The formation of Fe-N compounds by laser nitriding in an atmospheric ambient was reported. By CW-CO2 laser irradiation on pure ferrite iron in the atmospheric ambient, Fe-N compounds (including Fe2N, .Fe3AT and Fe4N) ...The formation of Fe-N compounds by laser nitriding in an atmospheric ambient was reported. By CW-CO2 laser irradiation on pure ferrite iron in the atmospheric ambient, Fe-N compounds (including Fe2N, .Fe3AT and Fe4N) are formed as a result of a laser-enhanced and temperature-enhanced reactions. The samples were analyzed with X-ray diffraction. It is found that the laser power density, scanning speed and nitrogen temperature are the main factors influencing the formation of Fe-N compounds. Nitrogen can be activated by pre-heating at some temperature. Nitrogen activation and sample surface melting by CW-CO2 laser greatly enhance the reaction between the sample surface and nitrogen beam. After annealing at 500℃for 3h, some Fe2N and Fe3N converted into more stable Fe4N.展开更多
The zirconium(Zr)alloy fuel cladding is one of the key structural components of a nuclear reactor and the first and most important line of defense for accommodating fission products.During the operation of nuclear rea...The zirconium(Zr)alloy fuel cladding is one of the key structural components of a nuclear reactor and the first and most important line of defense for accommodating fission products.During the operation of nuclear reactors,Zr alloy fuel cladding is subjected to extreme harsh environments,such as high temperature,high pressure and high flow rate for a long period of time.The wear and corrosion resistance of Zr alloys is important for the safe operation of nuclear reactors.Surface modification can effectively improve the corrosion and wear resistance of fuel cladding.Compared with coating technology,nitriding technology does not have problems for bonding between the coating and the substrate.Current research on surface nitriding of Zr alloys mainly focuses on plasma nitriding and ion implantation techniques.Research on laser nitriding of Zr alloy surfaces and their fretting wear characteristics is scarce.In this study,the surface of Zr alloy was treated with laser nitriding at different laser energies.The microstructure of Zr alloy treated with different laser energies and its fretting wear performance were studied.The results showed that after nitriding with different laser energies,the surface of the Zr alloy showed a typical molten state after melting,vaporizing and cooling under the thermal effect of the laser,and this state was more obvious with the increase of the laser energy.At the same time,doping of N atoms and formation of the ZrN phase led to different cooling rates in the molten zone that produced large tensile stresses after cooling.This led to cracks on the surface of Zr alloys after laser nitriding at different energies,and the crack density increased with increasing laser energy.This also led to an increase in the surface roughness of the Zr alloy with increasing laser energy after laser nitriding treatment.Due to the presence of water in the industrial nitrogen,nitrides were generated on the surface of the sample along with some oxides.When the laser energy was 100 mJ,there was no ZrN generation,and N existed mainly as a diffusion layer within the Zr alloy substrate.ZrN generated when the laser energy reached 200 mJ and above,which increased with the increase of laser energy.Due to the generation of ZrN phase and the presence of some oxides,the surface Vickers hardness of Zr alloys after laser nitriding treatment at different energies increased by 37.5%compared to Zr alloys.After laser nitriding treatment,the wear mechanism of Zr alloys changed.For the untreated Zr alloys,the wear mechanism was dominated by delamination and spalling wear,accompanied by oxidative and abrasive wear.The phenomenon of delamination and peeling decreased with the increase of laser energy.Wear mechanisms changed to predominantly abrasive wear with oxidative wear and delamination spalling.The wear volume of sample nitriding with laser energy 400 mJ was reduced by 46.5%compared with that of untreated Zr alloy.展开更多
