Fabrication of high-quality optics puts a strong demand on high-throughput detection of macroscopic bulk defects in optical components.A dark-field line confocal imaging method is proposed with two distinct advantage...Fabrication of high-quality optics puts a strong demand on high-throughput detection of macroscopic bulk defects in optical components.A dark-field line confocal imaging method is proposed with two distinct advantages:(ⅰ)a point-to-line confocal scheme formed by a columnar elliptical mirror and an optical fiber bundle breaks through the constraint on light collection angle and field of view in the traditional line confocal microscopy using an objective,allowing for an extended confocal line field of more than 100 mm while maintaining a light collection angle of 27°;(ⅱ)the bulk defects are independently illuminated as a function of time to eliminate the cross talk in the direction of the confocal slit,thus preserving point confocality and showing the optical section thicknesses to be 162μm in the axial direction,and 19 and 22μm in the orthogonal transverse directions.The experimental results verify that the method has a minimum detectable bulk defect of less than 5μm and an imaging efficiency of 400 mm2/s.The method shows great potential in high-throughput and highsensitivity bulk defects detection.展开更多
基金supported by the National Natural Science Foundation of China(No.52275528)the Hefei Municipal Natural Science Foundation(No.2022018)+1 种基金the Open Foundation of Key Laboratory of High-Power Laser and Physics,Chinese Academy of Sciences(No.SGKF202108)the China Scholarship Council(No.202206695004)。
文摘Fabrication of high-quality optics puts a strong demand on high-throughput detection of macroscopic bulk defects in optical components.A dark-field line confocal imaging method is proposed with two distinct advantages:(ⅰ)a point-to-line confocal scheme formed by a columnar elliptical mirror and an optical fiber bundle breaks through the constraint on light collection angle and field of view in the traditional line confocal microscopy using an objective,allowing for an extended confocal line field of more than 100 mm while maintaining a light collection angle of 27°;(ⅱ)the bulk defects are independently illuminated as a function of time to eliminate the cross talk in the direction of the confocal slit,thus preserving point confocality and showing the optical section thicknesses to be 162μm in the axial direction,and 19 and 22μm in the orthogonal transverse directions.The experimental results verify that the method has a minimum detectable bulk defect of less than 5μm and an imaging efficiency of 400 mm2/s.The method shows great potential in high-throughput and highsensitivity bulk defects detection.
