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Establishment and Error Analysis of Model of Interference Fringe Contrast for Laser Tracing Measurement Optical System
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作者 Hongfang Chen Mengyang Sun +3 位作者 Yinglun Ma Liang Tang Yu Wang Huixu Song 《Journal of Harbin Institute of Technology(New Series)》 CAS 2023年第4期37-49,共13页
A method was proposed to analyze the influences of the non-ideal spectroscopic performance of optical components and orientation errors of a laser tracing measurement optical system on the tracing measurement performa... A method was proposed to analyze the influences of the non-ideal spectroscopic performance of optical components and orientation errors of a laser tracing measurement optical system on the tracing measurement performance.A comprehensive model of the interference fringe contrast based on the laser tracing system s measurement principle was established in this study.Simulation results based on ZEMAX verified the model.According to the simulation results,the placement angle of the analyzer had a direct influence on the interference fringe contrast.When the angle of the polarized light to the analyzer’s transmission axis increased from 65°to 85°,each contrast of the four-way interference fringes decreased from 0.9996 to 0.3528,the interference fringe contrast is decreased by 65%.Under the split ratio of beam splitters in the interference part(BS 1)of 5∶5,when the splitting ratio of BS 2 changed from 2∶8 to 8∶2,the fringe contrast of the interference signals received by the photodetectors increased,but the injection light intensity onto the PSD reflected by BS 2 decreased.The significant influence of the tracing performance was verified by the experiments.When splitting ratio of BS 2 increased,the contrast of the interference fringes increased.Due to the weakening of the incident light intensity of the PSD caused by the change of BS 2 splitting ratio,the response time of the tracing system is increased by 23.7 ms.As a result,the tracing performance of the laser tracing measurement optical system was degraded.An important theoretical basis was provided to evaluate and improve the accuracy and reliability of laser tracing measurement systems. 展开更多
关键词 interference fringe contrast laser tracing measurement high precision measurement ZEMAX.
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2-μm single longitudinal mode GaSb-based laterally coupled distributed feedback laser with regrowth-free shallow-etched gratings by interference lithography 被引量:7
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作者 杨成奥 张宇 +6 位作者 廖永平 邢军亮 魏思航 张立春 徐应强 倪海桥 牛智川 《Chinese Physics B》 SCIE EI CAS CSCD 2016年第2期181-185,共5页
We report a type-I Ga Sb-based laterally coupled distributed-feedback(LC-DFB) laser with shallow-etched gratings operating a continuous wave at room temperature without re-growth process. Second-order Bragg gratings... We report a type-I Ga Sb-based laterally coupled distributed-feedback(LC-DFB) laser with shallow-etched gratings operating a continuous wave at room temperature without re-growth process. Second-order Bragg gratings are fabricated alongside the ridge waveguide by interference lithography. Index-coupled LC-DFB laser with a cavity of 1500 μm achieves single longitudinal mode continuous-wave operation at 20℃ with side mode suppression ratio(SMSR) as high as 24 dB.The maximum single mode continuous-wave output power is about 10 mW at room temperature(uncoated facet). A low threshold current density of 230 A/cm^2 is achieved with differential quantum efficiency estimated to be 93 mW/A. The laser shows a good wavelength stability against drive current and working temperature. 展开更多
关键词 laterally coupled distributed feedback laser LC-DFB interference lithography GASB second-order Bragg grating
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Self-Mixing Interference Effects in LD Pumped Multi-Mode Solid-State Laser 被引量:2
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作者 张勇 姚建铨 +2 位作者 王鹏 禹延光 陈进 《Transactions of Tianjin University》 EI CAS 2003年第4期261-263,共3页
