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Ion Density Distribution in an Inductively Coupled Plasma Chamber 被引量:4
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作者 陈俊芳 赵文锋 +2 位作者 吴先球 樊双莉 符斯列 《Plasma Science and Technology》 SCIE EI CAS CSCD 2004年第2期2233-2236,共4页
The ion density distribution in the reaction chamber was diagnosed by a Langmuir probe. The rules of the ion density distribution were obtained under the pressures of 9 Pa, 13 Pa, 27 Pa and 53 Pa in the reaction chamb... The ion density distribution in the reaction chamber was diagnosed by a Langmuir probe. The rules of the ion density distribution were obtained under the pressures of 9 Pa, 13 Pa, 27 Pa and 53 Pa in the reaction chamber, different radio-frequency powers and different positions. The result indicates that the ion density decreases as the pressure increases, and increases as the power decreases. The ion density of axial position z =0 achieves 5.8×1010 on the center of coil under the power of 200 w and pressure of 9 Pa in the reaction chamber. 展开更多
关键词 inductively coupled plasma ion density distribution angmuir probe
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On-Line Measurement of Ion Density in Atmospheric Nitrogen Discharge Filaments via Radiation Signals from Plasma Oscillation
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作者 汝丽丽 孟月东 +1 位作者 黄建军 齐冰 《Plasma Science and Technology》 SCIE EI CAS CSCD 2014年第5期448-453,共6页
Diagnosis of the particle number density of plasma plays an important role in the understanding of plasma sources and processing.Regular radiation signals from plasma oscillation in filaments of atmospheric nitrogen d... Diagnosis of the particle number density of plasma plays an important role in the understanding of plasma sources and processing.Regular radiation signals from plasma oscillation in filaments of atmospheric nitrogen discharge,which were excited by the injection of secondary electron beams during the propagation of the streamer,are employed to determine the ion density of plasma and its evolution in the filaments.Results show that the density of N4+ in a filament of atmospheric nitrogen discharge is of the order of 1013 cm-3.It is also found that the recombination processes play a dominant role in plasma decay,and that the ion density decreases non-monotonically with time during streamer propagation. 展开更多
关键词 streamer discharge plasma oscillation radiation signal ion density recombination
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Effect of Ne Glow Discharge on Ion Density Control in LHD
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作者 S.Morita M.Goto +6 位作者 S.Masuzak H.Suzuki K.Tanaka H.Nozato Y.Takeiri J.Miyazawa LHD experimental group 《Plasma Science and Technology》 SCIE EI CAS CSCD 2004年第5期2440-2444,共5页
Neon glow discharge cleaning was firstly attempted in Large Helical Device(LHD) instead of He glow discharge to remove hydrogen neutrals and to control the ion density, n_i.The Ne glow discharge continued for 8 hours ... Neon glow discharge cleaning was firstly attempted in Large Helical Device(LHD) instead of He glow discharge to remove hydrogen neutrals and to control the ion density, n_i.The Ne glow discharge continued for 8 hours overnight after a three-day experiment. At the secondnight H_α emission became weaker than the emission usually observed in the He glow discharge. Aclear reduction of the hydrogen influx was also observed in neutral beam injection (NBI) dischargeswith Ne puff, whereas the neon recycling was strongly enhanced with appearance of a flat densityprofile. As a result, the lowest density limit was further reduced down to 0.2 X 10^(13)cm^(-3). Theuse of Ar puff formed a peaked density profile with a high T_i of 7 keV. 展开更多
关键词 hydrogen recycling Ne glow discharge ion density
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Influence of Jet Angle and Ion Density of Cathode Side on Low Current Vacuum Arc Characteristics
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作者 王立军 贾申利 史宗谦 《Plasma Science and Technology》 SCIE EI CAS CSCD 2008年第2期193-197,共5页
In this study, the influence of the initial jet angles (IJAs) and ion number densities (INDs) at the cathode side on the low current vacuum arc (LCVA) characteristics is simulated and analysed. The results show ... In this study, the influence of the initial jet angles (IJAs) and ion number densities (INDs) at the cathode side on the low current vacuum arc (LCVA) characteristics is simulated and analysed. The results show that the ion temperature, electron temperature, ion number density, axial current density and plasma pressure all decrease with the increase of the cathode IJAs. It is also shown that LCVA can cause a current constriction for lower cathode IND, and the anode sheath potential is more nonuniform, which is mainly related to the nonuniform distribution of the axial current density at the anode side. 展开更多
