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基于CVD单层MoS_2 FET的光电探测器
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作者 战俊 粟雅娟 +2 位作者 贾昆鹏 罗军 闫祥宇 《微纳电子技术》 北大核心 2017年第7期437-443,共7页
通过化学气相沉积(CVD)工艺在SiO_2/Si衬底生长出MoS_2材料,对材料进行喇曼光谱表征,验证了单层MoS_2的存在;基于CVD生长的单层MoS_2完成了晶圆级背栅场效应晶体管(FET)光电探测器的工艺研发;对MoS_2 FET器件进行了电学特性表征,开关比... 通过化学气相沉积(CVD)工艺在SiO_2/Si衬底生长出MoS_2材料,对材料进行喇曼光谱表征,验证了单层MoS_2的存在;基于CVD生长的单层MoS_2完成了晶圆级背栅场效应晶体管(FET)光电探测器的工艺研发;对MoS_2 FET器件进行了电学特性表征,开关比可达到105数量级,场效应迁移率约为1 cm2·V-1·s-1,栅极漏电流为10-10 A数量级;对MoS2FET器件的光电特性进行了表征,该光电探测器具有普通光电导探测器的基本光电特性,其光电流随光照强度的增强以及源漏电压的增加而增加,同时由于栅极的调制提高了光电探测器的灵活性。通过控制栅极电压能够控制MoS2FET光电探测器的暗电流大小,实现对探测器η参数的有效调制。最后通过器件能带图对MoS_2 FET光电探测器的光电特性进行了阐释,为其走向实际应用奠定了理论基础。 展开更多
关键词 二硫化钼(MoS2) 场效应晶体管(FET) 二维(2D)半导体材料 光电探测器 过渡金属硫属化合物(TMD)
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用于FET的PECVD SiN_x掺杂MoS_2的有效性与可控性
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作者 战俊 粟雅娟 +3 位作者 罗军 贾昆鹏 段宁远 闫祥宇 《微纳电子技术》 北大核心 2017年第4期229-234,共6页
通过化学气相沉积(CVD)工艺成功生长出少层MoS_2薄膜,用Raman光谱仪对材料进行表征,验证了三层MoS_2材料的存在。基于CVD生长出的三层MoS_2薄膜材料完成了背栅场效应晶体管(FET)的制作工艺研发。对MoS_2FET器件进行了电学特性表征,研制... 通过化学气相沉积(CVD)工艺成功生长出少层MoS_2薄膜,用Raman光谱仪对材料进行表征,验证了三层MoS_2材料的存在。基于CVD生长出的三层MoS_2薄膜材料完成了背栅场效应晶体管(FET)的制作工艺研发。对MoS_2FET器件进行了电学特性表征,研制的MoS_2FET器件的开关比可达到1.45×10~6,器件的电子载流子场效应迁移率约为1 cm^2·V^(-1)·s^(-1)。对等离子增强化学气相沉积(PECVD)氮化硅(SiN_x)工艺掺杂MoS_2材料进行了研究,掺杂后器件的驱动电流提高了3倍多,验证了SiN_x掺杂MoS_2材料的有效性。通过控制PECVD SiN_x时间工艺参数对SiN_x薄膜厚度与掺杂浓度的关系进行了研究,随着SiN_x薄膜厚度增加器件的驱动电流逐渐增强,验证了SiN_x掺杂MoS_2材料的可控性。最后,对PECVD SiN_x工艺掺杂MoS_2材料的机理进行了讨论。 展开更多
关键词 二硫化钼场效应晶体管(MoS2 FET) 掺杂 二维(2D)半导体材料 过渡金属硫化物(TMD) 等离子体增强化学气相沉积(PECVD)
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过渡金属二硫化物在能量转换与存储上的应用 被引量:1
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作者 周慧 邱艳 +3 位作者 翟田莉 王凡 陈政华 方林霞 《广州化工》 CAS 2016年第21期54-55,72,共3页
过渡金属二硫化物(TMDs)具有与石墨类似的层状结构,因其具有独特的物理和化学性质,在能源领域显示出巨大的应用潜力,已经引起了人们广泛的关注。本文综述了层状TMDs的结构特征、基本性质和常用的合成方法,重点介绍了其在能源转换和存储... 过渡金属二硫化物(TMDs)具有与石墨类似的层状结构,因其具有独特的物理和化学性质,在能源领域显示出巨大的应用潜力,已经引起了人们广泛的关注。本文综述了层状TMDs的结构特征、基本性质和常用的合成方法,重点介绍了其在能源转换和存储领域的典型应用,包括在太阳能电池方面的应用,在电催化方面的应用,在超级电容器方面的应用以及在硫锂电池方面的应用。最后对层状TMDs的发展趋势进行了展望。 展开更多
关键词 层状过渡金属硫化物 能源转换与储存
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层状金属二硫化物作为钠离子电池负极的研究进展 被引量:2
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作者 成伟翔 黄兴文 +3 位作者 李越珠 胡俊祺 廖松义 闵永刚 《储能科学与技术》 CAS CSCD 北大核心 2022年第10期3062-3075,共14页
钠离子电池(NIBs)因其资源丰富、环境友好等特点被认为是最有望替代锂离子电池(LIBs)的新一代储能系统。然而,钠离子半径大于锂离子,传统锂离子电池负极材料在充放电过程中钠离子嵌入/脱出困难,容易造成材料结构的坍塌。目前,缺乏合适... 钠离子电池(NIBs)因其资源丰富、环境友好等特点被认为是最有望替代锂离子电池(LIBs)的新一代储能系统。然而,钠离子半径大于锂离子,传统锂离子电池负极材料在充放电过程中钠离子嵌入/脱出困难,容易造成材料结构的坍塌。目前,缺乏合适的负极材料仍是限制NIBs大规模应用的主要障碍之一。与传统的NIBs负极材料(碳材料、金属氧化物、金属磷化物等)相比,层状金属二硫化物(TMDs)由于其独特的层状结构可“额外”储存钠离子,并有效地缓解电化学反应中的体积变化已被广泛研究。本文将首先将介绍三种常见关于TMDs材料的合成方法(水/溶剂热法,化学气相沉积法,液相剥离法)。接下来对几种作为NIBs负极的常用TMDs(MoS2、SnS2、WS2、VS2)的研究进展进行综述。最后将对不同TMDs材料合成方法的优缺点进行比较并进一步展望其目前所遇到的挑战及未来的发展前景,为进一步推动TMDs在NIBs的产业化应用提供一些理论参考和科学借鉴。 展开更多
关键词 层状金属二硫化物 钠离子电池 负极材料
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MoS_(2)和MoTe_(2)同质结和异质结中的表面电势排列
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作者 江聪 张帅君 +3 位作者 李玉莹 王文静 夏辉 李天信 《红外与毫米波学报》 SCIE EI CSCD 北大核心 2023年第6期743-747,共5页