Gallium Nitride film was successfully separated from sapphire substrate by laser radiation. The absorption of the 248 nm radiation by the GaN at the interface results in rapid thermal decomposition of interfacial laye...Gallium Nitride film was successfully separated from sapphire substrate by laser radiation. The absorption of the 248 nm radiation by the GaN at the interface results in rapid thermal decomposition of interfacial layer, yielding metallic Ga and N2 gas. The substrate can be easily removed by heating above the Ga melting point (29°C). X-ray diffraction, atomic force microscopy and photoluminescence of GaN before and after lift-off process have been performed, which demonstrated that the separation and transfer process do not alter the structural quality of the GaN films. And further discussions on the threshold energy and crack-free strategies of laser lift-off process have also been presented.展开更多
Laser nitriding is one of the effective techniques to improve the surface properties of titanium alloys and has potential application in the life extension of last-stage steam turbine blades. However, cracking of surf...Laser nitriding is one of the effective techniques to improve the surface properties of titanium alloys and has potential application in the life extension of last-stage steam turbine blades. However, cracking of surface coating is a common problem due to heat concentration in laser nitriding process. Conventionally, the cracks can be avoided through heat treatment, which may have an important influence on the mechanical properties of coating. Crack-free TiN/Ti3Al IMC coatings on Ti6Al4V are prepared by plasma spraying and laser nitriding. The microstructures, phase constitutes and compositions of the coating are observed and analyzed with scanning electron microscopy(SEM), X-ray diffraction(XRD) and X-ray energy-dispersive spectroscopy(EDS). Microhardness, elastic modulus, fracture toughness of the coating are measured. The results show that the crackand pore-free IMC coatings can be made through the proposed method; with increasing laser power, the amount and density of TiN phase in the coating first increased and then decreased, leading to the similar trend of microhardness and elastic modulus and the reverse trend of fracture toughness of the coating. Both the average microhardness and elastic modulus of the coating increase three times higher than those of the substrate. The volume fraction of the TiN reinforced phase in composite can be controlled by varying the laser power and the cracking problem in laser nitriding process is successfully solved.展开更多
The mixing technology of laser and heated nitrogen was applied to improve the surface hardness of titanium alloy （ TC4 ）. The samples were nitrided with laser power density of 6.S × 10^6SW. cm^-2, the scanning ...The mixing technology of laser and heated nitrogen was applied to improve the surface hardness of titanium alloy （ TC4 ）. The samples were nitrided with laser power density of 6.S × 10^6SW. cm^-2, the scanning speed varioas from 100 to 500mm ·min^-1. The nitrogen gas was pre-heated to 300℃ to accelerate the nitriding process. Some interested samples were tested with XRD method （X-ray diffraction） to analyze the composition of nitrides, and the surface hardness of HV was measured. The results show that TiN and Ti2N were formed on the surface of Ti alloy with proper nitriding parameters, but TiN is the main composition. The surface hardness increased by three times, which is from the original value of 269to 794kg·mm^-2. The mechanism of the mixing technology is considered mainly of the activation of nitrogen by laser power and the pre-heated process which accelerated the nitriding process. The nitridation process can be considered as six steps given in detail. The result by analyzing the mechanism of improving the surface property of TiAl alloy shows the improvement of surface property due to two factors： the first reason is the result of laser annealing, and the second one is the formation of TiN.展开更多
CW-CO2 laser nitriding technique was applied to improve the properties （such as aging property and the core loss） of grain oriented silicon steel. The samples were nitrided with regular space. Laser power density an...CW-CO2 laser nitriding technique was applied to improve the properties （such as aging property and the core loss） of grain oriented silicon steel. The samples were nitrided with regular space. Laser power density and scanning speed were chosen as 7.8×10^5W·cm^-2 and 100mm·min^-1. By some laser irradiation, Fe4N and Fe3N were formed in the nitrided zone. The nitrided samples were annealed at the temperatures ranged from 100 to 90℃. The core loss of some interested samples was tested. The results show that the core loss of the nitrided samples with different thickness of 0.23 and 0.30mm decreased by 14.9% and 9.4% respectively, and the aging property were improved up to 800℃. The mechanism of laser nitriding to improve the properties of grain oriented silicon steel is discussed.展开更多
