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Linearity of Removal in the Proeess of Optical Element Polishing
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作者 辛企明 《Journal of Beijing Institute of Technology》 EI CAS 1992年第2期122-131,共10页
In the light of some assumptions that are very close to the practical working conditions,a very complicated polishing process of optical element can be simplified as a linear and shift invariant system that is relatd ... In the light of some assumptions that are very close to the practical working conditions,a very complicated polishing process of optical element can be simplified as a linear and shift invariant system that is relatd only to the speed,pres- sure and time of processing.In polishing,the removed material can be represented and entreated by the convolution of the removal function of polishing head and the dwell function.The properties of removal function are presented.The assumptions and methods given by the author have been shown to be correct and applicable by experiments using a ring lap to polish the optical surfac. 展开更多
关键词 optical element POLISHING convolution/linear and shift invariant system
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