Extreme ultraviolet(EUV) spectra emitted from low-Z impurity ions in the wavelength range of10–500Å were observed in Experimental Advanced Superconducting Tokamak(EAST)discharges. Several spectral lines from K-a...Extreme ultraviolet(EUV) spectra emitted from low-Z impurity ions in the wavelength range of10–500Å were observed in Experimental Advanced Superconducting Tokamak(EAST)discharges. Several spectral lines from K-and L-shell partially ionized ions were successfully observed with sufficient spectral intensities and resolutions for helium, lithium, boron, carbon,oxygen, neon, silicon and argon using two fast-time-response EUV spectrometers of which the spectral intensities are absolutely calibrated based on the intensity comparison method between visible and EUV bremsstrahlung continua. The wavelength is carefully calibrated using wellknown spectra. The lithium, boron and silicon are individually introduced for the wall coating of the EAST vacuum vessel to suppress mainly the hydrogen and oxygen influxes from the vacuum wall, while the carbon and oxygen intrinsically exist in the plasma. The helium is frequently used as the working gas as well as the deuterium. The neon and argon are also often used for the radiation cooling of edge plasma to reduce the heat flux onto the divertor plate. The measured spectra were analyzed mainly based on the database of National Institute of Standards and Technology. As a result, spectral lines of He Ⅱ, Li Ⅱ–Ⅲ, B Ⅳ–Ⅴ, C Ⅲ–Ⅵ, O Ⅲ–Ⅷ, Ne Ⅱ–Ⅹ,Si Ⅴ–Ⅻ, and Ar Ⅹ–XVI are identified in EAST plasmas of which the central electron temperature and chord-averaged electron density range in Te0=0.6–2.8 keV and ne=(0.5–6.0)×1019 m-3, respectively. The wavelengths and transitions of EUV lines identified here are summarized and listed in a table for each impurity species as the database for EUV spectroscopy using fusion plasmas.展开更多
Time-integrated optical emission analysis of laser-induced plasma on Teflon is presented.Plasma was induced under atmospheric pressure air using transversely excited atmospheric CO_(2) laser pulses.Teflon is a C-based...Time-integrated optical emission analysis of laser-induced plasma on Teflon is presented.Plasma was induced under atmospheric pressure air using transversely excited atmospheric CO_(2) laser pulses.Teflon is a C-based polymer that is,among other things,interesting as a substrate for laser-induced breakdown spectroscopy analysis of liquid samples.This study aimed to determine the optimal experimental conditions for obtaining neutral and ionized C spectral lines and C2 and CN molecular band emission suitable for spectrochemical purposes.Evaluation of plasma parameters was done using several spectroscopic techniques.Stark profiles of appropriate C ionic lines were used to determine electron number density.The ratio of the integral intensity of ionic-to-atomic C spectral lines was used to determine the ionization temperature.A spectral emission of C2 Swan and CN violet bands system was used to determine the temperature of the colder,peripheral parts of plasma.We critically analyzed the use of molecular emission bands as a tool for plasma diagnostics and suggested methods for possible improvements.展开更多
A study of a nanosecond laser irradiation on the titanium-layer-buried gold planar target is presented. The timeresolved x-ray emission spectra of titanium tracer are measured by a streaked crystal spectrometer. By co...A study of a nanosecond laser irradiation on the titanium-layer-buried gold planar target is presented. The timeresolved x-ray emission spectra of titanium tracer are measured by a streaked crystal spectrometer. By comparing the simulated spectra obtained by using the FLYCHK code with the measured titanium spectra, the temporal plasma states, i.e.,the electron temperatures and densities, are deduced. To evaluate the feasibility of using the method for the characterization of Au plasma states, the deduced plasma states from the measured titanium spectra are compared with the Multi-1D hydrodynamic simulations of laser-produced Au plasmas. By comparing the measured and simulated results, an overall agreement for the electron temperatures is found, whereas there are deviations in the electron densities. The experiment–theory discrepancy may suggest that the plasma state could not be well reproduced by the Multi-1D hydrodynamic simulation, in which the radial gradient is not taken into account. Further investigations on the spectral characterization and hydrodynamic simulations of the plasma states are needed. All the measured and FLYCHK simulated spectra are given in this paper as datasets. The datasets are openly available at http://www.doi.org/10.57760/sciencedb.j00113.00032.展开更多