关键词 low current vacuum arc initial jet angles ion number density simulation
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Deposition of High Quality GaN Film Under High ECR Plasma Density 被引量:1
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作者 杜小龙 陈广超 +1 位作者 姚鑫兹 朱鹤荪 《Journal of Beijing Institute of Technology》 EI CAS 1999年第4期374-380,共7页
Aim To investigate the influence of ion density( n i) on the deposition of wurtzite GaN films on the substrate of α Al 2O 3(0001) by electron cyclotron resonance plasma. Methods Langmuir probe measure... Aim To investigate the influence of ion density( n i) on the deposition of wurtzite GaN films on the substrate of α Al 2O 3(0001) by electron cyclotron resonance plasma. Methods Langmuir probe measurement, Double crystal X ray diffraction and Hall measurement were used. Results The quality of GaN film strongly depended on its growth condition. The higher ion density resulted in a higher amount ratio of N/Ga and a lower background electron concentration of GaN film. When the GaN was prepared in the ion density of 2 0×10 11 cm -3 , the amount ratio of N/Ga was close to 1, the electron background density was 3 7×10 18 cm -3 and its full width at half magnitude(FWHM) was 16?arcmin. Conclusion The quality of GaN film can be improved by raising the plasma density. 展开更多
关键词 electron cyclotron resonance(ECR) GAN ion density
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The Effect of Ion Current Density on Target Etching in Radio Frequency-Magnetron Sputtering Process
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作者 王庆 王永富 +1 位作者 巴德纯 岳向吉 《Plasma Science and Technology》 SCIE EI CAS CSCD 2012年第3期235-239,共5页
The effect of ion current density of argon plasma on target sputtering in magnetron sputtering process was investigated. Using home-made ion probe with computer-based data acquisition system, the ion current density a... The effect of ion current density of argon plasma on target sputtering in magnetron sputtering process was investigated. Using home-made ion probe with computer-based data acquisition system, the ion current density as functions of discharge power, gas pressure and positions was measured. A double-hump shape was found in ion current density curve after the analysis of the effects of power and pressure. The data demonstrate that ion current density increases with the increase in gas pressure in spite of slightly at the double-hump site, sharply at wave-trough and side positions. Simultaneously, the ion current density increases upon increase in power. Es- pecially, the ion current density steeply increases at the double-hump site. The highest energy of the secondary electrons arising from Larmor precession was found at the double-hump position, which results in high ion density. The target was etched seriously at the double-hump position due to the high ion density there. The data indicates that the increase in power can lead to a high sputtering speed rate. 展开更多
关键词 magnetron sputtering TARGET ion current probe ion current density ETCHING
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Structural,Electrical,and Lithium Ion Dynamics of Li2MnO3 from Density Functional Theory
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作者 陈永昌 霍苗 +5 位作者 刘洋 陈桐 冷成财 李强 孙兆林 宋丽娟 《Chinese Physics Letters》 SCIE CAS CSCD 2015年第1期132-136,共5页
The layered Li2MnO3 is investigated by using the first-principles calculations within the GGA and GGA-t-U scheme, respectively. Within the GGA4-U approach, the calculated intercalation voltage (ranges from 4,5 V to 4... The layered Li2MnO3 is investigated by using the first-principles calculations within the GGA and GGA-t-U scheme, respectively. Within the GGA4-U approach, the calculated intercalation voltage (ranges from 4,5 V to 4.9 V) is found to be in good agreement with experiments. From the analysis of electronic structure, the pure phase Li2MnO3 is insulating, which is indicative of poor electronic-conduction properties. However, further studies of lithium ion diffusion in bulk Li2MnO3 show that unlike the two-dimensional diffusion pathways in rock salt structure layered cathode materials, lithium can diffuse in a three-dimensional pathway in Li2MnO3, with moderate lithium migration energy barrier ranges from 0.57 to 0.63 e V. 展开更多
