Edge effect during microwave plasma chemical vapor deposition diamond-film:Multiphysics simulation and experimental verification

This study focused on the investigation of the edge effect of diamond films deposited by microwave plasma chemical vapor de-position.Substrate bulge height△h is a factor that affects the edge effect,and it was used to simulate plasma and guide the diamond-film deposition experiments.Finite-element software COMSOL Multiphysics was used to construct a multiphysics(electromagnetic,plasma,and fluid heat transfer fields)coupling model based on electron collision reaction.Raman spectroscopy and scanning electron microscopy were performed to characterize the experimental growth and validate the model.The simulation results reflected the experimental trends observed.Plasma discharge at the edge of the substrate accelerated due to the increase in△h(△h=0-3 mm),and the values of electron density(n_(c)),molar concentration of H(C_(H)),and molar concentration of CH_(3)(C_(CH_(3)))doubled at the edge(for the special concave sample with△h=−1 mm,the active chemical groups exhibited a decreased molar concentration at the edge of the substrate).At=0-3 mm,a high diamond growth rate and a large diamond grain size were observed at the edge of the substrate,and their values increased with.The uniformity of film thickness decreased with.The Raman spectra of all samples revealed the first-order characteristic peak of dia-mond near 1332 cm^(−1).When△h=−1 mm,tensile stress occurred in all regions of the film.When△h=1-3 mm,all areas in the film ex-hibited compressive stress.

Two-dimensional investigation of characteristic parameters and their gradients for the self-generated electric and magnetic fields of laser-induced zirconium plasma

Two-dimensional diagnosis of laser-induced zirconium(Zr)plasma has been experimentally performed using the time-of-flight method by employing Faraday cups in addition to electric and magnetic probes.The characteristic parameters of laser-induced Zr plasma have been evaluated as a function of different laser irradiances ranging from 4.5 to 11.7 GW cm-2 at different axial positions of 1–4 cm with a fixed radial distance of 2 cm.A well-supporting correlation between the plume parameters and the laser-plasma-produced spontaneous electric and magnetic(E and B)fields was established.The measurements of the characteristic parameters and spontaneously induced fields were observed to have an increasing trend with the increasing laser irradiance.However,when increasing the spatial distance in both the axial and radial directions,the plasma parameters(electron/ion number density,temperature and kinetic energy)did not show either continuously increasing or decreasing trends due to various kinetic and dynamic processes during the spatial evolution of the plume.However,the E and B fields were observed to be always diffusing away from the target.The radial component of electron number densities remained higher than the axial number density component,whereas the axial ion number density at all laser irradiances and axial distances remained higher than the radial ion number density.The higher axial self-generated electric field(SGEF)values than radial SGEF values are correlated with the effective charge-separation mechanism of electrons and ions.The generation of a self-generated magnetic field is observed dominantly in the radial direction at increasing laser irradiance as compared to the axial one due to the deflection of fast-moving electrons and the persistence of two-electron temperature on the radial axis.

A super wear-resistant coating for Mg alloys achieved by plasma electrolytic oxidation and discontinuous deposition

Magnesium alloys are lightweight materials with great potential,and plasma electrolytic oxidation(PEO)is effective surface treatment for necessary improvement of corrosion resistance of magnesium alloys.However,the∼14µm thick and rough PEO protection layer has inferior wear resistance,which limits magnesium alloys as sliding or reciprocating parts,where magnesium alloys have special advantages by their inherent damping and denoising properties and attractive light-weighting.Here a novel super wear-resistant coating for magnesium alloys was achieved,via the discontinuous sealing(DCS)of a 1.3µm thick polytetrafluoroethylene(PTFE)polymer layer with an initial area fraction(A_(f))of 70%on the necessary PEO protection layer by selective spraying,and the wear resistance was exceptionally enhanced by∼5500 times in comparison with the base PEO coating.The initial surface roughness(Sa)under PEO+DCS(1.54µm)was imperfectly 59%higher than that under PEO and conventional continuous sealing(CS).Interestingly,DCS was surprisingly 20 times superior for enhancing wear resistance in contrast to CS.DCS induced nano-cracks that splitted DCS layer into multilayer nano-blocks,and DCS also provided extra space for the movement of nano-blocks,which resulted in rolling friction and nano lubrication.Further,DCS promoted mixed wear of the PTFE polymer layer and the PEO coating,and the PTFE layer(HV:6 Kg·mm^(−2),A_(f):92.2%)and the PEO coating(HV:310 Kg·mm^(−2),A_(f):7.8%)served as the soft matrix and the hard point,respectively.Moreover,the dynamic decrease of Sa by 29%during wear also contributed to the super wear resistance.The strategy of depositing a low-frictional discontinuous layer on a rough and hard layer or matrix also opens a window for achieving super wear-resistant coatings in other materials.

