Scanning Hartmann test method and its application to lens aberration measurement

A scanning Hartmann test method is proposed and its measurement principle is described. The scanning Hartmann test setup is formed by modifying the Hartmann screen of the conventional Hartmann test setup. With the rotation of the scanning Hartmann screen and the improved hole arrangement, the whole information of the lens to be tested in the full aperture can be obtained. The measurement accuracy of the aberration is improved and the local error of the lens can be got. In the method, no change of the Hartmann screen is needed for measuring the lenses of different aperture sizes. Experimental results of aberration measurements of two lenses are given to verify the usefulness of the setup.

Non-isoplanatic lens aberration correction in dark-field digital holographic microscopy for semiconductor metrology

In the semiconductor industry,the demand for more precise and accurate overlay metrology tools has increased because of the continued shrinking of feature sizes in integrated circuits.To achieve the required sub-nanometre precision,the current technology for overlay metrology has become complex and is reaching its limits.Herein,we present a dark-field digital holographic microscope using a simple two-element imaging lens with a high numerical aperture capable of imaging from the visible to near-infrared regions.This combination of high resolution and wavelength coverage was achieved by combining a simple imaging lens with a fast and accurate correction of non-isoplanatic aberrations.We present experimental results for overlay targets that demonstrate the capability of our computational aberration correction in the visible and near-infrared wavelength regimes.This wide-ranged-wavelength imaging system can advance semiconductor metrology.

EFFECT OF SHORT-TERM SOFT CONTACT LENS WEAR ON HUMAN OCULAR ABERRATIONS

Objective To evaluate the effect of short-term soft contact lens （SCLs） wearing on human ocular aberrations （ HOA ）. Methods This prospective study included 50 eyes of 50 young volunteers wearing SCLs for 1 month. The ocular aberrations were measured by Allegretto Wavefront Analyzer. The root-mean-square （RMS） values of the general （RMSG） , higher-order （RMSH） , first to sixth order （ RMS1 to RMS6） and aberration coefficients were analyzed. Results There were no significant differences in the mean values of RMSG, RMSH, RMS1 to RMS6 （ P 〉 0. 05 ） and changes of absolute values of aberration coefficients between baseline and various visits after SCLs discontinuation. However, at d I after the discontinuation of SCLs, changes in coefficient values of the third-order aberrations （ C6 to C9 ） were slightly higher than others, and C7 was the highest. The increase factors of RMS values were higher at 1 week and lower at the 2 week visit after SCLs discontinuation. The uniformity of dominating type in HOA and the corneal topography form was both about 60% after discontinuation of SCLs. The corneal thickness increased after SCLs wear and gradually decreased to baseline until 1 month discontinuation of SCLs. Conclusion The effect of short-term SCLs wear on human ocular aberrations is slight but profound. A month or more wait should be allowed before the short-term SCLs wearers are scheduled for wavefronted-guided LASIK.

EFFECTS OF PREOPERATIVE SOFT CONTACT LENS WEAR ON HIGHER-ORDER ABERRATIONS AFTER LASER IN SITU KERATOMILEUSIS

Objective To evaluate the effects of preoperative soft contact lens (SCL) wear on higher-order aberrations(HOAs)correction after wavefront-guided and conventional laser in situ keratomileusis (LASIK). Methods A prospective randomized double-masked comparative study was conducted in 180 eyes of 90 patients scheduled for LASIK, including 92 eyes of 46 patients with previous SCL wear. The patients were divided into four groups: no SCL-conventional group, SCL-conventional group, no SCL-wavefront group and SCL-wavefront group. Preoperative and postoperative examinations included uncorrected visual acuity (UCVA), best spectacle-corrected visual acuity (BSCVA), contrast sensitivity and HOAs. Results The UCVA and BSCVA were 20/20 in all patients at 6 months postoperatively. And 36.3%, 22.7%, 18.1% and 35.4% gained one line or more of BSCVA in no SCL-wavefront group, SCL-wavefront group, no SCL-conventional group and SCL-conventional group, respectively. Both the safety index and efficacy index surpassed one in 4 groups and were highest in no SCL-wavefront group. The increase in root-mean-square (RMS) values of HOAs was significantly lower in no SCL-wavefront group and higher in SCL-wavefront group. At 6 months postoperatively, the increase in RMS of HOAs (RMSh) were 0.67, 1.58, 1.17 and 1.28 in no SCL-wavefront group, SCL-wavefront group, no SCL-conventional group and SCL-conventional group, respectively. Conclusion Preoperative contact lens wear has significant influence on the efficacy of HOAs correction in wavefront-guided LASIK. Patients with contact lens wear preoperatively should be cautious when scheduled for wavefront-guided LASIK.

Glass homogeneity efect on wavefront aberration in lithography projection lens

Analysis of glass homogeneity using the attaching interferometric data model neglects body distribution.To improve analysis accuracy,we establish the three-dimensional gradient index(GRIN) model of glass index by analyzing fused silica homogeneity distribution in two perpendicular measurement directions.Using the GRIN model,a lithography projection lens with a numerical aperture of 0.75 is analyzed.Root mean square wavefront aberration deteriorates from 0.9 to 9.65 nm and then improves to 5.9 nm after clocking.