关键词 Li Structural Electrical and Lithium ion Dynamics of Li2MnO3 from density Functional Theory MNO
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Inter-Calibration Between Plasma Instruments Onboard DEMETER 被引量:2
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作者 Maha S.QUASSIM 《Plasma Science and Technology》 SCIE EI CAS CSCD 2008年第5期539-545,共7页
The in-situ measurements of the ionospheric plasma that we use come from two instruments of the scientific payload of the satellite DEMETER; the plasma analyser IAP (Instrument d'analyse du plasma) and the Langmuir... The in-situ measurements of the ionospheric plasma that we use come from two instruments of the scientific payload of the satellite DEMETER; the plasma analyser IAP (Instrument d'analyse du plasma) and the Langmuir probe ISL (Instrument Sonde de Langmuir). DEMETER is a micro-satellite realized by the CNES(Centre National d'Etudes Spatiales, France) with a principal objective to seek a possible influence of the seismic activity on the electromagnetic waves in the ionosphere and on the ionospheric plasma. The satellite was placed on June 29, 2004, in a circular and quasi helio-synchronous orbit at -710 km altitude. The experiments function primarily at mid-latitudes (from +60° to -60°). The IAP data were analysed to deduce the ion population (densities of the dominant ions, i.e. generally O^+, H^+ and He^+) therefore the total ion density. The use of data IAP thus requires some precaution to make sure that the electric equilibrium conditions of the satellite, such as the satellite potential (Фsat), are obtained during the treatment of routine, does not induce an error of measurement. When this potential is negative, the minority light ions H^+ and He^+ can be measured in a reliable way when their proportion is above 3% to 5% of that of O^+. The critical limitation is: under certain conditions, the satellite potential becomes positive and reach a value about -0.5 V so that it becomes impossible to measure H^+ ions. This is likely to involve a significant error on the composition and the density of the plasma. Therefore we carried out a calibration to estimate the missing density. The ISL experiment (Langmuir probe) provided the collected current/polarized tension characteristics of a cylindrical probe from which both electron density Ne and temperature Te were obtained. In some situations it is necessary to examine the accuracy of the electron density using another technique, for instance the high frequency (HF) spectrogram, provided by ICE (instrument champ electrique) instrument. This technique could give precise information about the accuracy of the data provided by the plasma analyser and the Langmuir probes. The observed satellite surface potential was found to be remarkable and subject of question. It displayed negative values at daytime and positive at night. 展开更多
关键词 plasma analyser satellite plasma observation ion density measuring
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Control of beam halo-chaos by sample function 被引量:1
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作者 白龙 张荣 +2 位作者 翁甲强 罗晓曙 方锦清 《Chinese Physics B》 SCIE EI CAS CSCD 2006年第6期1226-1230,共5页
The K-V beam through an axisymmetric uniform-focusing channel is studied using the particle-core model. The beam halo-chaos is found, and a sample function controller is proposed based on mechanism of halo formation a... The K-V beam through an axisymmetric uniform-focusing channel is studied using the particle-core model. The beam halo-chaos is found, and a sample function controller is proposed based on mechanism of halo formation and strategy of controlling halo-chaos. We perform multiparticle simulation to control the halo by using the sample function controller. The numerical results show that our control method is effective. We also find that the radial ion density changes when the ion beam is in the channel: not only can the halo-chaos and its regeneration be eliminated by using the sample function control method, but also the density uniformity can be found at the beam's centre as long as an appropriate control method is chosen. 展开更多
关键词 beam halo-chaos sample function radial ion density uniform-focusing channel
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Characterization of high flux magnetized helium plasma in SCU-PSI linear device 被引量:2