Diagnostics of laser-induced plasma on carbon-based polymer material using atomic and molecular emission spectra

Time-integrated optical emission analysis of laser-induced plasma on Teflon is presented.Plasma was induced under atmospheric pressure air using transversely excited atmospheric CO_(2) laser pulses.Teflon is a C-based polymer that is,among other things,interesting as a substrate for laser-induced breakdown spectroscopy analysis of liquid samples.This study aimed to determine the optimal experimental conditions for obtaining neutral and ionized C spectral lines and C2 and CN molecular band emission suitable for spectrochemical purposes.Evaluation of plasma parameters was done using several spectroscopic techniques.Stark profiles of appropriate C ionic lines were used to determine electron number density.The ratio of the integral intensity of ionic-to-atomic C spectral lines was used to determine the ionization temperature.A spectral emission of C2 Swan and CN violet bands system was used to determine the temperature of the colder,peripheral parts of plasma.We critically analyzed the use of molecular emission bands as a tool for plasma diagnostics and suggested methods for possible improvements.

Transmission effects of high energy nanosecond lasers in laser-induced air plasma under different pressures

When a high energy nanosecond(ns)laser induces breakdown in the air,the plasma density generated in the rarefied atmosphere is much smaller than that at normal pressure.It is associated with a relatively lower absorption coefficient and reduces energy loss of the laser beam at low pressure.In this paper,the general transmission characterizations of a Joule level 10 ns 1064 nm focused laser beam are investigated both theoretically and experimentally under different pressures.The evolution of the electron density(n_(e)),the changes in electron temperature(T_(e))and the variation of laser intensity(I)are employed for numerical analyses in the simulation model.For experiments,four optical image transfer systems with focal length(f)of 200 mm are placed in a chamber and employed to focus the laser beam and produce plasmas at the focus.The results suggest that the transmittance increases obviously with the decreasing pressure and the plasma channels on the transmission path can be observed by the self-illumination.The simulation results agree well with the experimental data.The numerical model presents that the maximum n_e at the focus can reach 10^(19)cm^(-3),which is far below the critical density(n_(c)).As a result,the laser beam is not completely shielded by the plasmas.

Laser-induced voltage effects in Ca_3Co_4O_9 thin films on tilted LaAlO_3(001) substrates grown by chemical solution deposition

Laser-induced voltage effects in c-axis oriented Ca3Co4O9 thin films have been studied with samples fabricated on 10°tilted LaAIO3 （001） substrates by a simple chemical solution deposition method. An open-circuit voltage with a rise time of about 10 ns and full width at half maximum of about 28 ns is detected when the film surface is irradiated by a 308-nm laser pulse with a duration of 25 ns. Besides, opemcircuit voltage signals are also observed when the film surface is irradiated separately by the laser pulses of 532 nm and 1064 nm. The results indicate that Ca3Co4O9 thin films have a great potential application in the wide range photodetctor from the ultraviolet to near infrared regions.