过渡金属硫族化合物(TMD)薄层仅改变几何形状(如层厚)就可调节带隙、电子亲和势和费米能级,使器件设计更灵活。但因缺乏费米能级排列信息,TMD同质/异质结器件常因未知的能带弯曲而偏离预期。利用扫描开尔文探针显微镜(SKPM)表征了TMD同... 过渡金属硫族化合物(TMD)薄层仅改变几何形状(如层厚)就可调节带隙、电子亲和势和费米能级,使器件设计更灵活。但因缺乏费米能级排列信息,TMD同质/异质结器件常因未知的能带弯曲而偏离预期。利用扫描开尔文探针显微镜(SKPM)表征了TMD同质/异质结,结果显示,Mo S_(2)和Mo Te_(2)同质结的费米能级随层厚增加向本征费米能级移动(背景掺杂浓度降低),而Mo Te_(2)/Mo S_(2)异质结中探测到宽耗尽区和强光响应,同时给出表面污染(分子尺度)对单层TMD表面电势的影响。上述发现将在器件设计中帮助精准堆叠范德华(vdW)层。 展开更多
关键词 表面电势 过渡金属硫族化合物(TMD) 扫描开尔文探针显微镜(SKPM) 层厚
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二维MoS_(2(1-x))Se_(2x)特性及其光电晶体管性能
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作者 钱程 巫君杰 +1 位作者 李潇 徐浩 《微纳电子技术》 CAS 北大核心 2022年第4期306-311,347,共7页
表征了MoS_(2(1-x))Se_(2x)样品的Raman光谱和光致发光(PL)谱性质,验证了MoS_(2(1-x))Se_(2x)基于组分和厚度的带隙可调特性,并基于Raman光谱分析了单层及多层样品由于引入Se原子引起的结构变化及光谱特性。此外,受益于单层材料的直接... 表征了MoS_(2(1-x))Se_(2x)样品的Raman光谱和光致发光(PL)谱性质,验证了MoS_(2(1-x))Se_(2x)基于组分和厚度的带隙可调特性,并基于Raman光谱分析了单层及多层样品由于引入Se原子引起的结构变化及光谱特性。此外,受益于单层材料的直接带隙的电子结构,在405 nm激光波长、112.1μW/cm^(2)功率密度光照和0.5 V偏压的条件下,单层MoS_(2(1-x))Se_(2x)光电探测器响应度最大约为29 A/W,探测率超过4.0×10^(10) Jones,电流开关比约为10^(2)。单层MoS_(2(1-x))Se_(2x)光电晶体管展示出的优异光电探测性能显示出其在未来光电领域的巨大潜力。 展开更多
关键词 二维材料 光电晶体管 光电探测 过渡金属二硫化物(TMD) MoS_(2(1-x))Se_(2x)
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Vertically mounting molybdenum disulfide nanosheets on dimolybdenum carbide nanomeshes enables efficient hydrogen evolution
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作者 Tingting Wang Pengyan Wang +6 位作者 Yajun Pang Yitian Wu Jin Yang Hao Chen Xiaorui Gao Shichun Mu Zongkui Kou 《Nano Research》 SCIE EI CSCD 2022年第5期3946-3951,共6页
Designing hierarchical heterostructure to optimize the adsorption of hydrogen intermediate(H*)is impressive for hydrogen evolution reaction(HER)catalysis.Herein,we show that vertically mounting two-dimensional(2D)laye... Designing hierarchical heterostructure to optimize the adsorption of hydrogen intermediate(H*)is impressive for hydrogen evolution reaction(HER)catalysis.Herein,we show that vertically mounting two-dimensional(2D)layered molybdenum disulfide(MoS_(2))nanosheets on 2D nonlayered dimolybdenum carbide(Mo_(2)C)nanomeshes to form a hierarchical heterostructure largely accelerates the HER kinetics in acidic electrolyte due to the weakening adsorption strength of H*on 2D Mo_(2)C nanomeshes.Our hierarchical MoS2/Mo2C heterostructure therefore gives a decrease of overpotential for up to 500 mV at-10 mA·cm^(-2)and an almost 200-fold higher kinetics current density compared with the pristine Mo2C nanomeshes and maintains robust stability with a small drop of overpotential for only 16 mV upon 5,000 cycles.We further rationalize this finding by theoretical calculations and find an optimized adsorption free energy of H*,identifying that the MoS_(2)featuring strong H*desorption plays a key role in weakening the strong binding of Mo_(2)C with H*and therefore improves the intrinsic HER activity on active C sites of Mo_(2)C.This present finding shines the light on the rational design of heterostructured catalysts with synergistic geometry. 展开更多
关键词 hydrogen evolution reaction transition metal carbide transition metal disulfide two-dimensional nonlayered/layered heterostructure hydrogen adsorption/desorption
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CVD法制备二维MoS_(2)的形貌调控研究 被引量:3
