This study investigated indium tin oxide(ITO) films that were deposited on fluororesin-46(F46) and polyimide(PI) transparent flexible substrates by a DC magnetron sputtering system. The optical properties of ITO films...This study investigated indium tin oxide(ITO) films that were deposited on fluororesin-46(F46) and polyimide(PI) transparent flexible substrates by a DC magnetron sputtering system. The optical properties of ITO films on F46 and PI including transmittance and reflectance in visible, near-infrared, and infrared spectral regions were obtained, and the surface morphology, and optical and electrical properties of ITO/F46 and ITO/PI after vacuum ultraviolet irradiation were investigated. The results showed that the mean transmittances of ITO/F46 and ITO/PI decreased and the sheet resistance increased after the irradiation, and these effects were mainly attributed to the greater surface roughness and crystal defects caused by the irradiation.展开更多
基金supported by the Science and Technology on Vacuum Technology and Physics Laboratory under the research Project No.6142207040104
文摘This study investigated indium tin oxide(ITO) films that were deposited on fluororesin-46(F46) and polyimide(PI) transparent flexible substrates by a DC magnetron sputtering system. The optical properties of ITO films on F46 and PI including transmittance and reflectance in visible, near-infrared, and infrared spectral regions were obtained, and the surface morphology, and optical and electrical properties of ITO/F46 and ITO/PI after vacuum ultraviolet irradiation were investigated. The results showed that the mean transmittances of ITO/F46 and ITO/PI decreased and the sheet resistance increased after the irradiation, and these effects were mainly attributed to the greater surface roughness and crystal defects caused by the irradiation.
