An effective method based on laser etching and driving layer strategy was proposed to prepare patterned Ag nanoparticles(Ag NPs)on fluorine-doped tin oxide(FTO)/glass substrate and thus to enhance the photoelectric pr...An effective method based on laser etching and driving layer strategy was proposed to prepare patterned Ag nanoparticles(Ag NPs)on fluorine-doped tin oxide(FTO)/glass substrate and thus to enhance the photoelectric properties.This method successively included depositing an aluminum-doped zinc oxide(AZO)driving layer,laser etching,depositing an Ag layer,furnace annealing and laser removal.Different AZO and Ag layer thicknesses were adopted,and the surface morphology,crystal structure and photoelectric properties were investigated.An Ag NPs/FTO/glass sample without an AZO driving layer was prepared for comparison.It was found that furnace annealing of the Ag layer combined with the AZO driving layer,rather than that without the AZO driving layer,was more conducive to generating patterned Ag NPs.Using a 20-nmthick AZO layer and a 150-nm-thick Ag layer led to the formation of uniformly distributed Ag NPs being aligned along the laser-etched grooves to form a pattern.The as-obtained sample had the best comprehensive photoelectric property with an average transmittance of 79.95%,a sheet resistance of 7.11Ω/sq and the highest figure of merit of 1.50×10^(-2)Ω^(-1),confirming the feasibility of the proposed method and providing enlightenment for related researches of transparent conductive oxide-based films.展开更多
基金supported by the National Natural Science Foundation of China(Nos.51805220 and 61405078)the Jiangsu University Study-abroad Fund(No.UJS-2017-013)support of the Young Backbone Teacher Cultivating Project of Jiangsu University(No.5521220008)。
文摘An effective method based on laser etching and driving layer strategy was proposed to prepare patterned Ag nanoparticles(Ag NPs)on fluorine-doped tin oxide(FTO)/glass substrate and thus to enhance the photoelectric properties.This method successively included depositing an aluminum-doped zinc oxide(AZO)driving layer,laser etching,depositing an Ag layer,furnace annealing and laser removal.Different AZO and Ag layer thicknesses were adopted,and the surface morphology,crystal structure and photoelectric properties were investigated.An Ag NPs/FTO/glass sample without an AZO driving layer was prepared for comparison.It was found that furnace annealing of the Ag layer combined with the AZO driving layer,rather than that without the AZO driving layer,was more conducive to generating patterned Ag NPs.Using a 20-nmthick AZO layer and a 150-nm-thick Ag layer led to the formation of uniformly distributed Ag NPs being aligned along the laser-etched grooves to form a pattern.The as-obtained sample had the best comprehensive photoelectric property with an average transmittance of 79.95%,a sheet resistance of 7.11Ω/sq and the highest figure of merit of 1.50×10^(-2)Ω^(-1),confirming the feasibility of the proposed method and providing enlightenment for related researches of transparent conductive oxide-based films.
