冷凝。对不同冷凝表面的传热特性进行了试验测定。分析讨论了试验表面制备工艺条件... 采用离子束动态混合注入技术 ( Dynamic Ion- beam Mixed Implantation)制备了铜基、不锈钢基聚四氟乙烯 ( PTFE)的超薄聚合物薄膜 ,实现了水蒸汽的滴状冷凝。对不同冷凝表面的传热特性进行了试验测定。分析讨论了试验表面制备工艺条件及表面材料导热系数对滴状冷凝传热性能的影响。 展开更多
关键词 滴状冷凝 传热 离子束动脉混合注入 PTFE 薄膜
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混合离子束阴极真空弧等离子体鞘层特性 被引量:2
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作者 陈磊 金大志 +3 位作者 石磊 谈效华 戴晶怡 胡思得 《强激光与粒子束》 EI CAS CSCD 北大核心 2012年第8期1856-1860,共5页
基于无碰撞模型,建立了混合离子束阴极真空弧等离子体鞘层动力学模型,给出了解析表达式。针对材料改性中应用的H-Ti混合离子束,模拟计算了鞘层厚度和靶表面电场强度分别随离子密度和偏置靶压的演变规律。针对实际应用中出现的鞘层击穿... 基于无碰撞模型,建立了混合离子束阴极真空弧等离子体鞘层动力学模型,给出了解析表达式。针对材料改性中应用的H-Ti混合离子束,模拟计算了鞘层厚度和靶表面电场强度分别随离子密度和偏置靶压的演变规律。针对实际应用中出现的鞘层击穿和离子束散焦现象进行了理论分析,发现离子束稳定工作区域强烈依赖于离子密度和偏置靶压等参数,降低离子密度和提高靶压会增加稳定工作区域范围。 展开更多
关键词 混合离子束 真空弧 鞘层击穿 鞘层厚度
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