The paper presents experimental results obtained on “Kanal-2” facility. Laser radiation focusing on the surface of plane magnesium targets created the high temperature plasma, which emitted X-ray and vacuum ultravio...The paper presents experimental results obtained on “Kanal-2” facility. Laser radiation focusing on the surface of plane magnesium targets created the high temperature plasma, which emitted X-ray and vacuum ultraviolet (VUV) radiation. This radiation spectrum was investigated with two spectrographs: the mica crystal spectrograph (working range 8.2 ? - 9.6 ?) and the grazing incidence VUV spectrograph (working rage 30 ? - 130 ?). A set of beryllium stepwise attenuators appended the diagnostic complex and allowed us to get an approximated picture of a continuous spectrum within the range of 2.2 ? - 6.2 ?. The estimation of the plasma electron temperature Te from the ratio between the intensity of the dielectronic satellites and the resonance line gives Te ~ 180 eV. The ratio between the intensity of the resonance and intercombination lines gives the electron density of the emitting zone ne ~ 2 × 1019 cm-3. Some lines observed within the spectral range of 8.5 ? - 9.1 ? belong to none of the transitions of Mg ions. Perhaps the observed spectrum is determined by the transitions in so-called hollow ions of Mg, i.e. in the ions with unfilled inner shells. The spectra obtained with the grazing incidence spectrograph and with the minimum-directioned discrepancy iteration method of spectrum reconstruction from the attenuation curve in the beryllium stepwise attenuators are also presented.展开更多
Laser-induced discharge plasmas(LDPs) have the potential to be inspection and metrology sources in extreme ultraviolet(EUV) lithography. An LDP EUV source was developed to avoid tin electrode erosion in which a tin po...Laser-induced discharge plasmas(LDPs) have the potential to be inspection and metrology sources in extreme ultraviolet(EUV) lithography. An LDP EUV source was developed to avoid tin electrode erosion in which a tin pool was used as a cathode. A CO2 pulse laser was focused on the liquid tin target surface, and then a breakdown occurred in a very short time. The voltage-current characteristics of the discharge oscillated, lasting for several microseconds, and an RLC fitting model was used to obtain the inductance and resistance. An intensified chargecoupled device(ICCD) camera was used to investigate the dynamics of LDP, which can explain the formation of a discharge channel. The EUV spectra of laser-induced liquid tin discharge plasma were detected by a grazing incident ultraviolet spectrometer, compared with a laser-produced tin droplet plasma EUV spectrum. To explain the EUV spectrum difference of laser-induced liquid tin discharge plasma and laser-produced tin droplet plasma,the collision radiation(CR) model combined with COWAN code was used to fit the experimental EUV spectrum, which can estimate the electron temperature and density of the plasma.展开更多
基金supported by National Key Research and Development Program of China(Nos.2018YFE0311100,2017YFE0300402,2017YFE0301300)National Natural Science Foundation of China(Nos.Nos.11905146,11775269,U1832126,11805133)+1 种基金Hefei Science Center High-end User Development Fund Project(2019HSCUE014)Chinese Academy of Sciences President’s International Fellowship Initiative(PIFI)(2020VMA0001)。
文摘Extreme ultraviolet(EUV) spectra emitted from low-Z impurity ions in the wavelength range of10–500Å were observed in Experimental Advanced Superconducting Tokamak(EAST)discharges. Several spectral lines from K-and L-shell partially ionized ions were successfully observed with sufficient spectral intensities and resolutions for helium, lithium, boron, carbon,oxygen, neon, silicon and argon using two fast-time-response EUV spectrometers of which the spectral intensities are absolutely calibrated based on the intensity comparison method between visible and EUV bremsstrahlung continua. The wavelength is carefully calibrated using wellknown spectra. The lithium, boron and silicon are individually introduced for the wall coating of the EAST vacuum vessel to suppress mainly the hydrogen and oxygen influxes from the vacuum wall, while the carbon and oxygen intrinsically exist in the plasma. The helium is frequently used as the working gas as well as the deuterium. The neon and argon are also often used for the radiation cooling of edge plasma to reduce the heat flux onto the divertor plate. The measured spectra were analyzed mainly based on the database of National Institute of Standards and Technology. As a result, spectral lines of He Ⅱ, Li Ⅱ–Ⅲ, B Ⅳ–Ⅴ, C Ⅲ–Ⅵ, O Ⅲ–Ⅷ, Ne Ⅱ–Ⅹ,Si Ⅴ–Ⅻ, and Ar Ⅹ–XVI are identified in EAST plasmas of which the central electron temperature and chord-averaged electron density range in Te0=0.6–2.8 keV and ne=(0.5–6.0)×1019 m-3, respectively. The wavelengths and transitions of EUV lines identified here are summarized and listed in a table for each impurity species as the database for EUV spectroscopy using fusion plasmas.