A double-tapered AlGaN electron blocking layer (EBL) is proposed to apply in a deep ultraviolet semiconductor laser diode. Compared with the inverse double-tapered EBL, the laser with the double-tapered EBL shows a hi...A double-tapered AlGaN electron blocking layer (EBL) is proposed to apply in a deep ultraviolet semiconductor laser diode. Compared with the inverse double-tapered EBL, the laser with the double-tapered EBL shows a higher slope efficiency, which indicates that effective enhancement in the transportation of electrons and holes is achieved. Particularly, comparisons among the double-tapered EBL, the inverse double-tapered EBL, the singletapered EBL and the inverse single-tapered EBL show that the double-tapered EBL has the best performance in terms of current leakage.展开更多
This study raised a new assisted technique used for chemical vapor deposition (CVD) in which a laser beam irradiated the surface of substrate and simultaneously the plasma surroundings created in the reactive room, bu...This study raised a new assisted technique used for chemical vapor deposition (CVD) in which a laser beam irradiated the surface of substrate and simultaneously the plasma surroundings created in the reactive room, but both laser and plasma were at lower energy level in order to perform easily. The chemical vapor deposition reaction could be performed only just using simultaneously above two assisted methods. If not, the reaction could not be performed, too. It is laser plasma assisted chemical vapor deposition (LPCVD). For these reasons, a LPCVD device had been designed and manufactured, and was carried on practical operation. The results indicated that this technique is successful and feasible. Acting on the system of SiH 4 NH 3 N 2 with both CO 2 laser and RF plasma, expectant film of silicon nitride had been obtained on the surface of stainless steel.展开更多
Laser assisted machining is an effective method to machine advanced materials with the added benefits of longer tool life and increased material removal rates. While extensive studies have investigated the machining p...Laser assisted machining is an effective method to machine advanced materials with the added benefits of longer tool life and increased material removal rates. While extensive studies have investigated the machining properties for laser assisted milling（LAML）, few attempts have been made to extend LAML to machining parts with complex geometric features. A methodology for continuous path machining for LAML is developed by integration of a rotary and movable table into an ordinary milling machine with a laser beam system. The machining strategy and processing path are investigated to determine alignment of the machining path with the laser spot. In order to keep the material removal temperatures above the softening temperature of silicon nitride, the transformation is coordinated and the temperature interpolated, establishing a transient thermal model. The temperatures of the laser center and cutting zone are also carefully controlled to achieve optimal machining results and avoid thermal damage. These experiments indicate that the system results in no surface damage as well as good surface roughness, validating the application of this machining strategy and thermal model in the development of a new LAML system for continuous path processing of silicon nitride. The proposed approach can be easily applied in LAML system to achieve continuous processing and improve efficiency in laser assisted machining.展开更多
