We detail the generation of a pulsed atomic oxygen(AO)broad beam with a high flux-density via collision-induced dissociation of O_(2) to support practical industrial exploitation of AOs,particularly for facilitating 2...We detail the generation of a pulsed atomic oxygen(AO)broad beam with a high flux-density via collision-induced dissociation of O_(2) to support practical industrial exploitation of AOs,particularly for facilitating 2-dimenstional oxidation/etching at a fast rate of one-monolayer per second in an area≥1000 cm².This innovation fuses the following interdisciplinary concepts:(a)a high density of O^(*) can be produced in an electron-cyclotron-resonance(ECR)O2 plasma;(b)o^(*) can be extracted and accelerated with an aperture-electrode in the plasma.展开更多
基金support from National Natural Science Foundation of China(NSFC No.22008007)Scientific and Technological Innovation Foundation of Shunde Graduate School,USTB(BK21BEO10)Foshan Science and technology Innovation Project(No.2018IT100363)。
文摘We detail the generation of a pulsed atomic oxygen(AO)broad beam with a high flux-density via collision-induced dissociation of O_(2) to support practical industrial exploitation of AOs,particularly for facilitating 2-dimenstional oxidation/etching at a fast rate of one-monolayer per second in an area≥1000 cm².This innovation fuses the following interdisciplinary concepts:(a)a high density of O^(*) can be produced in an electron-cyclotron-resonance(ECR)O2 plasma;(b)o^(*) can be extracted and accelerated with an aperture-electrode in the plasma.