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作者 马小春 曹小岗 +3 位作者 韩磊 张志艳 韦建军 芶富均 《Plasma Science and Technology》 SCIE EI CAS CSCD 2018年第2期104-109,共6页
A high-flux linear plasma device in Sichuan University plasma-surface interaction(SCU-PSI)based on a cascaded arc source has been established to simulate the interactions between helium and hydrogen plasma with the ... A high-flux linear plasma device in Sichuan University plasma-surface interaction(SCU-PSI)based on a cascaded arc source has been established to simulate the interactions between helium and hydrogen plasma with the plasma-facing components in fusion reactors.In this paper,the helium plasma has been characterized by a double-pin Langmuir probe.The results show that the stable helium plasma beam with a diameter of 26 mm was constrained very well at a magnetic field strength of 0.3 T.The core density and ion flux of helium plasma have a strong dependence on the applied current,magnetic field strength and gas flow rate.It could reach an electron density of1.2×10^19m^-3and helium ion flux of 3.2×10^22m^-2s^-1,with a gas flow rate of 4 standard liter per minute,magnetic field strength of 0.2 T and input power of 11 k W.With the addition of-80 Vapplied to the target to increase the helium ion energy and the exposure time of 2 h,the flat top temperature reached about 530°C.The different sizes of nanostructured fuzz on irradiated tungsten and molybdenum samples surfaces under the bombardment of helium ions were observed by scanning electron microscopy.These results measured in the SCU-PSI linear device provide a reference for International Thermonuclear Experimental Reactor related PSI research. 展开更多
关键词 helium plasma beam diameter electron density ion flux nanostructure fuzz
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Saturation Ion Current Densities in Inductively Coupled Hydrogen Plasma Produced by Large-Power Radio Frequency Generator
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作者 WANG Songbai LEI Guangjiu +3 位作者 BI Zhenhua H. GHOMI YANG Size LIU Dongping 《Plasma Science and Technology》 SCIE EI CAS CSCD 2016年第9期907-911,共5页
An experimental investigation of the saturation ion current densities (Jions) in hydrogen inductively coupled plasma (ICP) produced by a large-power (2-32 kW) radio frequency (RF) generator is reported, then s... An experimental investigation of the saturation ion current densities (Jions) in hydrogen inductively coupled plasma (ICP) produced by a large-power (2-32 kW) radio frequency (RF) generator is reported, then some reasonable explanations are given out. With the increase of RF power, the experimental results show three stages: in the first stage (2-14 kW), the electron temperature will rise with the increase of RF power in the ICP, thus, the Jions increases continually as the electron temperature rises in the ICP. In the second stage (14 20 kW), as some H- ions lead to the mutual neutralization (MN), the slope of Jio^s variation firstly decreases then increases. In the third stage (20-32 kW), both the electronic detachment (ED) and the associative detachment (AD) in the ICP result in the destruction of H- ions, therefore, the increased amplitude of the Jions in the third stage is weaker than the one in the first stage. In addition, with the equivalent transformer model, we successfully Explain that the Jions at different radial locations in ICP has the same rule. Finally, it is found that the Jions has nothing to do with the outer/inner puffing gas pressure ratio, which is attributed to the high-speed movement of hydrogen molecules. 展开更多
关键词 saturation ion current densities large-power RF generator outer/innerpuffing gas pressure ratio H- ion transformer model
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Research on corona discharge suppression of high-voltage direct-current transmission lines based on dielectric-film-covered conductor
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作者 Yuze JIANG Qiying LI +4 位作者 Xuekai ZHANG Diwen JIANG Shiqiang LIU Bangfa PENG Jie LI 《Plasma Science and Technology》 SCIE EI CAS CSCD 2021年第2期64-75,共12页
