Lithium niobate on insulator(LNOI) provides a platform for the fundamental physics investigations and practical applications of integrated photonics. However, as an indispensable building block of integrated photonics...Lithium niobate on insulator(LNOI) provides a platform for the fundamental physics investigations and practical applications of integrated photonics. However, as an indispensable building block of integrated photonics, lasers are in short supply. In this paper, erbium-doped LNOI laser in the 1550-nm band was demonstrated in microdisk cavities with high quality factors fabricated in batches by UV exposure, inductively coupled plasma reactive ion etching, and chemomechanical polishing. The threshold and conversion efficiency of the erbium-doped LNOI microdisk laser were measured to be lower than 1 m W and 6.5×10^(-5)%, respectively. This work will benefit the development of integrated photonics based on LNOI.展开更多
基金supported by the National Key Research and Development Program of China (Grant No. 2019YFA0705000)the National Natural Science Foundation of China (Grant Nos. 12034010, 11734009, 11674181,11674184, and 11774182)+2 种基金the Higher Education Discipline Innovation Project (Grant No. B07013)the National Science Fund for Talent Training in the Basic Sciences (Grant No. J1103208)the Program for Changjiang Scholars and Innovative Research Team in University (PCSIRT)(Grant No. IRT_13R29)。
文摘Lithium niobate on insulator(LNOI) provides a platform for the fundamental physics investigations and practical applications of integrated photonics. However, as an indispensable building block of integrated photonics, lasers are in short supply. In this paper, erbium-doped LNOI laser in the 1550-nm band was demonstrated in microdisk cavities with high quality factors fabricated in batches by UV exposure, inductively coupled plasma reactive ion etching, and chemomechanical polishing. The threshold and conversion efficiency of the erbium-doped LNOI microdisk laser were measured to be lower than 1 m W and 6.5×10^(-5)%, respectively. This work will benefit the development of integrated photonics based on LNOI.