Fabrication of micro carbon pillar by laser-induced chemical vapor deposition

Argon ion laser was used as the induced light source and ethane(C2H4) was selected as the precursor gas,in the variety ranges of laser power from 0.5 W to 4.5 W and the pressure of the precursor gas from 225×133.3 Pa to 680×133.3 Pa,the experiments of laser induced chemical vapor deposition were proceeded for fabrication of micro carbon pillar.In the experiments,the influences of power of laser and pressure of work gas on the diameter and length of micro carbon pillar were investigated,the variety on averaged growth rate of carbon pillar with the laser irradiation time and moving speed of focus was discussed.Based on experiment data,the micro carbon pillar with an aspect ratio of over 500 was built through the method of moving the focus.

Experimental study on microdeposition of the copper thin film by femtosecond laser-induced forward transfer

The morphologies of the deposited dots on the 40 nm-thick copper film by the femtosecond laser-induced forward transfer that depend on the irradiated laser fluence have been studied, and the variations of orderliness of the diameter of deposited dots on the quartz substrate and forward ablated dot on the donor substrate with increasing pulse fluence have been obtained experimentally. The experimental results show that a thinner copper film would generate larger-sized ablated dot and deposited dot at the threshold fluence for transfer. By x-ray diffraction measurement, it is demonstrated that the crystal form of the transferred copper films is unaltered and the size of the crystallites is diminished.

Effect of process parameters on induction plasma reactive deposition of tungsten carbide from tungsten metal powder

Tungsten carbide deposit was made directly from tungsten metal powder through the reaction with methane in radio frequency induction plasma. Effect of major process parameters on the induction plasma reactive deposition of tungsten carbide was studied by optical microscopy, scanning electron microscopy, X ray diffraction analysis, water displacement method, and microhardness test. The results show that methane flow rate, powder feed rate, particle size, reaction chamber pressure and deposition distance have significant influences on the phase composition, density, and microhardness of the deposit. Extra carbon is necessary to ensure the complete conversion of tungsten metal into the carbide.

Investigation on the deposition rate and the dilution ratio of plasma surface welding

A new kind of plasma technology with both high deposition rate and low dilution ratio was developed under the calculation and analysis of the arc flame characteristics of plasma arc,the kinematics behavior of powder and powder's heating in the arc. Compared with normal plasma surfacing method, the idea using constricting nozzle with small orifice diameter, long plasma arc and increasing the distance from meeting point of the two beams of powder to workpiece, to achieve the goals of high deposition rate and low dilution ratio, was put forward here. In order to prove this idea, a set of experimental system was built up and obtained satisfied results including high deposition rate(more than 25 kg/h )and low dilution ratio(less than 5%). The success of this study offers a promising prospect for developing the powder plasma surface welding in China and may open a way to improve this technology further in efficiency and quality.

Microwave Plasma Chemical Vapor Deposition of Diamond Films on Silicon From Ethanol and Hydrogen

Diamond films with very smooth surface and good optical quality have been deposited onto silicon substrate using microwave plasma chemical vapor deposition (MPCVD) from a gas mixture of ethanol and hydrogen at a low substrate temperature of 450 ℃. The effects of the substrate temperature on the diamond nucleation and the morphology of the diamond film have been investigated and observed with scanning electron microscopy (SEM). The microstructure and the phase of the film have been characterized using Raman spectroscopy and X-ray diffraction (XRD). The diamond nucleation density significantly decreases with the increasing of the substrate temperature. There are only sparse nuclei when the substrate temperature is higher than 800 ℃ although the ethanol concentration in hydrogen is very high. That the characteristic diamond peak in the Raman spectrum of a diamond film prepared at a low substrate temperature of 450 ℃ extends into broadband indicates that the film is of nanophase. No graphite peak appeared in the XRD pattern confirms that the film is mainly composed of SP3 carbon. The diamond peak in the XRD pattern also broadens due to the nanocrystalline of the film.

