The fabrication of pure copper microstructures with submicron resolution has found a host of applications,such as 5G communications and highly sensitive detection.The tiny and complex features of these structures can ...The fabrication of pure copper microstructures with submicron resolution has found a host of applications,such as 5G communications and highly sensitive detection.The tiny and complex features of these structures can enhance device performance during high-frequency operation.However,manufacturing pure copper microstructures remain challenging.In this paper,we present localized electrochemical deposition micro additive manufacturing(LECD-μAM).This method combines localized electrochemical deposition(LECD)and closed-loop control of atomic force servo technology,which can effectively print helical springs and hollow tubes.We further demonstrate an overall model based on pulsed microfluidics from a hollow cantilever LECD process and closed-loop control of an atomic force servo.The printing state of the micro-helical springs can be assessed by simultaneously detecting the Z-axis displacement and the deflection of the atomic force probe cantilever.The results showed that it took 361 s to print a helical spring with a wire length of 320.11μm at a deposition rate of 0.887μm s^(-1),which can be changed on the fly by simply tuning the extrusion pressure and the applied voltage.Moreover,the in situ nanoindenter was used to measure the compressive mechanical properties of the helical spring.The shear modulus of the helical spring material was about 60.8 GPa,much higher than that of bulk copper(~44.2 GPa).Additionally,the microscopic morphology and chemical composition of the spring were characterized.These results delineate a new way of fabricating terahertz transmitter components and micro-helical antennas with LECD-μAM technology.展开更多
在局部电化学沉积加工体系中引入纳秒脉冲激光,利用激光辐照和局部电化学沉积的方法对铜进行三维微结构的沉积试验。分析了激光的热力效应对局部电化学沉积的作用机理。构建了激光辅助局部电化学沉积的试验系统,进行了沉积试验,并利用...在局部电化学沉积加工体系中引入纳秒脉冲激光,利用激光辐照和局部电化学沉积的方法对铜进行三维微结构的沉积试验。分析了激光的热力效应对局部电化学沉积的作用机理。构建了激光辅助局部电化学沉积的试验系统,进行了沉积试验,并利用扫描电子显微镜(Scanning electron microscope,SEM)和X射线能量色散色谱仪对电沉积体进行了检测。试验结果表明激光辅助局部电化学沉积相较于普通的局部电化学沉积,定域性好。随着激光能量的增加,沉积体的高宽比增加,定域性提高。同时,激光还可以减少阴极杂质的吸附,提高沉积体的纯度。展开更多
基金supported by the National Natural Science Foundation of China under Grant U19A20103the Fund for Jilin Province Scientific and Technological Development Program under No.Z20190101005JH。
文摘The fabrication of pure copper microstructures with submicron resolution has found a host of applications,such as 5G communications and highly sensitive detection.The tiny and complex features of these structures can enhance device performance during high-frequency operation.However,manufacturing pure copper microstructures remain challenging.In this paper,we present localized electrochemical deposition micro additive manufacturing(LECD-μAM).This method combines localized electrochemical deposition(LECD)and closed-loop control of atomic force servo technology,which can effectively print helical springs and hollow tubes.We further demonstrate an overall model based on pulsed microfluidics from a hollow cantilever LECD process and closed-loop control of an atomic force servo.The printing state of the micro-helical springs can be assessed by simultaneously detecting the Z-axis displacement and the deflection of the atomic force probe cantilever.The results showed that it took 361 s to print a helical spring with a wire length of 320.11μm at a deposition rate of 0.887μm s^(-1),which can be changed on the fly by simply tuning the extrusion pressure and the applied voltage.Moreover,the in situ nanoindenter was used to measure the compressive mechanical properties of the helical spring.The shear modulus of the helical spring material was about 60.8 GPa,much higher than that of bulk copper(~44.2 GPa).Additionally,the microscopic morphology and chemical composition of the spring were characterized.These results delineate a new way of fabricating terahertz transmitter components and micro-helical antennas with LECD-μAM technology.
文摘在局部电化学沉积加工体系中引入纳秒脉冲激光,利用激光辐照和局部电化学沉积的方法对铜进行三维微结构的沉积试验。分析了激光的热力效应对局部电化学沉积的作用机理。构建了激光辅助局部电化学沉积的试验系统,进行了沉积试验,并利用扫描电子显微镜(Scanning electron microscope,SEM)和X射线能量色散色谱仪对电沉积体进行了检测。试验结果表明激光辅助局部电化学沉积相较于普通的局部电化学沉积,定域性好。随着激光能量的增加,沉积体的高宽比增加,定域性提高。同时,激光还可以减少阴极杂质的吸附,提高沉积体的纯度。