Carbon nitride,an emerging polymeric semiconductor,has attracted attention in research ranging from photocatalysis to photodetection due to its favorable visible light response and high physicochemical stability.For i...Carbon nitride,an emerging polymeric semiconductor,has attracted attention in research ranging from photocatalysis to photodetection due to its favorable visible light response and high physicochemical stability.For its practical device application,the fabrication of high-quality carbon nitride films on substrates is essential.However,conventional methodologies to achieve high polymerization of carbon nitride are often accompanied by its decomposition,significantly compromising the film quality.Herein,we report an ultrafast fabrication of carbon nitride film by laser direct writing(LDW).The instantaneous high temperature and pressure during LDW can efficiently boost the polymerization of carbon nitride and suppress its decomposition,resulting in high-quality carbon nitride film with excellent mechanical stability with the substrate.Due to the efficient photon-to-electron conversion,it exhibits an outstanding photoelectrochemical water splitting and optoelectronic detection capability,even under strong acid/alkaline conditions.This study thus offers a facile and efficient LDW strategy for the rapid fabrication of carbon nitride film photoelectrodes,demonstrating its great feasibility in multifunctional photoelectrical applications,including but not limited to photoelectrochemical water splitting and optoelectronic detection.展开更多
The physical mechanisms of Ti/Al/Ni/Au ohmic contacts to AlGaN/GaN heterostructures by laser annealing and rapid thermal annealing are systematically investigated. The microstructures indicate that a better surface mo...The physical mechanisms of Ti/Al/Ni/Au ohmic contacts to AlGaN/GaN heterostructures by laser annealing and rapid thermal annealing are systematically investigated. The microstructures indicate that a better surface morphology and an intact contact interface are formed after laser annealing. None of the TiN alloy spikes are formed at the interface of the laser annealing sample. The experimental results show that the current transport mechanism through the ohmic contact after laser annealing is different from the conventional spike mechanism, and it is dominated by thermionic field emission.展开更多
Titanium nitride （TiN） films were deposited on Si（100） substrates by laser molecular beam epitaxy（LMBE）,and their properties of structure and resistivity with varying N2 pressure were investigated.The results sh...Titanium nitride （TiN） films were deposited on Si（100） substrates by laser molecular beam epitaxy（LMBE）,and their properties of structure and resistivity with varying N2 pressure were investigated.The results showed that atomically flat TiN films with layer-by-layer growth mode were successfully grown on Si（100） substrates,and （200） was the preferred orientation.With the increasing of N2 pressure,the N/Ti ratio gradually increased and the diffraction peak progressively shifted towards lower diffraction angle.At pressure of 0.1 Pa,stoichiometric TiN film was formed which exhibited the characteristic diffraction angle of （200） plane.All films showed high reflectance to infrared spectrum and the films with overstoichiometry and understoichiometry had a higher resistivity owing to the surface particles and lattice distortion,while the stoichiometric TiN film depicted the minimum resistivity,around 19 μΩ·cm.展开更多
oron carbon nitride coatings were synthesized using the pulsed laser deposition method. The hardness of the coatings was measured by a Vickers microhardness tester. It was found that the hardness of the coatings was b...oron carbon nitride coatings were synthesized using the pulsed laser deposition method. The hardness of the coatings was measured by a Vickers microhardness tester. It was found that the hardness of the coatings was between 15.45 and 34.05 GPa under a load of 0.5 N. The surface morphology was studied by optical microscopy and atomic force microscopy. There were spherical and irregular shaped particulates in the coatings. The density of the spherical particles was found being increased at high deposition temperatures. The rootmeansquared surface roughness of the coatings was about 4 nm.展开更多
文摘The formation of Fe-N compounds by laser nitriding in an atmospheric ambient was reported. By CW-CO2 laser irradiation on pure ferrite iron in the atmospheric ambient, Fe-N compounds (including Fe2N, .Fe3AT and Fe4N) are formed as a result of a laser-enhanced and temperature-enhanced reactions. The samples were analyzed with X-ray diffraction. It is found that the laser power density, scanning speed and nitrogen temperature are the main factors influencing the formation of Fe-N compounds. Nitrogen can be activated by pre-heating at some temperature. Nitrogen activation and sample surface melting by CW-CO2 laser greatly enhance the reaction between the sample surface and nitrogen beam. After annealing at 500℃for 3h, some Fe2N and Fe3N converted into more stable Fe4N.