Based on the effective structure of the self-mixing interference effects,a general model for the self-mixing interference effects in the LD pumped solid-state laser has been established for the first time.The numerica... Based on the effective structure of the self-mixing interference effects,a general model for the self-mixing interference effects in the LD pumped solid-state laser has been established for the first time.The numerical simulation of the self-mixing interference signal has been done,the results show that when the external cavity length is integral times of 1/2,1/3,2/3,1/4,3/4 of the effective cavity length,the intensity of the self-mixing interference signals reach maximum in value.While that of single mode laser is integral times of half of the effective cavity length,the measuring precision of displacement of single mode laser is λ/2.A conclusion can be drawn from the above results that the measuring precision of displacement of multi-mode laser is higher than that of single mode laser. 展开更多
关键词 general model self-mixing interference effects LD pumped multi-mode solid-state laser numerical simulations
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Fabrication of 4-Inch Nano Patterned Wafer with High Uniformity by Laser Interference Lithography 被引量:2
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作者 Gen Yue Yu Lei +2 位作者 Jun-Hui Die Hai-Qiang Jia Hong Chen 《Chinese Physics Letters》 SCIE CAS CSCD 2018年第5期56-59,共4页
We report the fabrication of 4-inch nano patterned wafer by two-beam laser interference lithography and analyze the uniformity in detail. The profile of the dots array with a period of 800 nm divided into five regions... We report the fabrication of 4-inch nano patterned wafer by two-beam laser interference lithography and analyze the uniformity in detail. The profile of the dots array with a period of 800 nm divided into five regions is characterized by a scanning electron microscope. The average size in each region ranges from 270 nm to 320 nm,and the deviation is almost 4%, which is approaching the applicable value of 3% in the industrial process. We simulate the two-beam laser interference lithography system with MATLAB software and then calculate the distribution of light intensity around the 4 inch area. The experimental data fit very well with the calculated results. Analysis of the experimental data and calculated data indicates that laser beam quality and space filter play important roles in achieving a periodical nanoscale pattern with high uniformity and large area. There is the potential to obtain more practical applications. 展开更多
关键词 exp Fabrication of 4-Inch Nano Patterned Wafer with High Uniformity by laser interference Lithography
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Nanodot array deposition via single shot laser interference pattern using laser-induced forward transfer 被引量:2
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作者 Yoshiki Nakata Eiki Hayashi +4 位作者 Koji Tsubakimoto Noriaki Miyanaga Aiko Narazaki Tatsuya Shoji Yasuyuki Tsuboi 《International Journal of Extreme Manufacturing》 2020年第2期114-118,共5页
Laser-induced forward transfer(LIFT)is a direct-writing technique capable of depositing a single dot smaller than the laser wavelength at small shot energy through the laser-induced dot transfer(LIDT)technique.To depo... Laser-induced forward transfer(LIFT)is a direct-writing technique capable of depositing a single dot smaller than the laser wavelength at small shot energy through the laser-induced dot transfer(LIDT)technique.To deposit a single nanodot in a single shot of laser irradiation,a liquid nanodrop is transferred from donor to receiver and finally solidified via a solid–liquid–solid(SLS)process.In conventional LIDT experiments,multi-shots with step scanning have been used to form array structures.However,interference laser processing can achieve an arrayed process and generate a periodic structure in a single shot.In this study,a femtosecond laser interference pattern was first applied to LIDT,and an array of nanodots was successfully deposited in a single shot,producing the following unit structures:a single dot,adjoining dots,and stacking dots.The diameter of the smallest nanodot was 355 nm,and the narrowest gap between two adjoining nanodots was 17.2 nm.The LIDT technique produces high-purity,catalyst-free that do not require post-cleaning or alignment processes.Given these significant advantages,LIDT can expand the usability of nanodots in a wide range of fields. 展开更多