Corona discharge suppression for high-voltage direct-current(HVDC)transmission lines at line terminals such as converter stations is a subject that requires attention.In this paper,a method based on a conductor covere... Corona discharge suppression for high-voltage direct-current(HVDC)transmission lines at line terminals such as converter stations is a subject that requires attention.In this paper,a method based on a conductor covered with dielectric film is proposed and implemented through a bench-scale setup.Compared with the bare conductor,the corona discharge suppression effect of the dielectric-film-covered conductor under positive polarity is studied from the composite field strength and ion current density using a line-plate experimental device.The influences of film thickness and film material on the corona discharge suppression effect are investigated.The charge accumulation and dissipation characteristics of different film materials are also studied.The results show that the conductor covered with dielectric film has excellent ability to inhibit corona discharge.The ground-level composite field strength of the conductor covered with dielectric film is lower than its nominal field strength,and its ion current density is at the nA m^(−2) level.The corona threshold voltage can be promoted by increasing the film thickness,but the ability to inhibit corona discharge becomes weak.The larger the surface electric field strength,the more charge accumulated,but the faster the charge dissipation rate.Compared with polyvinyl chloride film,cross-linked polyethylene film has stronger charge accumulation ability and slower charge dissipation rate,which can better restrain the corona discharge of HVDC transmission lines. 展开更多
关键词 high-voltage direct-current(HVDC)transmission lines corona discharge suppression dielectric-film-covered conductor composite field strength ion current density
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Ischemic postconditioning protects against ischemic brain injury by up-regulation of acid-sensing ion channel 2a 被引量:5
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作者 Wang-sheng Duanmu Liu Cao +3 位作者 Jing-yu Chen Hong-fei Ge Rong Hu Hua Feng 《Neural Regeneration Research》 SCIE CAS CSCD 2016年第4期641-645,共5页
Ischemic postconditioning renders brain tissue tolerant to brain ischemia,thereby alleviating ischemic brain injury.However,the exact mechanism of action is still unclear.In this study,a rat model of global brain isch... Ischemic postconditioning renders brain tissue tolerant to brain ischemia,thereby alleviating ischemic brain injury.However,the exact mechanism of action is still unclear.In this study,a rat model of global brain ischemia was subjected to ischemic postconditioning treatment using the vessel occlusion method.After 2 hours of ischemia,the bilateral common carotid arteries were blocked immediately for 10 seconds and then perfused for 10 seconds.This procedure was repeated six times.Ischemic postconditioning was found to mitigate hippocampal CA1 neuronal damage in rats with brain ischemia,and up-regulate acid-sensing ion channel 2a expression at the m RNA and protein level.These findings suggest that ischemic postconditioning up-regulates acid-sensing ion channel 2a expression in the rat hippocampus after global brain ischemia,which promotes neuronal tolerance to ischemic brain injury. 展开更多
关键词 neural regeneration brain injury ischemic brain injury acid-sensing ion channels neuroprotection ischemic postconditioning neuroprotection protein expression neuronal density ischemic tolerance molecular mechanism gene expression nerve regeneration
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Charge Exchange Effect on Space-Charge-Limited Current Densities in Ion Diode
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作者 石磊 《Plasma Science and Technology》 SCIE EI CAS CSCD 2002年第2期1239-1242,共4页
The article theoretically studied the charge-exchange effects on space charge limitedelectron and ion current densities of non-relativistic one-dimensional slab ion diode, and comparedwith those of without charge exch... The article theoretically studied the charge-exchange effects on space charge limitedelectron and ion current densities of non-relativistic one-dimensional slab ion diode, and comparedwith those of without charge exchange. 展开更多
关键词 Charge Exchange Effect on Space-Charge-Limited Current Densities in ion Diode THAN
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Experimental Study of a Minitype Atmospheric Non-equilibrium Plasma Source 被引量:2
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作者 白希尧 周建刚 +2 位作者 邱秀梅 刘栋 白敏冬 《Plasma Science and Technology》 SCIE EI CAS CSCD 2008年第6期724-726,共3页