文摘The zirconium(Zr)alloy fuel cladding is one of the key structural components of a nuclear reactor and the first and most important line of defense for accommodating fission products.During the operation of nuclear reactors,Zr alloy fuel cladding is subjected to extreme harsh environments,such as high temperature,high pressure and high flow rate for a long period of time.The wear and corrosion resistance of Zr alloys is important for the safe operation of nuclear reactors.Surface modification can effectively improve the corrosion and wear resistance of fuel cladding.Compared with coating technology,nitriding technology does not have problems for bonding between the coating and the substrate.Current research on surface nitriding of Zr alloys mainly focuses on plasma nitriding and ion implantation techniques.Research on laser nitriding of Zr alloy surfaces and their fretting wear characteristics is scarce.In this study,the surface of Zr alloy was treated with laser nitriding at different laser energies.The microstructure of Zr alloy treated with different laser energies and its fretting wear performance were studied.The results showed that after nitriding with different laser energies,the surface of the Zr alloy showed a typical molten state after melting,vaporizing and cooling under the thermal effect of the laser,and this state was more obvious with the increase of the laser energy.At the same time,doping of N atoms and formation of the ZrN phase led to different cooling rates in the molten zone that produced large tensile stresses after cooling.This led to cracks on the surface of Zr alloys after laser nitriding at different energies,and the crack density increased with increasing laser energy.This also led to an increase in the surface roughness of the Zr alloy with increasing laser energy after laser nitriding treatment.Due to the presence of water in the industrial nitrogen,nitrides were generated on the surface of the sample along with some oxides.When the laser energy was 100 mJ,there was no ZrN generation,and N existed mainly as a diffusion layer within the Zr alloy substrate.ZrN generated when the laser energy reached 200 mJ and above,which increased with the increase of laser energy.Due to the generation of ZrN phase and the presence of some oxides,the surface Vickers hardness of Zr alloys after laser nitriding treatment at different energies increased by 37.5%compared to Zr alloys.After laser nitriding treatment,the wear mechanism of Zr alloys changed.For the untreated Zr alloys,the wear mechanism was dominated by delamination and spalling wear,accompanied by oxidative and abrasive wear.The phenomenon of delamination and peeling decreased with the increase of laser energy.Wear mechanisms changed to predominantly abrasive wear with oxidative wear and delamination spalling.The wear volume of sample nitriding with laser energy 400 mJ was reduced by 46.5%compared with that of untreated Zr alloy.
基金supported by Special Funds for Major Stale Basic Research Project G20000683863 Hi-tech Research Project,Distinguished Young Scientist Grant(60025411)+1 种基金National Nature Science Foundation of China(69976014,69636010,69806006,69987001)benefited from using the laser device of the Pulsed Laser Deposition laboratory in Nanjing University.
文摘Gallium Nitride film was successfully separated from sapphire substrate by laser radiation. The absorption of the 248 nm radiation by the GaN at the interface results in rapid thermal decomposition of interfacial layer, yielding metallic Ga and N2 gas. The substrate can be easily removed by heating above the Ga melting point (29°C). X-ray diffraction, atomic force microscopy and photoluminescence of GaN before and after lift-off process have been performed, which demonstrated that the separation and transfer process do not alter the structural quality of the GaN films. And further discussions on the threshold energy and crack-free strategies of laser lift-off process have also been presented.
基金supported by National Natural Science Foundations of China(Grant Nos. 51175177, 10672058)Shanghai Municipal Leading Academic Discipline Project of China (Grant No. B503)
文摘Laser nitriding is one of the effective techniques to improve the surface properties of titanium alloys and has potential application in the life extension of last-stage steam turbine blades. However, cracking of surface coating is a common problem due to heat concentration in laser nitriding process. Conventionally, the cracks can be avoided through heat treatment, which may have an important influence on the mechanical properties of coating. Crack-free TiN/Ti3Al IMC coatings on Ti6Al4V are prepared by plasma spraying and laser nitriding. The microstructures, phase constitutes and compositions of the coating are observed and analyzed with scanning electron microscopy(SEM), X-ray diffraction(XRD) and X-ray energy-dispersive spectroscopy(EDS). Microhardness, elastic modulus, fracture toughness of the coating are measured. The results show that the crackand pore-free IMC coatings can be made through the proposed method; with increasing laser power, the amount and density of TiN phase in the coating first increased and then decreased, leading to the similar trend of microhardness and elastic modulus and the reverse trend of fracture toughness of the coating. Both the average microhardness and elastic modulus of the coating increase three times higher than those of the substrate. The volume fraction of the TiN reinforced phase in composite can be controlled by varying the laser power and the cracking problem in laser nitriding process is successfully solved.