关键词 interference laser processing laser-induced dot transfer NANODOT array femtosecond laser solid-liquid-solid mechanism Au
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Spatially-Resolved Crystallization of Amorphous Silicon Films on the Glass Substrate by Multi-beam Laser Interference
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作者 Zhongfan LIU Xuede YUAN +1 位作者 Xue HAO F.Muecklich 《Journal of Materials Science & Technology》 SCIE EI CAS CSCD 2007年第4期465-467,共3页
Laser interference induced crystallization of amorphous silicon (a-Si) on the glass substrate was performed using a Q-switched Nd:YAG (yttrium aluminum garnet) laser. White light interferometer (WLI) and atomic... Laser interference induced crystallization of amorphous silicon (a-Si) on the glass substrate was performed using a Q-switched Nd:YAG (yttrium aluminum garnet) laser. White light interferometer (WLI) and atomic force microscope (AFM) were used to characterize the morphology of the structured films, while X-ray diffraction (XRD), combined with the AFM, was used to analyse the crystalline structure of the film. The experimental results show that the laser energy density above a certain threshold, in the range of 400-500 mJ/cm2,triggers the patterned crystallizations which take the form similar to the laser intensity distribution. For the patterned crystallization under multipulse exposure, a definite polycrystalline structure with individual phases was observed by XRD. The difference in feature form, e.g., deepened craters or heightened lines, is related to the laser energy density relative to the threshold of evaporation of the material. 展开更多
关键词 Pulsed laser laser interference Amorphous silicon CRYSTALLIZATION
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A New Approach to Speed Measurement of Rotating Objects by Laser Interference Method
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作者 李鹏生 张琢 +1 位作者 赵慧洁 陈军 《Journal of Harbin Institute of Technology(New Series)》 EI CAS 1994年第1期23-25,共3页
ANewApproachtoSpeedMeasurementofRotatingObjectsbyLaserInterferenceMethodLIPengshengZHANGZhuoZHAOHuijieCHENJu... ANewApproachtoSpeedMeasurementofRotatingObjectsbyLaserInterferenceMethodLIPengshengZHANGZhuoZHAOHuijieCHENJun(李鹏生)(张琢)(赵慧洁)(陈... 展开更多
关键词 ss: laser interference ROTATING SPEED ROTATING angle MEASUREMENT
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Laser self-mixing interference fibre sensor
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作者 朱钧 赵燕 金国藩 《Chinese Physics B》 SCIE EI CAS CSCD 2008年第8期2979-2983,共5页
Fibre sensors exhibit a number of advantages over other sensors such as high sensitivity, electric insulation, corrosion resistance, interference rejection and so on. And laser self-mixing interference can accurately ... Fibre sensors exhibit a number of advantages over other sensors such as high sensitivity, electric insulation, corrosion resistance, interference rejection and so on. And laser self-mixing interference can accurately detect the phase difference of feedback light. In this paper, a novel laser self-mixing interference fibre sensor that combines the advantages of fibre sensors with those of laser self-mixing interference is presented. Experimental configurations are set up to study the relationship between laser power output and phase of laser feedback light when the fibre trembles or when the fibre is stretched or pressed. The theoretical analysis of pressure sensors based on laser self-mixing interference is indicated to accord with the experimental results. 展开更多
关键词 laser self-mixing interference fibre sensor
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All-fiber erbium-doped dissipative soliton laser with multimode interference based on saturable-reserve saturable hybrid optical switch