基金funded by the Ministry of Education,Science and Technological Development of the Republic of Serbia(Nos.451-03-68/2022-14/200017 and 451-03-68/2022-14/200146)the financial support of the State Committee on Science and Technology of the Republic of Belarusthe Belarusian Republican Foundation for Fundamental Research(No.F20SRBG-001)。
文摘Time-integrated optical emission analysis of laser-induced plasma on Teflon is presented.Plasma was induced under atmospheric pressure air using transversely excited atmospheric CO_(2) laser pulses.Teflon is a C-based polymer that is,among other things,interesting as a substrate for laser-induced breakdown spectroscopy analysis of liquid samples.This study aimed to determine the optimal experimental conditions for obtaining neutral and ionized C spectral lines and C2 and CN molecular band emission suitable for spectrochemical purposes.Evaluation of plasma parameters was done using several spectroscopic techniques.Stark profiles of appropriate C ionic lines were used to determine electron number density.The ratio of the integral intensity of ionic-to-atomic C spectral lines was used to determine the ionization temperature.A spectral emission of C2 Swan and CN violet bands system was used to determine the temperature of the colder,peripheral parts of plasma.We critically analyzed the use of molecular emission bands as a tool for plasma diagnostics and suggested methods for possible improvements.
基金Project supported by the National Key Research and Development Program of China (Grant No.2017YFA0403300)the National Natural Science Foundation of China (Grant Nos.12074352 and 11675158)Fundamental Research Funds for the Central Universities in China (Grant No.YJ202144)。
文摘A study of a nanosecond laser irradiation on the titanium-layer-buried gold planar target is presented. The timeresolved x-ray emission spectra of titanium tracer are measured by a streaked crystal spectrometer. By comparing the simulated spectra obtained by using the FLYCHK code with the measured titanium spectra, the temporal plasma states, i.e.,the electron temperatures and densities, are deduced. To evaluate the feasibility of using the method for the characterization of Au plasma states, the deduced plasma states from the measured titanium spectra are compared with the Multi-1D hydrodynamic simulations of laser-produced Au plasmas. By comparing the measured and simulated results, an overall agreement for the electron temperatures is found, whereas there are deviations in the electron densities. The experiment–theory discrepancy may suggest that the plasma state could not be well reproduced by the Multi-1D hydrodynamic simulation, in which the radial gradient is not taken into account. Further investigations on the spectral characterization and hydrodynamic simulations of the plasma states are needed. All the measured and FLYCHK simulated spectra are given in this paper as datasets. The datasets are openly available at http://www.doi.org/10.57760/sciencedb.j00113.00032.
文摘The paper presents experimental results obtained on “Kanal-2” facility. Laser radiation focusing on the surface of plane magnesium targets created the high temperature plasma, which emitted X-ray and vacuum ultraviolet (VUV) radiation. This radiation spectrum was investigated with two spectrographs: the mica crystal spectrograph (working range 8.2 ? - 9.6 ?) and the grazing incidence VUV spectrograph (working rage 30 ? - 130 ?). A set of beryllium stepwise attenuators appended the diagnostic complex and allowed us to get an approximated picture of a continuous spectrum within the range of 2.2 ? - 6.2 ?. The estimation of the plasma electron temperature Te from the ratio between the intensity of the dielectronic satellites and the resonance line gives Te ~ 180 eV. The ratio between the intensity of the resonance and intercombination lines gives the electron density of the emitting zone ne ~ 2 × 1019 cm-3. Some lines observed within the spectral range of 8.5 ? - 9.1 ? belong to none of the transitions of Mg ions. Perhaps the observed spectrum is determined by the transitions in so-called hollow ions of Mg, i.e. in the ions with unfilled inner shells. The spectra obtained with the grazing incidence spectrograph and with the minimum-directioned discrepancy iteration method of spectrum reconstruction from the attenuation curve in the beryllium stepwise attenuators are also presented.
文摘Laser-induced discharge plasmas(LDPs) have the potential to be inspection and metrology sources in extreme ultraviolet(EUV) lithography. An LDP EUV source was developed to avoid tin electrode erosion in which a tin pool was used as a cathode. A CO2 pulse laser was focused on the liquid tin target surface, and then a breakdown occurred in a very short time. The voltage-current characteristics of the discharge oscillated, lasting for several microseconds, and an RLC fitting model was used to obtain the inductance and resistance. An intensified chargecoupled device(ICCD) camera was used to investigate the dynamics of LDP, which can explain the formation of a discharge channel. The EUV spectra of laser-induced liquid tin discharge plasma were detected by a grazing incident ultraviolet spectrometer, compared with a laser-produced tin droplet plasma EUV spectrum. To explain the EUV spectrum difference of laser-induced liquid tin discharge plasma and laser-produced tin droplet plasma,the collision radiation(CR) model combined with COWAN code was used to fit the experimental EUV spectrum, which can estimate the electron temperature and density of the plasma.