A mini-type of plasma source was studied experimentally. The results showed that the plasma density, which was generated by an atmospheric non-equilibrium plasma source, rises with the increase in driving electric-fie... A mini-type of plasma source was studied experimentally. The results showed that the plasma density, which was generated by an atmospheric non-equilibrium plasma source, rises with the increase in driving electric-field and the momentum of gas particles. For a driving electricfield of 56 kV/cm and a gas particles' momentum of 10^9 × 10^-22 g·m/s, the ion density can exceed 10^10/cm^3 while the effective volume of the plasma source is only 2.5 cm^2. This study may help develop a method to generate a minitype plasma source with low energy consumption but high ion concentration. This source can be used in chemical industry, environmental engineering and military applications. 展开更多
关键词 atmosphere high voltage ionizing source ion density gas particle momentum electric discharging non-equilibrium plasma
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Improvement of the Uniformity of Surface Barrier Discharge in Atmospheric Nitrogen by Spark Discharge 被引量:1
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作者 高亮 齐冰 +1 位作者 黄建军 汝丽丽 《Plasma Science and Technology》 SCIE EI CAS CSCD 2010年第6期668-672,共5页
A spark generator was employed to assist surface barrier discharge (SBD) in nitrogen at atmospheric pressure. The influence of spark discharge on the SBD electrical behavior is investigated by means of volt-ampere c... A spark generator was employed to assist surface barrier discharge (SBD) in nitrogen at atmospheric pressure. The influence of spark discharge on the SBD electrical behavior is investigated by means of volt-ampere characteristics. Also, the electron density of plasma in the filament of each SBD arrangement is determined by plasma radiation method. It is found that the filaments in spark-assistant SBD are much stronger, while the corresponding mean electron density is much lower. Results show that the spark generator can improve the uniformity of SBD in atmospheric nitrogen in a particular range of applied frequency. 展开更多
关键词 surface barrier discharge spark preionization plasma radiation ion density
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Control of Beam Halo-Chaos for an Intense Charged-Particle Beam Propagating Through Double Periodic Focusing Field by Soliton
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作者 BAI Long ZHANG Rong +1 位作者 WENG Jia-Qiang FANG Jin-Qing 《Communications in Theoretical Physics》 SCIE CAS CSCD 2008年第10期913-918,共6页
We study an intense beam propagating through the double periodic focusing channel by the particle-coremodel,and obtain the beam envelope equation.According to the Poincare-Lyapunov theorem,we analyze the stabilityof b... We study an intense beam propagating through the double periodic focusing channel by the particle-coremodel,and obtain the beam envelope equation.According to the Poincare-Lyapunov theorem,we analyze the stabilityof beam envelope equation and find the beam halo.The soliton control method for controlling the beam halo-chaos isput forward based on mechanism of halo formation and strategy of controlling beam halo-chaos,and we also prove thevalidity of the control method,and furthermore,the feasible experimental project is given.We perform multiparticlesimulation to control the halo by using the soliton controller.It is shown that our control method is effective.We alsofind the radial ion density changes when the ion beam is in the channel,not only the halo-chaos and its regeneration canbe eliminated by using the nonlinear control method,but also the density uniformity can be found at beam's centre aslong as an appropriate control method is chosen. 展开更多
关键词 double periodic focusing channel beam envelope equation soliton controller radial ion density
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The Effect of Inductively Coupled Discharge on Capacitively Coupled Nitrogen-Hydrogen Plasma
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作者 张志辉 吴雪梅 宁兆元 《Plasma Science and Technology》 SCIE EI CAS CSCD 2014年第4期352-355,共4页