Enhanced laser-induced plasma channels in air

Plasma is a significant medium in high-energy density physics since it can hardly be damaged. For some applications such as plasma based backward Raman amplification （BRA）, uniform high-density and large-scale plasma channels are required. In the previous experiment, the plasma transverse diameter and density are 50-200 μm and 1-2 x 10^19 cm-3, here we enhance them to 0.8 mm and 8 x 10^19 cm-3, respectively. Moreover, the gradient plasma is investigated in our experiment. A proper plasma gradient can be obtained with suitable pulse energy and delay. The experimental results are useful for plasma physics and nonlinear optics.

Electron field emission characteristics of nano-catkin carbon films deposited by electron cyclotron resonance microwave plasma chemical vapour deposition

This paper reported that the nano-catkin carbon films were prepared on Si substrates by means of electron cyclotron resonance microwave plasma chemical vapour deposition in a hydrogen and methane mixture. The surface morphology and the structure of the fabricated films were characterized by using scanning electron microscopes and Raman spectroscopy, respectively. The stable field emission properties with a low threshold field of 5V/μm corresponding to a current density of about 1μA/cm^2 and a current density of 3.2mA/cm^2 at an electric field of 10V/μm were obtained from the carbon film deposited at CH4 concentration of 8%. The mechanism that the threshold field decreased with the increase of the CH4 concentration and the high emission current appeared at the high CH4 concentration was explained by using the Fowler-Nordheim theory.

Effect of cathode composition on microstructure and tribological properties of TiBN nanocomposite multilayer coating synthesized by plasma immersion ion implantation and deposition

Nanocomposite multilayer TiBN coatings were prepared on Si(100) and 9Cr18Mo substrates using TiBN composite cathode plasma immersion ion implantation and deposition technique(PIIID). Synthesis of TiBN composite cathodes was conducted by powder metallurgy technology and the content of hexagonal boron nitride(h-BN) was changed from 8% to 40%(mass fraction). The as-deposited coatings were characterized by energy dispersive spectrometer(EDS), grazing incidence X-ray diffraction(GIXRD), Fourier Transform Infrared Spectroscopy(FTIR) and high resolution transmission electron microcopy(HRTEM). EDS results show that the B content of the coatings was varied from 3.71% to 13.84%(molar fraction) when the composition of the h-BN in the composited cathodes was changed from 8 % to 40%(mass fraction). GIXRD results reveal that the TiBN coatings with a B content of 8% has the main diffraction peak of TiN(200),(220) and(311), and these peaks disappear when the B content is increased. FTIR analysis of the multilayer coatings showed the presence of h-BN in all coatings. TEM images reveal that all coatings have the characteristics of self-forming nanocomposite multilayers, where the nanocomposites are composed of face-centered cubic Ti N or h-BN nanocrystalline embedded in amorphous matrix. The tribological tests reveal that the Ti BN coatings exhibit a marked decrease of coefficient at room temperature(~0.25). The improved properties were found to be derived from the comprehensiveness of the self-forming multilayers structure and the h-BN solid lubrication effects in the coatings.

The high deposition of microcrystalline silicon thin film by very high frequency plasma enhanced chemical vapour deposition and the fabrication of solar cells

This paper reports that the intrinsic microcrystalline silicon （μc-Si：H） films are prepared with plasma enhanced chemical vapour deposition from silane/hydrogen mixtures at 200℃ with the aim to increase the deposition rate. An increase of the deposition rate to 0.88 nm/s is obtained by using a plasma excitation frequency of 75 MHz. This increase is obtained by the combination of a higher deposition pressure, an increased silane concentration, and higher discharge powers. In addition, the transient behaviour, which can decrease the film crystallinity, could be prevented by filling the background gas with H2 prior to plasma ignition, and selecting proper discharging time after silane flow injection. Material prepared under these conditions at a deposition rate of 0.78nm/s maintains higher crystallinity and fine electronic properties. By H-plasma treatment before i-layer deposition, single junction μc-Si：H solar cells with 5.5% efficiency are fabricated.