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作者 张鑫 赵鸿滨 +1 位作者 张青竹 魏峰 《稀有金属》 EI CAS CSCD 北大核心 2020年第12期1249-1254,共6页
采用常压化学气相沉积法(CVD)生长了单层、双层及多层二维MoS_(2),通过形核促进剂对生长基体进行处理,生长了不同形貌尺寸的MoS_(2),并使用拉曼光谱和原子力显微镜(AFM)进行形貌与结构表征,分析探索了在化学气相沉积系统下的二维MoS_(2... 采用常压化学气相沉积法(CVD)生长了单层、双层及多层二维MoS_(2),通过形核促进剂对生长基体进行处理,生长了不同形貌尺寸的MoS_(2),并使用拉曼光谱和原子力显微镜(AFM)进行形貌与结构表征,分析探索了在化学气相沉积系统下的二维MoS_(2)生长规律。结果表明,生长温度与时间、CVD通入气体的载气流量能够显著影响二维MoS_(2)的尺寸、层数及结构等性质。其中生长时间是影响二维MoS_(2)的层数的决定因素,载气流量能够影响二维MoS_(2)结构的稳定性,生长温度则可显著影响MoS2的生长尺寸。通过构建生长模型与分析,解释了在富硫、缺硫和平衡氛围下,导致MoS_(2)的不同几何形状生长倾向的原因。富硫和缺硫氛围下S-zz和Mo-zz边生长速率差异较大,因此MoS_(2)倾向于三角形生长;平衡氛围下S-zz和Mo-zz边生长速率相近,故倾向于六边形生长。这为生长特定形貌尺寸的单层MoS_(2)提供了参考。 展开更多
关键词 二硫化钼 化学气相沉积 形核促进剂 过渡金属硫化物
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面向微电子应用的二维过渡金属硫族化合物制备进展 被引量:2
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作者 许浒 廖付友 +4 位作者 郭仲勋 郭晓娇 周鹏 包文中 张卫 《科学通报》 EI CAS CSCD 北大核心 2017年第36期4237-4255,共19页
二维原子晶体材料所独有的结构特性带来了诸多优异的性质.与石墨烯相比,二维过渡金属硫族化合物(TMDs)拥有不同大小且可调控的带隙,在微电子和光电器件领域有着广阔的应用前景.本文对二维TMDs材料"自上而下"和"自下而上&... 二维原子晶体材料所独有的结构特性带来了诸多优异的性质.与石墨烯相比,二维过渡金属硫族化合物(TMDs)拥有不同大小且可调控的带隙,在微电子和光电器件领域有着广阔的应用前景.本文对二维TMDs材料"自上而下"和"自下而上"的制备方法进行了总结,对比了机械剥离、液相剥离和化学气相沉积等常见制备技术,并归纳了各自的优缺点.同时基于未来晶圆级二维TMDs器件,重点介绍了化学气相沉积法及其面向应用需要解决的问题.最后总结了二维TMDs材料在微电子器件应用中的研究进展. 展开更多
关键词 二维层状材料/二维原子晶体 过渡金属硫族化合物 二硫化钼 化学气相沉积
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Selective hydrogenation improves interface properties of high-k dielectrics on 2D semiconductors
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作者 Yulin Yang Tong Yang +7 位作者 Tingting Song Jun Zhou Jianwei Chai Lai Mun Wong Hongyi Zhang Wenzhang Zhu Shijie Wang Ming Yang 《Nano Research》 SCIE EI CSCD 2022年第5期4646-4652,共7页
The integration of high-k dielectrics with two-dimensional(2D)semiconductors is a critical step towards high-performance nanoelectronics,which however remains challenging due to the high density of interface states an... The integration of high-k dielectrics with two-dimensional(2D)semiconductors is a critical step towards high-performance nanoelectronics,which however remains challenging due to the high density of interface states and the damage to the monolayer 2D semiconductors.In this study,we propose a selective hydrogenation strategy to improve the interface properties while the 2D semiconductors are not affected.Using the interface of monolayer molybdenum disulfide(MoS_(2))and silicon nitride as an example,we show substantially improved interface properties for electronic applications after the interfacial hydrogenation,as evidenced by reduced inhomogeneous charge redistribution,increased band offset,and nearly intact electronic properties of MoS_(2).Importantly,this hydrogenation process selectively occurs only at the silicon nitride surface and is compatible with the current semiconductor fabrication process.We further show that this strategy is general and applicable to other interfaces between high-k dielectrics and 2D semiconductors such as hafnium dioxide(HfO_(2))on the monolayer MoS_(2).Our results demonstrate a simple yet viable way to improve the integration of high-k dielectrics on a broad range of 2D transition metal disulfide semiconductors,shedding light on practical electronic and optoelectronic applications. 展开更多