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作者 Xin Zhao Renyan Wan +6 位作者 Weiyan Li Liang Jin He Zhang Yan Li Yingtian Xu Linlin Shi Xiaohui Ma 《Chinese Physics B》 SCIE EI CAS CSCD 2022年第6期435-439,共5页
Reverse saturable absorption is essential for the realization of dissipative solitons.In this paper,we introduce reverse saturable absorption by using nonlinear multimode interference(NL-MMI),for the first time,to the... Reverse saturable absorption is essential for the realization of dissipative solitons.In this paper,we introduce reverse saturable absorption by using nonlinear multimode interference(NL-MMI),for the first time,to the best of our knowledge,and obtain a stable dissipative soliton operation.By adjusting the coupling efficiency from multimode fiber to single mode fiber,the absorption properties of NL-MMI can be switched between saturation and reverse saturation.The dissipative soliton can be obtained with pulse width of 975 fs in the experiment,the 3-dB bandwidth at 1555 nm is 16 nm,and the maximum output power is 11.48 m W.The nonlinear absorption optical modulation and high damage threshold characteristics of the NL-MMI based ultrafast optical switch provide a new idea for realizing dissipative solitons. 展开更多
关键词 multimode interference laser mode-locking abnormal saturable absorption
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Field-free molecular orientation induced by combined femtosecond single-and dual-color laser pulses: The role of delay time and quantum interference
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作者 秦朝朝 贾光瑞 +3 位作者 张现周 刘玉芳 龙金友 张冰 《Chinese Physics B》 SCIE EI CAS CSCD 2014年第1期201-205,共5页
The coherent control of field-free molecular orientation of CO with combined femtosecond single- and dual-color laser pulses has been theoretically studied. The effect of the delay time between the femtosecond single-... The coherent control of field-free molecular orientation of CO with combined femtosecond single- and dual-color laser pulses has been theoretically studied. The effect of the delay time between the femtosecond single- and dual-color laser pulses is discussed, and the physical mechanism of the enhancement of molecular orientation with pre-alignment of the molecule is investigated. It is found that the basic mechanism is based on the creation of a rotational wave packet by the femtosecond single-color laser pulse. Furthermore, we investigate the interference between multiple rotational excitation pathways following pre-alignment with femtosecond single-color laser pulse. It is shown that such interference can lead to an enhancement of the orientation of CO molecule by a factor of 1.6. 展开更多
关键词 molecular orientation femtosecond dual-color laser pulse quantum interference
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Interference effect of photoionization of hydrogen atoms by ultra-short and ultra-fast high-frequency chirped pulses 被引量:3
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作者 Ningyue Wang Aihua Liu 《Chinese Physics B》 SCIE EI CAS CSCD 2019年第8期112-118,共7页
The photoionization of a hydrogen atom from its ground state with ultra-fast chirped pulses is investigated by numerically solving the time-dependent Schrodinger equation within length,velocity,and Kramers-Henneberger... The photoionization of a hydrogen atom from its ground state with ultra-fast chirped pulses is investigated by numerically solving the time-dependent Schrodinger equation within length,velocity,and Kramers-Henneberger gauges.Converged results for all gauges for chirp-free pulses agree with the prediction of dynamic interference for ground state hydrogen atoms predicted recently by Jiang and Burgdorfer[Opt.Express 26,19921(2018)].In addition,we investigated photoelectron spectra of hydrogen atoms by chirped laser pulses,and showed that dynamic interference effect will be weaken for pulses with increasing linear chirp.Our numerical results can be understood and discussed in terms of an interplay of photoelectron wavepackets from first and second halves of laser enevelop,including the ac Stark energy level shift of the photoelectron final state and atomic stabilization effect at ultra-high intensities. 展开更多
