Acoustic/ultrasonic sensors are devices that can convert mechanical energy into electrical signals.The Fabry–Perot cavity is processed on the end face of the double-clad fiber by a two-photon three-dimensional lithog...Acoustic/ultrasonic sensors are devices that can convert mechanical energy into electrical signals.The Fabry–Perot cavity is processed on the end face of the double-clad fiber by a two-photon three-dimensional lithography machine.In this study,the outer diameter of the core cladding was 250μm,the diameter of the core was 9μm,and the microcavity sensing unit was only 30μm.It could measure ultrasonic signals with high precision.The characteristics of the proposed ultrasonic sensor were investigated,and its feasibility was proven through experiments.Its design has a small size and can replace a larger ultrasonic detector device for photoacoustic signal detection.The sensor is applicable to the field of biomedical information technology,including medical diagnosis,photoacoustic endoscopy,and photoacoustic imaging.展开更多
基金This work was supported in part by the Natural Science Foundation of Guangdong Province,No.2020A1515010958Key Project of Shenzhen Science and Technology Plan,No.JCYJ20200109113808048.
文摘Acoustic/ultrasonic sensors are devices that can convert mechanical energy into electrical signals.The Fabry–Perot cavity is processed on the end face of the double-clad fiber by a two-photon three-dimensional lithography machine.In this study,the outer diameter of the core cladding was 250μm,the diameter of the core was 9μm,and the microcavity sensing unit was only 30μm.It could measure ultrasonic signals with high precision.The characteristics of the proposed ultrasonic sensor were investigated,and its feasibility was proven through experiments.Its design has a small size and can replace a larger ultrasonic detector device for photoacoustic signal detection.The sensor is applicable to the field of biomedical information technology,including medical diagnosis,photoacoustic endoscopy,and photoacoustic imaging.