关键词 two-dimensional(2D)materials high-k dielectrics molybdenum disulfide interfacial properties transition metal disulfide(TMD)
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High-performance MoS_(2)/p^(+)-Si heterojunction field-effect transistors by interface modulation
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作者 Yoonsok Kim Taeyoung Kim Eun Kyu Kim 《Nano Research》 SCIE EI CSCD 2022年第7期6500-6506,共7页
Molybdenum disulfide(MoS_(2)),one of transition metal dichalcogenides,is a promising semiconductor material for electronic or optoelectronic devices due to its favorably electronic properties.However,in metal-oxide se... Molybdenum disulfide(MoS_(2)),one of transition metal dichalcogenides,is a promising semiconductor material for electronic or optoelectronic devices due to its favorably electronic properties.However,in metal-oxide semiconductor field-effect transistor(MOSFET)structures using MoS_(2),electrical performances such as mobility and subthreshold swing are suppressed by the interface trap density between the channel and dielectric layers.Moreover,the electrical stability of such structures is compromised due to interface traps and that can be analyzed such as current hysteresis and transient characteristics.Here,we demonstrate MoS_(2) heterojunction field-effect transistors(HFET)by applying MoS_(2)/p^(+)-Si heterojunctions and achieve high performance characteristics,including a mobility of 636.19 cm^(2)/(V∙s),a subthreshold swing of 67.4 mV/dec,minimal hysteresis of 0.05 V,and minimized transient characteristics.However,the HFET devices with varying the channel length demonstrated degradation of electrical performance with increasing the overlap area of the channel and dielectric layers.These results regarding MoS_(2)/p^(+)-Si HFETs resulted in the structural optimization of high-performance electronic devices for practical applications. 展开更多
关键词 molybdenum disulfide(MoS_(2)) transition metal dichalcogenide junction field-effect transistor dielectric layer interface trap
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Bandgap opening in MoTe2 thin flakes induced by surface oxidation
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作者 Yuan Gan Jiyuan Liang +11 位作者 Chang-woo Cho Si Li Yanping Guo Xiaoming Ma Xuefeng Wu Jinsheng Wen Xu Du Mingquan He Chang Liu Shengyuan A.Yang Kedong Wang Liyuan Zhang 《Frontiers of physics》 SCIE CSCD 2020年第3期105-111,共7页
Recently,the layered transition metal dichalcogenide 1T′-MoTe2 has generated considerable interest due to their superconducting and non-trivial topological properties.Here,we present a systematic study on 1T′-MoTe2 ... Recently,the layered transition metal dichalcogenide 1T′-MoTe2 has generated considerable interest due to their superconducting and non-trivial topological properties.Here,we present a systematic study on 1T′-MoTe2 single-crystal and exfoliated thin-flakes by means of electrical transport,scanning tunnelling microscope(STM)measurements and band structure calculations.For a bulk sample,it exhibits large magneto-resistance(MR)and Shubnikov–de Hass oscillations inρxx and a series of Hall plateaus inρxy at low temperatures.Meanwhile,the MoTe2 thin films were intensively investigated with thickness