关键词 dynamic interference super-intense laser CHIRPED pulses
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Two-Time Intensity Correlations and Multiple Interference Mechanisms in a Driven Cascade Atom
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作者 王飞 胡响明 《Chinese Physics Letters》 SCIE CAS CSCD 2007年第2期432-435,共4页
We examine the intensity correlation functions of the two fluorescent fields that are emitted from the top and middle states of a doubly driven three-level atom in the cascade configuration. Novel interference effects... We examine the intensity correlation functions of the two fluorescent fields that are emitted from the top and middle states of a doubly driven three-level atom in the cascade configuration. Novel interference effects are shown. (i) Both of the fluorescent fields have anticorrelations which can exist for long times when the applied fields are on the two-photon resonance and far off one.photon resonances. (ii) Both of the fluorescent fields have strong correlations when the applied fields are far off one- and two-photon resonances. In particular, the extremely strong correlation occurs for the photons emitted from the top state. The above phenomena are traced to the multiple interference mechanisms. 展开更多
关键词 SPONTANEOUS EMISSION CANCELLATION ELECTROMAGNETICALLY INDUCED TRANSPARENCY QUANTUM interference RESONANCE FLUORESCENCE PHOTONIC CRYSTAL INVERSION SYSTEMS laser
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Comparative research and its significance of deformation measurements by technologies of laser real-time holographic interferome-try and radar differential interferometry
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作者 毛先进 许昭永 +3 位作者 钱家栋 胡毅力 杨润海 王彬 《Acta Seismologica Sinica(English Edition)》 EI CSCD 2006年第3期333-343,共11页
The principles and applications of laser real-time holographic interferometry (LRTHI) and radar differential interferometry (RDI) technologies are described in this paper, respectively. By using LRTHI, we can obse... The principles and applications of laser real-time holographic interferometry (LRTHI) and radar differential interferometry (RDI) technologies are described in this paper, respectively. By using LRTHI, we can observe the deformation of samples under pressure in the lab and study the anomaly characteristics relating to different strain fields in different fracture-developing areas; while by using RDI, we can observe the landform and surface deformation. The results of deformation observed before and after the Ms=7.9 Mani earthquake (Tibet) and Ms=6.2 Shangyi-Zhangbei earthquake in China are obtained. It is pointed out that LRTHI and RDi are similar, which study the characteristics of anomalous deformation field by fringe variations for both of them. Therefore, the observation of deformation field in the seismogenic process, especially in the period impending an earthquake by RDI, and the comparative study in the lab by LRTHI are of great significance. 展开更多
关键词 laser real-time holographic interferometry radar differential interferometry interference fringe image deformation anomaly image
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High harmonic generation in crystal SiO_(2) by sub-10-fs laser pulses
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作者 王帅 郭嘉为 +5 位作者 贺新奎 梁玥瑛 谢百川 钟诗阳 滕浩 魏志义 《Chinese Physics B》 SCIE EI CAS CSCD 2023年第6期213-217,共5页
The high harmonic generation(HHG)by few-cycle laser pulses is essential for research in strong-field solid-state physics.Through comparison of high harmonic spectra of solids generated by laser pulses with varying dur... The high harmonic generation(HHG)by few-cycle laser pulses is essential for research in strong-field solid-state physics.Through comparison of high harmonic spectra of solids generated by laser pulses with varying durations,we discovered that lasers with good dispersion compensation are capable of producing a broad spectrum of high harmonics.As the pulse duration is further compressed,several interference peaks appear in the broad spectrum.Moreover,we conducted simulations using the semiconductor Bloch equation,considering the effect of Berry curvature,to better understand this process.Our work provides a valuable approach for studying HHG by few-cycle laser pulses in solid materials,expanding the application of HHG in attosecond physics. 展开更多
