A grating is an important element of a phase-shifting point diffraction interferometer, and the grating constant and duty cycle have a great impact on the interferometer, so the design of a grating becomes significant...A grating is an important element of a phase-shifting point diffraction interferometer, and the grating constant and duty cycle have a great impact on the interferometer, so the design of a grating becomes significant. In order to measure the projection objective with a numerical aperture of 0.2, we present a joint optimization method of a pinhole and grating based on scalar diffraction and the finite difference time domain method. The grating constant and the film thickness are selected, and the duty cycle of the grating is optimized. The results show that in the grating processing the material chromium is adopted, the thickness is 200 nm, and the grating constant is 15 μm. When the duty cycle is 55%, the interference fringe contrast is the greatest. The feasibility of the design result is further verified by experiment.展开更多
Let T be a bounded linear operator on a complex Hilbert space H. In this paper we introduce a new class denoted by l-＊-A, of operators satisfying T＊｜T2｜T≥ T＊｜T＊｜2T, and we prove the basic properties of these ...Let T be a bounded linear operator on a complex Hilbert space H. In this paper we introduce a new class denoted by l-＊-A, of operators satisfying T＊｜T2｜T≥ T＊｜T＊｜2T, and we prove the basic properties of these operators. Using these results, we also prove that if T or T＊ ∈l-＊-A, then w（f（T）） = f（w（T））, σea（f（T）） = f（σea（T）） for every f C H（σ（T））, where g（σ（T）） denotes the set of all analytic functions on an open neighborhood of σ（T）.展开更多
基金supported by the Major Scientific Instrument Development Project of the National Natural Science Foundation of China(No.11627808)the National Natural Science Foundation of China(No.61675026)the National Science and Technology
文摘A grating is an important element of a phase-shifting point diffraction interferometer, and the grating constant and duty cycle have a great impact on the interferometer, so the design of a grating becomes significant. In order to measure the projection objective with a numerical aperture of 0.2, we present a joint optimization method of a pinhole and grating based on scalar diffraction and the finite difference time domain method. The grating constant and the film thickness are selected, and the duty cycle of the grating is optimized. The results show that in the grating processing the material chromium is adopted, the thickness is 200 nm, and the grating constant is 15 μm. When the duty cycle is 55%, the interference fringe contrast is the greatest. The feasibility of the design result is further verified by experiment.
基金Supported by Science Foundation of Ministry of Education of China (Grant No.208081)
文摘Let T be a bounded linear operator on a complex Hilbert space H. In this paper we introduce a new class denoted by l-＊-A, of operators satisfying T＊｜T2｜T≥ T＊｜T＊｜2T, and we prove the basic properties of these operators. Using these results, we also prove that if T or T＊ ∈l-＊-A, then w（f（T）） = f（w（T））, σea（f（T）） = f（σea（T）） for every f C H（σ（T））, where g（σ（T）） denotes the set of all analytic functions on an open neighborhood of σ（T）.
