Electron cyclotron resonance radio frequency （ECR-rf） hybrid krypton-diluted oxygen plasmas were used to pattern the surfaces of diamond films with the assistance of a physical mask, while optical emission spectrosc...Electron cyclotron resonance radio frequency （ECR-rf） hybrid krypton-diluted oxygen plasmas were used to pattern the surfaces of diamond films with the assistance of a physical mask, while optical emission spectroscopy was employed to characterize the plasma. It was found that with krypton dilution the etching rate decreased, and also the aspect ratios of nanotips formed in micro-holes were significantly modified. The oxygen atomic densities were estimated by oxygen atom optical emission and argon actinometry. Under a microwave power of 300 W and rf bias of-300 V, the absolute density of ground-state oxygen atoms decreased from 1.3×10^12 cm^-3 to 1.4×10^11 cm^-3 as the krypton dilution ratio increased to 80%, accompanied by the decrease in the plasma excitation temperature. It is concluded that oxygen atoms play a dominant role in diamond etching. The relative variations in the horizontal and vertical etching rates induced by the addition of krypton are attributed to the observations of thicker nanotips at a high krypton dilution ratio.展开更多
The transport processes of plasmas in grid systems of krypton（Kr） ion thrusters at different acceleration voltages were simulated with a 3 D-PIC model, and the result was compared with xenon（Xe） ion thrusters. The...The transport processes of plasmas in grid systems of krypton（Kr） ion thrusters at different acceleration voltages were simulated with a 3 D-PIC model, and the result was compared with xenon（Xe） ion thrusters. The variation of the screen grid transparency, the accelerator grid current ratio and the divergence loss were explored. It is found that the screen grid transparency increases with the acceleration voltage and decreases with the beam current, while the accelerator grid current ratio and divergence loss decrease first and then increase with the beam current. This result is the same with Xe ion thrusters. Simulation results also show that Kr ion thrusters have more advantages than Xe ion thrusters, such as higher screen grid transparency, smaller accelerator grid current ratio, larger cut-off current threshold, and better divergence loss characteristic. These advantages mean that Kr ion thrusters have the ability of operating in a wide range of current. Through comprehensive analyses, it can be concluded that using Kr as propellant is very suitable for a multimode ion thruster design.展开更多
基金supported by National Natural Science Foundation of China (No. 10635010)National Basic Research Program of China (No. 2008CB717800)
文摘Electron cyclotron resonance radio frequency （ECR-rf） hybrid krypton-diluted oxygen plasmas were used to pattern the surfaces of diamond films with the assistance of a physical mask, while optical emission spectroscopy was employed to characterize the plasma. It was found that with krypton dilution the etching rate decreased, and also the aspect ratios of nanotips formed in micro-holes were significantly modified. The oxygen atomic densities were estimated by oxygen atom optical emission and argon actinometry. Under a microwave power of 300 W and rf bias of-300 V, the absolute density of ground-state oxygen atoms decreased from 1.3×10^12 cm^-3 to 1.4×10^11 cm^-3 as the krypton dilution ratio increased to 80%, accompanied by the decrease in the plasma excitation temperature. It is concluded that oxygen atoms play a dominant role in diamond etching. The relative variations in the horizontal and vertical etching rates induced by the addition of krypton are attributed to the observations of thicker nanotips at a high krypton dilution ratio.
基金co-supported by the National Natural Science Foundation of China (No. 11675040)the Fundamental Research Funds for the Central Universities of China (Nos. 3102014KYJD005 and 1191329723)
文摘The transport processes of plasmas in grid systems of krypton（Kr） ion thrusters at different acceleration voltages were simulated with a 3 D-PIC model, and the result was compared with xenon（Xe） ion thrusters. The variation of the screen grid transparency, the accelerator grid current ratio and the divergence loss were explored. It is found that the screen grid transparency increases with the acceleration voltage and decreases with the beam current, while the accelerator grid current ratio and divergence loss decrease first and then increase with the beam current. This result is the same with Xe ion thrusters. Simulation results also show that Kr ion thrusters have more advantages than Xe ion thrusters, such as higher screen grid transparency, smaller accelerator grid current ratio, larger cut-off current threshold, and better divergence loss characteristic. These advantages mean that Kr ion thrusters have the ability of operating in a wide range of current. Through comprehensive analyses, it can be concluded that using Kr as propellant is very suitable for a multimode ion thruster design.