dependence.For samples,without encapsulation,an apparent transition from the intrinsic metallic to insulating state is observed by reducing thickness.In such thin films,we also observed a suppression of the MR and weak anti-localization(WAL)effects.We attributed these effects to disorders originated from the extrinsic surface chemical reaction,which is consistent with the density functional theory(DFT)calculations and in-situ STM results.In contrast to samples without encapsulated protection,we discovered an interesting superconducting transition for those samples with hexagonal Boron Nitride(h-BN)film protection.Our results indicate that the metallic or superconducting behavior is its intrinsic state,and the insulating behavior is likely caused by surface oxidation in few layer 1T’-MoTe2 flakes. 展开更多
关键词 two-dimensional materials metal-insulator transition layered transition metal dichalcogenides(tmds) surface oxidation
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Design and construction of ultra-thin MoSe2 nanosheet-based heterojunction for high-speed and low-noise photodetection 被引量:4
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作者 Xiangshun Geng Yongqiang Yu +7 位作者 Xiaoli Zhou Chunde Wang Kewei Xu Yan Zhang Chunyan Wu Li Wang Yang Jiang Qing Yang 《Nano Research》 SCIE EI CAS CSCD 2016年第9期2641-2651,共11页
Advances in the photocurrent conversion of two-dimensional (2D) transition metal dichalcogenides have enabled the realization and application of ultrasensitive and broad-spectral photodetectors. The requirements of pr... Advances in the photocurrent conversion of two-dimensional (2D) transition metal dichalcogenides have enabled the realization and application of ultrasensitive and broad-spectral photodetectors. The requirements of previous devices constantly drive for complex technological implementation, resulting in limits in scale and complexity. Furthermore, the development of large-area and low-cost photodetectors would be beneficial for applications. Therefore, we demonstrate a novel design of a heterojunction photodetector based on solution-processed ultrathin MoSe2 nanosheets to satisfy the requirements of its application. The photodetector exhibits a high sensitivity to visible–near infrared light, with a linear dynamic range over 124 decibels (dB), a detectivity of ~1.2 × 1012Jones, and noise current approaching 0.1 pA·Hz–1/2at zero bias. Significantly, the device shows an ultra-high response speed up to 30 ns with a 3-dB predicted bandwidth over 32 MHz, which is far better than that of most of the 2D nanostructured and solution-processable photodetectors reported thus far and is comparable to that of commercial Si photodetectors. Combining our results with material-preparation methods, together with the methodology of device fabrication presented herein, can provide a pathway for the large-area integration of low-cost, high-speed photodetectors. [Figure not available: see fulltext.] © 2016, Tsinghua University Press and Springer-Verlag Berlin Heidelberg. 展开更多
关键词 molybdenum diselenide layer transition metal dichalcogenide (TMD) urtrathin nanosheet HETEROJUNCTION ultrafast photoresponse
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