文摘The mixing technology of laser and heated nitrogen was applied to improve the surface hardness of titanium alloy （ TC4 ）. The samples were nitrided with laser power density of 6.S × 10^6SW. cm^-2, the scanning speed varioas from 100 to 500mm ·min^-1. The nitrogen gas was pre-heated to 300℃ to accelerate the nitriding process. Some interested samples were tested with XRD method （X-ray diffraction） to analyze the composition of nitrides, and the surface hardness of HV was measured. The results show that TiN and Ti2N were formed on the surface of Ti alloy with proper nitriding parameters, but TiN is the main composition. The surface hardness increased by three times, which is from the original value of 269to 794kg·mm^-2. The mechanism of the mixing technology is considered mainly of the activation of nitrogen by laser power and the pre-heated process which accelerated the nitriding process. The nitridation process can be considered as six steps given in detail. The result by analyzing the mechanism of improving the surface property of TiAl alloy shows the improvement of surface property due to two factors： the first reason is the result of laser annealing, and the second one is the formation of TiN.
基金supported by the National Natural Science Foundation of China(No.50174020).
文摘CW-CO2 laser nitriding technique was applied to improve the properties （such as aging property and the core loss） of grain oriented silicon steel. The samples were nitrided with regular space. Laser power density and scanning speed were chosen as 7.8×10^5W·cm^-2 and 100mm·min^-1. By some laser irradiation, Fe4N and Fe3N were formed in the nitrided zone. The nitrided samples were annealed at the temperatures ranged from 100 to 90℃. The core loss of some interested samples was tested. The results show that the core loss of the nitrided samples with different thickness of 0.23 and 0.30mm decreased by 14.9% and 9.4% respectively, and the aging property were improved up to 800℃. The mechanism of laser nitriding to improve the properties of grain oriented silicon steel is discussed.
基金Supported by the National Key Research and Development Program under Grant No 2016YFE0118400the Key Project of Science and Technology of Henan Province under Grant No 172102410062+1 种基金the National Natural Science Foundation of China under Grant No 61176008the National Natural Science Foundation of China Henan Provincial Joint Fund Key Project under Grant No U1604263
文摘A double-tapered AlGaN electron blocking layer (EBL) is proposed to apply in a deep ultraviolet semiconductor laser diode. Compared with the inverse double-tapered EBL, the laser with the double-tapered EBL shows a higher slope efficiency, which indicates that effective enhancement in the transportation of electrons and holes is achieved. Particularly, comparisons among the double-tapered EBL, the inverse double-tapered EBL, the singletapered EBL and the inverse single-tapered EBL show that the double-tapered EBL has the best performance in terms of current leakage.
文摘This study raised a new assisted technique used for chemical vapor deposition (CVD) in which a laser beam irradiated the surface of substrate and simultaneously the plasma surroundings created in the reactive room, but both laser and plasma were at lower energy level in order to perform easily. The chemical vapor deposition reaction could be performed only just using simultaneously above two assisted methods. If not, the reaction could not be performed, too. It is laser plasma assisted chemical vapor deposition (LPCVD). For these reasons, a LPCVD device had been designed and manufactured, and was carried on practical operation. The results indicated that this technique is successful and feasible. Acting on the system of SiH 4 NH 3 N 2 with both CO 2 laser and RF plasma, expectant film of silicon nitride had been obtained on the surface of stainless steel.
基金Supported by National Natural Science Foundation of China(Grant No.51205097)China Postdoctoral Science Foundation(Grant No.2013M541401)
文摘Laser assisted machining is an effective method to machine advanced materials with the added benefits of longer tool life and increased material removal rates. While extensive studies have investigated the machining properties for laser assisted milling（LAML）, few attempts have been made to extend LAML to machining parts with complex geometric features. A methodology for continuous path machining for LAML is developed by integration of a rotary and movable table into an ordinary milling machine with a laser beam system. The machining strategy and processing path are investigated to determine alignment of the machining path with the laser spot. In order to keep the material removal temperatures above the softening temperature of silicon nitride, the transformation is coordinated and the temperature interpolated, establishing a transient thermal model. The temperatures of the laser center and cutting zone are also carefully controlled to achieve optimal machining results and avoid thermal damage. These experiments indicate that the system results in no surface damage as well as good surface roughness, validating the application of this machining strategy and thermal model in the development of a new LAML system for continuous path processing of silicon nitride. The proposed approach can be easily applied in LAML system to achieve continuous processing and improve efficiency in laser assisted machining.