Measurement and analysis of species distribution in laser-induced ablation plasma of an aluminum–magnesium alloy

We proposed a theoretical spatio-temporal imaging method,which was based on the thermal model of laser ablation and the two-dimensional axisymmetric multi-species hydrodynamics model.By using the intensity formula,the integral intensity of spectral lines could be calculated and the corresponding images of intensity distribution could be drawn.Through further image processing such as normalization,determination of minimum intensity,combination and color filtering,a relatively clear species distribution image in the plasma could be obtained.Using the above method,we simulated the plasma ablated from Al-Mg alloy by different laser energies under 1 atm argon,and obtained the theoretical spatio-temporal distributions of Mg I,Mg II,Al I,Al II and Ar I species,which are almost consistent with the experimental results by differential imaging.Compared with the experimental decay time constants,the consistency is higher at low laser energy,indicating that our theoretical model is more suitable for the plasma dominated by laser-supported combustion wave.

Effective parameters on diameter of carbon nanotubes by plasma enhanced chemical vapor deposition

The effective parameters on the diameter of carbon nanotubes (CNTs) by plasma enhanced chemical vapor deposition (PECVD) were presented.Among lots of influential parameters,the effects of the catalytic film thickness and the pretreatment plasma power on the growth of CNTs were investigated.The results show that the size of catalytic islands increases by increasing the thickness of catalytic layer,but the density of CNTs decreases.The pretreatment duration time of 30 s is the optimal condition for growing CNTs with about 50 nm in diameter.By increasing the pretreatment plasma power,the diameter of CNTs decreases gradually.However,the diameter of CNTs does not change drastically from 80 to 120 W.The uniformly grown CNTs with the diameter of 50 nm are obtained at the pretreatment plasma power of 100 W.

Fabrication and characterization of iron and iron carbide thin films by plasma enhanced pulsed chemical vapor deposition

A new pulsed chemical vapor deposition（PCVD） process has been developed to fabricate iron（Fe） and iron carbide(Fe1-xCx) thin films at low temperature range from 150 ℃ to 230 ℃.The process employs bis（1,4-di-tert-butyl-1,3-diazabutadienyl）iron（Ⅱ） as iron source and hydrogen gas or hydrogen plasma as the coreactant.The films deposited with hydrogen gas are demonstrated polycrystalline with body-centered cubic Fe.However,for the films deposited with hydrogen plasma,the amorphous phase of iron carbide is obtained.The influence of the deposition temperature on iron and iron carbide characteristics have been investigated.

Growth properties of gallium oxide on sapphire substrate by plasma-assisted pulsed laser deposition

Gallium oxide was deposited on a c-plane sapphire substrate by oxygen plasma-assisted pulsed laser deposition(PLD).An oxygen radical was generated by an inductive coupled plasma source and the effect of radio frequency(RF)power on growth rate was investigated.A film grown with plasma assistance showed 2.7 times faster growth rate.X-ray diffraction and Raman spectroscopy analysis showedβ-Ga2 O3 films grown with plasma assistance at 500℃.The roughness of the films decreased when the RF power of plasma treatment increased.Transmittance of these films was at least 80%and showed sharp absorption edge at 250 nm which was consistent with data previously reported.

Field emission characteristics of nano-sheet carbon films deposited by quartz-tube microwave plasma chemical vapour deposition

Nano-sheet carbon films are prepared on Si wafers by means of quartz-tube microwave plasma chemical vapour deposition （MPCVD） in a gas mixture of hydrogen and methane. The structure of the fabricated films is investigated by using field emission scanning electron microscope （FESEM） and Raman spectroscopy. These nano^carbon films are possessed of good field emission （FE） characteristics with a low threshold field of 2.6 V/μm and a high current density of 12.6 mA/cm^2 at an electric field of 9 V/μm. As the FE currents tend to be saturated in a high E region, no simple Fowler-Nordheim （F-N） model is applicable. A modified F N model considering statistic effects of FE tip structures and a space-charge-limited-current （SCLC） effect is applied successfully to explaining the FE data observed at low and high electric fields, respectively.