A novel technique to generate high-density plasma-called inductively coupled plasma (ICP), enhanced capacitively coupled plasma (CCP)- is successfully developed. The plasma can be generated using different frequen... A novel technique to generate high-density plasma-called inductively coupled plasma (ICP), enhanced capacitively coupled plasma (CCP)- is successfully developed. The plasma can be generated using different frequency configurations, such as ICP-enhanced single-frequency ca- pacitively coupled plasma (SFCCP) and dual-frequency capacitively coupled plasma (DFCCP). The characteristics of the plasma in the following frequency combinations are mainly investigated using a Langmuir probe, SFCCP (60 MHz), DFCCP (60 MHz, 13.56 MHz), SFCCP (60 MHz) and inductively coupled plasma (13.56 MHz), DFCCP (60 MHz, 13.56 MHz) and inductively coupled plasma (13.56 MHz). In this letter, the nitrogen and hydrogen mixture gas discharge charac- teristics of different configurations are studied. After the analysis, we can acquire the electron temperature and ion density. Then, the effect of inductively coupled discharge on SFCCP and DFCCP can be summarized. In our preliminary investigations, the main results can be given as follows. ICP can make the density of SFCCP increase and the distribution of the electron temper- ature in a radial direction more uniform. In addition, ICP not only can make the ion density of DFCCP increase, but also can improve the radial uniformity. F^rther experiments may be needed to clarify the mechanism. 展开更多
关键词 inductively coupled plasma capacitively coupled plasma ion density elec-tronic temperature
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Laser induced photo-detachment of O2 in DC discharge
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作者 j r legorreta j l patiNo f b yousif 《Plasma Science and Technology》 SCIE EI CAS CSCD 2018年第7期98-105,共8页
Determination of the negative ion number density of O2 and O in a DC discharge of oxygen plasma was made employing Langmuir probe in conjunction with eclipse laser photo- detachment technique. The temporal evolution o... Determination of the negative ion number density of O2 and O in a DC discharge of oxygen plasma was made employing Langmuir probe in conjunction with eclipse laser photo- detachment technique. The temporal evolution of the extra electrons resulting from the photo- detachment of O2- and O- were used to evaluate the negative ion number density. The ratio of O2 number density to O varied from 0.03 to 0.22. Number density of both O~ and O increased with increasing power and decreased as the pressure was increased. Electron number density was evaluated from the electron energy distribution function (EEDF) using the I-V recorded characteristic curves. Electron temperature between 2 and 2.7 eV were obtained. Influence of the 02(al△g) metastable state is discussed. 展开更多
关键词 electronegative plasma electron temperature Langmuir probe negative ion number density
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Multiscale frictional behaviors of sp^(2) nanocrystallited carbon films with different ion irradiation densities 被引量:1
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作者 Zelong HU Xue FAN Cheng CHEN 《Friction》 SCIE EI CAS CSCD 2021年第5期1025-1037,共13页
sp^(2) nanocrystallited carbon films with large nanocrystallite sizes,smooth surfaces,and relative high hardness were prepared with different ion irradiation densities regulated with the substrate magnetic coil curren... sp^(2) nanocrystallited carbon films with large nanocrystallite sizes,smooth surfaces,and relative high hardness were prepared with different ion irradiation densities regulated with the substrate magnetic coil current in an electron cyclotron resonance plasma sputtering system.Their multiscale frictional behaviors were investigated with macro pin‐on‐disk tribo‐tests and micro nanoscratch tests.The results revealed that,at an ion irradiation density of 16 mA/cm^(2),sp^(2) nanocrystallited carbon film exhibits the lowest friction coefficient and good wear resistant properties at both the macroscale and microscale.The film sliding against a Si_(3)N_(4) ball under a contact pressure of 0.57 GPa exhibited a low friction coefficient of 0.09 and a long wear life at the macroscale.Furthermore,the film sliding against a diamond tip under a contact pressure of 4.9 GPa exhibited a stable low friction coefficient of 0.08 with a shallow scratch depth at the microscale.It is suggested that sp^(2) nanocrystallites affect the frictional behaviors in the cases described differently.At the macroscale,the contact interface via the small real contact area and the sp^(2) nanocrystallited transfer layer dominated the frictional behavior,while the sp^(2) nanocrystallited structure in the film with low shear strength and high plastic resistivity,as well as the smooth surface morphology,decided the steady low nanoscratch properties at the microscale.These findings expand multiscale tribological applications of sp^(2) nanocrystallited carbon films. 展开更多
关键词 macro‐tribology micro‐tribology sp^(2)nanocrystallite carbon film ion irradiation density
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