基金Australian Research Council,Grant/Award Number:DP200100365National Natural Science Foundation of China,Grant/Award Numbers:21905144,21905202,22002107,22179093+1 种基金Qinghai Provincial Department of Science and Technology,Grant/Award Number:2021-zj-702Tianjin University,Grant/Award Number:2021XZC-0052。
文摘Carbon nitride,an emerging polymeric semiconductor,has attracted attention in research ranging from photocatalysis to photodetection due to its favorable visible light response and high physicochemical stability.For its practical device application,the fabrication of high-quality carbon nitride films on substrates is essential.However,conventional methodologies to achieve high polymerization of carbon nitride are often accompanied by its decomposition,significantly compromising the film quality.Herein,we report an ultrafast fabrication of carbon nitride film by laser direct writing(LDW).The instantaneous high temperature and pressure during LDW can efficiently boost the polymerization of carbon nitride and suppress its decomposition,resulting in high-quality carbon nitride film with excellent mechanical stability with the substrate.Due to the efficient photon-to-electron conversion,it exhibits an outstanding photoelectrochemical water splitting and optoelectronic detection capability,even under strong acid/alkaline conditions.This study thus offers a facile and efficient LDW strategy for the rapid fabrication of carbon nitride film photoelectrodes,demonstrating its great feasibility in multifunctional photoelectrical applications,including but not limited to photoelectrochemical water splitting and optoelectronic detection.
基金supported by the National Natural Science Foundation of China(Grant Nos.51577169 and 51777187)the National Key Research and Development Program of China(Grant No.2017YFB0402804)
文摘The physical mechanisms of Ti/Al/Ni/Au ohmic contacts to AlGaN/GaN heterostructures by laser annealing and rapid thermal annealing are systematically investigated. The microstructures indicate that a better surface morphology and an intact contact interface are formed after laser annealing. None of the TiN alloy spikes are formed at the interface of the laser annealing sample. The experimental results show that the current transport mechanism through the ohmic contact after laser annealing is different from the conventional spike mechanism, and it is dominated by thermionic field emission.
基金Funded by the Guangxi Natural Science Foundation (No.0731005)the Open Foundation of the Key Lab of New Processing Technology for Nonferrous Metals and Materials (No.6XKFJ-06)
文摘Titanium nitride （TiN） films were deposited on Si（100） substrates by laser molecular beam epitaxy（LMBE）,and their properties of structure and resistivity with varying N2 pressure were investigated.The results showed that atomically flat TiN films with layer-by-layer growth mode were successfully grown on Si（100） substrates,and （200） was the preferred orientation.With the increasing of N2 pressure,the N/Ti ratio gradually increased and the diffraction peak progressively shifted towards lower diffraction angle.At pressure of 0.1 Pa,stoichiometric TiN film was formed which exhibited the characteristic diffraction angle of （200） plane.All films showed high reflectance to infrared spectrum and the films with overstoichiometry and understoichiometry had a higher resistivity owing to the surface particles and lattice distortion,while the stoichiometric TiN film depicted the minimum resistivity,around 19 μΩ·cm.
文摘oron carbon nitride coatings were synthesized using the pulsed laser deposition method. The hardness of the coatings was measured by a Vickers microhardness tester. It was found that the hardness of the coatings was between 15.45 and 34.05 GPa under a load of 0.5 N. The surface morphology was studied by optical microscopy and atomic force microscopy. There were spherical and irregular shaped particulates in the coatings. The density of the spherical particles was found being increased at high deposition temperatures. The rootmeansquared surface roughness of the coatings was about 4 nm.