关键词 solid state hhg few-cycle laser pulses broad spectrum interference peak
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长寿命低丰度放射性核素的激光共振电离质谱分析技术研究进展
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作者 王文亮 张满超 +9 位作者 冯磊 沈小攀 徐江 张鹏飞 汪伟 翟秀芳 王江帆 邓虎 翟利华 李志明 《分析测试学报》 CAS CSCD 北大核心 2024年第10期1536-1544,共9页
长寿命低丰度放射性核素分析在核环境监测、核燃料循环和核取证等领域具有重要价值。激光共振电离质谱是一种将激光共振电离技术和质谱技术相结合的质谱分析技术,具有高选择性、高探测灵敏度和高丰度灵敏度等优点,适用于复杂基体条件下... 长寿命低丰度放射性核素分析在核环境监测、核燃料循环和核取证等领域具有重要价值。激光共振电离质谱是一种将激光共振电离技术和质谱技术相结合的质谱分析技术,具有高选择性、高探测灵敏度和高丰度灵敏度等优点,适用于复杂基体条件下超痕量核素分析需求。该文综述了近年来课题组基于自研的磁-电双聚焦激光共振电离质谱仪进行121mSn、126Sn、233U、236U、238Pu等核素丰度分析的相关研究工作,介绍了高效原子化源、高元素选择性以及高同位素选择性实验技术,并对激光共振电离质谱用于超痕量核素分析的发展方向进行了展望。 展开更多
关键词 低丰度 同量异位素干扰 激光共振电离质谱
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三维激光扫描技术在解决工业驱动汽轮机装配干涉问题的应用与研究
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作者 刘祥 张峻宁 晏杰 《中国重型装备》 2024年第3期21-25,共5页
详细阐述了三维激光扫描技术在工业驱动汽轮机装配上的应用,对三维激光扫描的关键技术(高精度测量、快速扫描、虚拟装配等)进行了分析研究,提出了通过高效装配仿真技术解决工业驱动汽轮机部套装配干涉问题的方案,探索并总结了一套适合... 详细阐述了三维激光扫描技术在工业驱动汽轮机装配上的应用,对三维激光扫描的关键技术(高精度测量、快速扫描、虚拟装配等)进行了分析研究,提出了通过高效装配仿真技术解决工业驱动汽轮机部套装配干涉问题的方案,探索并总结了一套适合汽轮机部套虚拟装配预防装配干涉的技术。 展开更多
关键词 三维激光扫描 驱动汽轮机 虚拟装配 装配干涉
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高水平应用型大学“检测技术”课程教学探索与实践——以北京信息科技大学为例
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作者 张雯 《教育教学论坛》 2024年第19期97-100,共4页
构筑全环境立德树人“大思政”格局,是全面提升高水平应用型大学教育教学质量的关键所在。“检测技术”是电子信息大类专业特色主干课程,其教学内容与仪器领域科技前沿紧密结合,具有高度的学科交叉特性。融合思政元素开展教学工作具有... 构筑全环境立德树人“大思政”格局,是全面提升高水平应用型大学教育教学质量的关键所在。“检测技术”是电子信息大类专业特色主干课程,其教学内容与仪器领域科技前沿紧密结合,具有高度的学科交叉特性。融合思政元素开展教学工作具有独特的优势,是新时代教育教学改革的必然趋势。以北京信息科技大学“检测技术”课程为例,探索了以课程教学为主线、科技前沿技术服务课程思政的教学模式,在教学实例方面,从激光干涉产生的“小”条纹入手,引导学生关注知识点背后隐藏的“大”学问,启发学生见“微”知“著”,树立精益求精的科学态度,坚定科技报国的理想。 展开更多
关键词 课程思政 高水平应用型大学 检测技术 激光干涉 引力波测量
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连续激光辐照背照式CMOS图像传感器实验研究
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作者 许永博 王云哲 +3 位作者 郑长彬 刘扬 程相正 邵俊峰 《应用光学》 CAS 北大核心 2024年第5期1072-1078,共7页
背照式互补金属氧化物半导体(complementary metal oxide semiconductor,CMOS)图像传感器较前照式结构显著提高了低光照环境下的拍摄效果,激光对不同结构传感器有不同的干扰损伤机制。为了研究激光对背照式CMOS图像传感器的影响,利用1 0... 背照式互补金属氧化物半导体(complementary metal oxide semiconductor,CMOS)图像传感器较前照式结构显著提高了低光照环境下的拍摄效果,激光对不同结构传感器有不同的干扰损伤机制。为了研究激光对背照式CMOS图像传感器的影响,利用1 064 nm连续激光,开展对背照式CMOS图像传感器的干扰和损伤实验研究。干扰实验观察到饱和与反饱和现象,激光功率密度大于1.39×10^(-2)W/cm^(2)时出现饱和现象,大于1.03×10~4W/cm^(2)时出现反饱和现象。损伤实验观察到点损伤、十字线损伤、面损伤和致盲现象,功率密度大于1.35×10^(6) W/cm^(2)出现点损伤,大于1.74×10^(6) W/cm^(2)出现十字线损伤,大于1.65×10^(7) W/cm^(2)时出现面损伤现象,进一步增加激光功率,探测器最终出现致盲现象。背照式结构电路较前照式结构的位置更深,干扰和损伤所需的激光功率更高,因此抗激光能力更强。 展开更多
关键词 连续激光 图像传感器 背照式 激光干扰 激光损伤
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中波红外激光器干扰效果对比实验研究
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作者 寇峻 岳通 +5 位作者 张纪鹏 杨艺帆 刘文兵 李轶国 彭杰 张茂 《应用光学》 CAS 北大核心 2024年第4期709-715,共7页
使用两种不同频率(1 kHz与15 kHz)的中波红外激光器对同一目标进行了远距离(15 km)干扰效果对比实验,分析了激光器频率与干扰效果的关系,计算了到达探测器的激光功率密度。实验结果表明:在激光器波长、平均功率一致的情况下,高重复频率(... 使用两种不同频率(1 kHz与15 kHz)的中波红外激光器对同一目标进行了远距离(15 km)干扰效果对比实验,分析了激光器频率与干扰效果的关系,计算了到达探测器的激光功率密度。实验结果表明:在激光器波长、平均功率一致的情况下,高重复频率(15 kHz)中波激光器的干扰效果要明显优于低重复频率(1 kHz)的中波激光器,实验结果对光电对抗装备的研制具有一定的指导意义。 展开更多
关键词 中波红外激光器 干扰效果 重复频率 对比实验
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激光共焦干涉面形快速高精度自动测量
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作者 赵家豪 杨帅 +3 位作者 杨铮 崔健 邱丽荣 赵维谦 《光学精密工程》 EI CAS CSCD 北大核心 2024年第9期1320-1329,共10页
针对传统球面面形干涉测量中手动调整被测件姿态精度低、速度慢的问题,提出了激光共焦干涉面形快速高精度自动测量方法。该方法通过共焦精密定焦技术实现了对被测件共焦位置的高精度轴向定位;通过五维自动调整架对被测件进行姿态调整,... 针对传统球面面形干涉测量中手动调整被测件姿态精度低、速度慢的问题,提出了激光共焦干涉面形快速高精度自动测量方法。该方法通过共焦精密定焦技术实现了对被测件共焦位置的高精度轴向定位;通过五维自动调整架对被测件进行姿态调整,实现了被测件的高精度横向定位;通过Zernike拟合对被测件进行精调以减小离焦误差和倾斜误差,实现了对干涉面形的零条纹调整。最终实现了激光共焦干涉面形自动测量。构建了激光共焦干涉面形测量系统,实验表明:该方法的面形测量结果与Zygo干涉仪的测量结果相差0.000 6λ,重复测量精度可达0.001 9λ,平均单次干涉面形测量时间为16.5 s,与手动调整至零条纹相比测量效率提高了1.56倍。该方法为干涉面形的快速高精度测量提供了一种有效的手段。 展开更多
关键词 激光共焦测量 移相干涉 共焦法 姿态调整 Zernike拟合 自动测量
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